JPS5948636A - High speed return type fine particle attachment detection sensor - Google Patents
High speed return type fine particle attachment detection sensorInfo
- Publication number
- JPS5948636A JPS5948636A JP16040682A JP16040682A JPS5948636A JP S5948636 A JPS5948636 A JP S5948636A JP 16040682 A JP16040682 A JP 16040682A JP 16040682 A JP16040682 A JP 16040682A JP S5948636 A JPS5948636 A JP S5948636A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- detection sensor
- piezoelectric vibrator
- piezoelectric
- return type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は環境管理或は各種計装に於いて要求される結霧
、粉塵付着の有無、露点又は霜点等全検知、測定するセ
ンサに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sensor that detects and measures all of the conditions required for environmental management or various instrumentation, such as fog formation, presence of dust adhesion, dew point, or frost point.
従来から結露或は微粉塵の付着を検知する手法の−とし
て圧電振動子主表面への水滴等の付着による共振周波数
或は等制定数の変化を測定するものがあるが、これらは
いずれも一度前記微粒子が付着するとこれを除去しセン
サたる圧電振動子を原状に復帰させるのが困難であった
。Conventionally, there is a method for detecting dew condensation or fine dust adhesion that measures changes in the resonant frequency or constant frequency due to adhesion of water droplets to the main surface of a piezoelectric vibrator, but these methods can only be performed once. Once the fine particles adhere, it is difficult to remove them and return the piezoelectric vibrator serving as the sensor to its original state.
例えば水滴の場合にあっては前記圧電振動子衣＃ｉｔ加
熱し、粉塵の場合はエア・ジェットに頼る等センサ本体
より周辺装置が大型となる等の欠点があった。For example, in the case of water droplets, the piezoelectric vibrator must be heated, and in the case of dust, it relies on air jets, which has disadvantages such as peripheral devices being larger than the sensor body.
本発明は圧電振動子を利用する結露、粉塵付着等の検知
センサに於ける上述の欠点を除去する為になされたもの
であって、圧電振動子主表面に微粒子が付着したことを
検知した後前記圧電振動子をオーバー・ドライブするこ
とによって前記付着した微粒子を急速に飛散せしめ次の
計測に備えるようにした高速復帰型微粒子付着検知上ン
サ會提供することを目的とする。The present invention was made in order to eliminate the above-mentioned drawbacks of sensors for detecting dew condensation, dust adhesion, etc. that utilize piezoelectric vibrators. It is an object of the present invention to provide a high-speed recovery type particle adhesion detection sensor which rapidly scatters the adhered particles by overdriving the piezoelectric vibrator to prepare for the next measurement.
以下、不発明を図面に示す実施例によって詳細に説明す
る。Hereinafter, the invention will be explained in detail with reference to embodiments shown in the drawings.
第１図は本発明に係る高速復帰型微粒子付着検知センサ
の基本的構成を示す図である。FIG. 1 is a diagram showing the basic configuration of a fast return type particle adhesion detection sensor according to the present invention.
即ち、１はセンサ本体たる圧電振動子であってこれをド
ライブレベル可変型発振器２によって所定のドライブレ
ベルにて励振する。That is, 1 is a piezoelectric vibrator which is the main body of the sensor, and is excited at a predetermined drive level by a variable drive level oscillator 2.
而して前記発振器２を例えば振動子の等価抵抗算定回路
３によって算定しその値を比較器４によって基準値と比
較し一定のスレッシホールドを越えた時点で前記発振回
路２のドライブレベルを上げ前記振動子１主表面に付着
した水滴、微細粉塵等を飛散させるものである。Then, the value of the oscillator 2 is calculated by, for example, an equivalent resistance calculation circuit 3 of a vibrator, and the value is compared with a reference value by a comparator 4, and when a certain threshold is exceeded, the drive level of the oscillation circuit 2 is increased. This is to scatter water droplets, fine dust, etc. adhering to the main surface of the vibrator 1.
