JPS5970341U - ウエ−ハ立替え装置 - Google Patents

ウエ−ハ立替え装置

Info

Publication number
JPS5970341U
JPS5970341U JP16486582U JP16486582U JPS5970341U JP S5970341 U JPS5970341 U JP S5970341U JP 16486582 U JP16486582 U JP 16486582U JP 16486582 U JP16486582 U JP 16486582U JP S5970341 U JPS5970341 U JP S5970341U
Authority
JP
Japan
Prior art keywords
cassette
wafer
boat
wafers
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16486582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141236Y2 (enExample
Inventor
清水　昭生
角田　良二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP16486582U priority Critical patent/JPS5970341U/ja
Publication of JPS5970341U publication Critical patent/JPS5970341U/ja
Application granted granted Critical
Publication of JPS6141236Y2 publication Critical patent/JPS6141236Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge By Other Means (AREA)
JP16486582U 1982-10-29 1982-10-29 ウエ−ハ立替え装置 Granted JPS5970341U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16486582U JPS5970341U (ja) 1982-10-29 1982-10-29 ウエ−ハ立替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16486582U JPS5970341U (ja) 1982-10-29 1982-10-29 ウエ−ハ立替え装置

Publications (2)

Publication Number Publication Date
JPS5970341U true JPS5970341U (ja) 1984-05-12
JPS6141236Y2 JPS6141236Y2 (enExample) 1986-11-25

Family

ID=30361337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16486582U Granted JPS5970341U (ja) 1982-10-29 1982-10-29 ウエ−ハ立替え装置

Country Status (1)

Country Link
JP (1) JPS5970341U (enExample)

Also Published As

Publication number Publication date
JPS6141236Y2 (enExample) 1986-11-25

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