JPS59500887A - heat sensitive film shutter - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Heat sensitive film shutter The present invention relates to a novel material for detecting applied thermal energy, and in particular to a novel material for detecting applied thermal energy. The present invention relates to other media used as films for the detection of

backstory of invention This disclosure relates to optical media and includes a prescribed level of heat or a prescribed irradiation energy. J: Techniques and equipment used to detect objects, especially low-power laser devices. It is related to the location.

As the technology progresses, the stage H1 and operation of such a system will be affected. Gong largely depends on its sensing medium.

The technological progress in this field is such that film shutters are at a patent level. Optical system that passes or blocks the monitor beam, depending on whether the lid is on or off. If you are looking to discover a simple and inexpensive film medium that can cover the shutter and other functions, Dew. This invention is an actual film shutter for this purpose, with long-term use. Indicates a device that can be used in conjunction with an ordinary, simple, and inexpensive low-power laser monitor device. vinegar.

This shutter and its various applications are detailed below, for example in FIG. (See accompanying explanation). But first, let's take a look at the relevant optical recording media and Explain related applications.

Recording medium suitable for the irradiation beam; General theory: The conditions for such an ODD medium are strict. For example, high bit densities, cost-effective information storage, sufficient Write/read speeds, and preferably the use of low power lasers, etc. are relevant. (Technology The person) is aware of the simplicity, speed and power of performing such laser processing and is For read/write operations, the laser beam need only be modulated or refracted. ) In related applications (e.g., video disc recording), those skilled in the art was used. And in their configuration, a metal film is used as the "information layer". The medium used was presented. This layer has ``voids'' as ``bits'' within the layer. writing rail to form (pitch I~, ball, bubble, etc., or other processing) Softened and melted by The Beam.

or evaporated (thermally processed). Such films are It is possible to coat the surface of the screen.

At some technological advances, such laser records can be compared to second-by-second computer records (e.g. I felt that it would be promising as an ODD medium (as mentioned above). They are the actual system awaits a recording medium that responds to low-power laser writing, and thus this Discover information layers (materials) that can be melted (or evaporated, etc.) at extremely low power levels. I expected that it would be a matter of whether or not. This also means that its associated system It will also depend on the irradiation efficiency.

Therefore, the technical running speed is high thermal efficiency'' (λ set at the recording position) Which of these is effectively stored locally for the formation of ``Pi1~''? I continued to search for recording materials that showed the ``scale speed''. For this reason, they used recording materials with low melting temperature and small heat dissipation properties (for example, -full heat dissipation). We have considered indium, lead, bismuth, and indium. Probably low melting point This allows for minimum energy internal pulses, thus minimizing system cost. It is possible to increase the bandwidth or increase the bandwidth.

J. Technological speeds must use low-power lasers for such recording. I felt that (even if it were just a case of increasing the operating life of the Re+J'' device and its cost) and to cover the q-law small〉, so it is chosen for such information (absorber) films. Metals generally have extremely low melting points (appropriately high sensitivity). and the resulting "'pip 1~ void" claimed is the minimum laser power. It is hoped that 1q will be formed.

1C absorber film: Currently, many technical speeds are based on this L/-IJ' record or a related one. For this purpose, tellurium (:re) absorber film is used. in addition (There are several reasons for 11P. Tellurium has an attractive low (bulk) melting point (ca. /I50°C), has poor thermal conductivity, and cannot provide good 4C sensitivity and S/N ratio. Moreover, it is relatively convenient to deposit as a thin film. It is. Bismuth is also commonly proposed for similar reasons. Also related alloys (For example, -['e-Qc.

Te~△5-8e and l-';-3c) have been suggested as interesting. Ta.

Tellurium has a relatively low heat dissipation property and is useful for materials such as aluminum. Compared to the lower write threshold, I' (1) and energy are considered to be J. I've been exposed to it. Even if it is 4.1” B (! 11th grade American special cypress No. 1, 222,0 Please refer to issue 71: Mako SP IE, Vol, 177.0ptic al　■nformation　3t.

rage, 1979. By ZeCll after 156g °’[’uviewof See also “Optical S storage M edia” t4J::More SP I [, Vol, 123.0ptical Storage fvja teriaIs and Methods, 1977, fft p. 2 [ 3artol ini “Optical Recording M e See also “dia l(view)”.

For example, this Bartoli+ii editorial tJ: 10 <”!Other optics of the class Such an absorbent film ('additional thin film') together with the recording means are discussed, including those that undergo photochemical changes accompanied by changes in fil3)1 rate. Contains "optical polymers," which are organic compounds known to be Ru. Z ech's editorial is written in 1 Noza J: 7. ``To Pi 1'' is the absorbent layer. (We are discussing an absorbent film that is used when arranged to form a bit information is sensed by changes in reflectivity (similar to the BCll patent).

(like) the well-known "processing record" smell ((like) high intensity black beam (laser). The thermal energy given by the writing beam beam at the ``writing position'' at the At least 1811 minutes of the beam lvi surface is d5 and melted lζ(j processed It would be something like that. In many cases, surface tension causes the formation of planar pores. If a person has 1 irises and a3 (see the editorial by Zech cited above), that This usually means the formation of slightly oval pits or holes. (Cocllra nd Ferrier JS ru”　M e口1n al l'l: 11m5 for Real-Time, 1''igh [)c nsily Data 3Lorage”, SP■E l-)roceed inOs, August 1977, see PI3-1) 31) Absorber film: One feature of them is that the associated type of ``record'' is at a humidity well below its melting point (i.e., up to its bulk melting point). I have found that you can do this without heating the bit position. and the result , a relatively high melting point and a rather high thermal conductivity.These characteristics make the technology suitable for this purpose. Materials like gold, which have an M value depending on the running speed, are surprisingly good. It forms an absorbent film, and it I also found that the sensitivity was comparable. i: I discovered it.

Of course, those made of titanium, gold (also platinum, [1dium, nickel, chromium]) , manganese, and babdium; e.g., 13all U.S. Pat. No. 4.285 ．． 056 kokumata (Ma TI'3 M's TD 13ulletin, 1971 ``High melting point'' materials such as March issue, page 301) are also J, Una'', 1T ``Jlf vaguely suspected that it might be suitable as an absorbent layer.

However, such a measurement does not address the actual problem of "feeling tcz" or the J to those materials, such that a low power laser can record the No attention was paid to such matters. Or, in those JIClit, The associated problem of high thermal conductivity (heat is conducted radially away from the recording device) has been ignored. As a result, Yoshikomi energy is consumed and sensitivity deteriorates. metal like gold) Note that although it has high thermal conductivity, it is not as good as Ti or -ret).

Until now, observations have generally been made that "high melting point" metals are completely unlikely candidates for absorbers. For example, as stated in the cited U.S. Pat. No. 4,222,071, The “low melting point” and low conductivity T-e gives excellent sensitivity and It was recognized that it could be recorded by a low-power laser. The exact opposite is true of gold, which has a high melting point and is a good heat conductor. Such a metal should theoretically be the worst ``absorber''.)

Nevertheless, the present invention provides that just such metals, such as gold, can be used. Possible and at least known absorbers (e.g. excellent record keeping) We believe that over the lifespan, it can function as well as an absorber with sensitivity equivalent to show.

Furthermore, the present invention provides that such an absorbent film (contrary to what the prior art teaches) ) The bit position is heated to the conventional bulk metal melting point for recording. Clearly indicate that it is not necessary.

Extended record retention life: A major attraction of optical data storage technology is the ability to increase storage capacity (e.g. 100 times that of magnetic tape). is intended here optical data discs that last for an extended recording life on the order of 10 years or more. It would be envisaged to store upward (“non-erasable”) information. That's it Extended lifespan is a goal that has not yet been achieved in the prior art; I wish to increase my mental strength.The present invention is the a medium that specifically promises to be used in optical large-scale memory and such applications. .

In contrast, commonly proposed absorber metals such as bismuth and tellurium are less It is known to oxidize quickly and otherwise It is known that performance degrades easily in unsuitable for record keeping (e.g., ASh et al., cited later, 19 paper in 1981; and editorial in 7ec11; further illustrated by Example I described later. ). The technology progresses because tellurium has particularly poor storage stability. It is recognized that the successive signals deteriorate in a short period of time. This deterioration Encouraged by high humidity environments, typically resulting in faster overall light transmission. characterized by an increase in gold (probably due to general oxidation of the metal) and that gold Severe corrosion starting at selected pit (- position) It is characterized by (=t　4J. And the same is true for bismuth.

Extended archival stability is evidenced by this development indicating similar utilization of absorbent films such as gold. As described by Akira, these materials are suitable for combicoaters as information storage media. The use of such optical data for computers, especially (as in Table 1) It has excellent storage stability and stability when used as a disc recording.

