JPS5970944A - Apparatus for measuring particle diameter - Google Patents
Apparatus for measuring particle diameterInfo
- Publication number
- JPS5970944A JPS5970944A JP57179739A JP17973982A JPS5970944A JP S5970944 A JPS5970944 A JP S5970944A JP 57179739 A JP57179739 A JP 57179739A JP 17973982 A JP17973982 A JP 17973982A JP S5970944 A JPS5970944 A JP S5970944A
- Authority
- JP
- Japan
- Prior art keywords
- scattered light
- intensity distribution
- light intensity
- particle size
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title claims abstract description 20
- 239000013307 optical fiber Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
- G01N15/0211—Investigating a scatter or diffraction pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
- G01N2021/4716—Using a ring of sensors, or a combination of diaphragm and sensors; Annular sensor
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
この発明は、微小な粒子の径を測定する粒径測定装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a particle size measuring device for measuring the diameter of minute particles.
従来より光の散乱を利用した粒径測定装置の１つに第１
図に示すような装置がある。これはレーザー光３を試ネ
・ト８に照射し、１ζ４：料８に」、す））り乱乎れた
光のθ方向の散乱光強度分布１ （０） ｋ ｊｉｌｔ
定しく１）式の関係を利用してハダ乱九強度分布１（の
から粒径分布ｎ（Ｄ）へ変換するものである。The first particle size measuring device that uses light scattering
There is a device as shown in the figure. This is the scattered light intensity distribution in the θ direction of the scattered light 1 (0) k jilt.
The Hada Random intensity distribution 1() is converted into the particle size distribution n(D) using the relationship of Equation 1).
■（θ）＝、／ｌ（Ｄ、θ） ｎ（Ｄ）旧〕（１）こ
こでｉ （Ｄ、θ）は回折理論に基ついＣ８（゛算しプ
ｃ１粒子による散乱光
この方法では第１図に示すように試料８からの散乱光を
受光レンズ４を用いＣレンズの焦点面に集光し°Ｃ−い
る。これは試料の位置によらず散乱角がθである光はす
べＣ焦点面のｒ（−θｆ）の位置に集光させるためであ
る。このような光学系であるとレンズの口径に限度があ
るために散乱光強度分布の測定範囲がＯ〜１５°程度に
限定される。又フォトディテクタとして第２図に示すよ
うなパターンフォトタイオードアレイを用いると中心部
が強い適過光により照射され、この部分で発生した電流
が周辺のリングへ流れ込むために、散乱光強度分布の６
１１１ ｔｌに大きい誤差が混入する。■ (θ) =, /l (D, θ) n (D) old] (1) Here, i (D, θ) is based on diffraction theory, C8 As shown in Figure 1, the scattered light from the sample 8 is focused on the focal plane of the C lens using the light receiving lens 4. This means that regardless of the position of the sample, all light with a scattering angle of θ is This is to focus the light on the position r(-θf) of the C focal plane.With such an optical system, there is a limit to the aperture of the lens, so the measurement range of the scattered light intensity distribution is approximately 0 to 15 degrees. Furthermore, when a patterned photodiode array as shown in Figure 2 is used as a photodetector, the center area is irradiated with strong and moderate light, and the current generated in this area flows into the surrounding ring, resulting in scattered light. 6 of intensity distribution
111 A large error is mixed into tl.
この発明の目的は上述した欠点を改良（７、広い散乱角
範囲にわたり正値な散乱光強度分布を測定出来る光学系
を（ｉｉｉｉ乙、微小粒子をも測定可能な粒径測定装置
を提供することにある。The purpose of this invention is to improve the above-mentioned drawbacks (7) to provide an optical system capable of measuring a positive scattered light intensity distribution over a wide scattering angle range (iii) to provide a particle size measuring device capable of measuring even minute particles. It is in.
〔光（す」のイＱ ５松シ 〕
本発明ｉｌ′ｉ第３図に示すように測定したい散乱角方
向に光ファイバを配置し、それぞれの光ファイバからの
出力をディスクリートなフォトディテクタで電気信号に
変換することにより希望するすべての散乱角範囲の散乱
光強度分布を測定出来るようにしたものである。[Light (Su'no IQ 5 Matsushi)] The present invention as shown in Figure 3, optical fibers are arranged in the direction of the scattering angle to be measured, and the output from each optical fiber is converted into an electrical signal by a discrete photodetector. By converting to , it is possible to measure the scattered light intensity distribution in all desired scattering angle ranges.
