JPS5952973A - Image pickup element and image pickup device - Google Patents

Image pickup element and image pickup device

Info

Publication number
JPS5952973A
JPS5952973A JP57162661A JP16266182A JPS5952973A JP S5952973 A JPS5952973 A JP S5952973A JP 57162661 A JP57162661 A JP 57162661A JP 16266182 A JP16266182 A JP 16266182A JP S5952973 A JPS5952973 A JP S5952973A
Authority
JP
Japan
Prior art keywords
rows
output
information
odd
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57162661A
Other languages
Japanese (ja)
Inventor
Seiji Hashimoto
誠二 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57162661A priority Critical patent/JPS5952973A/en
Publication of JPS5952973A publication Critical patent/JPS5952973A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To obtain a signal which is suitable for reproducing a still picture record, by separately outputting signals of an odd number line and an even number line of an image pickup element and obtaining information of two fields from information of one picture. CONSTITUTION:A shift registers 2a scans only odd number lines and another shift register 2b scans only even number lines and the outputs of the odd number lines and even number lines are outputted through separate circuits after passing through amplifiers 6a and 6b, respectively. When shift registers 2a and 2b are driven in parallel with a time interval of 1/2 horizontal scanning period between them in an image pickup device, the output of the device can be outputted synchronously to TV signals one field by one field. Moreover, since information of two fields formed simultaneously when the two outputs are read out at the same time can be obtained, this device is suitable for reproducing a still picture record.

Description

【発明の詳細な説明】 本発明は静止画記録に適したX−Yアドレス型の撮像素
子及びこの素子を用いた撮像装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-Y address type imaging device suitable for still image recording and an imaging device using this device.

従来X−Yアドレス型の撮像素子に於ては第1図に示さ
れる様に感度及び水平解像度を向上させる為にセンサに
対して貼合わせるカラーフィルターとしては市松模様の
カラーフィルターが多く使われている。
In conventional X-Y address type image sensors, checkered pattern color filters are often used as color filters attached to the sensor to improve sensitivity and horizontal resolution, as shown in Figure 1. There is.

図示の例ではCy(ンアン)、Yo(* )、W(透明
)、G(緑)の4つのカラーフィルターから成り、補色
系のフィルタを採用する事によりフィルターの透光率を
向上させ、ひいてはセンサとしての感度も向上させてい
る。
The illustrated example consists of four color filters: Cy (Nan), Yo (*), W (transparent), and G (green), and by adopting complementary color filters, the light transmittance of the filter is improved, and as a result, The sensitivity of the sensor has also been improved.

図に於て、1は水平シフトレジスタで読み出し用のトラ
ンジスタ3を順次2つずつONさせる事により水平走査
を行なう。2は垂直シフトレジスタであって、光電変換
手段としての例えばフォトダイオード5の電気信号を読
み出す為のトランジスタ4を垂直方向に走査する。
In the figure, reference numeral 1 denotes a horizontal shift register which performs horizontal scanning by sequentially turning on two reading transistors 3 at a time. Reference numeral 2 denotes a vertical shift register, which vertically scans a transistor 4 for reading an electric signal from a photodiode 5 as a photoelectric conversion means, for example.

ここでフォトダイオード5は水平方向の行及び垂直方向
の列を形成してかり、前記レジスタ2Fi読み出される
べき行を選択する機能を有し、レジスタ1は読み出され
るべき列を選択する機能を有する。
Here, the photodiodes 5 form horizontal rows and vertical columns, and the register 2Fi has a function of selecting a row to be read out, and the register 1 has a function of selecting a column to be read out.

又、各光電変換手段5に対しては夫々Cy % G 1
Y8、Wのいずれかの色フィルタを介した光が入射し、
同色フィルタのついた光電変換手段5の出力は共通の出
力線を介してセンナより出方されていく。又、この様に
構成されたセンサの出力は不図示の信号処理回路に於て
以下に述べる様な相関処理を受ける。
Moreover, for each photoelectric conversion means 5, Cy % G 1
Light enters through either Y8 or W color filter,
The output of the photoelectric conversion means 5 equipped with the same color filter is outputted from the sensor via a common output line. Further, the output of the sensor configured in this manner is subjected to correlation processing as described below in a signal processing circuit (not shown).

