JPS594851U - Reduction mechanism for stage drive of electron beam lithography equipment - Google Patents

Reduction mechanism for stage drive of electron beam lithography equipment

Info

Publication number
JPS594851U
JPS594851U JP10074782U JP10074782U JPS594851U JP S594851 U JPS594851 U JP S594851U JP 10074782 U JP10074782 U JP 10074782U JP 10074782 U JP10074782 U JP 10074782U JP S594851 U JPS594851 U JP S594851U
Authority
JP
Japan
Prior art keywords
electron beam
beam lithography
reduction mechanism
stage drive
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10074782U
Other languages
Japanese (ja)
Inventor
岩瀬　昭
Original Assignee
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝機械株式会社 filed Critical 東芝機械株式会社
Priority to JP10074782U priority Critical patent/JPS594851U/en
Publication of JPS594851U publication Critical patent/JPS594851U/en
Pending legal-status Critical Current

Links

Landscapes

  • Fax Reproducing Arrangements (AREA)
  • Transmission Devices (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例における断面図である。 １・・・入力軸、４．６・・・歯車、５・・・出力軸、
８・・・プーリ、９・・・ベルト。The figure is a sectional view of one embodiment of the present invention. 1...Input shaft, 4.6...Gear, 5...Output shaft,
8...Pulley, 9...Belt.

Claims (1)

【実用新案登録請求の範囲】 、（１）　　電動機へ接続された入力軸と、被駆動体へ
接続された出力軸と、前記両軸へ固着され互に噛み合う
一対の歯車と、前記歯車の減速比に対し同−或いは小さ
い減速化の摩擦伝達機構とを前記両軸へ設けた電子ビー
ム描画装置のステージ駆動用減速機構。 （２）　　摩擦伝達機構としてベルトを使用したことを
特徴とする実用新案登録請求の範囲第１項記載の電子ビ
ーム描画装置のステージ駆動用減速機構。　　　　− （３）　　摩擦伝達機構として摩擦車を使用したことを
特徴とする実用新案登録請求の範囲第１項記載の電子ビ
ーム描画装置のステージ駆動用減速機構。[Claims for Utility Model Registration] (1) An input shaft connected to an electric motor, an output shaft connected to a driven body, a pair of gears that are fixed to both shafts and mesh with each other, and a reduction gear of the gears. A deceleration mechanism for driving a stage of an electron beam lithography apparatus, wherein a friction transmission mechanism with a speed reduction equal to or smaller than the ratio is provided on both of the shafts. (2) A speed reduction mechanism for driving a stage of an electron beam lithography apparatus according to claim 1, which is characterized in that a belt is used as the friction transmission mechanism. - (3) A deceleration mechanism for driving a stage of an electron beam lithography apparatus according to claim 1, which is characterized in that a friction wheel is used as the friction transmission mechanism.
JP10074782U 1982-07-02 1982-07-02 Reduction mechanism for stage drive of electron beam lithography equipment Pending JPS594851U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10074782U JPS594851U (en) 1982-07-02 1982-07-02 Reduction mechanism for stage drive of electron beam lithography equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10074782U JPS594851U (en) 1982-07-02 1982-07-02 Reduction mechanism for stage drive of electron beam lithography equipment

Publications (1)

Publication Number Publication Date
JPS594851U true JPS594851U (en) 1984-01-12

Family

ID=30238198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10074782U Pending JPS594851U (en) 1982-07-02 1982-07-02 Reduction mechanism for stage drive of electron beam lithography equipment

Country Status (1)

Country Link
JP (1) JPS594851U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104038U (en) * 1984-12-11 1986-07-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104038U (en) * 1984-12-11 1986-07-02

Similar Documents

Publication Publication Date Title
JPS594851U (en) Reduction mechanism for stage drive of electron beam lithography equipment
JPH06219168A (en) Driving device for vehicle
JPS6018351U (en) Planetary gear transmission
JPS5833317U (en) Transmission device of cover truck
JPS5869146U (en) rotary drive device
JPS58143769U (en) Tracked vehicle power transmission system
JPS603341U (en) power transmission device
JPS6138351U (en) Power transmission mechanism
JPS6035244U (en) Operation inspection device for differential gear equipment
JPS59157121U (en) Cultivating rotary drive device of tiller
JPS5948690U (en) toy power transmission device
JPS58137680U (en) Passenger conveyor drive device
JPS60137769U (en) Elevator hoisting machine device
JPS598984U (en) Elevator drive device
JPS5814539U (en) power transmission device
JPS58191455U (en) Hydraulic drive vehicle power transmission device
JPS5875291U (en) Marine hoist drive device
JPS59169451U (en) power transmission device
JPS5991956U (en) traveling device
JPS6411467U (en)
JPS6031538U (en) Auxiliary drive transmission
JPS6043752U (en) multi-speed gearbox
JPS608472U (en) engine starting device
JPS5986453U (en) transmission
JPS6138352U (en) Multi-gear transmission