広い散乱角範囲にわたり正確な散乱光強度分布を測定出
来れば第４図に示すように散乱光強度分布の変化の小さ
い微小粒子（０，１〜２μｍ）の散乱光強度分布を区別
出来るので微小粒子をも測定出来るようになる。If the scattered light intensity distribution can be accurately measured over a wide scattering angle range, the scattered light intensity distribution of small particles (0.1 to 2 μm) with small changes in the scattered light intensity distribution can be distinguished, as shown in Figure 4. can also be measured.
本発明の１細を第３図に示す実施例に基づいＣ説明する
。One detail of the present invention will be explained based on the embodiment shown in FIG.
レーザー１及びコリメータレンズ系２によす成形された
平行ビーム３を試料８に照射し試料により散乱された光
を測定したい散乱角力向に配置した光ファイバ１０によ
りフォトディテクタ１２に導く。元ファイバの６１にマ
イクロレンズ９を配置シ、マイクロレンズ９の光軸に・
ド行な、すなわち配置した散乱角力向に平行な元のみを
光ノアイパ内に尋くようにしである。又外部の迷光を除
去するためにレーザーの波長の光のみ葡ｉｉ４過させる
フィルタ１１をフォトティツーフタ１２の６１１面に配
置している。このような光ファイバをｔｈｔｕ個配置し
散乱光強Ｉｆ分布を測定する。電気１ぎ号に変換された
散乱光強度分布は、散乱光強度分布−粒径分布変換装置
７により粒径分布へ変換される。この変換装置は通常旧
算機により構成さｉｚアナログ入力装置から、電気信号
に変換された散乱光強度分布を読み、粒径分布へ変換す
る。A parallel beam 3 formed by a laser 1 and a collimator lens system 2 is irradiated onto a sample 8, and the light scattered by the sample is guided to a photodetector 12 through an optical fiber 10 placed in the direction of the scattering angle desired to be measured. The microlens 9 is placed on the original fiber 61, and the optical axis of the microlens 9 is
In other words, only the elements parallel to the direction of the disposed scattering angle force are examined in the optical sensor. Further, in order to remove external stray light, a filter 11 is arranged on the 611 side of the photo-touch lid 12 to allow only light of the wavelength of the laser to pass through. Thtu such optical fibers are arranged and the scattered light intensity If distribution is measured. The scattered light intensity distribution converted into electric number 1 is converted into a particle size distribution by a scattered light intensity distribution-particle size distribution conversion device 7. This conversion device usually consists of an old computer, and reads the scattered light intensity distribution converted into an electrical signal from an analog input device, and converts it into a particle size distribution.