Therefore, as a feature of novelty, I The intention is to use materials that are suitable for use. That is, such a monthly interest rate is Excellent resistance to deterioration due to oxidation or such atmospheres during storage and use. It is something that exists. Therefore, over extended storage technologies, ``Disappearance'' of recorded information by maintaining sufficient reflex stability against does not occur. However, this alone is not sufficient to ensure that the actual storage medium or associated system This is a problem especially if ``good'' sensitivity is also required. Ru. The invention will not be described hereinafter.

The novel recording media and associated deposition techniques presented here generally meet the aforementioned criteria. If possible, meet one of the "Pamegura Performance Standards" shown in the table below. or more would be intended to fit. (by △sb and A11en °′○ptical properties of Tellurium Fi lms) sed for [)ata Recording”, SP I　E　pr　.

c@edings, Vol, 222.1980:;A3 and Rancou "Design and") production of Tell by rt uriumQptical Data Qisks", 5PTE PI"oce cd　i　ng　s　.

Vol, 299, 1981. See J:. ) A person's body μ-pressure redoubt 1. “High” sensitivity: Allows recording by low power laser means. ``Sensitivity'' is the bit formation (sub 1- Changes in anti-sword performance, caused by balls or other voids in the medium or such (such as those that arise from the formation of changes, ensuring proper readout at the intended readout speed) This is understood as the minimum radar power required for According to the invention, typically is on the order of 5-151 nW for a time of approximately 40-60 nanoseconds (pulse period). It is possible to ``write'' on the output. is not degraded either.

1-A9 High S/N; (proper read): about 30-40d against RAM noise Min of B, for noise on the order of the peak signal (for proper readout). percentage of signals.

28゛Record storage stability”; (life span of 10 years or more): “Normal computer environment ”, without falling below the minimum readout for about 10 to 15 years (minimum S /N is 3, ``computer recording medium'': Intended for the ability to work with today's high speed digital computers. and For example, it would have at least the same capabilities as today's magnetic disk storage devices (for example, For example, a bit density of about 10 F' bits/crn' or higher, i.e. 10- Bit error rate of 6 or less”).

4. “Possible to precipitate”: Suitable films can be deposited on a “commercial scale” with reproducible and controlled properties shows.

5. ``Can be overcoated'': Absorber film can be overcoated For example, up to a few thousandths of an inch, the above features can be sacrificed. without, for example, still providing adequate readout and mechanically protecting the film. and protects against “surface contamination” (preferably the overcoat also protects against heat, contaminant gases, etc.) protect the absorber film).

Therefore, the objective here is to provide the aforementioned A3 and other related 1zI features and benefits. It is to be. A more specific purpose may be an ``island'' or The purpose of this study is to show the deposition of a discontinuous gold-like absorber (information) film. . Another objective is to not only extend archival storage life but also to serve low-power lakes. 1) To present a film that exhibits Y sensitivity. Yet another one One purpose is to demonstrate the preparation of a recording moon suitable for recording that does not require “dissolving” the information layer. This is true; however, the temperature of the archive was kept below the melting point of the bulk of the archive. Formation of bits (pips 1~) with reflectivity °'.

Drawing reminiscence 1 These and other advantages and features of the present invention, as set forth in conjunction with the accompanying drawings, include: See detailed description of the preferred embodiment below. It will be well recognized. The same reference numerals indicate the same elements in the accompanying drawings.

FIG. 1 is a partial cross-sectional view of a recording medium according to the above technology.

FIG. 2 shows an embodiment of a novel 41 preferred recording medium having a structure according to the principles of the present invention. FIG.

Figure 31. i9'f　*, A cross-sectional view of an embodiment of a new disc recording body (*).

FIG. 4 is an idealized plan view of the recording pill position.

FIG. 5 is a cross-sectional view of another preferred embodiment.

FIG. 6 is a large enlargement of the location of another pin 1 written according to the present invention. FIG.

FIG. 7 is a diagram showing the relationship between λ and reflectance for two embodiments.

FIG. 8 is a schematic enlarged partial plan view of another embodiment.

FIG. 9 is a mechanical schematic diagram of another application of the invention.

Fig. 10, Fig. 11, Fig. 12, OJ, Fig. This is a transmission electron micrograph of the film.

"Tomo" shiichi "su" "old Ru "Example 1-e"; Tellurium absorber; ('Control'): Figure 1 is an idealization of the optical recording medium 1. It is a schematic illustration of a cross-section made of tellurium, usually from the literature related to tellurium (for example, ASl C. manufactured and operated according to the method set forth in . It is equipped with a medium 1 (, 1 supporting material 2, which -1 has an ``anti-reflection'' base △R The AIR 10 is equipped with an information layer (<°<absorber>>) 5.

Preferably, the base △R is provided with a ``Torikawa'' layer 3, which has a 1J translucency. layer 4 of the path spacer. Layers 3 and 4 are used for the intended read/write It can be characterized as a first-order reaction and a first-order transmission that are equal to each wavelength. layer 3゜ 4.5, as is known in the prior art (ASll paper), It is understood that multiple layers of low reflection (approximate protection) are formed over the entire area. will be done.

R: A, T no Kake, fouling body 3 is aluminum or such opaque The spacer 4 is made of transparent Fused silica or such transparent dielectric material, approximately I8/4 wavelength thick. That is, N×λ/4. where N=1, 3.5, etc.].

A polished abrasive of the type currently used for digital magnetic recording. It consists of a aluminum disk, and the cracking becomes smooth within 1 minute due to the precipitation of the fouling layer 3. N) l, l: Organic smoothing layer used (base layer) 2-8 is covered.

This is a 14-inch disk that runs at about 1800 (min.) rpm, and has a good Good surface smoothness (e.g. less than 4 x 10-' inch peak-to-peak) This will be understood in the book "Shinotoji," which includes the following:

A radiation (laser) beam of controlled energy and wavelength is transmitted from a laser source 1- to a medium 1. irradiated to form a "bit" or such a powder on the layer 5 and impregnated it. '' (eg, at the position of V'' shown in phantom). Bodhisattva more specifically For example, direct t￥0, 8 μm (-6', that is, 8000A or 1/Σ) 1O Using nlW Gaussian beam, 45m, /sec, ("Sukiya with a minimum length of 0.8μ width (not necessarily circular or other It may be necessary to form a comb (not necessarily in a controlled form), but this The conditions are far too strict compared to conventional means.

The prior art recording body 1 in FIG. This is described in order to identify the means of identification. And here it is clear To the extent that all materials, methods, and equipment are currently well-practiced and generally known, It is intended that the

Here, the metal recording film 5 is deposited on a "transparent" dielectric space 94; The thicknesses of both are chosen to form a structure of known low fouling ability (even if Bartoli's old editorial, when recording at λ-488nm, reflectance of less than 3% is 8 On+n 5i02 spacer'' (obtained by two 5nm Ji) 31 Then, When each ゛bit'' (Hira l-) is recorded, this ゛°anti-reflective upper and lower ground is high] It is suitable for reading the laser beam 1~ and is processed to form a pin 1~''. If the wavelength to be recorded can be changed, the space should be The thickness can be easily changed. This is a three-layer "or" mirror. k　Mirror)'IM3ffffni Selected by adjusting the thickness It can be expressed as a value. Here "triple layer" fi, with an absorber on one side and the other It can be understood that there is a transparent spacer with a reflector on its surface.

Technical considerations suggest that in some cases the reflector film can be omitted, e.g. electrical mirrors”), and spacers 4 may be made of other materials or structures (e.g. It will be appreciated that it may be formed from several insulating layers of similar materials.

So here the coating parameters are such that the writing beam hits this absorber layer. When the light is focused, the so-called disk exhibits a polar response to the intended recording frequency. ] In that regard, 1, -Bel △nti-RerIectton 3 trUctU by l and 3 pong reSfOrOptical-upper "orssing", Journal of Quantum E 1 electronics, VOl, QE 1 A, No, 7. JulV, 1978. Dear child; regarding general prior art, please refer to the following: See typical literature: 3.’0ptical by artol ini et al. isk 3 systems E 1ller(le”, I E E E 3pectrum.

△1lQLlst 1978.1), 20:e and 3 artol i old "Qptical l)ecoding 1yjcdia Review" , 3p I Eproceedings, Vol, 123.1977 , p, 2; “0ptical 3 storage M material s and lyl methods”, SP) Eproceedings, V ol, 177, 0f)tical Information 3torage , 1979. l), 56o] Preferably, the deposition is carried out so that the reflectivity of layer 5 is predetermined. thermal evaporation until the desired reflectance level is reached.

