JPS5964794A - Plating apparatus - Google Patents

Abstract

PURPOSE:To treat a large amount of plating objects within a short time, by a method wherein a plating object transfer apparatus capable of making free the direction of a chuck for grasping each plating object is provided and the high speed and smooth motion of the whole is enabled. CONSTITUTION:A plating apparatus 1 is constituted by a mounting and transfer apparatuses 4a, 4b each transferring a strip shaped plating object to the inlet side I and the outlet side O of a main plating apparatus 2. The aforementioned transfer apparatuses 4a, 4b each consists of a drive means (a pressure cylinder) 11, a base frame 12 suspended from the cylinder 11 and a chuck for grasping the plating object in a horizontal state. This chuck is attached to the under sides of a plurality of slide bars freely slidable in a left and right direction provided to the frame and a plurality of the plating objects are simultaneously maintained in an arranged state comprising a plurality of lines in the left and right direction and the transfer direction through the chuck.

Description

DETAILED DESCRIPTION OF THE INVENTION According to the present invention, a strip-shaped plated article, especially a plated article such as an ICIJ-de frame, is taken from one side and transferred to the other.
i! The present invention relates to a plating apparatus which is provided with transfer devices suitable for the purpose of transfer, on both the input and output sides of the plating apparatus.

When plating strip-shaped plated objects on the side of an IC lead frame, it is necessary to plate the first few plated objects at the same time in order to increase plating efficiency. And the speed of plating process is loading, pre-treatment, main plating process,
It is set according to the processing speed of the entire line such as post-processing and unloading. However, although several speed-controlled devices of this kind have been devised and put into practical use, the processing speed of the entire line has been relatively slow. Therefore, this applicant ILJ:'a arranges and places several strip-shaped plated objects on a trolley in advance, treats this trolley as a separate rank, and transports the plated objects together with the trolley (7) We have previously proposed an apparatus for efficiently plating a large number of plated objects [Unexamined Japanese Patent Publication No. 41-15]
-99127]. According to the proposed plating equipment, the processing speed is considerably higher than that of conventional plating equipment) 71. ;
Although this improvement was achieved, it was difficult to further increase the processing speed because the plated material was transferred via a trolley. For this reason, a feed roller is used instead of a trolley! The use of IY was considered, but unless a device was developed to pick up the plated material from the feed roller 1ff on the line and transfer it to the plating machine 2 in an efficient, visible and reliable manner, even if the speed of the feed roller group was It was found that even if the speed of the plating equipment was increased, the intended processing speed could not be improved.

When a spray type plating device 6'' is used as the plating device, a suppression plate is placed above the sparger, and the plated object placed on the mask plate of the sparger is repeatedly lowered and raised. In order to improve the speed, it is necessary to reduce the vertical movement distance of this suppressing plate, and if it is further reduced, the space between the mask plate and the suppressing plate will become smaller, and it will be difficult to pick up the material from the feed roller group within that small space. There is a problem in that it is difficult to transfer the material onto the mask plate.

Applicant Q:j, Ju Focusing on the above situation,
Using a resealable chuck, strip-shaped plating '1 wafer,
Picked up from above the feed roller group, plating with little space above! 4-position sparger - top - transfers in a short time and reliably places it in the specified position 1? Power 1 ・ Wit'T'T'T'T'T'T'T'T'T'T'T'T'T'T'T ' 1.Transferring multiple plated objects to the input and output sides of the main plating device by simultaneously aligning them in multiple rows in the left and right directions and in the transfer direction to improve the overall processing speed. The purpose is to provide a plating apparatus i'4 equipped with this apparatus.

Specifically, one plating device according to the present invention is placed on the input (ill and exit side) of the plating device, and the plating device is dipped in the direction of the exit side (11). A plating apparatus is provided with a transfer device, and each of the transfer devices includes driving means provided above both left and right sides in the transfer direction of the plated object;
There is a horizontal base frame that is suspended from these two-wheel drive means and is installed between the left and right sides, and the whole can be moved back and forth, and a slide bar provided on this base frame that can be slid in the left and right directions. , in the left-right direction and in the transfer direction, respectively, and a chuck for holding plated objects in a horizontal state with columns +VJ, :J, and ηV in the horizontal direction and in the transfer direction, respectively, and a plurality of 4
The plated articles] are transferred simultaneously with several rows of ladles on the right and in the transfer direction using a silk ladle 1 in an aligned state.

