JPS5952451B2 - optical scanning device - Google Patents

optical scanning device

Info

Publication number
JPS5952451B2
JPS5952451B2 JP52078705A JP7870577A JPS5952451B2 JP S5952451 B2 JPS5952451 B2 JP S5952451B2 JP 52078705 A JP52078705 A JP 52078705A JP 7870577 A JP7870577 A JP 7870577A JP S5952451 B2 JPS5952451 B2 JP S5952451B2
Authority
JP
Japan
Prior art keywords
signal
vibration
vibrator
circuit
scanning mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52078705A
Other languages
Japanese (ja)
Other versions
JPS5413354A (en
Inventor
吉一 今津
勤 花房
俊一 中辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP52078705A priority Critical patent/JPS5952451B2/en
Publication of JPS5413354A publication Critical patent/JPS5413354A/en
Publication of JPS5952451B2 publication Critical patent/JPS5952451B2/en
Expired legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)

Description

【発明の詳細な説明】 本発明は光学走査装置、とくに光学系をねじり振動をな
す振動子により駆動して走査を行う光学走査装置に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical scanning device, and particularly to an optical scanning device that performs scanning by driving an optical system with a vibrator that generates torsional vibration.

赤外線映像装置は狭い瞬時視野で対象物を光学的に走査
し、走査系通過後の赤外線を赤外線検知器に入射させて
光電変換することにより映像信号を得ている。
An infrared imaging device optically scans an object with a narrow instantaneous field of view, and obtains a video signal by inputting the infrared rays that have passed through the scanning system into an infrared detector and photoelectrically converting them.

この光学的走査は、通常平面型の走査鏡の回転運動によ
つて行われる。従来、赤外線映像装置の光学的走査線に
おいては、平面鏡の駆動はねじり振動子の固有振動周期
と整数比をなす周期に近い周期で泪励発振する発振回路
を有する駆動源から、電気−機械エネルギー変換、例え
ば前記振動子をソレノイドにより駆動する方法で固有振
動を与え、この振動周期で対象物を走査していた。
This optical scanning is performed by the rotational movement of a scanning mirror, which is usually of the flat type. Conventionally, in the optical scanning line of an infrared imaging device, a plane mirror is driven using electric-mechanical energy from a drive source having an oscillation circuit that oscillates at a period close to an integer ratio with the natural vibration period of a torsional oscillator. For example, by driving the vibrator with a solenoid, a natural vibration is applied, and the object is scanned with this vibration period.

この方式では、周囲温度、外部雑音および気圧変動に伴
う空気抵抗の変化等の要因で上記振動子の機械的共振周
波数が変化し、これに伴つて走査鏡の振動周期や振動振
幅(捩角)の変化が生じて表示面上での赤外線画像に乱
れを生じる問題があつた。
In this method, the mechanical resonance frequency of the vibrator changes due to factors such as changes in air resistance due to ambient temperature, external noise, and atmospheric pressure fluctuations, and the vibration period and vibration amplitude (torsion angle) of the scanning mirror change accordingly. There was a problem in that the infrared image on the display screen was disturbed due to changes in the amount of light.

