JPS5946664U - Double-sided processing equipment - Google Patents

Double-sided processing equipment

Info

Publication number
JPS5946664U
JPS5946664U JP1982141894U JP14189482U JPS5946664U JP S5946664 U JPS5946664 U JP S5946664U JP 1982141894 U JP1982141894 U JP 1982141894U JP 14189482 U JP14189482 U JP 14189482U JP S5946664 U JPS5946664 U JP S5946664U
Authority
JP
Japan
Prior art keywords
cylinder tube
double
compressed air
air chamber
sided processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982141894U
Other languages
Japanese (ja)
Other versions
JPS6212537Y2 (en
Inventor
鈴木　寿恵男
Original Assignee
ホ−ヤ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ホ−ヤ株式会社 filed Critical ホ−ヤ株式会社
Priority to JP1982141894U priority Critical patent/JPS5946664U/en
Publication of JPS5946664U publication Critical patent/JPS5946664U/en
Application granted granted Critical
Publication of JPS6212537Y2 publication Critical patent/JPS6212537Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案装置の一部を切欠いて示した側面図、第
２図は同上装置における押出しロッドとその駆動装置の
取付状態を示す要部断面図である。 １：上定盤、、２：下定盤、３：キャリア、４：被加工
物、６：圧縮空気室、８：給排気管、９ニジリンダチユ
ーブ、１０：ピストン、１１：ばね、１２：ストッパ、
１４：押出しロッド、１５：開口部、１９：圧力逃し弁
。FIG. 1 is a partially cutaway side view of the device of the present invention, and FIG. 2 is a cross-sectional view of the essential parts of the same device showing how the extrusion rod and its driving device are attached. 1: Upper surface plate, 2: Lower surface plate, 3: Carrier, 4: Workpiece, 6: Compressed air chamber, 8: Supply and exhaust pipe, 9 Niji cylinder tube, 10: Piston, 11: Spring, 12: Stopper ,
14: Extrusion rod, 15: Opening, 19: Pressure relief valve.

Claims (1)

【実用新案登録請求の範囲】 １　下定盤と上定盤とを備え、その間に被加工物を保持
するキャリアを設けた両面加工装置において、上定盤に
給排気管８と連通した圧縮空気室６を設け、圧縮空気室
６の底部にシリンダチューブ９を固定し、シリンダチュ
ーブ９内に上下動自在に挿入され、下面に当接するばね
１１によって上方に付勢されてシリンダチューブ９の上
端に設けたストッパ１２に係止され、かつ圧縮空気室６
内に供給される空気の圧力によって下動するピストン１
０を上部に有する押出しロッド１４を、上定盤における
被加工物の当接面から突出しうるようにシリンダチュー
ブ９の下部に形成した開口部１５内に配置したことを特
徴とする両面加工装置。 ２　前記シリンダチューブ９は、圧縮空気室６の圧力が
予じめ定めた圧力以上になるとミ前記圧縮空気室６と開
口部１５とを連通させる圧力逃し弁１９を備えている実
用新案登録請求の範囲第１項記載の両面加工装置。[Scope of Claim for Utility Model Registration] 1. In a double-sided processing device comprising a lower surface plate and an upper surface plate, and a carrier for holding a workpiece between them, a compressed air chamber communicating with the supply/exhaust pipe 8 is provided in the upper surface plate. A cylinder tube 9 is fixed to the bottom of the compressed air chamber 6, and the cylinder tube 9 is inserted into the cylinder tube 9 so as to be movable up and down, and is biased upward by a spring 11 that abuts the lower surface of the cylinder tube 9. The compressed air chamber 6 is
A piston 1 that moves downward due to the pressure of air supplied therein.
2. A double-sided processing device characterized in that an extrusion rod 14 having a number 0 at the top thereof is disposed in an opening 15 formed at the lower part of the cylinder tube 9 so as to be able to protrude from the contact surface of the workpiece on the upper surface plate. 2. The cylinder tube 9 is equipped with a pressure relief valve 19 that communicates the compressed air chamber 6 with the opening 15 when the pressure in the compressed air chamber 6 exceeds a predetermined pressure. Double-sided processing device according to scope 1.
JP1982141894U 1982-09-21 1982-09-21 Double-sided processing equipment Granted JPS5946664U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982141894U JPS5946664U (en) 1982-09-21 1982-09-21 Double-sided processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982141894U JPS5946664U (en) 1982-09-21 1982-09-21 Double-sided processing equipment

Publications (2)

Publication Number Publication Date
JPS5946664U true JPS5946664U (en) 1984-03-28
JPS6212537Y2 JPS6212537Y2 (en) 1987-04-01

Family

ID=30317214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982141894U Granted JPS5946664U (en) 1982-09-21 1982-09-21 Double-sided processing equipment

Country Status (1)

Country Link
JP (1) JPS5946664U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62120966A (en) * 1985-11-19 1987-06-02 Haruchika Seimitsu:Kk Lens transport mechanism of automatic grinding device
JPH09207066A (en) * 1995-11-30 1997-08-12 Speedfam Corp Polishing device equipped with product taking out device
JP2003159645A (en) * 2001-11-22 2003-06-03 Sumitomo Mitsubishi Silicon Corp Grinding device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537141U (en) * 1978-08-28 1980-03-10

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537141B2 (en) * 1972-08-01 1980-09-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537141U (en) * 1978-08-28 1980-03-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62120966A (en) * 1985-11-19 1987-06-02 Haruchika Seimitsu:Kk Lens transport mechanism of automatic grinding device
JPH09207066A (en) * 1995-11-30 1997-08-12 Speedfam Corp Polishing device equipped with product taking out device
JP2003159645A (en) * 2001-11-22 2003-06-03 Sumitomo Mitsubishi Silicon Corp Grinding device

Also Published As

Publication number Publication date
JPS6212537Y2 (en) 1987-04-01

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