J? Below, details of the present invention (11) are illustrated with an acid 1 based on FIG.

The plating device 6t1 is mainly provided at the main plating device 2, the main plating device 2, and the output side 0 of the main plating device 2. 4b
C: See figure 1.

In the illustrated example, this plating device i'1'2 is a spray type partial plating device 1 (1 and 7), and the plating solution is sprayed into a position corresponding to a nozzle (not shown) for spraying the plating solution. Push the sparger 6 with the top lid 5a with holes 5 and the plating object 3 into the top lid 5a with the plating solution injection holes 5.
The sparger 6 is provided with a suppression plate 7 provided above the sparger 6 for discharging the air, and a pressure cylinder 8 for driving the suppression plate 7. Here, the plated object 3 i, i of the illustrated example: I
It is available as a C lead frame, and the upper cover 5 of the sparger 6
In a, the number corresponds to the spot-shaped plating target portions in one IC lead frame [4 locations in the illustrated example]
As one block, plating solution injection holes 5 are opened 11,
In addition, two rows are provided in the transfer direction (direction of arrow 7M' A) of the plated object 3, and multiple rows (seven rows in the illustrated example) are provided on both left and right sides (direction of arrow I3) in the transfer direction (direction of arrow 7M' A). [1st
Refer to the figure 1゜ In the figure, 9 is a linear body made of synthetic resin, which is spray plated on the sparger 6 and plated object 3.
In order to peel it off from a, it is stretched on both the left and right sides (in the direction of arrow B) on the sparger 6. Numeral 10 in the trench diagram is a positioning pin, and a predetermined number of pins (6 pins each in example 1 shown in the diagram) are set up for each block of plating liquid spray opening (15). It is designed to ensure that the part to be plated on the plating object 3 side and the plating liquid injection hole 5 on the sparger 6 side can be positioned 16" when doing so.

Transfer equipment installed on entry side ■ and exit side O respectively ftt 4a +
4b is assumed to have a configuration of 4 times -. Below, we will discuss one transfer device 4a on NIi Akira's convenience side ■, and for other transfer devices f>S'+"4b (71 In the middle of the figure, the transfer device 4a I:l, plating 'l' is moved in the +3 direction 11・■ direction (
TI as a driving means provided in a pair of left and right 1111 (arrow 1B direction) grains on both the left and right sides (arrow W, A direction);
The cylinder 11, the horizontal base frame 12, and the cam plates provided on both sides of the base frame 12]
Mainly from Kochuck 15? will be completed. The pressure cylinders 11 are arranged so as to face each other one-to-one above both the left and right sides of the rectangular plated object 3 in the transfer direction (direction of arrow viewing). In the illustrated example, a "slide cylinder" which is operated by pneumatic pressure is used. The pressure cylinder 11 employing this "slide cylinder" has a pair of left and right sides that can extend and contract in the direction of the arrow. There are 1. In the illustrated example, the left and right pressure cylinders 11 have the same shape and structure, so only one of them will be explained in the following sections.

A holder 1 is placed under the movable part 17 of the pressure cylinder 11.
8 is fixed. A pair of front and rear guide bars 19 are loosely inserted into the holder 18, and the guide bars 19 are inserted into the holder 18 by the amount of stroke that is regulated by a stopper 20 provided at the bottom of the guide bar 19. It is possible to move up and down in the supported state. Guide bar 19
A horizontal base frame 12 is set at the lower end of the frame, and this base frame 12 is connected to the Ryokawa cylinder 1.
1, it reaches the pressure cylinder 11 via the boulder 18 of the h''-, which is suspended and installed, and cam plates 1 and 13 provided in advance on both sides thereof are interposed.