As technology experts know, this can be done empirically, or by layering When 5 is precipitated, refer to the precipitation technique described in the frequently cited Zech literature. ) Continuously monitor the reflectance of the absorber film (e.g. on a specimen) or by similar suitable optical techniques for precipitation monitoring. It is also possible to perform other commonly known methods such as monitoring the deposited mass. This is also possible depending on the method and electrical characteristics.

Thus, applying an opaque layer of aluminum 3 onto the coated disk 2. All optical properties are within the range of 4000-900oA. output/write) laser spectrum). Next, SiO2 (molten silicon) A layer 4 of transparent dielectric or such a "transparent" dielectric is formed on layer 3 and has a controlled thickness of lζ. This thickness is related to the operating wavelength of 2° (here 1/4λ . or 3/4λ. ).

On layer 4 an absorber film 5 is deposited to a thickness that yields the intended reflectance ( (see below).

The fouling ability of the recording medium 1 is determined by the irradiation from the writing laser L at each bit position 11 V I+. If modified by the beam and detected by suitable means, the papoid region °′ (i.e. Pabit[~'') is relatively ``high'' as is known in the prior art. A ``non-void'' background of low reflectivity surrounding it as a ``spot'' of reflectance. It can be identified from the sound.

For example, 3ell U.S. Pat. No. 4,285,056 describes such a medium. Therefore, it is noted as a hole in both the absorber layer and the transparent spacer layer. recorded, and the length of the holes and the unexposed (illuminated) area between them is Frequency information is varied along specific information tracks that convey information. This wait V ( also includes species deposited using conventional evaporation techniques or electron beam evaporation techniques. various materials (e.g. titanium, rhodium, platinum, gold, nickel, chromium, manga) vanadine). In comparison, rice such as K. National patent No. 4. ．． No. 183.094 "dries" without forming such pits. This paper describes the rapping record on the Te-Ge-3e-8 material that causes a "crossover change." Ru.

However, for 3ell, its spacer layer is heated by the writing beam. 83, which is different from the intent of this case.

That is, his spacer layer has to be removed by itself (i.e., otherwise (to form voids in the The top layer (e.g. gold layer) must be removed to form a ``bubble''. It is necessary to generate enough gas to generate the gas. In this case, essentially the beam Energy does not need to be absorbed by a similar spacer layer.

Tellurium is the "low melting point/low conductivity" metal preferred by engineers because , it shows excellent sensitivity and therefore the required (threshold) laser writing output This is because it is thought that the force is small.

For example, this idea is based on 3ell and 3art01in+ U.S. Patent No. 4.222. , 671@, where a similar tellurium film was written on it. It is characterized as requiring a laser output of the order of 15 mW to (This assumes an optical efficiency of about 20% to achieve proper readout.) This goal is to reduce the recorded video signal to about 40=50dB S/ N to enable playback or “broadcast quality” readback. Ru. ).

[They also specify a solid-state Ga-AC-1ΔS irradiation laser, approximately 1 mm in diameter. A continuous beam of chrons is applied to the recording surface. Meanwhile, the recording surface is Keep moving. ] U.S. Pat. No. 4,222,071M discloses that the absorber is made of It emphasizes that it must be a ``low melting point metal'' (also ``continuous film metal''). It should be precipitated as a “microscopic agglomerate”; In other words, it is clearly not a pai-island °' or "island-like" form as shown below. ).

Absorber layer 5 made of vA (Fig. 1): The absorber layer 5 preferably consists of a relatively thin layer of tellurium, which is separated by a spacer. onto layer 4 (whose recording surface is relatively smooth and below λ/20) (thermally evaporated). evaporated). The Te is preferably applied in a large batch coating chamber. evaporated in high vacuum using a chamber to ensure better uniformity. A large coating distance and 1-knob straight 1-"2-type rotation" are adopted, For example, a high melting point metal board is used for the source [1.2111 box type The term ``Ting Chi'' is used in the literature of △Sh. Contamination must be severely reduced using the most stringent 'Clean Rules' techniques. No.

4 knobs 1 to rate 2 (j1 polished to desired smoothness and with thin reflective layer 3) Subbing (undercoating) to a level of smoothness suitable for accepting precipitation "at least with respect to the intended irradiation spectrum to be coated with 2-8" The high resistance in the moving part is 1.l = 1) made of a flat aluminum plate. Ta. Aluminum is not a perfect reflector, so in some 5M cases it is difficult to induce multiple layers. Technologists will recognize that it can be replaced with an electric material or something similar. .

Similarly, a spacer 4 is deposited on the anti-q-1 interlayer 3.

Spacer 4 is made of dielectric material C゛, which has range specs 1 to 5 lop< It was found that silicon dioxide〉゛ is a wood material (for example, λ-6). Tellurium absorber layer 5 is interpreted as a high absorber of intention-lead record 1 normal subek 1 health. (For example, !II! type is 25% absorbent; 30% reflective; about 45% Transmission of beam energy: Due to the three-layer moon erasure, it (J (G, must be). The thickness of the absorption layer 5 depends on the thickness of the spacer 4.

If the transmitted light is to be reduced, the light thickness must be increased considerably. It would be desirable to ).

The technology advances due to its low melting point and relatively short heat dissipation length (low conductivity). 5 is considered a good ``high-sensitivity'' material to help conserve irradiation 1 laser energy. It is growing. A writing beam from a laser source 1- is focused on the layer 5 at the ``V'' position. In any case, a small portion of that energy is reflected and another small portion is absorbed. , a large portion is transmitted. , the transmitted part is reflected by layer 3 (mainly) absorbed into layer 5. Therefore, both the C1 incident energy and the reflected energy heats the film 5 and minimizes the transmission loss (note: the precipitation of 5 forms a ``triple layer''). ). Variations in the absorber's grain or uniformity should be carefully removed. It is. This is because this variation reduces the writing energy absorbed in the absorber film. This is because it reduces the sensitivity and prevents deterioration of sensitivity.

result: For present purposes, ``sensitivity'' is defined as −1− min tr The writing energy required to change the reflectivity (or similar continuous characteristic) be understood.

The intensity of the focused writing beam and the exposure time can be adjusted depending on the required readout quality (V It takes -1 min (at It is understood that the humidity of the absorbent layer 5 is reduced (for example, A suitable = 1 truss 1 hem, as known in the prior art and in the technology progress. or S,/N ratio). 4,0- for a bandwidth of approximately 15MH7 50613 typical S/N ratio (beak-to-peak signal vs. RMS noise) See.

Here, the recording to Death 1 is 63288 and the operation J-ru gas 17-za (1-1 cmN e) By beam? The recording time is 30 to 7170 nanoseconds (usually 10 40)-seconds or approximately 400 pJ) for InW. This reads at low power intended to yield a minimum adequate readout or S/N of approximately 400 dB. For example, the output can be obtained using the same or similar 1 noser device. 50 to 500p J/cm2 (pJ==10” watt-sec, ((1 joule). For this intended set-L beam, the laser has a diameter of approximately Located at Pi1 of 1/2 to 1 Miku (5000 to 10000A) We assume a write pulse of approximately 40 nanoseconds when the light is focused on the This corresponds to a disk rotating at 1800 rpm and is related to A connected galvo mirror (galvo-mi+・ror). Adaptable to light-gathering characteristics 1 ゜The recording medium 1 is recorded in this manner. (Comparable situations in literature, etc.) ) whose Te film is sufficiently dissolved by relatively low power laser pulses. The well-known "hit" or "crate" r)” and a succession of good Qf (for example, 1-3% background in λ-6328 people) Gives about 550% pill reflection*) to the round, but only a small amount of Is”i) accompany.

Such "bits" actually appear to form voids (and For example, see the photo in the △sh literature. It goes to 2 - 10nIW, 100ns 1 nota'' in a similar laser pulse recorded with a laser pulse of . 4. J, foul - used in the seed ``C's 250A filter 45C) OA wavelength is J3'C 57% foul rate, 6% transmittance, 37% It is said to have shown absorption rate. ). However, such le-e films are made of continuous layers. Regardless of the fact that it is precipitated in The document states that the formation is accompanied by a rim surrounding it. stop Therefore, this rim is thought to be closely related to the aforementioned ``Noise''.

Obviously, the minimum written J-energy [3W] within the minimum temperature rise time (for example, About 10 mW of ray I+') within 40 nanoseconds is required to form a proper ``hole''. (For example, if high power is applied too slowly, the heat of the absorber (J It runs away, so "Pi1~" is not written. ).

