JPS5949305B2 - Chemical plating pretreatment method - Google Patents

Chemical plating pretreatment method

Info

Publication number
JPS5949305B2
JPS5949305B2 JP12967577A JP12967577A JPS5949305B2 JP S5949305 B2 JPS5949305 B2 JP S5949305B2 JP 12967577 A JP12967577 A JP 12967577A JP 12967577 A JP12967577 A JP 12967577A JP S5949305 B2 JPS5949305 B2 JP S5949305B2
Authority
JP
Japan
Prior art keywords
acid
chemical plating
present
concentration
resistive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12967577A
Other languages
Japanese (ja)
Other versions
JPS5462930A (en
Inventor
敢次 村上
洋一 松田
元世 和嶋
峰雄 川本
泰定 森下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12967577A priority Critical patent/JPS5949305B2/en
Publication of JPS5462930A publication Critical patent/JPS5462930A/en
Publication of JPS5949305B2 publication Critical patent/JPS5949305B2/en
Expired legal-status Critical Current

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  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【発明の詳細な説明】 本発明は化学めつき前処理方法に関し、特に抵抗付プリ
ント回路板における抵抗膜の抵抗値精度を向上させる化
学めつき前処理方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chemical plating pretreatment method, and more particularly to a chemical plating pretreatment method for improving the resistance value accuracy of a resistive film in a printed circuit board with a resistor.

化学めつきを行なう場合、めつきに先立ち、被めつき体
表面にめつき反応の開始剤となるパラジウム等の触媒を
付着させる必要がある。次いで化学めつきが行なわれる
が、このままでは、付着した触媒がめつき液中に脱落し
てめつき液の分解をひき起し易い。そのため、これを防
止するための処理が通常触媒付与後の工程で行なわれる
。このような前処理液としては、塩酸、硫酸、硝酸、過
塩素酸、フッ酸、ホウフッ化水素酸及び水酸化ナトリウ
ム等の水溶液が主として知られている。しかしながら、
化学めつきにより抵抗膜を形成する場合には抵抗膜の均
一性が要求されるが、上記のような処理液では十分な均
一性を得ることはできなかつた。その原因としては、抵
抗を形成する絶縁基板表面が不均一であること、前処理
液の作用が不均一であることあるいは触媒付着量にむら
があること等が考えられる。本発明はこのような現状に
鑑みてなされたものであり、その目的は、上記従来技術
の欠点を解決し、抵抗となる部分が絶縁体である基板表
面に化学めつきにより抵抗膜を形成する場合に、均一な
厚さの抵抗膜すなわち一定の面積抵抗値の得られる抵抗
膜を得るための化学めつき前処理方法を提供することで
ある。
When chemical plating is performed, a catalyst such as palladium, which serves as an initiator for the plating reaction, must be attached to the surface of the object to be plated prior to plating. Chemical plating is then carried out, but if left as is, the attached catalyst is likely to drop into the plating solution and cause decomposition of the plating solution. Therefore, treatment to prevent this is usually performed in a step after the catalyst is applied. As such pretreatment liquids, aqueous solutions of hydrochloric acid, sulfuric acid, nitric acid, perchloric acid, hydrofluoric acid, fluoroboric acid, sodium hydroxide, and the like are mainly known. however,
When forming a resistive film by chemical plating, uniformity of the resistive film is required, but it has not been possible to obtain sufficient uniformity with the above-mentioned processing liquid. Possible causes of this are that the surface of the insulating substrate on which the resistor is formed is non-uniform, that the action of the pretreatment liquid is non-uniform, or that the amount of catalyst deposited is non-uniform. The present invention has been made in view of the current situation, and its purpose is to solve the above-mentioned drawbacks of the prior art, and to form a resistive film by chemical plating on the surface of a substrate whose resistive portion is an insulator. In this case, it is an object of the present invention to provide a chemical plating pretreatment method for obtaining a resistive film having a uniform thickness, that is, a resistive film having a constant area resistance value.

本発明につき概説すれば、本発明の化学めつき前処理方
法は、基板表面に化学めつきで抵抗を形成する抵抗付プ
リント回路板の製造において、化学めつき前処理工程と
して無機酸及び脂肪族カルホン酸ようなる混酸で基板表
面を処理することを特徴とするものである。
To summarize the present invention, the chemical plating pretreatment method of the present invention uses an inorganic acid and aliphatic This method is characterized by treating the substrate surface with a mixed acid such as carbonic acid.

本発明者等は、抵抗膜を均一にするため種々の前処理方
法につき検討を加えた。
The present inventors have investigated various pretreatment methods in order to make the resistive film uniform.