前記発振回路２及び等価抵抗算定回路３は例えば通常の
ＣＩメータの振幅レベル可変上限を大きくした回路を用
いればよいので更に詳細な回路構成の説明は省略する。As the oscillation circuit 2 and the equivalent resistance calculation circuit 3, for example, a circuit with a larger amplitude level variable upper limit of a normal CI meter may be used, and therefore a detailed explanation of the circuit configuration will be omitted.
同、本発明に係るセンサたる振動子１はどのような振動
モードをとる圧電板も一応可能であるが、圧電板表面に
付着した微粒子を急速に飛散させる為には振幅レベルを
大幅に高くする必モードの振動子を用いるのがよい。Similarly, the vibrator 1, which is a sensor according to the present invention, can be made of a piezoelectric plate that takes any vibration mode, but in order to rapidly scatter fine particles attached to the surface of the piezoelectric plate, the amplitude level must be significantly increased. It is better to use a resonator with a necessary mode.
本発明は以上説明した如く構成するので通常の圧電振動
子発振回路にわずかな付加回路を付すのみで微粒子付着
検知センサたる圧電振動子全速かに原状に復帰せしめる
ことができる。Since the present invention is constructed as described above, it is possible to restore the piezoelectric vibrator, which is a particulate adhesion detection sensor, to its original state at full speed by simply adding a small additional circuit to a normal piezoelectric vibrator oscillation circuit.
しかしながら前記圧電振動子をその破壊限界近傍まで振
動させても飛散し難い微粒物質も存在するので、センサ
たる圧電振動子をオーバー・ドライブするのみならず更
に加熱或は外部から機械的衝撃を加えるようにしてもよ
い。However, even if the piezoelectric vibrator is vibrated close to its destruction limit, there are some fine particles that are difficult to scatter, so it is necessary not only to overdrive the piezoelectric vibrator as a sensor but also to apply further heat or mechanical shock from the outside. You can also do this.
第２図は圧電振動子１の主表面表裏に付着する励振電極
５，６の少なくとも一方６を入出力端８及び９を備えた
渦巻状電極とし、通常は前記他の電極５との間に高周波
電圧全印加して励振せしめると共に前記圧電振動子１の
表面に付着した水滴等の微粒子を除去する場合には前述
のドライブレベル上昇と共に適当なスイッチング回路１
０ｆ：閉じ前記入出力端子８及び９間に直流電圧を印加
するようにすればよい。In FIG. 2, at least one of the excitation electrodes 5 and 6 attached to the front and back surfaces of the main surface of the piezoelectric vibrator 1 is a spiral electrode with input and output ends 8 and 9, and is usually connected to the other electrode 5. When applying a full high-frequency voltage to excite the piezoelectric vibrator 1 and removing particulates such as water droplets attached to the surface of the piezoelectric vibrator 1, the drive level is raised as described above and an appropriate switching circuit 1 is applied.
0f: Closed and DC voltage may be applied between the input/output terminals 8 and 9.
斯くすることによって水滴、霜等の気化性或は昇華性物
質を一層急速に除去することができは（ｂ）に示す如く
外部から機械的衝撃を与えることも有効である。By doing so, vaporizable or sublimable substances such as water droplets and frost can be removed more rapidly, and it is also effective to apply mechanical shock from the outside as shown in (b).
即ち、同図（ａ）に示す如く圧電セラミックス１１の変
位方向（図上矢印）に沿ってセンサたる圧電振動子１を
適当な脚１２，１２．・・・・・・によって固定する。That is, as shown in FIG. 3(a), the piezoelectric vibrator 1 serving as a sensor is attached to appropriate legs 12, 12 . It is fixed by...
前記膜１２，１２．・・・・・の一端と前記圧電振動子
１との結合点は該圧電振動子１の励撮ヲ妨げないように
振動エネルギの閉じ込め範囲の外側に設けるべきことは
いうまでもない。The membranes 12, 12. It goes without saying that the connection point between one end of the piezoelectric vibrator 1 and the piezoelectric vibrator 1 should be provided outside the vibration energy confinement range so as not to interfere with the excitation of the piezoelectric vibrator 1.