Such 4r ``ball'' or pavit 1 ~'' is J5 in Figure 1, and is home with ``v''. implied as the location of the wheel. and at least some of the absorbent material 5 clearly softens and moves at the pitch 1 position of A, decreasing the stiffness there by 1 point, and causing the -C reaction. increasing the radioactivity (at least that is what the prior art teaches: e.g. (See the Δsh reference and cited U.S. Pat. No. 4,222,071).

Such a subbox can be read by means known in the art; For example, using a similar laser at low power (e.g. 3m using the laser described above) ). The increase in reflected energy received (with a suitable photodetector) is recorded. is sensed to produce an output signal representing the bits that have been detected. These bits are back Easily identified from the ground. Of course, this reading energy is recorded as such. is insufficient to ``erase'' or perturb the bits that have been read. , the “bit depth” causes a phase change for the light reflected on the surface of Te, and it This is done at a frequency f such that the maximum con] ~ last is obtained. ] Ran 11 L friend L1: I am using the oxidation as stated in the literature (see e.g. oxidation etc. in the ASll literature). ) I learned that the storage stability of this "Dinge Recording Body" is extremely poor. For example, recording medium 1 (without a protective film on layer 5) is exposed to a known cycle of temperature and humidity. ), its reflective ability increases by 60% in about 2 to 3 weeks, and this is mainly due to oxidation. It is clear that (the "hole" should have a "high" relative reflectance, but Oxidation increases the pack grade reflectance between holes and reduces the required S/N make it disappear ). The Te film of Example 1 after such "aging" It can be seen that it is characterized by a rapid increase in overall light transmission. cormorant.

This is probably due to not only the general oxidation of the metal, but also the This is due to severe selective corrosion starting from the defect location (MjL 5 (See similar test by PEC#810-B).

This is before)! li's "record storage memory" requirements (normal computer operation/maintenance) (see Table 2) exposed to existing conditions for about 10 years).

Example The following are some examples of "low temperature" absorbers in the form of island films according to the present invention. It shows typical uses and benefits of. Its advantages and characteristics are the above-mentioned ``'Te example. By comparing with ``, it will be evaluated as better.

Example I: Gold absorber: Figure 2 It is said that a film 15 made of gold absorber is used in place of the tellurium film 5. Except for the feature J, the operation of the above-mentioned ``Te example'' is performed on the new recording medium 1゜ (Fig. 2). , Materials, Methods.

and the structure is repeated here again.

The recording medium 10 includes a support 12, on which an ``anti-reflection'' base 1-△R (No. Like the AR shown in FIG. 4) is listed, and the substrate 4) An absorbent film 15 is placed on top.

Here, according to its characteristics, the absorber 15 functions as an absorber film. Deposition (somewhat similar to the Te film shown in “Te Example”; e.g. ``gold'' filament consisting of ``island layer'' made by similar means) It consists of Lum. Here, very deep care is taken to control the absorber thickness during deposition. the intended minimum “dark mirror” as described below. form the reflectance R (for example, 1o% is chosen here).The important point is As shown in Figure 11 (100,000 times Te micrograph) and described later, In addition, the film 15 is formed discontinuously into islands for optimum results. There is a thing.

Otherwise, the underlying spacer layer 149 reflector layer 13. and subst Rate 12 is (at least functionally) the same as the “Te example” and therefore absorber as understood in the art (see e.g. cited references) It is believed that it functions as a ``trilayer'' with 15.

The entire absorber film 15 is therefore preferably on the surface of the 3io2 spacer 4. It is formed by vapor-depositing gold. It is the well-known ``trilayer'' While monitoring the effect) the surface fouling power of 5 is set to a preselected value RIIl (here 1 Care is taken to form an ``island'' structure until the reflectance drops to 0% (0% reflectance). Ru. The reflectance RII can be conveniently set to a value that accommodates appropriate ``writing'' and reading. is possible. Here, about 10% (due to proper focusing of this laser, etc.) ) was chosen arbitrarily. Somewhat surprisingly, (as in the Te example ) "Writing" with the laser beam described above gives the appropriate sequence as described above. (i.e., the written "spot" has a reflectance of 25-55%). indicates the emissivity and yields an acceptable S/N in the range of 25 to 40 dB; in some cases 30 ~50% increase is sufficient). The technological progress is “Virgin ( unused or first)'' relative to the absorber film, any other pa minimum reflectance ” value may be selected.

Preparation of absorber layer 15 (FIG. 2): The absorber layer 15 is located on the spacer layer 14 (i.e., on a relatively smooth surface; e.g. ．． A very thin eye deposited (thermally evaporated) onto the recording surface of 52 Somewhat unexpectedly, 10% of ° If gold is deposited on this ``trilayer coach,'' up to the minimum reflectance ``Rm,'' If the 10mW.

40 nanoseconds), the reflectance changes significantly (highly desirable and totally unexpected): it is quite sufficient for a decent succession ( For example, increasing from about 10% to about 25-55%; detailed 4f discussion of results below. (see ).

The absorbent film l\15 is therefore preferably fabricated using current preferred technology. The spacer layer 140 is vacuum-deposited (for example, ``pure'' gold is deposited on the vacuum layer 140). It is deposited in a vacuum chamber at a vacuum level of approximately 10-6 to 10-’T” orr, and The deposition rate is approximately 5-10 A/sec using a resistively heated Moripuran boat. (It is done with melon).

Preferably, the silica layer 1/I is also coated with gold film 15 before being deposited on it as well. is vacuum deposited. 1.Here 1~ is for optically thin film. Cleaned according to this good practice.

This precipitation (due to thermal evaporation) is caused by a predetermined reflectance of the film 15. Proceed with the necessary “island” formation until the minimum reflectance level (Rm) is obtained. This is very important. Otherwise, the desired result will not be obtained.

As the technical layer knows, this (more empirically or satisfactorily The surface of the reference specimen while the absorber film 1b is deposited until the appearance of the This can be done by continuously monitoring the reflectance (cited in /ec The precipitation technique described by J3-C in the literature of B, J: or the quality of the precipitated or by other known methods such as monitoring the electrical properties during the deposition. (See the technology below).

Mustache: The results were checked in the light of the expected properties of Koma and as described above in the “Te example”. Productivity and also ゛[0% surprising in comparison to traditional media such as absorbent)) It is. While the recording body 10 is being read out, it is recorded on -1-, and ' The sensitivity, etc. of For example, using an l-10-Ne relay system of the type described above). That's it (,=The location of the written pin 1 is like a ``agglomeration hole'' (there, ``is'' , the absorber is formed into a conglomerate, and the absorber is formed around the ball or around the ball. ) The diameter of the hole is compared with the diameter of the 8-tipped beam. 1q (if you follow it, part 1, / 4-3,, /' 4), anti-self '' shows an f51-like increase in the rate and a high peak Il*.

Figure 6 shows the agglomeration hole '' (or ' ' This is an artistic expression showing the pseudo-pitch 1'''). As for the L house roughly circular written subbox 1, or (or unwritten barge) This may be understood as a physical-optical discontinuity in the absorber film 15v. vinegar The pot 15P is on the order of the laser beam diameter (for example, 40-120% of it). ) and includes a ``rim'' or partial rim around it. The inside of the rim is usually There is a relatively small amount of absorber; the only thing that exists is absorber globules. 9c, many of which are relatively large (for example, For example, many of them are virgin film 15V or the small "island" shown in Figure 11. Larger and usually located relatively far away (there are only 14 boxwoods).

In short, the spora h15r is an optical beam that overlaps the selected readout wavelength (λW). id°' also constitutes a [-ri discontinuity, 1, -1 virgin island fi lum 15v may be understood as a relatively continuous (partial) body.

15P of ``agglomeration hole'' is about tellurium. Functionally equivalent to conventional bits such as those known as (see 10 examples).

As will be detailed later, such island-like film is an excellent recording medium. It is found that it is possible to form t1. with remarkable record storage stability. High sensitivity with no premonitions , and 10 S,/N - force, surprisingly low writing energy J3 and 1.: It only requires a low write rate, and even more overlap = J-buing. It is obvious in E (having a small correspondence.[, 4fA-bar useful here]- j ink (it does not degrade operational performance beyond the scope of its actual usefulness. Regarding the 1-e absorber (deteriorated well, the reason for this is probably due to the relative nature of the absorber material) This is probably because there is a clear need for movement. In contrast, the C1 invention , most of the absorber from the bit good device (J rim also moves the J: sea urchin No need to worry, record the first hole for the reading beam to pass through. -I feel comfortable knowing that I can do Rinawara. You will be very surprised. The present invention can be carried out by simply "agglomerating". and therefore rearrange the absorber within the pill position, but that bit position There is almost no need to move the monthly interest to the outside of J, or there is no need to move the monthly interest at all. There is no need to remove it out of range; 11 details are given above.