従来よう、金属と化学めつき膜の密着性を高める目的で
、触媒付着工程後にアミン類及びアルカリあるいは塩酸
及びシユウ酸(例えば特開昭51−1327号公報参照
)をそれぞれ併用する方法が知られている。本発明者等
は、この点に着目し研究を進めた結果、各種無機酸及び
各種脂肪族カルボン酸を併用した混酸が、本発明の目的
達成に極めて有効であることを見出して本発明を完成し
たものである。すなわち、本発明によれば、抵抗膜を形
成するための化学めつきにおいて、基板表面に化学めつ
きに必要な触媒を付着させた後、無機酸及び脂肪族カル
ボン酸よシなる混酸の適正量で基板表面を更に処理し、
その後化学めつきを施すことによシ、均一な厚さの抵抗
膜が得られ、抵抗膜の抵抗値精度を著しく向上させるこ
とができる。本発明によう抵抗を形成するための回路板
の基板としては、セラミツク板、エポキシ系積層板、フ
エノール系積層板等殆どあらゆる絶縁板を挙げることが
できる。
Conventionally, methods have been known in which amines and alkali or hydrochloric acid and oxalic acid (see, for example, JP-A-51-1327) are used in combination after the catalyst adhesion process in order to improve the adhesion between the metal and the chemically plated film. ing. As a result of focusing on this point and proceeding with research, the present inventors completed the present invention by discovering that a mixed acid containing various inorganic acids and various aliphatic carboxylic acids is extremely effective in achieving the object of the present invention. This is what I did. That is, according to the present invention, in chemical plating for forming a resistive film, after attaching a catalyst necessary for chemical plating to the substrate surface, an appropriate amount of a mixed acid such as an inorganic acid and an aliphatic carboxylic acid is added. further treat the substrate surface with
By subsequently applying chemical plating, a resistive film with a uniform thickness can be obtained, and the accuracy of the resistance value of the resistive film can be significantly improved. As the substrate of the circuit board for forming the resistor according to the present invention, almost any insulating board such as a ceramic board, an epoxy laminate, a phenol laminate, etc. can be used.

又、本発明に適用できる抵抗膜形成用めつき膜としては
、Ni−P.Ni−B、Ni−CO−P,.Ni−W−
P,.Ni−Fe−PlCO−P,.CO−W−P及び
Ni−Cr−P等の組成のものを挙げることができる。
本発明における前処理液は、上記のように、無機酸と脂
肪族カルボン酸の混酸である。
Further, as a plating film for forming a resistive film that can be applied to the present invention, Ni-P. Ni-B, Ni-CO-P, . Ni-W-
P. Ni-Fe-PlCO-P,. Examples include those having compositions such as CO-W-P and Ni-Cr-P.
As mentioned above, the pretreatment liquid in the present invention is a mixed acid of an inorganic acid and an aliphatic carboxylic acid.

無機酸としては周知の塩酸、硫酸、硝酸、過塩素酸等を
使用できるが、取扱いの容易さ、価格等の点から塩酸が
適している。又、脂肪族カルボン酸としては、ギ酸、酢
酸、シユウ酸、コハク酸、クエン酸、Dt−リンゴ酸、
酒石酸、グリコール酸、マロン酸、マレイン酸等いずれ
も使用できるが、シユウ酸が特に効果的にも価格的にも
適している。本発明の前処理液としての無機酸の濃度は
、塩酸の場合は少なくとも1t当)35(F6塩酸10
mt以上硫酸の場合は少なくとも30p/tであう、脂
肪族カルボン酸の濃度は少なくとも0.3f/tが必要
である。
As the inorganic acid, well-known hydrochloric acid, sulfuric acid, nitric acid, perchloric acid, etc. can be used, but hydrochloric acid is suitable from the viewpoint of ease of handling, cost, etc. In addition, examples of aliphatic carboxylic acids include formic acid, acetic acid, oxalic acid, succinic acid, citric acid, Dt-malic acid,
Tartaric acid, glycolic acid, malonic acid, maleic acid, etc. can all be used, but oxalic acid is particularly effective and cost-effective. The concentration of the inorganic acid as the pretreatment liquid of the present invention is at least 1 t equivalent in the case of hydrochloric acid) 35 (F6 hydrochloric acid 10
The concentration of aliphatic carboxylic acid must be at least 0.3 f/t, which is at least 30 p/t in the case of mt or more sulfuric acid.

これらの量が上記条件の数値を下廻る場合には、本発明
の効果は十分達成されず、均一な抵抗膜を得ることがで
きない。本発明の実施に当つては、化学めつきを施す基
板表面を脱脂、水洗し、塩酸処理後パラジウムを含む触
媒液を浸漬、塗布、吹付け等を行なつてパラジウムを析
出させた後、上記処理液で処理する。
If these amounts are less than the numerical values of the above conditions, the effects of the present invention will not be sufficiently achieved and a uniform resistive film will not be obtained. In carrying out the present invention, the surface of the substrate to be chemically plated is degreased, washed with water, treated with hydrochloric acid, and then immersed, coated, or sprayed with a catalyst solution containing palladium to deposit palladium. Treat with processing solution.