斯くすることによって必要に応じて前記圧電セラミック
ス１１にスイッチング回路１３を介して直流電圧を印加
すれば前記圧電セラミックス１１は一瞬前記矢印の方向
に衝動しセンサたる前記圧電振動子１表面に付着した微
粒子、特に少々の加熱によっては気化することもなく又
励振レベルの上昇程度では容易に離脱し難い微粉状固体
粒子等を一時的に浮揚せしめ除去を容易にするものであ
る。By doing so, if a DC voltage is applied to the piezoelectric ceramic 11 via the switching circuit 13 as necessary, the piezoelectric ceramic 11 is momentarily impulsed in the direction of the arrow, and the fine particles attached to the surface of the piezoelectric vibrator 1, which is a sensor, are Particularly, fine powder solid particles, etc., which do not vaporize even with a small amount of heating and are difficult to separate when the excitation level is increased, are temporarily suspended to facilitate their removal.
伺、同図（ｂｌは前記圧電セラミックス１１を電磁プラ
ンジャ１４に置換したものであってその効果は前述と同
等である。In the figure, the piezoelectric ceramic 11 is replaced with an electromagnetic plunger 14, and the effect is the same as that described above.
本発明は以上説明した如く構成するので圧電振動子その
ものをセンサとして用いその表面に物質が付着したか否
かを検知し、これによって露点、霜点等全測定したり或
は粉塵の多い環境の監視等を行うセンサに於いて、極め
て簡単な装置を付加するのみで上記微粒子が付着するこ
とによって喪失したセンサ機能を急速に回復せしめる上
で著しい効果を奏するものである。Since the present invention is constructed as described above, the piezoelectric vibrator itself is used as a sensor to detect whether or not a substance has adhered to its surface, thereby making it possible to measure all aspects such as dew point and frost point, or to measure dusty environments. By simply adding an extremely simple device to a sensor that performs monitoring, etc., it is extremely effective in quickly restoring the sensor function that has been lost due to the attachment of the fine particles.
第１図は本発明の高速復帰型微粒子付着検知センサのブ
ロック図、第２図は本発明に於いて使用する加熱兼用励
振電極を付したセンサーの一実施例を示す図、第３図（
ａｌ及び（ｂ）は夫々本発明に於いて使用する衝撃装置
付センサの相異なる二つの実施例を示す図である。
１・・・・・・圧電振動子（センサ）、２・・・・・・
オーバー・ドライブ回路、６・・・・・・加熱兼用励振
電極、１１・・・・・圧電セラミクス、１４・・・・・
・′電磁プランジャ特許出願人 東洋通信機株式会社Fig. 1 is a block diagram of a fast return type particulate adhesion detection sensor of the present invention, Fig. 2 is a diagram showing an embodiment of a sensor equipped with a heating and excitation electrode used in the present invention, and Fig. 3 (
1A and 1B are diagrams showing two different embodiments of a sensor with an impact device used in the present invention. 1...Piezoelectric vibrator (sensor), 2...
Overdrive circuit, 6... Heating/excitation electrode, 11... Piezoelectric ceramics, 14...
・'Electromagnetic plunger patent applicant Toyo Tsushinki Co., Ltd.