Island shape of absorber film: Figure 11 (The first virgin of the total absorber film as described in 1) Transmission electron microscope (100,000x magnification) (mirror photo). This surface is physically discontinuous [or partially discontinuous islands] +i4 construction J, U (J visible, fairly uniform pattern (history on S102 surface) It will be clear that it represents myiasin 1~). Regarding this example ■, Iran (,1 number 100△(for example, 1oO・~300 people for type 1) The diameter of Δ-da is E4 and d3. You will see that they are separated by 5000"-100 fil. Figure 15 shows a range of “% void” (e.g., from a few % to 10 % void).

Now, the aforementioned J: U27 Leri "recording beam to this virgin - part of the film" Furthermore, these “islands” should be “easternized” and the “bar” at that location As the voids to Gin 1 are increased (larger island spacing), some See ejecta e. ), forming a (small, not necessarily continuous) ``rim'' there do. In this way, an "agglomeration hole" as shown in Figure 6 is formed.Here, this process Characterized as "agglomeration".

This “island” structure was unexpected. What is even more surprising is that ``recording properties'' were realized, and the properties were completely different from those of ``bulk gold.'' It was shown to be effective.

Above J: Sea urchin, it is possible to form an ODD absorber film on Pai Island Pasuzou. , not stated in the literature: Not only that, but the literature contradicts good practice in this case. U.S. Patent No. 4,222,071 reveals that J: Sea urchin; see discussion above).

At least some of the primary factors controlling such island formation are: host material, deposition rate, deposition; substrate material and condition (e.g., cleanliness, roughness, etc.) and temperature; presence of a nucleation layer, presence of vapor contaminants (degree of vacuum), and such factors, which shall be recognized by the Ministry of Technology. cormorant. For example, a substrate that is too cold will form a continuous film; However, at too high a temperature it will not form a film at all.

Regarding this point, technique #i stones can compare Figures 12 and 13 with Figure 11. can. In Figure 12, oxidation for nucleation as known in the prior art. A similar structure (as in Example I) except for a silica substrate covered with a bismuth layer. A film is formed. Figure 13 is similar, but instead shows the nucleation of chromium. layers are used. Compared to Figure 11, Figure 12 shows thinner eyelets with wider spacing. while Figure 13 shows a continuous gold film ( There are no islands).

The laser device quoted (at the power level quoted) is fully exposed on the film in Figure 13. On the other hand, the film in Figure 12 had a slightly lower sensitivity. I was able to write in the same way as in Figure 11 (Example ■), except for the degree.

The Ministry of Technology believes that such "island" patterns are (e.g. writing energy, beam width, λ, etc.) You will realize that you can give Thus, in example ■, about 4 A satisfactory "bit hole" with a diameter of 0.000 to 10000 amps is (give i! 1 foot < S/N, etc.).

Island diameters that are too large or too small are considered unsatisfactory. It will be measured. More specifically, the dimensions and spacing of virgin islands are When recording, it is not suitable for the above-mentioned agglomeration. diameter is much smaller than what is becoming a continuum film (i.e., not enough spacing (2) percent void thermally isolating individual islands; (relatively continuous) for the selected λ (R/W laser) 2) large enough so that the absorber film 15 is ``visible'' like an ``optical reflector''. It is necessary that the amount of voids is sufficiently small. If the spacing is sufficient, the spot When the cut is laser heated (written on), the film 15 is exposed to the optical The above-mentioned ``agglomeration hole'' is formed to cause a ``switch'', and the detected foul rate is J3 will be ``agglomerated'' showing a significant change. Corresponding to the changing S/N, etc., the pass spot is relatively transparent. ” and, like a traditional “bit,” it is compatible with the associated optical system. Opposite ``hearing'' (transparent) roar.

In addition to the above, the writing beam now acts on the islands within the bit locations to agglomeration” and (usually) an associated increase in average island size and spacing. resulting in an increase (increased % void area). The initial virgin)% void is , sufficiently accommodating the intended minimum radial heat loss, and the initial reflectance (R,) The value of ``dark mirror'' is so large that it exceeds the zero value (considered as a ``dark mirror''). It is estimated that there is no.

Of course, if a triple layer is formed in the optical lower nubs 1~rate, then the absorption The body/spacer/reflector actually increases the reflective power (e.g., here about 1 0% to approximately 30%).

Typically, this write operation essentially removes a significant amount of absorber material at the bit location. In addition, it provides energy to the absorber film. In this way, it is written If a spot that is not present exhibits 25% absorption, 45% transmission, and 30% reflection, then the ``written'' These values are approximately 30% and 10% 1 with respect to the writing wavelength of the spot. It will change to 60%.

This "in and out" increases the percent void (area), so the write The program obviously gives 1 energy to the islands at that writing spot, and those islands increase the average size of the nodes and also increase their average spacing (i.e., They do not "agglomerate" into a smaller number of islands; ``Thin metallic films'' have received some attention as a general proposition in the literature. (For example, ' .

App, physics: June 1966, VOl, 37. #7゜P27 See below 75. There the gold film is mentioned and tailed. :　T　ruong etc.” Q physical C, instants of Aggregat ecl gold Film”, Jour++al of 0ptica 13ociety Am, Vol, 66, #2. February 19 76, P124 and below are also children. There, a gold film was heated to 300 degrees Celsius. The particles themselves are formed by vapor deposition on the substrate, and the remarkable characteristic of A is that the particles themselves are We believe that it is reasonable to assume that the optical constant of (By !rssOn and N0rnlan" 3 tructural and E 1 electrical [)ropertics of [)isconti nous Qold “11m5 on Glass”, ■acuum, V Ol, 2 7. #4. 1977, Pergamon press, Qr Also see eat 13ritaine.

- Each examines the electrical resistance of such a film and determines whether this resistance is equal to that of bulk gold. This shows that the resistance is greater than the resistance of ).

However, such an “island film” of gold or any other metal OD f) If there is any advantage in using -C as one laser recording medium. Ura also discovered that ``It seems that it was intended only for absorbent films.'' (Even if the US cited L1 National patent No. 4. ．． Child No. 222,071. (If the upper absorber is "agglomerated") It shows that it must be pulled instead of ``continuous film''. J, Take J B, IVI-rDB, March 1971. See P4O10 . It indicates a continuous ``metallic layer such as a gold amorphous sublayer'', The amorphous is like silicon. These layers are gold + V; heated to form a mixture of amorphous silicon and amorphous silicon. It will be done. ).

Up to 3Xfi F'4M forms an "island-like" absorber film like this It was by pure chance that I formed such a ``minimum reflectance'' precipitate on the top. Met. Otherwise, I have a sensitivity and S/S of 11= minutes over a long life of use. N - providing such an OD/D record (which would otherwise have been impossible) (See below).

By the way, as mentioned above, such a The ``write pulse'' of energy A, which is strangely relatively low, causes a ->-C- shadow. It is clear that the melting point of gold is Then, the island will re-agglomerate (7J). This is based on the literature - C conjecture There is no one in Relomono! .

Many engineers have hypothesized that thin metal foils would take on the properties of bulk metals. It was fixed. All four people have different characteristics (OF). Related to the recording body fJIJL I've come.

So-C1 engineers believe that such an "island" absorber film (as described above) ) I can't fully trust how the J3 works on the OD disk. It was.

The technical feasibility is that such an island film can be written on by Rayleigh. and see how amazing it is that such an agglomeration hole can be formed. You'll know two things. Rather, people should take advantage of the softened monthly interest rate in the roundabout position. One might expect that continuity of the absorber film is necessary for ``spreading''. (For example, the cited Zech literature assumes (, as if it were) - position. ``Surface horns'' that stretch out the surface create depressions in the plane of the surface.)

Storage stability °'; (resistance to environmental deterioration) It was found that the record storage stability of the tellurium recording material used in ``d Hub'' is excellent (in summary). Furthermore, it is superior to any previously known tellurium recording material). for example,( ``Aging'' test (under cyclic back-temperature/high humidity environment) Monitoring the changes shows that this AU film is significantly more pronounced than the similar tellurium film. It can be seen that it is very stable. Technological potential [J-kin film mentioned here] Four types of total absorbent media are designed to suit the strict requirements of record keeping. However, it was a great surprise that it was able to be sufficiently ``sensitive'' as an absorber. Ta. That is, in this case, the information is transmitted at 5-15 mW/10-100 nanoseconds (or 1 With an output of 00 to 1000p, J,), it is possible to write a pixel in one minute on three layers of gold. It is possible. This is truly surprising; it exceeds the theoretically expected sensitivity level. It is much higher than Bell, and is very different from what the literature teaches.