また上記のような環境変化に伴う振動子の機械的共振周
波数の変動に対処する一つの方策として、例えば特開昭
47−28937号公報に見られるように走査鏡の振動
位相を検出して駆動回路にフィードバックするループを
設け、駆動信号の位相を共振周波数の変化に追従させる
制御を行つて走査鏡の振動振幅を一定に維持するやり方
も提案されているが、走査鏡の振動周波数の変動を防ぐ
配慮が欠けていたので画像表示を目的とした赤外線映像
装置の撮像系としては、やはり表示画像にみだれを生じ
るという欠点があつた。本発明は、前述の点に鑑みなさ
れたもので、ねじり振動を行う振動系によつて光学系を
駆動し、前記振動エネルギーを自己の発振周期に強制的
に周期せしめる信号発生回路から供給し、かつ自動位相
制御により、電気回路および機械系の位相ずれの補正を
行い、また振動子の振幅を検知して駆動源へ帰還し、走
査角の変動の少ない光学的走査装置を提供するものであ
る。
In addition, as a measure to deal with the fluctuation of the mechanical resonance frequency of the vibrator due to the environmental change as described above, for example, as shown in Japanese Patent Laid-Open No. 47-28937, the scanning mirror is driven by detecting its vibration phase. It has also been proposed to maintain the vibration amplitude of the scanning mirror constant by providing a feedback loop in the circuit and controlling the phase of the drive signal to follow changes in the resonance frequency. Because there was a lack of consideration to prevent this, the imaging system of an infrared imaging device for the purpose of displaying images still had the drawback of causing blurring in the displayed image. The present invention has been made in view of the above points, and includes driving an optical system by a vibration system that performs torsional vibration, and supplying the vibration energy from a signal generation circuit that forcibly cycles the vibration energy to its own oscillation period. Furthermore, the present invention provides an optical scanning device that uses automatic phase control to correct phase shifts in electrical circuits and mechanical systems, detects the amplitude of the vibrator, and returns it to the drive source, and has little variation in scanning angle. .

以下、図面を用いて本発明の実施例を詳細に説明する。Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は、本発明に係る光学的走査装置の一実施例を系
統図として示したもので、1は一端を固定されてねじり
振動を行う金属棒で、振動子と称する。
FIG. 1 shows a system diagram of an embodiment of an optical scanning device according to the present invention. Reference numeral 1 denotes a metal rod having one end fixed to perform torsional vibration, and is referred to as a vibrator.

該振動子1はソレノイドコイル2と振動子1に付設され
た鉄片3からなる電磁系で駆動される。すなわちソレノ
イドコイル2に印加される電流により鉄片3を通じてね
じり応力を受け、電流が断たれると弾性により復元する
。従つて、ソレノイドコイル2に供給する電圧周期で振
動子は駆動されてねじり振動を行い、該振動子に取付け
られている走査鏡4は光学的走査を行う。ソレノイドコ
イル2に供給される電圧の周期は基準同期信号源9によ
り決定される。本実施例では、該基準同期信号源9はデ
ユーテイ比一定の矩型波信号発生器で、このようなもの
は周知である。前記振動子1の振動を検知したゲート信
号発生回路5よりゲート信号が発生し、このゲート信号
により後述するように前記振動子1の振角および位相を
制御する。電源投入後、振動子1が所望の振動を行なつ
ていない時、ゲート信号発生回路5にはゲート信号が発
生しないので、位相比較回路11からは基準同期信号に
よつて定まる一定の直流電圧が出力される。
The vibrator 1 is driven by an electromagnetic system consisting of a solenoid coil 2 and an iron piece 3 attached to the vibrator 1. That is, the iron piece 3 receives torsional stress due to the current applied to the solenoid coil 2, and when the current is cut off, it returns to its original state due to its elasticity. Therefore, the vibrator is driven by the voltage cycle supplied to the solenoid coil 2 to perform torsional vibration, and the scanning mirror 4 attached to the vibrator performs optical scanning. The period of the voltage supplied to the solenoid coil 2 is determined by a reference synchronization signal source 9. In this embodiment, the reference synchronization signal source 9 is a rectangular wave signal generator with a constant duty ratio, which is well known. A gate signal is generated by the gate signal generating circuit 5 which detects the vibration of the vibrator 1, and the swing angle and phase of the vibrator 1 are controlled by this gate signal as described later. After the power is turned on, when the vibrator 1 is not performing the desired vibration, the gate signal generation circuit 5 does not generate a gate signal, so the phase comparator circuit 11 outputs a constant DC voltage determined by the reference synchronization signal. Output.