即ち、垂直2絵素の信号を加算して輝度信号Yとする。That is, the luminance signal Y is obtained by adding the signals of two vertical picture elements.

第1図では Y=Cy+Y、=W十〇=R+2G+B又、カラー信号
も垂直相関により R=(Y8+W)−(c+cy) B= (W−cy)−(Yo十G) の如く演算してR信号とB信号を得る。
In Fig. 1, Y=Cy+Y,=W10=R+2G+BAlso, the color signal is also calculated by vertical correlation as R=(Y8+W)-(c+cy) B=(W-cy)-(Yo1G) Obtain signal and B signal.

然しこの様な従来のセンサーに於ては垂直方向の2ライ
ンによって1ライン分の信号を得ており、水平解像度及
び感度は向上するものの、静止画再生の為に所謂フィー
ルド・スキップ方式の記録再生を行なうと、1フイール
ドの情報を2回再生するので垂直解像度が低くなってし
まう。
However, in such conventional sensors, one line's worth of signals is obtained from two vertical lines, and although the horizontal resolution and sensitivity are improved, the so-called field skip method recording and playback is required for still image playback. If this is done, the information of one field will be reproduced twice, resulting in a lower vertical resolution.

又、Jフィールド分を記録媒体に記録した後で次の1フ
イールドを撮像し、別のトラックに記録し、再生すると
、動体撮影の場合に被写体がぶれてしオう。
Furthermore, if the next field is imaged after recording J fields on a recording medium, recorded on another track, and played back, the subject will be blurred when photographing a moving object.

本発明はこの様なX−Yアドレス型のイメージセンサを
用い静止画記録再生に適した信号を得る事のできる改善
された撮像装置を提供する事を目的とするものである。
It is an object of the present invention to provide an improved imaging device that can obtain signals suitable for recording and reproducing still images using such an X-Y address type image sensor.

その為に本発明ではX−Yアドレス型のイメージセンサ
を用いた撮像装置に対し垂直相関性を必要としない色フ
ィルター啼組み合わせる様にしている。
Therefore, in the present invention, a color filter that does not require vertical correlation is combined with an imaging device using an X-Y address type image sensor.

又、X−Yアドレス型のセンナの奇数ラインの信号と、
偶数ラインの信号とを別々に出力し得る様に出力ライン
の結線をしているので1回の撮像により得られた1両分
の情報から2ンイ一ルド分の情報を分離する事ができる
In addition, the signal of the odd line of the X-Y address type Senna,
Since the output lines are connected so that the even-numbered line signals can be output separately, the information for 2 lines can be separated from the information for 1 line obtained by one imaging.

更に又、この様な結線構成に於て偶数ライン出力と奇数
ライン出力とを一対ずつ加算し得る加算手段を設け、こ
の加算手段を選択的に作用させる事によりX−Yアドレ
ス型のイメージセンサに於て1回の撮像情報を1フイ一
ルド分の情報として合成する事もできる。そして、仁の
場合Kdセンサの感度が略2倍となる効果もある。
Furthermore, in such a wiring configuration, an adding means capable of adding up the even number line output and the odd number line output pair by pair is provided, and by selectively operating this adding means, an X-Y address type image sensor can be used. In this case, it is also possible to combine one-time imaging information into one field's worth of information. In addition, in the case of nickel, there is also the effect that the sensitivity of the Kd sensor is approximately doubled.

以下本発明を実施例に基づき詳細に説明する。The present invention will be described in detail below based on examples.

尚、第1図と同じ符番のもの暖同じ要素を表わす。Note that the same reference numerals as in FIG. 1 represent the same elements.

図中2aは奇数行の情報を選択する為のシフトレジスタ
であって順次例えば、1,3.5・−・・・・の如く奇
数行のみを走査する。2bは同様に偶数行を順次走査す
る為のシフトレジスタである。
In the figure, 2a is a shift register for selecting information on odd rows, and sequentially scans only odd rows, for example, 1, 3.5, . . . . 2b is a shift register for sequentially scanning even-numbered rows.

