JPS5969240A - Electromagnetic chuck - Google Patents

Abstract

PURPOSE:To improve anti-wear property of a worked surface in a surface grinding type of electromagnetic chuck by quenching and hardening an adsorbing plate. CONSTITUTION:To the upper portion of a support member 1 is secured fixedly an adsorbing plate laminating alternatively adsorbing plate elements 2a, 2b of a rectangular parallelopiped iron cut out partially to have a longitudinally convex and concave section and quenched and polarization materials 3 consisting of solder, resin, etc. Said adsorbing plate elements 2a, 2b and the polarization materials 3 are fixedly secured to each other by fasteners 4 not to be separated from each other.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electromagnetic chuck with a suction plate hardened and hardened.In recent years, in response to the automation of electromagnetic chucks, efforts have been made to improve the wear resistance of the working surface on the suction plate. There is a growing demand for V<-9@. Furthermore, on the automated lines of dedicated grinding machines in bearing manufacturing factories, machines with improved wear resistance on the working surfaces are being put into practical use.

□ Conventionally, the working surface has been fragmented by using the bearing steel itself, by using a hardened face plate as the top plate or adapter plate, or by using plate-shaped or bottle-shaped materials such as carbide tips and stellite. Brazed or press-fitted ones are used. However, in general chucks for surface grinding, a hardened material is not used as the face plate, and the working surface is hardened by pasting hard chrome plating, hardened fL plate, or hardened fL chig. . If hardened material is used as a face plate, it becomes necessary to grind the surface after hardening to less than 0,jnrs degree due to economical reasons. The bending must be less than 1
1-, and the depth of the quenching depth must be 7/n or less.

The present invention has been made to overcome the above-mentioned drawbacks of the prior art, and it is an object of the present invention to provide an electromagnetic chuck which has excellent economical efficiency by hardening the iron material forming the working surface. purpose.

In order to achieve the above object, the present invention provides an adsorption plate element made of individually hardened iron material with convex and concave vertical cross-sections, or a ring-shaped iron material through a polarized material. The present invention provides an electromagnetic chuck which is equipped with a suction plate made up of Y layers and fixed together with a stopper, and is capable of suctioning and releasing a workpiece on the suction plate.

The present invention will be described in detail with reference to FIGS. 1 to 7.

Figures 1 to 5 show adsorption g! This is an example in which the element is made of a hardened iron material with a convex and concave longitudinal section. As shown in Fig. 1, a suction plate element made of a steel material made by cutting a part of an iron rectangular parallelepiped so that the longitudinal section has a convex shape and a concave shape, and hardening it as shown in Fig. 1. ,2a,
, 2b, and a polarizing material 3'f9 consisting of solder, resin, etc.), and a suction plate formed by laminating them on each other is fixed. Adsorption plate element, 2a
, 2b may be performed on the entire J month having a convex shape and a concave shape in longitudinal section, or M frequency hardening may be performed only on the surface. Alternatively, surface hardening by carburizing or nitriding may be used. Specifically, after grinding and processing it into the desired shape, it is hardened to prevent distortion, and a high permeability of 6B is achieved. Note that the suction plate elements 2a, xb and the polarizing material 3 are fixed with a stopper to prevent them from separating.

In addition, the adsorption plate No. a has a convex shape and a concave shape in the longitudinal section.

-! A polarizing material j is inserted into the gap formed between b and supporting member l, and the adsorption plate becomes a face plate. Make it L.

FIG. 1 is a plan view of the electromagnetic chuck shown in FIG. 1, and the same elements as in FIG. 1 are designated by the same symbols. A terminal box 6 is provided on the support member/, and is connected to an external power source via a cord.

FIG. 3 is a front view and a sectional view taken along the line A and -A of the electromagnetic chuck shown in FIGS. 1 and 2, and the same elements as in FIG. 1 are designated by the same reference numerals.

Figure 5 shows the B, -B2 lines and O, -C! lines of the electromagnetic chuck shown in Figures 1 and 2. This is a 2-line sectional view, and the same elements as in FIG. 1 are designated by the same reference numerals.

A recess is provided in the support member l, an excitation coil 7 is inserted, and a current is applied from an external power source.