J, such as Te, is a well-known and accepted "good absorber". In comparison, gold has a relatively high (bulk) melting point (T’c of about 4.50°C vs. 1063°C) and has excellent thermal conductivity (that of Te is very poor; gold is the best (belongs to high) to the right. Therefore, one might think that the total absorber is actually insensitive at all. , compared to the sensitivity of tellurium).

In other words, the literature describes tellurium as having much better sensitivity than titanium. Although butane has a high melting point like gold, Good conductivity.

So why can gold be compared as an absorber? (For example, Te yes It has the lowest thermal conductivity than any other metal, while the current thermal conductivity is about 100 Only OLl etc. △9 has higher thermal conductivity than gold.

One reason (see below) (yo! 1. The writing mechanism has become ``bit formation'' or `` It may be related to "write").

A related reason may be the “island” form of the gold film as mentioned above. unknown. In order to change the reflectivity of the film (yo, it becomes even lower than expected). However, the writing energy is less than that indicated by the properties of the bulk gold. obviously requires a gi.

Low temperature record: The big surprise is that the ``reflection chamber changes'' shown are at such low (write) power levels. and clearly occurs at such low temperatures (this symptom appears at about 300°C). This occurs at a temperature lower than gold's published melting point of 1000°C; By way of example, islands of C It has been confirmed. This is because the melting point of the polymer is much lower than this 1063°C. It is the body. (see example below). As an absorber, it has a high Melting point'' material has excellent storage properties and therefore over a long lifespan Directing engineers' attention to materials that reduce risks such as corrosion and performance deterioration Maybe.

Of course, the film's island structure explains this apparently reduced melting point. It may be possible to clarify this, or it may be that a writing mechanism other than "dissolution" is working. No one is sure yet. One theory is that such islands are Because they have a high internal energy, they can be written with relatively low writing beam energy. can cause a “splitting” of the molecules and thus without the need to “melt them” It can be used to gather souls.

In any case, the technological aspect clearly welcomes the use of such a new "gold absorber". will. Because of the well-known manufacturing, precipitation, and handling In addition to ease of storage, excellent storage stability and computer disk recording Not only due to its suitability for use as a body (for example, see Table ■), but also because it is usually This is because it offers special and unique advantages in writing the ``modulation'' of For example, there is no need to heat the absorber bit location to conventional melting point temperatures).

Also, the reduction in write energy and recording temperature will be appreciated: The possibility of “laser writing” with much less energy and smaller bit area promises the possibility of writing. For this reason, spacers (and some l! j, covering material) is a good thermal insulator with a relatively low heat capacity, as discussed below. It is considered that the best solution is the intense heat and macroscopic (e.g., without requiring such a large move in the absorber monthly interest rate) A system that records beeps (instead of cormorant.

This was like a pseudo-overcoat 1-, but it was the type that the technical ability desired. true functional overcoat (e.g. removes surface dust and dirt: water and oxygen) It prevents the entry of steam such as A few thousandths of an inch of transparent polymer that can be handled and recorded without causing scratches. -) was not given. This SiO coating does not affect pavit formation. However, since I wanted to increase the required write energy by about twice, it was probably This is probably because it presses down the Te film at the ~ position and inhibits the movement of the Te material there. cormorant. ).

Technological properties (such as bits in Te, bubbles in other metals, etc.) It is expected that the "processing record" will be disturbed by any "overcoat". For example, if you want to do something like and prevent any "ejector". ).

However, when the gold film as in Example I is similarly overcoated, such (Yu rarely or never appeared, and the sensitivity deteriorated only by a little Δ2.) . This is evidence that different types of bit forming mechanisms are at work.

This reinforces the idea that the instantaneous recording mechanism is entirely new; Engineer J Zhuo would probably agree with this (the processing and movement of island materials is called “bit”). Even if such a low output write of (This is not inconsistent with the above-mentioned "agglomeration") . This increases the attractiveness of such absorbers. Because overcoating This is because it is extremely important to not be influenced by

Mourning unit of characteristics of “Bulk Au” Another feature based on the above example ■ and others is that the gold eye) The land film ``absorber'' has its reported ``bulk'' (gold) properties. It will be seen that it does not behave as expected from (for example, radial conduction does not seem to be important). Such ``island film characteristics'' This finding is important and will be briefly discussed below.

These agglomerate holes (reflective switches) are lower than the melting temperature of the absorber (metal). It appears to be formed at fairly low temperatures, with the exclusion of absorbers and little or It doesn't matter at all, the writing requires only a small amount of writing energy. It's good.

Typically, such island-like absorber films are utilized to form ○D disks. q, one would expect technicalizability (for example, if all or most of the key points f1 in Table 1 Instead of pure gold, which satisfies most of the The process is the same as Example (■) except for the following. This is laminated (raln) due to vapor deposition. i nate): first gold, then tin, then gold (or may be added with a double layer of tin and gold). By heating, this “laminate” becomes △U will interdiffuse to form a /Sn alloy (mostly gold and therefore (the properties of gold would be dominant).

This AU/Sn film is placed with the island film (15 in Figure 2) of Example ①. and written on it as well. The effect was qualitatively similar to Example 1. However, it showed much better shelf life and somewhat poorer sensitivity.

N L 2 sets 1 luster: It was also observed that the gold islands were only weakly attached to the silica ( For example, it cannot be easily wiped off). Also transparent for better thermal insulation When I replaced it with a polymer spacing of The arrival coefficient is O).

Therefore, the ``strike'' of the blocking tin (island type (See Example 111) can be considered as a “nucleation film” and treated with -C. This is then formed on the glass by the evaporation of △U islands. (worn). Polymer Sube 11 was used later. As the example shows, the result was very promising, especially for polymer →jbustray 1- (Kin no I). has been greatly improved, and its island structure (which has not changed much).

A transparent polymer (e.g. Teflon) is used as a spacer to connect the tin Shico (゛S1HERIKE'', adhesion promoter -C) is inserted under the pure gold absorbent body. FIG. 5 shows that Example I (FIG. 2) is otherwise similar. Therefore As before, we have disk 212 and subbing layer 21 on that disk. 2-8. Next, reflector 213. (of transparent tenon or such polymer) Spacer 214゜J, and absorber 15 (island-shaped pure △u: but eye A triple layer of 2-A has. This -L was written as before.

Product”L: Similar to Example I, but with greatly improved shielding, sensitivity, readout, and storage stability for gold. However, the gold (island) is I landed firmly on the 3n island on the Mar spacer. High sensitivity and continuous occurrence Therefore, this 3n strike has a much improved adhesion (to the polymer). It is thought that it will work not only to improve the From 4′ is a surprising ζ.

One such surprising optical effect is shown in Figure 7. The reflectance (33 and refractive index) of the virgin island-neulum for be. A pure gold island absorber like the example ■ has a refractive index as shown by the curve It exhibits a reflectance/'λ characteristic as shown by curve B. This is obviously good on the one hand. (For example, it is not possible to run Qa, and instead Qa - Not feasible even with a ΔS laser). Quite surprisingly, 511 If a strike (land) is applied, the reflection of the absorber will be as shown by curve C. Touch the curve to ``flatten'' it.

Technologists will recognize the importance of such increased beam width.

The archival properties of Example 1 (pure Au on Si02) are somewhat insufficient (for example, Insufficient resistance to water vapor penetration; (depending on adhesion). On the other hand, this Δ11/Sn island structure is excellent in escape.

Moraron 1, polymers (,) are highly thermally degraded (Sn, and The subsequent A (for 1) deposition step was kept below its temperature limit (~100 °C). It will be done. Such gold film I'm sure it will endure. Such a “whole record” is the only type of preservation it was intended for. Under the conditions of use and use, a suitable succession (30 + dB) will occur in the order of 10 years. The setup S1 example ■ is reproduced so that it can be maintained. However, with protective overcoat 1~ A transparent polymeric supercoat 1 is then applied to the absorbent layer 15-L.

Stand 1: It is the same as Example ■ except for the slight deterioration of the feeling, so it passes the test.

The next step for overcoating is fr[1'! VI has remarkable characteristics. : Highly desired in technology.

Example 71 Example] Iζ" Lee 4 * T" e and Ichiku engineering alloy were simultaneously deposited q-: A similar small amount (%) of tin (as a preliminary “strike”) was analyzed at the same time as gold (). Similar to Example I, except that

The symptoms are exactly the same as in Example ■.

Vl’:” III To ii - in 5K practice Uni σ Engineering J polymer ((Engineering S i. A thin layer of O2 is superimposed on the porin spacer 214 (Figure 5). ('J is similar to example , then gold is deposited.