低域フイルタ12を通過した前記直流電圧が電圧制御発
振器13へ入力すると、基準同期信号に同期した矩型波
電圧が発生する。なお、前記の位相比較回路11.低域
フイルタ12、電圧制御発振器]3はPLLに通常用い
られているものであり周知のものである。前記の電圧制
御発振器13で発生した矩型波電圧は波形変換回路14
で正弦波電圧に変換されたのち、乗算器15に加わる。
該乗算器15の他入力である振幅制御信号は、基準同期
信号とクロツク信号源8からのクカツク信号によりゲー
ト回路10、カウンタ回路17およびD/A変換器18
でつくられ、乗算器出力信号を最大ならしめる。この結
果振動子は静止状態から速やかに定常的な振動状態へ移
る。乗算器出力信号は増幅回路16で所要の振幅に増幅
され、駆動用ソレノイド2に加えられると振動子1およ
び走査鏡4は振動をはじめる。振動子の振動に伴う走査
鏡の運動を検出したゲート信号発生回路5は、走査鏡4
の運動と等しい繰返し周期を有するゲート信号を発生す
る。このようにゲート信号発生回路5は振動系の振動を
検知し、電気信号に変換する振動検出系を構成する。運
動の検出には、運動体の変位にほぼ比例する電圧または
電流を発生する変換器を用いればよく、このような変換
器としては電磁方式、圧電方式、光電変換方式等多種の
ものがすでに周知であつて、これらのうち適当なものを
選んで用いればよい。ゲート信号発生回路5で発生した
ゲート信号は、ゲート回路7およびゲート回路10へ送
られ、振動子1の振動の位相および振角を制御する。す
なわぢ、振動子1が振動をはじめてゲート信号発生回路
5で発生したゲート信号はゲート回路7、ゲート回路1
0へ送られ、今まで基準同期信号のみによつて制御され
ていた振動子の運動は、位相制御および振角制御をうけ
る。
When the DC voltage that has passed through the low-pass filter 12 is input to the voltage controlled oscillator 13, a rectangular wave voltage synchronized with the reference synchronization signal is generated. Note that the phase comparator circuit 11. The low-pass filter 12 and the voltage controlled oscillator] 3 are commonly used in PLLs and are well known. The rectangular wave voltage generated by the voltage controlled oscillator 13 is transferred to the waveform conversion circuit 14.
After being converted into a sine wave voltage, the voltage is applied to the multiplier 15.
The amplitude control signal, which is another input to the multiplier 15, is applied to the gate circuit 10, the counter circuit 17, and the D/A converter 18 by the reference synchronization signal and the clock signal from the clock signal source 8.
is created and maximizes the multiplier output signal. As a result, the vibrator quickly shifts from a stationary state to a steady vibration state. The multiplier output signal is amplified to a required amplitude by the amplifier circuit 16, and when applied to the drive solenoid 2, the vibrator 1 and the scanning mirror 4 begin to vibrate. The gate signal generation circuit 5 detects the movement of the scanning mirror due to the vibration of the vibrator.
generate a gate signal with a repetition period equal to the motion of . In this way, the gate signal generation circuit 5 constitutes a vibration detection system that detects vibrations in the vibration system and converts them into electrical signals. To detect motion, it is sufficient to use a transducer that generates a voltage or current that is approximately proportional to the displacement of the moving body, and many types of such transducers are already well known, such as electromagnetic, piezoelectric, and photoelectric conversion methods. Any suitable one may be selected and used among these. The gate signal generated by the gate signal generation circuit 5 is sent to the gate circuit 7 and the gate circuit 10 to control the phase and vibration angle of the vibration of the vibrator 1. In other words, when the vibrator 1 begins to vibrate, the gate signal generated by the gate signal generation circuit 5 is transmitted to the gate circuit 7 and the gate circuit 1.
0, and the motion of the vibrator, hitherto controlled only by the reference synchronization signal, is now subject to phase control and swing angle control.

すなわち、ゲート回路7へ送られるゲート信号により振
動子の位相制御を行い、ゲート回路10へ送られるゲー
ト信号により振動子の振角制御を行う。ゲート回路7は
、ゲート信号が発生していない期間はパルス消滅検出回
路6の制御により電圧制御発振器13の出力信号の一部
を位相比較回路11へ帰還し、振動子駆動用ソレノイド
2へ送られる駆動信号の位相を基準同期信号の位相と一
致せしめる。
That is, the phase of the vibrator is controlled by the gate signal sent to the gate circuit 7, and the swing angle of the vibrator is controlled by the gate signal sent to the gate circuit 10. The gate circuit 7 feeds back a part of the output signal of the voltage controlled oscillator 13 to the phase comparator circuit 11 under the control of the pulse extinction detection circuit 6 during a period when no gate signal is generated, and sends it to the vibrator driving solenoid 2. The phase of the drive signal is made to match the phase of the reference synchronization signal.