Now, when current is passed through the excitation coil so that the outer side /a of the support member becomes the north pole and the inner side /b becomes the south pole, the adsorption plate element 2a, which has a convex vertical section, becomes a concave vertical section. The letter-shaped suction plate element 2b becomes the north pole. In this way, the suction plate element constituting the suction plate can be turned off.

FIGS. 6 and 7 show an embodiment in which the suction plate element is made of hardened iron with a ring-shaped outer shape.

FIG. 1 is a plan view of an electromagnetic chuck. 6p-I) Ning-shaped adsorption plate elements /2FL, /2b are provided in a circular shape with polarized material /3 interposed therebetween.

Figure 7 shows the positive m1 diagram and DID of the electromagnetic chuck shown in Figure 7.
This is a 2M sectional view, and the same elements as in FIG. 6 are indicated by the same symbols. A recessed portion is provided in the support member // as shown in the figure, and the excitation coil /7 is inserted into the recessed portion. Additionally, a polarizing material 15 is inserted between the adsorption plate element/2a and the excitation coil/7.

In this way, when 7 liters of current is passed through the excitation coil, different polarities will appear in the attracting element at every opening.
It becomes possible to adsorb and release the workpiece. The ring-shaped iron material is hardened fL by the same method as shown in the embodiment of FIG.

As described above, in the iL, the suction plate elements constituting the suction plate can be individually hardened, so that an electromagnetic chuck with improved wear resistance on the working surface can be obtained. ′-! However, since we are using 1NO as the material for the suction plate element, processing and grinding of the suction plate can be done easily before hardening. Compared to electromagnetic chatter, manufacturing costs can be kept low.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the embodiment of the present invention; Fig. 2 is a plan view of the embodiment of Fig. 1; Fig. 3 is a perspective view of the embodiment of Fig. 1;
・A partial cross-sectional view of A + -jh m, Figure V, Figure 5 shows the B1- B, line and C, - of the embodiment in Figure 1.
O, line sectional view, FIG. 6 is a plan view of another embodiment of the present invention,
Figure 7 shows Dl-D2# as seen from the front car of the embodiment shown in Figure 6.
410 is a partial cross-sectional view. 2a, J1), /, 2a, /2b...-
Adsorption plate element, 3... polarization material. Applicant's agent Seihaku Inomata Figure 3 ``4th cause Figure 5 Figure 6 Procedural amendments January 1980/g Date Kazuo Wakasugi, Commissioner of the Patent Office 1, Indication of the case 1982 q'S Grant No. 178946 No. 2, Name of the invention Electromagnetic chuck 3, Relationship with the amended person case Patent applicant: Fuji Porcelain Co., Ltd. [Telephone: Tokyo (211) 2321 Dog representative] “Detailed description of the invention” section of the specification and drawings. 8. Details of the amendment (1) [Figure 1] in Section 6, Line 6 of the specification is corrected to ``Figure 6.'' (2) In lines 3 to 7 of page 7 of the specification, [Grinding can be carried out before quenching...low (can be suppressed.]) should be replaced with ``Cutting can be easily carried out before quenching. It is now possible to manufacture an electromagnetic chuck with a suction plate element made of ferrite material, etc., which is molded into a mold.'' (3) Revise Figures 1 to 3 of the drawings as shown in the attached sheet.

Claims (1)

[Scope of Claims] 1. An excitation coil, an adsorption plate made of an adsorption plate element and a polarized material, and a support member that accommodates the excitation coil and supports the adsorption plate, the workpiece being processed on the adsorption plate. adsorbs things,
In the electromagnetic chuck for releasing, the adsorption plate element is made of a plurality of hardened iron materials,
The electromagnetic chuck is characterized in that the suction plate is formed by arranging the suction plate elements alternately so as to have different polarities, and fixing the suction plate elements through the polarization material with a fastener. The suction plate element is an iron material having a convex longitudinal section by cutting both ends of an iron rectangular parallelepiped, and an iron material having a concave longitudinal section by cutting the middle part of the iron rectangular parallelepiped. 2. The electromagnetic chuck according to claim 1, characterized in that the suction plate elements in the shape of a concave shape and the suction plate elements in the shape of a concave shape are alternately arranged so as to have different polarities. 3. The suction plate element is a ring-shaped iron material with a rectangular cross section, and the suction plate is characterized in that the ring-shaped suction plate elements are arranged concentrically rather than alternately having different polarities. The range of electromagnetic chucks described in item 1.