第１図は従来の粒径ａ＋＋＋定装置１１のブロック図。
第２図はパターンフォトダイオ−ドア／イの形を示す一
部正面図。第３図は本発明の実施例を示すブロック図。
第４図は散乱光強度分布を示すグラフである。
１・・・レーザー ８・・・試料（破測定粒子
）２・・・コリメータレンズ系 ９・・・マイクロレン
ズ３・・・平行ヒーム １０・・・光ファイバ４
・・・受光レンズ １１・・・フィルタ５・・ フ
ォトディテクタ １２・・・フォトディチククロ・
・・増１１】器
７・・・ｔ）ｋ乱光強度分布−粒径分布変換装置。
代理人弁理士 則 近 憲 佑
（ほか１名）FIG. 1 is a block diagram of a conventional particle size a+++ determining device 11. FIG. 2 is a partial front view showing the shape of the pattern photodiode/a. FIG. 3 is a block diagram showing an embodiment of the present invention. FIG. 4 is a graph showing the scattered light intensity distribution. 1...Laser 8...Sample (broken particle) 2...Collimator lens system 9...Micro lens 3...Parallel beam 10...Optical fiber 4
... Light receiving lens 11 ... Filter 5 ... Photodetector 12 ... Photo detector
... 11] Device 7... t) K scattered light intensity distribution-particle size distribution conversion device. Representative Patent Attorney Noriyuki Chika (and 1 other person)
Claims (1)
光を平行ビームに成形するためのコリメータ・レンズ系
と、このコリメータ・レンズ系ヲ通過するレーザー光を
光ファイバとフォトディテクタとにより、全散乱角範囲
にわたり散乱光強度分布が測定出来るよう構成した測定
系及びこの測定系で測定し”Ｃ得られた散乱光強度分布
を粒径分布に変換する粒径分布変換装置とを具備してな
る粒径測定装置。A laser device, a collimator lens system for shaping the laser light output from the laser device into a parallel beam, and an optical fiber and a photodetector to scatter the laser light passing through the collimator lens system over the entire scattering angle range. A particle size measuring device comprising a measurement system configured to measure a light intensity distribution and a particle size distribution conversion device that converts the scattered light intensity distribution obtained by measuring with this measurement system into a particle size distribution.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57179739A JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
| US06/541,023 US4595291A (en) | 1982-10-15 | 1983-10-12 | Particle diameter measuring device |
| DE8383306227T DE3381178D1 (en) | 1982-10-15 | 1983-10-14 | PARTICLE DIAMETER MEASURING DEVICE. |
| EP83306227A EP0106684B1 (en) | 1982-10-15 | 1983-10-14 | Particle diameter measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57179739A JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5970944A true JPS5970944A (en) | 1984-04-21 |
| JPH0225448B2 JPH0225448B2 (en) | 1990-06-04 |
Family
ID=16071014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57179739A Granted JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5970944A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117940A (en) * | 1984-07-05 | 1986-01-25 | Nippon Paint Co Ltd | Method and instrument for measuring dispersion condition of particles in high-density suspension or the like |
| JPS6171336A (en) * | 1984-09-14 | 1986-04-12 | Nippon Paint Co Ltd | Grain-size measuring apparatus |
| JPS61234339A (en) * | 1985-04-10 | 1986-10-18 | Fuji Electric Co Ltd | Fine particle detector for liquid |
| JPS6255545A (en) * | 1985-09-05 | 1987-03-11 | Toshiba Corp | Particle size measuring apparatus |
| JPH0264435A (en) * | 1988-08-31 | 1990-03-05 | Y D K:Kk | Measuring apparatus for particle size |
| JPH0478543U (en) * | 1990-11-17 | 1992-07-08 | ||
| CN104596991A (en) * | 2014-12-25 | 2015-05-06 | 北京农业智能装备技术研究中心 | Detection device for water body turbidity |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5318206B2 (en) * | 2009-07-10 | 2013-10-16 | 株式会社日立ハイテクノロジーズ | Automatic analyzer |
-
1982
- 1982-10-15 JP JP57179739A patent/JPS5970944A/en active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117940A (en) * | 1984-07-05 | 1986-01-25 | Nippon Paint Co Ltd | Method and instrument for measuring dispersion condition of particles in high-density suspension or the like |
| JPS6171336A (en) * | 1984-09-14 | 1986-04-12 | Nippon Paint Co Ltd | Grain-size measuring apparatus |
| JPH0437937B2 (en) * | 1984-09-14 | 1992-06-22 | Nippon Paint Co Ltd | |
| JPS61234339A (en) * | 1985-04-10 | 1986-10-18 | Fuji Electric Co Ltd | Fine particle detector for liquid |
| JPH04545B2 (en) * | 1985-04-10 | 1992-01-07 | Fuji Electric Co Ltd | |
| JPS6255545A (en) * | 1985-09-05 | 1987-03-11 | Toshiba Corp | Particle size measuring apparatus |
| JPH0264435A (en) * | 1988-08-31 | 1990-03-05 | Y D K:Kk | Measuring apparatus for particle size |
| JPH0478543U (en) * | 1990-11-17 | 1992-07-08 | ||
| CN104596991A (en) * | 2014-12-25 | 2015-05-06 | 北京农业智能装备技术研究中心 | Detection device for water body turbidity |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0225448B2 (en) | 1990-06-04 |
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