1 Milk: Same as Example ■[, but the sensitivity was significantly reduced.

In addition, polymer substrates can be used (ζ, silica is disliked). (Silica is widely reported to be preferable) is important for technological feasibility. Let's be together.

Example ■;Δu/3b: Tin (on the polymer and s:o, L s!~like) is replaced by antimony Except that (J is similar to example Vl).

Gloss 1゛ Although the sensitivity is better than the previous example, the storage stability is very poor, and it is surprisingly What should be expected is a ``ejected'' globule (see e in Figure 4; in this case, compared to the light example, the ejected b-hole agglomerates and ring agglomerates (see Figure 4; 11), there is a tendency to form men l-i, r).

Figure 4 (foreign △u/31) Typical 1ζ small agglomerates written on the absorber layer - island arrangement V is shown here as an idealized version of Not yet.

The latter characteristic (ejecta) J, rather creates rings and local agglomerates. -i) is impressive. It hints at the nl ability to control the development of agglomerate migration. And furthermore, (?l all ''' ejecta'' e is 1IJII?l Doshi thought σ ')-4-bar:'-Hole shape that is minimally affected by deinking implying the organization mechanism.

Co-deposition of such an All/Sb alloy (at the same concentration) would show similar results. Dew.

Example■: AU/Sb/Sn: 3n strike is followed by Andimon's strike, and then gold is evaporated. Example ■ (3r+s1~like is applied on the polymer) ).

Symptom L: Almost the same as Example Ⅰ, but the sensitivity is slightly inferior, and the record keeping is poor. It is slightly better, and there is also a tendency for there to be fewer “ejecta” in general (as shown in Figure 4). , slightly more than the example ■). Simultaneous deposition of All-3n-8b gave similar results. will occur.

Takumi IX; Pd: The substitution of palladium with gold and the sub-rate of transparent polymer This is the same as example (■) except that it is a pacer.

Result: Similar to example ■ and Poton, but as in examples ■ and ■, there is generally less "ejecta" ( ``Rim agglomerates'' are slightly more expensive, except that PD is used instead of gold (e.g. Similar to (2) (Pd is deposited on the Sn strike on the polymer).

The difference is the same as in Example ■ (e.g., increased bandwidth.

Resistance to vapor intrusion, as well as related dislocations of virgin AU islands, etc. ).

Example XI: Au/Pb laminate: Same as Example ■ except that tin is replaced with lead, and the absorber film 15 ( Figure 2) consists of a series of island layers of gold, lead, gold, lead, and gold, and each layer is It has a suitable island structure. When heated, these island layers easily intersect. interdiffusion (the distance is very short) to form AU/Pb alloy islands.

Since AU is the main component, the nature of pb can be ignored as a first approximation. However, Therefore, the alloy will primarily exhibit "gold characteristics."

Film 15 was deposited as a ``laminate'' for testing convenience; Other methods may be available to those who wish to do so.

[Note: The “laminar” form of this alloy is simply a matter of preparation and polishing. selected for convenience of research. However, once the alloy conditions are settled and optimized, , engineers can use sputtering or other known reliable methods in high vacuum. evaporated by ``co-evaporation'', a method that allows the realization of more homogeneous alloys. would prefer to wear it. Such laminar films are somewhat non-uniform (). therefore, it may not be ``optimal'' for most applications. cormorant. However, compared to e.g. co-evaporators, it proceeds based on a first approximation. Very quick and cheap to get there.

and can be carried out conveniently. ] Result: An “island” as described above (and as shown in Figure 11 etc.) Rather, except for the fact that it precipitates in a quasi-discontinuous form in ficimene Examples are ■ and β1. This is shown in Figure 10 using an electron micrograph at a magnification of 100,000 times. and is shown idealized in FIG. 8 with a pair of spaced upper electrodes. It is. This 1' pseudo-island" ("island-like" or "peninsula-like") form is It appears to "agglomerate" in the manner described, and in the manner described above in example 1, They form "globules" which are discontinuous "pseudo bits"). therefore functional It is thought that the same applies to However, these filamentary peninsulas exhibits a much lower lateral electrical resistance than ``islands'' such as example r (but still However, the resistance is quite high). Additionally, they write “agglomeration holes” Since they function similarly to ``islands,'' they have the same ``thermal insulation'' as the ``islands'' described above. is considered to be maintained. Similar to ``Island'', such filament The island-like features can also be characterized as "island-like". Form and record an "agglomerate ball" in the same way as a ball.

In this case, the sensitivity is the highest and is better than in the case of pure gold (Example ■). for example It has approximately the same sensitivity of 1°' as a tellurium absorber, and is often better than that of a tellurium absorber. For example, about half the sensitivity of the "He example" has been measured). size, i.e. , in this case 5-15 m'W, /10-100 nanoseconds (or 100-1000 p , J, ), information can be sufficiently “written” into the gold/lead triple layer. Wear. More specifically, about 40 nanoseconds is a short period of time when a 5 mW output is A change in radiation intensity is seen. In some samples, a change in radiation between approximately 10 and 15 nanoseconds is observed. ``Change'' with an output of 1 to 2 mW; in other samples, with an output of 10 mW, Shows changes in a short period of time. In either case sufficient readout (e.g. 30-40dB S/N). This is truly surprising, as the sensitivity level predicted by theory is There are many examples of this, completely contradicting what would be expected from the literature. deer However, its record keeping properties were very poor (for most purposes, pure AU and AU-3b are unacceptable).

In addition, relatively small ``ejecta'' are observed as in the case of Δu/3b.

¥7JL: Some of the results of Examples I-XI are shown in the following table compared to. Now, assuming similar construction and operating/test conditions, we will Add server coating. [Note: S’y is sensitivity, A’V is preservability. palim” or “ejecta” indicates the possibility of rim or ejecta formation (e.g., high, low); 1°″.

Par2°'' etc. mean "best", "second best", etc.: X× means " Indicates “unavailable”.] Person-2L Reno: Mr. Lee Mr. Lee rFil It Re Junior High School 1st (and 1st appearance: High High Low Medium Medium Low So for example, one common teaching here is the ``3'' mentioned above. 43 years ago in the production of an oil dispersion with a 10-layer absorber film. By applying the absorber material in an island shape, surprisingly good sensitivity can be achieved. It means that you can get it. In general, for example, it is possible to maintain good sensitivity while maintaining records. True metals such as gold and palladium, or their alloys, can be absorbed to extend their shelf life. It is taught that it can be deposited as a sorbent.

Additionally, island film absorbers, such as gold, can be used to increase sensitivity. It can be combined with ingredients such as lead or antimony (for example, in small amounts96), In addition, tin is used to improve archival properties (e.g., increase bandwidth). It is also possible to use combinations of ingredients such as 4).

By combining metals, gold or palladium with other ingredients, holes can be made. Formation agglomeration can be controlled to some extent (e.g. in some cases (more In other cases, ejecta are predominant, Akl i-pb +'J, or P (1 → 3n minimizes the possibility of ejecta P, A 1 + + 3 n + 3b increases S”y, Δ′y, bandpass and reduces ejecta).

Also, to combine gold with lead, tin, or antimony, The interface between the absorber and the space υ (due to moisture) It seems to prevent the intrusion of air, that is, it improves record preservation.

The technical speed of sound is higher than that of electron beam recording or IR recording for such absorber films. There are other recording methods like this.

Figure 9: Figure 9 depicts the theme of “Teruyoto”. Another application of agglomerated” island films is schematically illustrated. , the island film (ab,) is inserted into the appropriate subs 1 in the frame member f. (For example, in the example above, a transparent polymer △(j also [yoA (1 alloy)) on glass with Bacote. Radiant energy ILs (e.g. 6338△) (appropriate mW for e-Jle laser) is -noilm Irradiation beam on AB! ), apply continuously (or periodically).

Initially, film ab reflects most of beam b1 (e.g., the reflected beam reflected to the first sensing device as beams b, -). However, the film ab, (that The part of the body that is hit by the warrior's beam) is warmed up to a predetermined level by LS. For example, if the agglomeration temperature is reached, as by a nearby fire or flame, it is agglomerates and becomes ``transparent'' (with respect to λ1 of b) (thus film ab is relatively transparent to λ1). Thus ab passes beam b, 1 Transmitted beam 1) 2 suitable for detection by the second detection device fi D2 with one series 4 Ru.

Source 1st, which may ordinarily be stationary directed (-) toward device D2, Holes are formed in the film ab by the irradiation energy (beam 1) 1).

(Instead, beam b is scanned across beam ab. You can also ``write'' a pattern here. Also, in the case of an immovable BL, an edged `` The mask may be a source of ``irradiation from the rear that irradiates the entire mask'' (for example, For example, to make a nice play or optical printing play 1). technique As for the technique, other similar applications may also be considered (q<.