又、6aは符数行の各絵素からの出力を増巾して出力す
る為のアンプ、6bfd偶数行の各絵素からの出力を増
巾して出力する為のアンプである。
Further, 6a is an amplifier for amplifying and outputting the output from each pixel in the code-numbered row, and 6bfd is an amplifier for amplifying and outputting the output from each pixel in the even-numbered row.

本発明の主要な特徴の1つはこの様に奇数行情報と偶数
行情報とが別系統で読み出せる様に出力線を接続した点
にある。又、図示の如く、各光電変換手段即ち絵素に対
してかけられる色フィルターは従来のものと異なり、垂
直相関を利用しない例えばストライプフィルターにより
構成している。従って各ラインの信号を夫々処理する為
の処理回路と、2ラインの信号を加算してから処理する
為の処理回路とを一部共通なものとする事ができるので
構成が簡単となる。
One of the main features of the present invention is that the output lines are connected so that odd-numbered row information and even-numbered row information can be read out in separate systems. Further, as shown in the figure, the color filter applied to each photoelectric conversion means, that is, the picture element, is different from the conventional one and is constituted by, for example, a stripe filter that does not utilize vertical correlation. Therefore, the processing circuit for processing the signals of each line and the processing circuit for adding and processing the signals of two lines can be partially shared, which simplifies the configuration.

又、ストライプフィルター以外にも変調方式のフィルタ
ーであっても同様の効果が得られる。
In addition to the stripe filter, the same effect can be obtained even with a modulation type filter.

尚、本発明の撮像装置に適用される力2−フィルタとし
てはモザイクフィルター等の垂直相関を利用したフィル
ターであっても良いが、その場合には各ライン信号を独
立に読み出す時に水平解像度が多少落ちる欠点がある。
Note that the force 2 filter applied to the imaging device of the present invention may be a filter that utilizes vertical correlation, such as a mosaic filter, but in that case, the horizontal resolution may be slightly reduced when reading out each line signal independently. There are downsides.

又、1ラインずつ読み出す場合と、2ラインを加算して
読み出す場合とで処理方法を変えなければならないとい
う欠点がある。一方、この様に加算して出力する時には
水平解像度が向上すると共に、感度も向上する特徴もあ
る。
Another disadvantage is that the processing method must be changed depending on whether one line is read out one line at a time or two lines are added up and read out. On the other hand, when the signals are added and output in this way, the horizontal resolution is improved and the sensitivity is also improved.

岡、本実施例ではレジスタ2a、2bを夫々設ける事に
より例えば1/2水平走査期間のずれの形成を容易にし
、スキュー歪の発生を防止しているが、第1図示のレジ
スタ2の様に1つのレジスタによってもこの様な機能を
持たせる事も可能である。しかし、その場合にはレジス
タへの制御パルスは極めて複雑化する欠点がある。
Oka, in this embodiment, by providing the registers 2a and 2b, for example, it is easy to form a shift of 1/2 horizontal scanning period and prevent the occurrence of skew distortion. It is also possible to provide such a function with a single register. However, in that case, there is a drawback that the control pulses to the registers are extremely complicated.

第3図は本発明の撮像装置の構成の一例を示すブロック
図で、■Dは撮像面、1は水平シフトレジスタ、2a、
2bは夫々奇数ライン用、偶数ライン用の垂直シフトレ
ジスタである。
FIG. 3 is a block diagram showing an example of the configuration of an imaging device according to the present invention, where ■D is an imaging surface, 1 is a horizontal shift register, 2a,
2b is a vertical shift register for odd lines and even lines, respectively.