この処理は単に浸漬又は塗布するだけでよい。処理され
た表面は簡単な水洗いだけで常法の化学めつき工程に移
すことができる。次に、本発明を実施例によシ説明する
が、本発明はこれらにようなんら限定されるものではな
い。
This treatment can be done by simply dipping or painting. The treated surface can be transferred to a conventional chemical plating process by simply washing with water. Next, the present invention will be explained using Examples, but the present invention is not limited to these in any way.

実施例 1〜1050?角のアルミナ基板を、トリクレ
ン蒸気及び80℃の10%水酸化ナトリウム水溶液でそ
れぞれ10分間脱脂し、水洗後15%塩酸に室温で2分
間浸漬した。
Example 1-1050? The square alumina substrates were degreased for 10 minutes each with trichlene vapor and a 10% aqueous sodium hydroxide solution at 80° C., and after washing with water, they were immersed in 15% hydrochloric acid for 2 minutes at room temperature.

次いで、パラジウム、塩化第一スズ及び塩酸からなる触
媒液(日立化成社製HSlOlB)に室温で10分間浸
漬した後、水洗した。このように処理してアルミナ基板
10枚を作成した。次に、これらアルミナ基板を、下記
表1の組成の前処理液に各1枚づつ室温で5分間浸漬し
、水洗後、下記表2の組成の化学めつき液に浸漬し、め
つき温度を40±2℃とし、面積抵抗値50Ω/口の抵
抗膜が得られるように8分間めつきを行なつた。
Next, it was immersed in a catalyst solution (HSlOlB manufactured by Hitachi Chemical Co., Ltd.) consisting of palladium, stannous chloride, and hydrochloric acid for 10 minutes at room temperature, and then washed with water. Ten alumina substrates were prepared in this manner. Next, each of these alumina substrates was immersed in a pretreatment solution with the composition shown in Table 1 below for 5 minutes at room temperature. After washing with water, the substrates were immersed in a chemical plating solution with the composition shown in Table 2 below, and the plating temperature was adjusted. Plating was carried out at 40±2° C. for 8 minutes so as to obtain a resistive film with a sheet resistance value of 50 Ω/hole.

なお、めつき液量は3tとし、攪拌機による攪拌を加え
た。このようにして得られた抵抗めつき膜を水洗乾燥し
、各めつき膜の面積抵抗膜を測定し、抵抗値のばらつき
を調べた。測定は、一方の面の抵抗膜の9個所について
行ない、4端子法抵抗計を用いた。得られた結果を表1
に併記する。実施例 11〜15無機酸として塩酸又は
硫酸、脂肪族カルボン酉としてシユウ酸を選択使用し、
下記組成(添加1が異なる)の処理液により、実施例1
〜10とレ様の実験を行つた。
The amount of plating liquid was 3 tons, and stirring was performed using a stirrer. The resistance plated films thus obtained were washed with water and dried, and the area resistance of each plated film was measured to examine variations in resistance values. Measurements were made at nine locations on one side of the resistive film using a four-terminal resistance meter. Table 1 shows the results obtained.
Also listed in Examples 11 to 15 Selecting hydrochloric acid or sulfuric acid as the inorganic acid and oxalic acid as the aliphatic carbonaceous acid,
Example 1 was carried out using a treatment solution with the following composition (addition 1 was different).
~10 and Mr. Le's experiments were conducted.

組成及び結果を表3に示す。比較例 1〜8比較例とし
て、本発明の範囲外の組成の処理液を使用し、実施例1
〜15と同様の実験を行なつた(塩酸及びシユウ酸の単
独又は併用並びに水酸化ナトリウムの単独を使用した)
The composition and results are shown in Table 3. Comparative Examples 1 to 8 As comparative examples, a treatment liquid having a composition outside the scope of the present invention was used, and Example 1
Experiments similar to ~15 were conducted (using hydrochloric acid and oxalic acid alone or in combination and sodium hydroxide alone).
.

その組成及び得られた結果を表4に示す。以上の結果か
ら明らかなように、本発明の方法によれば、抵抗値のば
らつきが少ないことがわかる。
Its composition and the results obtained are shown in Table 4. As is clear from the above results, it can be seen that according to the method of the present invention, there is little variation in resistance value.

