JPS5966847U - electron gun - Google Patents

electron gun

Info

Publication number
JPS5966847U
JPS5966847U JP16349082U JP16349082U JPS5966847U JP S5966847 U JPS5966847 U JP S5966847U JP 16349082 U JP16349082 U JP 16349082U JP 16349082 U JP16349082 U JP 16349082U JP S5966847 U JPS5966847 U JP S5966847U
Authority
JP
Japan
Prior art keywords
electron gun
electron
parts
emission surface
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16349082U
Other languages
Japanese (ja)
Other versions
JPS6348931Y2 (en
Inventor
修一 市川
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP16349082U priority Critical patent/JPS5966847U/en
Publication of JPS5966847U publication Critical patent/JPS5966847U/en
Application granted granted Critical
Publication of JPS6348931Y2 publication Critical patent/JPS6348931Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は蒸着装置の概略、第２図はフィラメントの一例
、第３図は従来の問題点の説明を補足する為に用いたも
の、及び第４図は本考案の二実施例の要部（フィラメン
ト）を夫々示したものであ　　−る。 ６：フィラメント、９：高融点金属円板。Figure 1 is an outline of the vapor deposition apparatus, Figure 2 is an example of a filament, Figure 3 is used to supplement the explanation of conventional problems, and Figure 4 is the main part of two embodiments of the present invention. (filament). 6: filament, 9: high melting point metal disk.

Claims (1)

【実用新案登録請求の範囲】 １　電子放出面の中心部を他の部分に比べ、荷電粒子の
衝撃に対し強くした電子銃。 ２　電子放出面の中心部を他の部分に比べ大きくした特
許請求の範囲第１項に記載の電子銃。 ３　電子放出面の中心部を高融点金属で補強した特許請
求の範囲第１項に記載の電子銃。[Claims for Utility Model Registration] 1. An electron gun in which the central part of the electron emitting surface is made more resistant to the impact of charged particles than other parts. 2. The electron gun according to claim 1, wherein the center part of the electron emission surface is larger than other parts. 3. The electron gun according to claim 1, wherein the center of the electron emission surface is reinforced with a high melting point metal.
JP16349082U 1982-10-28 1982-10-28 electron gun Granted JPS5966847U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16349082U JPS5966847U (en) 1982-10-28 1982-10-28 electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16349082U JPS5966847U (en) 1982-10-28 1982-10-28 electron gun

Publications (2)

Publication Number Publication Date
JPS5966847U true JPS5966847U (en) 1984-05-04
JPS6348931Y2 JPS6348931Y2 (en) 1988-12-15

Family

ID=30358715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16349082U Granted JPS5966847U (en) 1982-10-28 1982-10-28 electron gun

Country Status (1)

Country Link
JP (1) JPS5966847U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201297A (en) * 1994-12-15 1995-08-04 Matsushita Electric Ind Co Ltd Evaporation source
JP2002540574A (en) * 1999-03-30 2002-11-26 ティーエフアイ・テレマーク Arcless electron gun

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07201297A (en) * 1994-12-15 1995-08-04 Matsushita Electric Ind Co Ltd Evaporation source
JP2002540574A (en) * 1999-03-30 2002-11-26 ティーエフアイ・テレマーク Arcless electron gun
JP4689049B2 (en) * 1999-03-30 2011-05-25 ティーエフアイ・テレマーク Arc-free electron gun

Also Published As

Publication number Publication date
JPS6348931Y2 (en) 1988-12-15

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