次に振動子1の振動に伴つてゲート信号発生回路5から
ゲート信号が出力されると、パルス消滅検出回路6の働
きにより、ゲート回路7は前記ゲート信号のみを位相比
較回路11へ送る。位相比較回路11では、基準同期信
号とゲート信号の位相差に応じた差信号電圧が発生する
。低域フイルタ12は、前記差信号電圧に含まれる高周
波成分を減衰させ、妨害信号除去特性を良くする機能を
有する。低域通過フイルタ12を通過した差信号電圧は
電圧制御発振器13の発振周波数を基準同期信号の周波
数に一致させるような制御機能を有するので、ゲート信
号と基準同期信号に位相差が生じてもこれを解消せしめ
るPLLが構成されることになる。電圧制御発振器13
の矩型波出力信号は、波形整形回路14で正弦波に変換
される。
Next, when a gate signal is output from the gate signal generation circuit 5 as the vibrator 1 vibrates, the gate circuit 7 sends only the gate signal to the phase comparator circuit 11 by the action of the pulse extinction detection circuit 6. The phase comparison circuit 11 generates a difference signal voltage according to the phase difference between the reference synchronization signal and the gate signal. The low-pass filter 12 has a function of attenuating high frequency components included in the difference signal voltage and improving interference signal removal characteristics. The difference signal voltage that has passed through the low-pass filter 12 has a control function that matches the oscillation frequency of the voltage controlled oscillator 13 with the frequency of the reference synchronization signal, so even if there is a phase difference between the gate signal and the reference synchronization signal, this A PLL that eliminates this will be constructed. Voltage controlled oscillator 13
The rectangular wave output signal is converted into a sine wave by the waveform shaping circuit 14.

このような波形整形回路14は、低域淵波器とノツチフ
イルタから成るアクティブフィダーで構成することがで
きる。乗算器15では、前記正弦彼信号の振幅は、D/
A変換器18から送られる振角制御信号によ.り、振動
子の振角に対応して変調され、振動子の振角が大きくな
ると乗算器15の出力信号の振幅は小さくなり、振角が
小さくなると前記乗算器15の出力信号の振幅は大きく
なる。
Such a waveform shaping circuit 14 can be constituted by an active feeder consisting of a low frequency filter and a notch filter. In the multiplier 15, the amplitude of the sinusoidal signal is D/
Based on the swing angle control signal sent from the A converter 18. The amplitude of the output signal from the multiplier 15 decreases as the vibration angle of the vibrator increases, and the amplitude of the output signal from the multiplier 15 increases as the vibration angle decreases. Become.

この点については後に詳しく述べる。従つて増幅回路1
6で増ノ幅されたソレノイド駆動信号は常に基準同期信
号と位相が一致しており、また振動子の振角が一定とな
るように制御されている。ここで、前述の振角制御信号
について述べる。
This point will be discussed in detail later. Therefore, amplifier circuit 1
The solenoid drive signal amplified in step 6 is always in phase with the reference synchronization signal, and is controlled so that the vibration angle of the vibrator is constant. Here, the above-mentioned swing angle control signal will be described.

振動子1が振動をはじめていない時すなわちゲ5一ト信
号発生回路5でゲート信号が発生していない期間中は、
パルス消滅検出回路6の制御によりゲート回路10は、
基準同期信号の一周期中のクロツク信号のパルス数をカ
ウンタ回路17へ送る。この場合、基準同期信号および
クロツク信号の周期は常に一定に保持されているので、
カウンタ回路での計数は常に一定であるため、D/A変
換器18の出力信号である振角制御信号の大きさも一定
である。
When the vibrator 1 has not started to vibrate, that is, during the period when the gate signal generation circuit 5 is not generating the gate signal,
Under the control of the pulse extinction detection circuit 6, the gate circuit 10
The number of pulses of the clock signal during one period of the reference synchronization signal is sent to the counter circuit 17. In this case, the periods of the reference synchronization signal and clock signal are always held constant, so
Since the count in the counter circuit is always constant, the magnitude of the swing angle control signal, which is the output signal of the D/A converter 18, is also constant.

