JPS5952275U - タ−ボ形ポンプ - Google Patents

タ−ボ形ポンプ

Info

Publication number
JPS5952275U
JPS5952275U JP1982148389U JP14838982U JPS5952275U JP S5952275 U JPS5952275 U JP S5952275U JP 1982148389 U JP1982148389 U JP 1982148389U JP 14838982 U JP14838982 U JP 14838982U JP S5952275 U JPS5952275 U JP S5952275U
Authority
JP
Japan
Prior art keywords
partition wall
casing
seal member
sealing
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982148389U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243179Y2 (enrdf_load_stackoverflow
Inventor
薫 西村
渉 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1982148389U priority Critical patent/JPS5952275U/ja
Publication of JPS5952275U publication Critical patent/JPS5952275U/ja
Application granted granted Critical
Publication of JPS6243179Y2 publication Critical patent/JPS6243179Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sealing With Elastic Sealing Lips (AREA)
JP1982148389U 1982-09-29 1982-09-29 タ−ボ形ポンプ Granted JPS5952275U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982148389U JPS5952275U (ja) 1982-09-29 1982-09-29 タ−ボ形ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982148389U JPS5952275U (ja) 1982-09-29 1982-09-29 タ−ボ形ポンプ

Publications (2)

Publication Number Publication Date
JPS5952275U true JPS5952275U (ja) 1984-04-06
JPS6243179Y2 JPS6243179Y2 (enrdf_load_stackoverflow) 1987-11-09

Family

ID=30329702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982148389U Granted JPS5952275U (ja) 1982-09-29 1982-09-29 タ−ボ形ポンプ

Country Status (1)

Country Link
JP (1) JPS5952275U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010067540A1 (ja) * 2008-12-10 2010-06-17 株式会社アルバック シール機構及び処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417924U (enrdf_load_stackoverflow) * 1977-07-08 1979-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417924U (enrdf_load_stackoverflow) * 1977-07-08 1979-02-05

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010067540A1 (ja) * 2008-12-10 2010-06-17 株式会社アルバック シール機構及び処理装置
CN102245944A (zh) * 2008-12-10 2011-11-16 株式会社爱发科 密封机构及处理装置
JP5295265B2 (ja) * 2008-12-10 2013-09-18 株式会社アルバック 処理装置
TWI485339B (zh) * 2008-12-10 2015-05-21 Ulvac Inc Sealing mechanism and processing device

Also Published As

Publication number Publication date
JPS6243179Y2 (enrdf_load_stackoverflow) 1987-11-09

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