When suspended, the shaft can move vertically, horizontally, and longitudinally. 1 on the cam plate 13, and the rollers 21a and 2 on the tip of each roller 2]4)/? It has a bifurcated shape, and is supported by a bearing 22 mounted on the side of the base frame 1112. The cam plate 13, specifically its rollers 21a, 214. i): Guides 2 for forming vertical and horizontal cam surfaces arranged on both left and right sides (arrow 113 direction) of the transfer direction of the plated object 3 (direction of arrow viewing);
This guide 23 has vertical cam surfaces 24a and 24b on the front and rear sides, and double vertical cam surfaces 2.
1, both hanging cam surfaces 24a and 2, which are connected to the water 51' norm surface 25 connecting 4a and 24b.
4b regulates the descent and ascent of the base frame 12, and also controls the horizontal and front vjI of the base frame 12 with 25 horizontal cam surfaces.
It regulates Ii11. Incidentally, each of the above-mentioned transfer devices 4a and 4bU is provided with two guides 23 on both the left and right sides (direction of arrow B), but II'+ (1110
Interval 11- of the guides 23 arranged on the transfer device ￥f4b
It is wider than the interval between the guides 23 arranged on the transfer device 4a for the person π111■, and both transfer devices w4a.

41) lives so that it does not interfere with movement (No. 31)
Chapter 11 (Li.

As mentioned above, the base fleno・12 is connected to the pressure cylinder on both the left and right sides via the guide bar 19 and the holder 18.
The vertical movement 11 is suspended from the nJ moving part 17 of 11 and maintained in a horizontal state at all times when it is installed between the left and right sides.
The slider 14 has a generally rectangular shape as a whole and is provided with a plurality of sliders 14 that can be slid horizontally in the left and right direction (in the direction of arrow B).

As shown in Fig. 4, a total of 14 plated products 3 are arranged in two rows in the transfer direction (direction of arrow B) and seven rows in the left-right direction (direction of arrow B). Fourteen sets of chucks 15 are provided to enable one grip. The relationship between the slide par 14 and the chuck 15 will be described and explained with reference to FIG. 5 and FIG. 6, which are enlarged views of a part (view 7) of FIG. 4. In the example shown in FIG. 6, the slide pars 14 are divided into even rows and odd rows, and the slide pars 14 in the even rows. pressure cylinders 26a and 26a for independently sliding the slide pars 141) of the odd rows;
26b and a connecting bar 27a.

27b, the slide pars 14a of the even numbered rows and the slide pars 14b of the odd numbered rows are simultaneously slid together. The sliding direction is ')j'; in the left-right direction (direction of arrow B), and the sliding direction is ')j'; in the direction of moving away from each other, and the sliding direction is 'opening - 1' between the Q) and Tsuk 15 (described later), and the sliding direction in the approaching direction is 'closing 1'. This will change the state to 4.

On the lower surface side of the slide pars 14a, 14b, double V-mounted screws 15 are mounted to sandwich the plated object 3 from both the left and right sides so as to form a pair in the left and right direction (see Fig. 5191 and Fig. 7). A pair of chanok 15a in left and right direction: 1
5b+ 1.5c: 15d has the shape shown in FIG. The chuck 15 has a shape shown in FIG. 5 and FIG.
1) ”, 15d is 1 cent, each chuck 15B
+ 15b y 1.5C, 15d are each wide inverted U
It is said to be in the shape of a letter. In addition, a pair of front and rear chucks 15
The reason why a: 15c, 15b: 15d have such a wide inverted U-shape is to avoid interference with the feed roller 29 that conveys the plated object 3, and to prevent the chuck 1 from colliding with the chuck 1 when descending.
5B, 15c: This is to allow the forming portion 30 of the recess 28 for receiving the plated object 3 of 15b and 15d to enter between the feed rollers 29 without resistance.

Is the chuck 15 installed at position 1i' in the left-right direction (direction of arrow B)? and number 6. It is made to correspond to the alignment position 1v and the alignment number of the plated objects 3 that are sent in the negative Yabu alignment state. Specifically, as shown in FIG. This corresponds to the position and number of the parts on which the objects 3 are placed (seven plated objects 3 in the illustrated example).