この時の乗算器15の出力信号の振幅は最大となるよう
に設定されているので、振動子1は大きなエネルギーを
得て速やかに所定の振動をはじめる。この結果、振動子
1の振動に伴いゲート信号発生回路5でゲート信号が発
生すると、パルス消滅検出回路6の制御により、ゲート
回路10は振動子1の振角に対応した期間中のクロツク
信号のパルス数をカウンタ回路17へ送りこれを計数す
る。もし、何らかの要因で振動子の振角が大きくなると
、カウンタ回路17で計数されるクロツク信号のパルス
数は増加し、これに応じてD/A変換器18の出力であ
る振角制御信号は小さくなり、乗算器15の出力信号、
すなわちソレノイド駆動信号の振幅は小さくなつて、ソ
レノイド駆動信号は小さくなるため、振動子1の振角が
小さくなるように制御される。逆に振動子1の振角が小
さくなると上記の場合とは反対に、乗算器15の出力信
号の振幅は大きくなるため、振動子1は大きなエネルギ
ーで付勢され大きな振角の振動をするような制御を受け
る。さて以上の説明から明らかなように、要するに本発
明は走査鏡の振動を検出して電気信号を得、これと基準
同期信号の位相を比較して走査鏡の振動周波数を絶えず
一定に維持するような位相制御ループを設けた点と、更
にこの位相制御の結果走査鏡の実際の振動周波数が環境
変化に伴つて変化したねじり振動子の機械的共振周波数
から離調することによつて生じる走査鏡の振動振幅の変
化を補正する振角制御ループを設けた点とを特徴とする
ものであり、これら制御ループによつて走査鏡の振動周
波数と振動振幅を周囲の環境条件の変化に無関係に一定
にすることができるので、品質の良い表示画像を得るこ
とができる。
Since the amplitude of the output signal of the multiplier 15 at this time is set to be maximum, the vibrator 1 obtains a large amount of energy and promptly starts a predetermined vibration. As a result, when a gate signal is generated in the gate signal generation circuit 5 due to the vibration of the vibrator 1, the gate circuit 10 generates a clock signal during a period corresponding to the vibration angle of the vibrator 1 under the control of the pulse extinction detection circuit 6. The number of pulses is sent to a counter circuit 17 and counted. If the vibration angle of the vibrator increases for some reason, the number of pulses of the clock signal counted by the counter circuit 17 will increase, and the vibration angle control signal output from the D/A converter 18 will decrease accordingly. and the output signal of the multiplier 15,
That is, the amplitude of the solenoid drive signal becomes smaller, and the solenoid drive signal becomes smaller, so that the vibration angle of the vibrator 1 is controlled to become smaller. Conversely, when the vibration angle of the vibrator 1 becomes smaller, contrary to the above case, the amplitude of the output signal of the multiplier 15 increases, so the vibrator 1 is energized with large energy and vibrates with a large vibration angle. be controlled. As is clear from the above description, the present invention detects the vibration of the scanning mirror to obtain an electrical signal, and compares this with the phase of the reference synchronization signal to constantly maintain the vibration frequency of the scanning mirror constant. This phase control results in the scanning mirror's actual vibration frequency being detuned from the mechanical resonance frequency of the torsional oscillator, which changes with environmental changes. It is characterized by the provision of an oscillation angle control loop that compensates for changes in the vibration amplitude of the scanning mirror, and these control loops keep the vibration frequency and vibration amplitude of the scanning mirror constant regardless of changes in the surrounding environmental conditions. Therefore, a high quality display image can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係るねじり振動子を利用した光学走査
装置の一実施例を示す構成系統図である。 1:ねじり振動子、2:ソレノイドコイル、3:鉄片、
4:走査鏡、5:ゲートパルス発生回路、6:パルス消
滅検出回路、7リゲート回路(1)、8:タロツク信号
源、9:基準同期信号源、10:ゲート回路(2)、1
1:位相比較回路、12゜低域フイルタ、13電圧制御
発振器、14:波形整形回路、15:乗算器、16:増
幅器、17:カウンタ回路、18:D/A変換器。
FIG. 1 is a structural diagram showing an embodiment of an optical scanning device using a torsional oscillator according to the present invention. 1: Torsional vibrator, 2: Solenoid coil, 3: Iron piece,
4: Scanning mirror, 5: Gate pulse generation circuit, 6: Pulse extinction detection circuit, 7 Regate circuit (1), 8: Tarock signal source, 9: Reference synchronization signal source, 10: Gate circuit (2), 1
1: Phase comparison circuit, 12° low-pass filter, 13 Voltage controlled oscillator, 14: Waveform shaping circuit, 15: Multiplier, 16: Amplifier, 17: Counter circuit, 18: D/A converter.