Example of change: The technical concern is whether such "Island" (J, or Island-like) film , in some cases pond metals and their base metals (e.g. Au or P (+ other Binary alloys and ternary alloys include: Ipt, Cu, AG, RhO Can be composed of any other metal). In many instances, the absorbent filter (1) Conveniently coupled to an anti-reflective or similar optical substrate.

In other examples, such island films may be Technique i4i (vapor deposition is very practical, as in example 1, anti-I) Il, very fine Deposited by (can also be used to deposit any other related layers) be done. As for the "alloy", it is preferable to steam both simultaneously and simultaneously.

Other methods are also possible for depositing the absorber, such as sputtering.

Droplets are usually removed during precipitation to control the delineation of the precipitated islands. It is desirable to cover the monitoring film.

Name lL theory-゛ The preferred embodiments described herein are examples of Various modifications and changes in structure, arrangement, and usage can be made without departing from the One thing will be understood.

The present invention is subject to considerable modification (for example, the means and methods described herein may also be modified). , other ultra-thin films used to be optically switched when properly illuminated. Applicable to films.

The following examples of possible variations of the invention are 11 illustrative. (] Therefore, the present invention covers all possible modifications and changes within the scope of the invention as set forth in the appended claims. You should think about what you include.

FIG, 3゜ FIG.4. -... FIG, 7°

Claims (1)

[Claims] 1. Energy detection system used to detect energy from Death 1 to level In a system, a combination of the following: Optical sensing medium. Source means for providing monitor radiation at a prescribed wavelength. a beam along the sensing axis to impart a prescribed level of energy to the medium. means for directing said radiation by said source means; and means for intersecting said beam by said source means. a relation placed along said axis with a medium placed in the middle of said beam; related detection means. its optical properties for irradiation with said beam of energy at said test level; At least one ultrathin discontinuous layer deposited in an island shape such that the A medium comprising a layer of absorbent material. The island film is connected to the monitor beam. A clearly separated ′′ eyeliner of absorber material with an average width much smaller than the °° is shown. 2. A claim characterized in that the absorbent material contains at least one kind of noble metal. The invention according to the scope of item 1. 3. In a heat detection system, a combination including the following: Monitor irradiation with predetermined wavelength and energy level along prescribed axis Source means for delivering the beam. a detection means for the detection means, and a beam crossing relationship between the source means and the detection means; optical media. The medium comprises at least one layer of discontinuous absorbent material deposited in the form of islands. said medium attenuates said beam to generate said output of said sensing means. 5TOP state to block the beam or GO state to allow the beam to pass through. or the medium is subjected to prescribed test levels of heat. ``Soul-gathering'', thereby detectably changing its optical properties, A second state is obtained by reversing the 5TOP or GO state of the first state. Said The layers represent distinct "islands" of one or more absorbent materials. and the island has an average width significantly smaller than the width of the beam, and the island has an average width significantly smaller than the width of the beam. system energy levels are insufficient to cover such agglomeration. Ru. 4. An optical thermal sensing system that focuses a monitor illumination beam onto the medium at a prescribed wavelength. Optical medium used in the stem. The medium comprises at least one layer of absorbent material deposited in the form of discrete islands. It contains a "soul gathering" system by applying test-level thermal energy. detectably changes its optical properties and is detected by the prescribed associated optical sensing means. This allows the beam to be emitted successively. The width of the iland layer is the same as the width of the beam. Absorbent material in distinct “islands” with a fairly small average width It is formed so that it does not show. 5. said radiation beam is from a radiation source, and said sensing means is from said medium. arranged to detect the level of the light beam reflected by the body; The medium includes a reflective layer and a transparent polymer spacer layer overlying the reflective layer. and a plurality of absorber layers including one or more island-shaped absorber layers covering the spacer layer. Any one of claims 1 to 4, characterized in that it consists of a layer of The invention described in the section. the thickness and optical reflection properties of said layer and the optically detectable reflectance of said absorber layer; The change in is related to the level of energy detected and the wavelength of said beam. The selected and sensed beam intensity is determined by whether the test level energy is generated or not. Furthermore, the intensity of the beam has a significant effect on the reflectivity of the medium. of! It is selected so that it does not occur. 6. The absorber island layer is not deposited by evaporation from a melt in vacuum. The invention according to claim 5, characterized in that: 7. The total thickness of the one or more absorber island layers is several hundred ounces. Claim 6, characterized in that it is oak of Angstrom or smaller. The invention described in Section 1. 8. The polymer spacer layer is made of polytetrafluoroethylene. The invention according to claim 7, characterized in that: 9. The medium is formed with an anti-reflection base, with an island on top of the A layer is deposited thereby forming the formulated The invention according to claim 5, characterized in that the invention exhibits a minimum reflectance. 10. The islands are allowed to deposit until they produce a prescribed initial minimum reflectance value. The invention according to claim 9, characterized in that: 11. The island layer is deposited while monitoring its reflectance. The invention according to claim 10. 12. The island layer retains energy to the radiation irradiated onto the medium. The absorber material is precipitated and used in such a manner that the absorber material is Enables low-energy/low-temperature operation without the need for heating to melting temperature. The invention described in any one of claims 1 to 5, characterized by: 13. Average size and spacing of the formed islands, collected during test heating The material is selected and used in such a way that it "agglomerates" and thereby significantly changes the reflectance. 13. The invention according to claim 12, characterized in that: 14. Exhaust of the absorber material is not necessarily separate from the intersection of the beam and the medium. such test heating to produce such changes without the need for removal. Claim 12, characterized in that the island layer is formed in invention of. 15. A method of forming a medium used in an optical thermal sensing system, comprising: The system is equipped with a predetermined wavelength and energy monitor of the beam. The beam (644) is focused onto the medium -C1 and the detection means or the medium and the method includes the following steps. A fouling medium support means having a formulated transparent polymeric Spy+J layer thereon. step to provide. deposited on the medium as one or more absorber layers in an island shape on the spacer layer; step. The thickness and optical properties of the layer are such that the antifouling conditions are at test levels at the writing wavelength. Odor-C predominates in the virgin portion of the medium that is not exposed to the heat of the bell. ) is selected. The thickness and optical properties of the layer further determine that the test level of thermal energy is applied to the layer. just enough to detectably alter the antireflection conditions of the J: is selected to change its optical properties so that it can be optically read out. 16. The absorber layer is used until the prescribed low reflectance level is first detected. 16. The invention according to claim 15, characterized in that the deposit is made by vapor deposition. 17. The information layer is installed on the sub-stray 1-L ()1 and the prescribed energy is and wavelength laser beam (prescribed test 1 novel while being monitored) An improved illumination sensing recording blank used to sense and respond to the energy of '7 (blank)>, the method includes the following steps. . shows an array of isolated ``islands'' and directs the radiation beam to the radiation beam. A discontinuous recording film with an initial reflectance that is formulated to appear "continuous" depositing the ``absorber material'' until it forms. Then test When energized by a bell, the absorber material causing the film to become optically more discontinuous, An optical hole is drilled therein to change the sensed reflectance of the blank. The absorber material is selected in relation to the surrounding optical/thermal environment to "agglomerate" and then evaporated. 18. The substrate means includes an optical anti-fouling substrate; The absorber material is deposited thereon until it first exhibits a low level of initial fouling rate. 18. A method according to claim 17, characterized in that: 19. The absorber material must be in a evaporated formulation until the minimum reflectance first appears. containing the main part of the absorbed ``absorber metal''20, said metal is used to strengthen adhesion. The claim is characterized in that it is combined with at least one other metal used for Scope of Claim 18. The method according to item 18. 21. Temperature sensing system including: to project an illumination beam of prescribed wavelength and energy along a prescribed sensing axis. irradiation source means used for spaced apart from the source means along this axis and configured to direct the beam energy. Beam sensing means used to receive the power and slope the prescribed ON output. . a prescribed test level disposed along said axis between said source and sensing means; blocking said beam to prevent said output from said sensing means at temperatures below or (J) is sufficient for that purpose or used to reduce the beam. Temperature shutter means providing a temperature sensitive optical shield means. The shielding means comprises a discontinuous island-shaped absorber film, typically (J The beam is blocked or relatively reduced as described above. However, the said When the film is subjected to a minimum test heat corresponding to the temperature of said test level. ``Agglomeration'', whereby the film loses most of its reducing properties. The beam is "passed through" and the output is generated from the sensing means. 22. The absorber island film is evaporated from the melt in vacuum. The invention according to claim 21, characterized in that it is caused to precipitate. 23. The entire ρ of the absorber island film is several hundred angstroms. as claimed in claim 21, characterized in that the invention.