Left and right chucks 15a, 1.5 (!: 15b,
Between 15d and front and rear chucks 1.5a and 1.5b:
The front and rear chucks 15a and 15b are provided with dampers 32a and 321 for regulating the front and rear of the plated object 30, which securely hold the strip-shaped plated object 3 between the chucks 1.5c and 15a.
= 15c, 15aK combination is provided. Front damper 3
2a is of a fixed type, and the rear damper 32b is of a rotary type. These dampers 32a, 32b are provided in combination with each of the chucks 15 of 'fM number in the left and right direction, and in order to open and close the plurality of rear dampers 32b at the same time, the base end of each μm force damper 32b is The base frame 12 (specifically, the chuck 15) that urges the rotation of the fixed rotation bar 33, the rotation of the rotation bar 330, the rotation of the rotation bar 330, the rotation of the rotation bar 330, the rotation of the rotation bar 330, the rotation of the rotation bar 33, and the rotation of the rotation bar 33 and the rotation bar 33 are fixed. Kitzker roll 35 in the lowered position
The return spring 3 allows the kicker grate 34 to return to rotation through the protrusion 36 disposed at a position that interferes with the return spring 3.
7 etc. [see Figures 7 and 8].

It is positioned by the connecting shaft 3B inserted through the lower surface of the rotating bar base frame 12, and both dampers 32, ,
32) Adjust the interval 1 in step 1 to correspond to the length of the plated object 3. II
It has become so. That is, the metal fitting 40 is fixed to the base frame 12 and attached to the shaft 39 with a moving scale.
By inserting one end of the connecting shaft 38 into the fixing metal fitting 4o and attaching the other end of the connecting shaft 38 to the C111 receiver 41 fitted to the rotating bar, the fixing metal fitting 4o can be fixed. Move along the shaft 39 f=]'
, and the position of the rotating shaft 33 can be changed in the transfer direction (direction of arrow A). The part of the fixing metal fitting 40 through which the shaft 39 is inserted has a slotted groove shape as shown in FIG.
, 40 positions can be fixed. On the lower surface side of the base frame 12, there is a movement 71r of the rotation bar 33.
A notch 16 is provided in the upper part 4 (see Figure 8, 11).
(t],, On the input side 11 of the main plating device 1t2, that is, on the exit side of the pre-treatment device 43, there are six feed rollers that convey the plating material 3 and bring it in. However, this feed roller 2
9 and the entrance side ■ of the main plating device 2 and the main plating device 2
Stoppers 44 and 45 are provided between the third and fourth feed ports 29, respectively. The stopper 44 on the main plating equipment Wiz side is fixed, but the stopper 45 on the pretreatment device 43 side is vertically movable. That is, among the two rows of plated objects 3 that are simultaneously transferred to the main plating device 2 by the transfer device 4a, the seven plated objects 3 in the first row touch the stopper 44 on the main plating device 2 side, and the trench is removed. When the plated items 3 in the second row are transported in the transfer direction (
They are arranged in the direction of arrow A). In the figure, 46 is a counter equipped with a sensor, and a pre-processing device 430 output (1
11, and is removed so as to count the number of plated objects 3 passing therethrough by 1/1, and to transmit a signal for lowering the stopper 45 by 1, a signal for moving the transfer device 4a, etc.

Note that the post-processing device 47 disposed on the output side 0 of the main plating device 2
The number of feed rollers 29 provided at
Two rows of plated objects 3 in the direction (direction) and seven rows of plated objects 3 in the left-right direction (direction of arrows 1F and B) can be transported to the post-processing device 47 at the same time.

In addition, in the twilight described above, it is assumed that two rows of plated objects 3 in the transfer direction (direction of arrow A) and seven rows of plated objects 3 in the left-right direction (direction of arrow B) are transferred at the same time. It is not limited to 2 or 7 rows, but more plated objects 3 can be transferred simultaneously without any problem. That is, the sparger
The front and rear processing devices 43, the feed rollers 29 of 47, the placement of the chucks 15 of the base frame 12, the size of the base frame 12, etc. may be changed in accordance with the number and arrangement of the plating solution injection holes 5 of 6.