7は各レジスタに駆動パルスを供給する為の駆動回路、
8は該駆動回路に対し、モード切換信号を供給する為の
選択手段としてのモード切換回路であって、該モード切
換回路は1回分の蓄積情報を2フイールドに分離して読
み出す為の第1のモードと、蓄積情報を1フイールドと
して読み出す為の第2のモードとを選択的に指示する。
7 is a drive circuit for supplying drive pulses to each register;
Reference numeral 8 denotes a mode switching circuit as a selection means for supplying a mode switching signal to the drive circuit, and the mode switching circuit has a first mode switching circuit for reading out the stored information for one time by dividing it into two fields. mode and a second mode for reading accumulated information as one field.

19はモード切換回路8の指示に応じて切換わるスイッ
チ、9は奇数行出力と偶数行出力とを加算する為の加算
回路、10け撮像素子IDの出力又は加算回路10の出
力に基づき例えば色信号や輝度信号を形成する処理回路
、11はこの処理回路の出力を記録に適した信号に変換
する為の記録回路、12a、12bは夫々記録ヘッドで
あって不図示の記録媒体に対して信号の記録を行なう。
19 is a switch that changes according to the instruction from the mode switching circuit 8; 9 is an addition circuit for adding the outputs of odd and even rows; A processing circuit for forming signals and luminance signals; 11 is a recording circuit for converting the output of this processing circuit into signals suitable for recording; 12a and 12b are recording heads, respectively, which output signals to a recording medium (not shown); record.

この様VC構成されているのでモード切換回路8により
第1のモードが選択された際には所定時間だけ蓄積を行
なった後不図示のシャッタにより撮像部IDを遮光しそ
の後駆動回路によって奇数用シフトレジスタ2aと偶数
用シフトレジスタ2bとを例えば1/2水平走査期間ず
らして並列に駆動する事によって奇数行の情報と偶数行
の情報をスイッチ9のa端子を介して処理回路10に導
ひく。そして処理回路10に於て奇数行の情報と偶数行
の情報とを夫々信号処理した後、記録回路を介しヘッド
12a、  12bによって夫々記録媒体上の別のトラ
ックに記録する。
Since the VC is configured in this way, when the first mode is selected by the mode switching circuit 8, the image pickup unit ID is shielded from light by a shutter (not shown) after accumulation is performed for a predetermined time, and then shifted by the drive circuit for odd numbers. By driving the register 2a and the even shift register 2b in parallel with a shift of, for example, 1/2 horizontal scanning period, the information on the odd rows and the information on the even rows are guided to the processing circuit 10 via the a terminal of the switch 9. After the information on the odd rows and the information on the even rows are subjected to signal processing in the processing circuit 10, they are respectively recorded on separate tracks on the recording medium by the heads 12a and 12b via the recording circuit.

又、モード切換回路8により第2のモードを選択した場
合にはシャッタを用いずに常時撮像部IDに光を入射可
能にしておき、奇数行と偶数行とを一対として2行ずつ
同時に読み出す様、レジスタ2a、2bを同期させて駆
動させる。
In addition, when the second mode is selected by the mode switching circuit 8, light is always allowed to enter the imaging unit ID without using a shutter, and odd and even rows are read out as a pair, two rows at a time. , registers 2a and 2b are driven in synchronization.

又、スイッチ19をこの時す側に切換える事により、同
時に読み出された奇数行の情報と偶数行の情報とを加算
器9に於て加算し、処理回路10、記録回路11を介し
て1つのヘッド12aによって記録媒体の1つのトラッ
クに記録する。
Also, by switching the switch 19 to the "on" side at this time, the adder 9 adds the information on the odd rows and the information on the even rows that are read out at the same time, and adds the information to the adder 9 via the processing circuit 10 and the recording circuit 11. Recording is performed on one track of the recording medium using two heads 12a.