これに対し、無機酸のみ、脂肪族カルボン酸のみ、アル
カリのみを処理液とした場合、あるいは本発明の範囲を
逸脱した無機酸及び脂肪族カルボン酸併用の場合には、
満足したばらつきのない面積抵抗値が得られないことが
わかる。以上述べたように、本発明の化学めつき前処理
方法は、特に抵抗付プリント回路板における抵抗膜の抵
抗値精度を向上させるものであシ、その製造コスト低減
その他に寄与する所は大である。
On the other hand, when using only an inorganic acid, only an aliphatic carboxylic acid, or only an alkali as a treatment liquid, or when using a combination of an inorganic acid and an aliphatic carboxylic acid that are outside the scope of the present invention,
It can be seen that a satisfactory sheet resistance value without variation cannot be obtained. As described above, the chemical plating pretreatment method of the present invention particularly improves the accuracy of the resistance value of a resistive film in a printed circuit board with a resistor, and makes a significant contribution to reducing manufacturing costs and other aspects. be.

Claims (1)

【特許請求の範囲】 1 基板表面に化学めつきで抵抗を形成する抵抗付プリ
ト回路板の製造において、化学めつき前処理程として無
機酸及び脂肪族カルボン酸よりな混酸で基板表面を処理
することを特徴とする学めつき前処理方法。 2 無機酸が塩酸又は硫酸で脂肪族カルボン酸がシユウ
酸である特許請求の範囲第1項記載の方法。 3 塩酸の濃度が少なくとも1l当り35%塩酸として
10mlでありシユウ酸の濃度が少なくとも0.3g/
lである特許請求の範囲第2項記載の方法。 4 硫酸の濃度が少なくとも30g/lで、シユウ酸の
濃度が少なくとも0.3g/lである特許請求の範囲第
2項記載の方法。
[Claims] 1. In the production of printed circuit boards with resistors in which resistance is formed by chemical plating on the substrate surface, the substrate surface is treated with a mixed acid consisting of an inorganic acid and an aliphatic carboxylic acid as a pretreatment step for chemical plating. A learning preprocessing method characterized by the following. 2. The method according to claim 1, wherein the inorganic acid is hydrochloric acid or sulfuric acid and the aliphatic carboxylic acid is oxalic acid. 3 The concentration of hydrochloric acid is at least 10 ml as 35% hydrochloric acid per liter, and the concentration of oxalic acid is at least 0.3 g/l.
2. The method according to claim 2, wherein: l. 4. Process according to claim 2, wherein the concentration of sulfuric acid is at least 30 g/l and the concentration of oxalic acid is at least 0.3 g/l.
JP12967577A 1977-10-31 1977-10-31 Chemical plating pretreatment method Expired JPS5949305B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12967577A JPS5949305B2 (en) 1977-10-31 1977-10-31 Chemical plating pretreatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12967577A JPS5949305B2 (en) 1977-10-31 1977-10-31 Chemical plating pretreatment method

Publications (2)

Publication Number Publication Date
JPS5462930A JPS5462930A (en) 1979-05-21
JPS5949305B2 true JPS5949305B2 (en) 1984-12-01

Family

ID=15015376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12967577A Expired JPS5949305B2 (en) 1977-10-31 1977-10-31 Chemical plating pretreatment method

Country Status (1)

Country Link
JP (1) JPS5949305B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011155196A (en) * 2010-01-28 2011-08-11 Kyocera Corp Wiring board and method of manufacturing wiring board
JP2011198890A (en) * 2010-03-18 2011-10-06 Konica Minolta Ij Technologies Inc Metal pattern forming method, and metal pattern formed using the same
JP2011222797A (en) * 2010-04-12 2011-11-04 Konica Minolta Ij Technologies Inc Catalyst pattern manufacturing method and metal pattern manufacturing method
JP2011222798A (en) * 2010-04-12 2011-11-04 Konica Minolta Ij Technologies Inc Metal pattern manufacturing method and metal pattern

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59193089A (en) * 1983-04-15 1984-11-01 日立コンデンサ株式会社 Method of producing printed circuit board
US4639380A (en) * 1985-05-06 1987-01-27 International Business Machines Corporation Process for preparing a substrate for subsequent electroless deposition of a metal
JPH06299360A (en) * 1993-04-09 1994-10-25 Hitachi Chem Co Ltd Pretreating liquid for electroless plating
EP3724371A1 (en) * 2017-12-12 2020-10-21 Chemetall GmbH Boric acid-free composition for removing deposits containing cryolite

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011155196A (en) * 2010-01-28 2011-08-11 Kyocera Corp Wiring board and method of manufacturing wiring board
JP2011198890A (en) * 2010-03-18 2011-10-06 Konica Minolta Ij Technologies Inc Metal pattern forming method, and metal pattern formed using the same
JP2011222797A (en) * 2010-04-12 2011-11-04 Konica Minolta Ij Technologies Inc Catalyst pattern manufacturing method and metal pattern manufacturing method
JP2011222798A (en) * 2010-04-12 2011-11-04 Konica Minolta Ij Technologies Inc Metal pattern manufacturing method and metal pattern

Also Published As

Publication number Publication date
JPS5462930A (en) 1979-05-21

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