Next, the effect will be explained. In the following explanation, the plated items 3 are arranged in two rows in the transfer direction (arrow A direction) and in seven rows in the left-right direction (arrow arrow B direction), for a total of 14 pieces.
It is subject to the same treatment at the time of opening, and explanation J's convenience, J
=,,r 14 plated objects 1 are simply called "multiple plated objects 3"
”.

Now, when the strip-shaped plated objects 3 are subjected to pre-treatment M[+ in the pre-treatment device 43, each plated object 3 is sent to the outlet side of the pre-treatment device Mi, 43 in a state where a plurality of plated objects 3 are aligned. roller 2
9 and waits for the transfer device 4a to be picked up. The plated object 3 is pretreated by a pretreatment device 43.
When they are carried out onto the conveyor belt 229 and lined up, they are detected by a sensor in the counter 46 during conveyance, and this detection signal is transmitted to a lightning control means (not shown), and from this electric control means. By receiving the drive signal, the pressure cylinder 11 moves its movable portion 17 toward the pretreatment device 43 in the direction of arrow A (backward movement), and the base frame 12 is similarly moved. At this time, the two rollers 21a, 214) of the cam plate 13 are engaged with the horizontal cam surface 25 of the guide n, and the base frame 12 is engaged with the horizontal cam surface 25 of the guide n.
is moved (backwards) while remaining horizontal. Since this horizontal cam surface 25 is connected to the vertical cam surfaces 24a and 24b, one roller 21 of the two rollers 21a and 21b will engage with the vertical cam surface 24b. The bifurcated cam plate 13 rotates,
As a result, the entire pace frame 12 will fall. At this time, the chuck 15 moves toward the feed roller 29 at a speed of 9, and as the base frame 12 descends, the left and right, front and rear chucks 15B + 15b + 15c
+15d is arranged so that the recess 28 at the tip faces the left and right sides of the plated object 3 at a position where it does not interfere with the feed roller 29. Incidentally, the lower limit movement of the base frame 12 and the chuck 15 at this time is regulated by the stroke amount of the guide shaft 19. Next, the pressure cylinders 26a and 26b are driven to connect the connecting shafts 27a and 27.
b, the even-numbered row slider C-14a and the odd-numbered row slider door C-141) are moved toward each other in the left-right direction (direction of arrow B), and each of the even-numbered and odd-numbered rows slider 141, a pair of left and right chucks 15a protruding from the lower surface of I4b, 15°: 151)
, 15d approach each other and hold the plated object 3 on both left and right sides. At this time, as the base frame 12 descends, the kicker roll 35 comes into contact with the protrusion 36, so that the kicker plate 34 rotates against the return spring 37, and the plurality of rear dampers 3
2b rotate at the same time, so that all the rear dampers 32b are opened. Next, if the pressure cylinder 11 moves its movable part 17 in the opposite direction, the base frame 12 will also move in the same way)? Move in the direction of A force (forward movement)
However, when the roller 21a of the cam plate 13 engages with the horizontal cam surface 25 from the vertical cam surface 24a, the base frame 12 is once raised and then moved forward in a horizontal state. Therefore, a plurality of aligned plated objects 3d are simultaneously held in the aligned state by the respective chucks 15 and picked up from the feed roller 29. As the base frame 12 rises, the return spring 37 causes the kicker plate 34 to rotate.
The plurality of rear dampers 321) return to rotation via the rotation bar 33, and as a result, each of the three plated objects is held on both left and right sides by the chucks 15a, 15b, 150, and 15d, and the front and rear are fixed *' It is supported by the 11-way damper 32a and the rear damper 324) which has returned to rotation and is in a so-called "closed" state. When the entire base frame 11 moves forward in this state, 11) the bit plate 13 rotates as its roller 21b engages with the vertical cam surface 24b, and the base frame 12 as a whole moves downward. The lower limit position at this time is regulated by the stroke amount of the guide bar 19 as before. This lowered position of the base frame 12 exactly corresponds to the upper position of the sparger 6 of the present plating apparatus °2, and at this point 112t, the pressure cylinders 26a and 26b are operated again to move the even and odd rows of slide bars 14a.

14b in the left and right direction, and a pair of left and right chucks 15a.