第4図は処理回路10の構成の一例を示す図で13は加
算器、14はカットオフ周波数が3MHz程度のローパ
スフィルター、15a〜15cはカットオフ周波数が5
00KHz〜I MHz程度のローパスフィルター、1
6は減算器、17はプロセス回路である。この様に構成
されているので加算器9の出力又は撮像素子IDの各行
の出力(共にR,GXCy信号を夫々含む)の内のR,
G、Cy倍信号全て加算した後ローパスフィルタを通す
事により輝度信号Yを形成し、各色信号については高域
成分をカットした後でR信号はそのまま、CyとG信号
からFi(Cy−G)の演算によりB信号を形成し、プ
ロセス回路17に於てY信号と色差信号に変換されて出
力される。
FIG. 4 is a diagram showing an example of the configuration of the processing circuit 10, in which 13 is an adder, 14 is a low-pass filter with a cutoff frequency of about 3 MHz, and 15a to 15c are filters with a cutoff frequency of 5.
Low pass filter of about 00KHz to I MHz, 1
6 is a subtracter, and 17 is a process circuit. With this configuration, the R,
After adding all the G and Cy multiplied signals, the luminance signal Y is formed by passing it through a low-pass filter.For each color signal, after cutting the high frequency components, the R signal is left as it is, and Fi (Cy-G) is generated from the Cy and G signals. A B signal is formed by the calculation, which is converted into a Y signal and a color difference signal in the process circuit 17 and output.

以上説明した如く、本発明によればX−Yアドレス型の
撮像素子から同時に形成された2フイ一ルド分の情報を
得る事ができると共に、1フイールドずつTV信号に同
期して出力する事もできる。
As explained above, according to the present invention, it is possible to obtain information for two fields formed simultaneously from an X-Y address type image sensor, and it is also possible to output one field at a time in synchronization with a TV signal. can.

又、’FV信号に同期して出力する場合に複数の行の情
報を加算しているので素子の感度が向上する。
Furthermore, when outputting in synchronization with the FV signal, the sensitivity of the element is improved because information from a plurality of rows is added.

又、奇数行と偶数行とを並列に読み出し2っの記録手段
により同時に記録しているので記録速度が速くなる。又
、−・ラドシフト等のトラック切換えに要する時間が不
安となる。
Furthermore, since the odd-numbered rows and even-numbered rows are read out in parallel and recorded simultaneously by the two recording means, the recording speed is increased. In addition, the time required for track switching such as -.rad shift becomes unsettling.

又、撮像素子に於ける奇数フィールドの読み出し出力と
偶数フィールドの読み出し出力とを互いに独立に得られ
る様接続しているので奇数フィールドの信号と偶数フィ
ールドの信号とを並列に得る事ができ、従って2つの記
録手段により同時に各フィールドの信号を記録する事が
できる。
In addition, since the odd field readout output and the even field readout output of the image sensor are connected so that they can be obtained independently of each other, it is possible to obtain the odd field signal and the even field signal in parallel. The signals of each field can be recorded simultaneously by the two recording means.

又、ストライプ方式又は変調方式の色フィルターを採用
しているので1ラインずつ信号処理する場合も複数ライ
ン加算して信号処理する場合にも信号処理回路を共通化
し得る等多くの効果を有するものである。
In addition, since it uses a stripe-type or modulation-type color filter, it has many advantages, such as the ability to share the signal processing circuit when processing signals one line at a time or by adding multiple lines. be.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のMO8XX−Yアドレス型撮像素子の+
ItS成例を示す図、第2図は不発IJJの撮1象素子
の一例を示す図、第3図は本発明の撮像装置の一例を示
す図、第4図は信号処理回路の一例を示す図である。 1・・・・・・・・・・・・水平シフトレジスタ2・・
・・・・・・・・・・垂直シフトレジスタ2a・・・・
・・・・・奇数行用シフトレジスタ2b・・・・・・・
・・偶数行用シフトレジスタ5・・・・・・・・・・・
−光電変換手段(絵素)9・・・・・・・・・・・・加
算器 特許出願人  キャノン株式会社
Figure 1 shows the + of the conventional MO8XX-Y address type image sensor.
FIG. 2 is a diagram showing an example of an ItS configuration, FIG. 2 is a diagram showing an example of an imaging element for an unexploded IJJ, FIG. 3 is a diagram showing an example of an imaging device of the present invention, and FIG. 4 is a diagram showing an example of a signal processing circuit. It is a diagram. 1...Horizontal shift register 2...
・・・・・・・・・Vertical shift register 2a・・・・
...Shift register 2b for odd rows...
・・Shift register 5 for even rows・・・・・・・・・・・・・
-Photoelectric conversion means (pixel) 9 Adder patent applicant Canon Corporation