Claims (1)

【特許請求の範囲】[Claims] 1 ねじり振動子と、前記ねじり振動子に固定された走
査鏡と、前記ねじり振動子の固有振動数とほぼ整数比を
なす振動数で発振する基準同期信号源を有する駆動回路
と、該駆動回路からの駆動信号で上記ねじり振動子を付
勢するための電磁系と、上記走査鏡の振動を検出して電
気信号に変換する振動検出系と、該検出系の出力信号と
前記基準同期信号源からの同期信号との位相を比較して
上記電磁系に印加される駆動信号の位相を制御する位相
制御系と、前記検出系からの出力信号に応じて走査鏡の
振動振幅が一定になるよう前記電磁系に印加される駆動
信号を制御する振角制御系とを具えて成り、上記位相制
御系により基準同期信号に対する走査鏡の振動の位相同
期をなすとともに、上記振角制御系により走査鏡の振角
制御をなすようにしたことを特徴とする光学走査装置。
1. A drive circuit having a torsional oscillator, a scanning mirror fixed to the torsional oscillator, a reference synchronous signal source that oscillates at a frequency that is approximately an integer ratio to the natural frequency of the torsional oscillator, and the drive circuit. an electromagnetic system for energizing the torsional vibrator with a drive signal from the scanning mirror; a vibration detection system for detecting vibration of the scanning mirror and converting it into an electric signal; and an output signal of the detection system and the reference synchronization signal source. a phase control system that controls the phase of the drive signal applied to the electromagnetic system by comparing the phase with a synchronization signal from the detection system; and an oscillation angle control system that controls a drive signal applied to the electromagnetic system, and the phase control system synchronizes the vibration of the scanning mirror with respect to the reference synchronization signal, and the oscillation angle control system synchronizes the vibration of the scanning mirror with the reference synchronization signal. An optical scanning device characterized in that the swing angle is controlled.
JP52078705A 1977-06-30 1977-06-30 optical scanning device Expired JPS5952451B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52078705A JPS5952451B2 (en) 1977-06-30 1977-06-30 optical scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52078705A JPS5952451B2 (en) 1977-06-30 1977-06-30 optical scanning device

Publications (2)

Publication Number Publication Date
JPS5413354A JPS5413354A (en) 1979-01-31
JPS5952451B2 true JPS5952451B2 (en) 1984-12-19

Family

ID=13669269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52078705A Expired JPS5952451B2 (en) 1977-06-30 1977-06-30 optical scanning device

Country Status (1)

Country Link
JP (1) JPS5952451B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195218A (en) * 1983-04-20 1984-11-06 Nippon Teresukomu Kk Resonance type scanner with phase controller
JP2660015B2 (en) * 1988-09-28 1997-10-08 株式会社東芝 VOR device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3642344A (en) * 1970-11-27 1972-02-15 Honeywell Inc Optical scanner having high-frequency torsional oscillator

Also Published As

Publication number Publication date
JPS5413354A (en) 1979-01-31

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