Claims (1)
せしめその際の共振周波数又は等測定数の変動により上
記微粒子の付着を検知するセンサに於いて、前記圧電振
動子をオーバー・ドライブすることによりこれに付着し
た前記微粒子を飛散せしめ急速に原状に復帰させること
を特徴とする高速復帰型微粒子付着検知センサ。 （２）前記圧電振動子の振動モードがはソ純粋な厚み斡
卓振動であることを特徴とする特許請求の範囲１記載の
高速復帰型微粒子付着検知センサ。 一層であること全特徴とする特許請求の範囲１記載の高
速復帰型微粒子付着検知センサ。 （４）前記振動子の主面に付着する電極の少なくとも一
方を励振電極兼発熱電極とすることにより前記振動子に
付着した水滴又は霜等’ｒ 一層急速に除去するように
したことを特徴とする特許請求の範囲１，２又は３記載
の高速復帰型微粒子付着検知センサ。 （５）前記圧電振動子をその振動を阻害することなく圧
電セラミックス或は電磁プランジャの如１！撮動台に固
定し、前記圧電振動子全オーバー・ドライブ或は／及び
加熱すると同時に機械的振動金与えることによって前記
圧電振動子表面に付着した微粒子を更に一層急速に飛散
せしめるようにしたことを特徴とする特許請求の範囲１
乃至４記載の高速復帰型微粒子付着検知センサ。[Scope of Claims] (11) In a sensor for attaching water droplets, fine dust, frost, etc. to the surface of a piezoelectric vibrator and detecting the adhesion of the fine particles by fluctuations in the resonant frequency or the number of measurements at that time, the piezoelectric A high-speed recovery type particle adhesion detection sensor characterized by overdriving a vibrator to scatter the particles attached to the vibrator and rapidly return it to its original state. (2) The vibration mode of the piezoelectric vibrator is A fast return type particulate adhesion detection sensor according to claim 1, characterized by pure thickness control vibration.A fast return type particulate adhesion detection sensor according to claim 1, characterized by a single layer. (4) At least one of the electrodes attached to the main surface of the vibrator is used as an excitation electrode and a heating electrode, so that water droplets, frost, etc. attached to the vibrator can be removed more rapidly. A fast return type particulate adhesion detection sensor according to claim 1, 2 or 3. (5) The piezoelectric vibrator may be mounted on a photographing platform such as a piezoelectric ceramic or an electromagnetic plunger without disturbing its vibration. A patent characterized in that fine particles attached to the surface of the piezoelectric vibrator are scattered even more rapidly by fixing the piezoelectric vibrator, overdriving the entire piezoelectric vibrator, and/or applying mechanical vibration at the same time as heating the piezoelectric vibrator. Claim 1
4. The fast return type particle adhesion detection sensor as described in 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16040682A JPS5948636A (en) | 1982-09-13 | 1982-09-13 | High speed return type fine particle attachment detection sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16040682A JPS5948636A (en) | 1982-09-13 | 1982-09-13 | High speed return type fine particle attachment detection sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5948636A true JPS5948636A (en) | 1984-03-19 |
| JPH0237975B2 JPH0237975B2 (en) | 1990-08-28 |
Family
ID=15714243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16040682A Granted JPS5948636A (en) | 1982-09-13 | 1982-09-13 | High speed return type fine particle attachment detection sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948636A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03188350A (en) * | 1989-11-27 | 1991-08-16 | Hughes Aircraft Co | Sensor element in multilayer ceramic tape structure |
| JPH04222382A (en) * | 1990-03-21 | 1992-08-12 | Carbonell Co Anonima | Push drying machine |
| JP2012249063A (en) * | 2011-05-27 | 2012-12-13 | Showa Shinku:Kk | Strong excitation circuit of piezoelectric element and strong excitation method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291485A (en) * | 1976-01-28 | 1977-08-01 | Tdk Corp | Dew point meter |
| JPS5611340A (en) * | 1979-07-04 | 1981-02-04 | Graviner Ltd | Detector for particles in gaseous medium |
-
1982
- 1982-09-13 JP JP16040682A patent/JPS5948636A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291485A (en) * | 1976-01-28 | 1977-08-01 | Tdk Corp | Dew point meter |
| JPS5611340A (en) * | 1979-07-04 | 1981-02-04 | Graviner Ltd | Detector for particles in gaseous medium |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03188350A (en) * | 1989-11-27 | 1991-08-16 | Hughes Aircraft Co | Sensor element in multilayer ceramic tape structure |
| JPH04222382A (en) * | 1990-03-21 | 1992-08-12 | Carbonell Co Anonima | Push drying machine |
| JP2012249063A (en) * | 2011-05-27 | 2012-12-13 | Showa Shinku:Kk | Strong excitation circuit of piezoelectric element and strong excitation method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237975B2 (en) | 1990-08-28 |
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