JPS5954563U - 現像およびエツチング装置 - Google Patents

現像およびエツチング装置

Info

Publication number
JPS5954563U
JPS5954563U JP14697382U JP14697382U JPS5954563U JP S5954563 U JPS5954563 U JP S5954563U JP 14697382 U JP14697382 U JP 14697382U JP 14697382 U JP14697382 U JP 14697382U JP S5954563 U JPS5954563 U JP S5954563U
Authority
JP
Japan
Prior art keywords
tank
developing
development
etching
etching equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14697382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215242Y2 (enrdf_load_stackoverflow
Inventor
平山　和成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toppan Inc
Original Assignee
Toshiba Corp
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toppan Inc filed Critical Toshiba Corp
Priority to JP14697382U priority Critical patent/JPS5954563U/ja
Publication of JPS5954563U publication Critical patent/JPS5954563U/ja
Application granted granted Critical
Publication of JPS6215242Y2 publication Critical patent/JPS6215242Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP14697382U 1982-09-30 1982-09-30 現像およびエツチング装置 Granted JPS5954563U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14697382U JPS5954563U (ja) 1982-09-30 1982-09-30 現像およびエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14697382U JPS5954563U (ja) 1982-09-30 1982-09-30 現像およびエツチング装置

Publications (2)

Publication Number Publication Date
JPS5954563U true JPS5954563U (ja) 1984-04-10
JPS6215242Y2 JPS6215242Y2 (enrdf_load_stackoverflow) 1987-04-17

Family

ID=30326973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14697382U Granted JPS5954563U (ja) 1982-09-30 1982-09-30 現像およびエツチング装置

Country Status (1)

Country Link
JP (1) JPS5954563U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61284577A (ja) * 1985-06-10 1986-12-15 Futaba Corp 薄膜形成装置
JPS621780U (enrdf_load_stackoverflow) * 1985-06-19 1987-01-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61284577A (ja) * 1985-06-10 1986-12-15 Futaba Corp 薄膜形成装置
JPS621780U (enrdf_load_stackoverflow) * 1985-06-19 1987-01-08

Also Published As

Publication number Publication date
JPS6215242Y2 (enrdf_load_stackoverflow) 1987-04-17

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