15c: 151) and 15d are slid in the opening direction, and the plurality of plated objects 3 are lowered onto the two sides of the sparger 6 in an aligned state. Then, in order to repeat the above operation again, the base frame 12 is moved toward the pretreatment device 43, and at the same time, the pressure cylinder
At step 8, the suppressing plate 7 is lowered and a plurality of aligned plated objects 3 are pressed against the upper surface of the sparger 6 to prepare for partial spray plating.

Specifically, the plated object 3 transferred onto the sparger 6 is lowered onto the linear body 9, and moved by the positioning pin 10 to a position corresponding to the plating liquid injection hole 5 formed in the sparger 5a. accurately positioned. The suppressing plate 7 is lowered t2 to the plated objects 3 arranged in such a manner as described in 1 above, and the Metsu J liquid is sprayed onto the plated objects 3.

When the plating process is completed and the suppression plate 7 is moved upward by the pressure cylinder 8, it is separated from the upper lid 5a by the restoring force of the plated object 3C1 and the linear body 9, and transferred to the post-processing device 47 by the transfer device fi'i' 4b. Prepare for transfer.

The transfer device 4b is moved 1'tlJ (backward movement) in the direction of arrow viewing by a drive signal from an electric control means (not shown).
Thereafter, the transfer device 4a picks up the plated material 3 from the feed roller 19 of the pretreatment device 43 and transfers it onto the sparger 6. Transfer to the feed roller 19 of the processing device ie, t 47. Therefore, the explanation of the effect of the transfer device ff<4b will be omitted.

As explained above, the plating apparatus according to the present invention is
Chunks for holding plated objects are installed in a transfer device that is small in size but can move up and down and horizontally back and forth while drawing a reliable trajectory in the transfer direction and in the left and right directions for multiple base frames. By installing the ffl on the input and output sides of this plating equipment, the overall movement is faster and smoother, and compared to the conventional method, it is possible to achieve multiple rows in the transfer direction and in the left and right force directions. It is possible to process a large amount of unplated objects in a short period of time, and as a driving source (: 1, with only a pair of pressure cylinders placed above both the left and right sides in the direction of transfer of the plated objects). The drive device is in charge of the movement of the base frame, and the base frame is lowered by its own weight via the cam surface, and raised by the bifurcated cam play 1 with rollers via the cup surface. This has the effect of simplifying the structure and reducing the size of the entire device accordingly.
By adjusting the even-numbered rows and odd-numbered rows of the slide bars provided on the base frame and changing the combination of the left and right chucks, plated objects of different widths can be clamped, and the position of the damper's force can be varied in the transfer direction. This can be expected to have the effect of being able to handle plated objects of different lengths.

[Brief explanation of the drawing]

FIG. 1 is a side view showing an embodiment of a plating apparatus according to the present invention, FIG. 2 is a partial side view of the plating apparatus as seen in the IT force direction shown by the arrow in FIG. 1, and FIG. , a schematic plan view showing the pressed state of the plating device and the processing device 6, FIG. 4 is a schematic plan view showing the arrangement state of the chuck on the base frame, and FIG. 5 shows the plated object using the chuck. 6 is an enlarged partial plan view showing the base frame, slide bar, etc. in the direction of arrow Vi in FIG. 4, and FIG. FIG. 8 is an enlarged side view of the chuck viewed from one direction, and FIG. 8 is an enlarged side view of the chuck viewed from the direction of the arrows ■■ force in FIG.

Claims (1)

[Claims] A plating device that is equipped with a plated object transfer device on the entry side and the exit side of the plating device 6, respectively, for transferring the plated object in the direction of the person and the exit side. Therefore, the two transfer devices described in ``2'' include drive means provided above both the left and right sides in the transfer direction of the plated material, and are suspended from these drive means] and are installed between the left and right sides, and the whole is movable back and forth. A horizontal base frame with multiple rows of slide bars installed on the base frame that can be slid in the left and right directions is attached to the bottom of the horizontal base frame.
-Equipped with a chuck for holding the plated items, and transfers several plated items simultaneously in multiple rows in both the left and right directions and in the transfer direction through the chucks. It is. plating equipment.