Claims (2)

【特許請求の範囲】[Claims] (1)行及び列を構成する複数の光電変換要素と、各要
素の光電出力を夫々読み出す為の複数の出力線とを有す
る撮像素子に於て、 前記撮像素子の奇数行の光電変換要素の情報を読み出す
為の出力線と、偶数行の光電変換要素の情帽を読ノド出
す為の出力線とを互いに独立させた事を特徴とする撮像
素子。
(1) In an image sensor having a plurality of photoelectric conversion elements constituting rows and columns and a plurality of output lines for respectively reading out the photoelectric output of each element, the photoelectric conversion elements in odd-numbered rows of the image sensor An image sensor characterized in that an output line for reading information and an output line for reading the information of even-numbered photoelectric conversion elements are made independent of each other.
(2)行及び列を+、III成する+MPlの光電変換
要素と、奇数行の光電変換要素の情報を読み出す為の奇
数行出力線と、偶数行の光電変換要素の情報を読み出す
為の偶数行出力線とを独立して有する撮像素子と、 前ML奇数行の出力線を介した出力と偶数行の出力線を
介した出力とを加算して出力し得る加算手段と、該加算
手段を選択的に作動させる為の選択手段とを有する撮像
装置。
(2) +MPl photoelectric conversion elements forming + and III rows and columns, odd row output lines for reading out information on photoelectric conversion elements on odd rows, and even numbered output lines for reading out information on photoelectric conversion elements on even rows. an image sensor having row output lines independently, an adding means capable of adding and outputting an output via the output line of the previous ML odd-numbered rows and an output via the output line of the even-numbered rows, and the adding means. An imaging device having a selection means for selectively operating the image pickup device.
JP57162661A 1982-09-18 1982-09-18 Image pickup element and image pickup device Pending JPS5952973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57162661A JPS5952973A (en) 1982-09-18 1982-09-18 Image pickup element and image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57162661A JPS5952973A (en) 1982-09-18 1982-09-18 Image pickup element and image pickup device

Publications (1)

Publication Number Publication Date
JPS5952973A true JPS5952973A (en) 1984-03-27

Family

ID=15758869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57162661A Pending JPS5952973A (en) 1982-09-18 1982-09-18 Image pickup element and image pickup device

Country Status (1)

Country Link
JP (1) JPS5952973A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55162839U (en) * 1979-05-11 1980-11-22
JPS6146396U (en) * 1984-08-30 1986-03-27 石川島播磨重工業株式会社 arc furnace enclosure
WO2004084305A1 (en) * 2003-03-19 2004-09-30 Fujitsu Limited Semiconductor device, process for producing the same and imaging device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55162839U (en) * 1979-05-11 1980-11-22
JPS6146396U (en) * 1984-08-30 1986-03-27 石川島播磨重工業株式会社 arc furnace enclosure
JPS637837Y2 (en) * 1984-08-30 1988-03-07
WO2004084305A1 (en) * 2003-03-19 2004-09-30 Fujitsu Limited Semiconductor device, process for producing the same and imaging device
EP1605509A1 (en) * 2003-03-19 2005-12-14 Fujitsu Limited Semiconductor device, process for producing the same and imaging device
JPWO2004084305A1 (en) * 2003-03-19 2006-06-29 富士通株式会社 Semiconductor device and manufacturing method thereof
EP1605509A4 (en) * 2003-03-19 2008-01-02 Fujitsu Ltd Semiconductor device, process for producing the same and imaging device
CN100446255C (en) * 2003-03-19 2008-12-24 富士通微电子株式会社 Semiconductor device, process for producing the same and imaging device
US7619269B2 (en) 2003-03-19 2009-11-17 Fujitsu Microelectronics Limited Semiconductor device, manufacturing process thereof and imaging device
JP5140235B2 (en) * 2003-03-19 2013-02-06 富士通セミコンダクター株式会社 Semiconductor device

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