JPS5946053A - Manufacture of aluminium coated lead frame - Google Patents
Manufacture of aluminium coated lead frameInfo
- Publication number
- JPS5946053A JPS5946053A JP15642882A JP15642882A JPS5946053A JP S5946053 A JPS5946053 A JP S5946053A JP 15642882 A JP15642882 A JP 15642882A JP 15642882 A JP15642882 A JP 15642882A JP S5946053 A JPS5946053 A JP S5946053A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- coated
- lead frame
- culm
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 31
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000004411 aluminium Substances 0.000 title abstract 3
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 238000000576 coating method Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 16
- 230000000873 masking effect Effects 0.000 claims description 3
- FDQGNLOWMMVRQL-UHFFFAOYSA-N Allobarbital Chemical compound C=CCC1(CC=C)C(=O)NC(=O)NC1=O FDQGNLOWMMVRQL-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 16
- 238000005530 etching Methods 0.000 abstract 1
- 238000005253 cladding Methods 0.000 description 6
- 238000004080 punching Methods 0.000 description 5
- 241000257465 Echinoidea Species 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 241000283690 Bos taurus Species 0.000 description 1
- 101100203596 Caenorhabditis elegans sol-1 gene Proteins 0.000 description 1
- 241000282693 Cercopithecidae Species 0.000 description 1
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 235000014443 Pyrus communis Nutrition 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 101150114468 TUB1 gene Proteins 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 210000000003 hoof Anatomy 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010902 straw Substances 0.000 description 1
- 230000009182 swimming Effects 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4828—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
- H01L23/49582—Metallic layers on lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は集積回路（Ｉ Ｃ）やトランジスタの、」、う
な半導体装置の製ｊ責に用いられる）′ルミー１つ１１
被覆リードル−ｌ＼の製造方法に関（ｊる。DETAILED DESCRIPTION OF THE INVENTION The present invention is applied to the manufacturing of semiconductor devices such as integrated circuits (ICs) and transistors.
Regarding the manufacturing method of coated lead-l\.
半導体装置°の製造においＣ、アルミ−ラム較Ｗリード
フレームの使用は現イ１−ｄ３ Ｊ、び将来の動、向ど
して急速に高まりつつある。In the manufacture of semiconductor devices, the use of aluminum-laminated lead frames is rapidly increasing, both now and in the future.
ここに使用されるアルミニウム被覆り−１−ル−ムは、
例えば４２ア【１イ（Ｆｅ−４２％Ｎ１白金）等の帯状
金属条体−ににイの艮］°力向に）す１定Ｃ７，）幅の
アルミ−１クム被覆をス１〜ライーノ゛状に設（ｊだし
のを所定のパターン形状に打抜いに４ｉ４ 造で” ｔ
＆）る、。The aluminum coated 1-room used here is
For example, a strip-shaped metal strip such as 42A [1A (Fe-42%N1Platinum)] is coated with aluminum with a width of 1C7,) in the force direction. Cut out the stock into the specified pattern shape using 4i4 construction.
&) Ru,.
従来、このよ゛うな構造の１フル〜ミーウム被）“ζリ
ードフレームは、帯状金属条鉢土に−での長手り向に所
定の幅のアルミニウムＰＨ／）ｓ （ら２ｒるシーーブ
を月延Ｌ１゛接するクシラド払、あるいは帯状金属条体
Ｊ−１，ｌ所定の幅のマスクを当−（でアルミ−ラム金
属を５１・３￥１、スパッタリングｄりるいはイＡンゾ
レー１イン′りする気相メツ−１法によりそれぞれシＪ
造され（いる。Conventionally, a lead frame of such a structure is made by extending an aluminum sheave of a predetermined width in the longitudinal direction of a strip of metal row soil in a month. Wipe the aluminum ram metal 51.3 yen 1, sputtering d or ion sol 1 in. By the vapor phase Metsu-1 method, each
It is created.
’ｙ シラ＋：ｌ／Ｉ Ｌ、１．．１．− ｒｉｊ Ｌ
／ ／ＪＪ、−）Ｉｊ ／’ ）Ｉｙ ミーノ／ ム９
”＋ｊ−−ゾを１十延Ｊ−ｉ接りる万？人Ｃ′あるが、
Ｐ）しｆ、−ウノ、ｆｉゞ）Ｊ−ゾｊｖさが薄く軟弱イ
ｆために全屈条体−１１＼ぞの（１ン置１太めに？、ｆ
ｌ ＋；’、ｉかｔ’ｙ＞ ”）、このことからノ′ル
ミーウム被苗の＝１法粕１哀を１−げることがｔ１１シ
いという欠点がｄする。特に第１図のＪうに金属条体１
−にストノイゾ状のノフルミニウム被覆を多条形成りる
場合に１．Ｌ、クラッド法ではアルミニウム被留相Ｌ１
間の・Ｊ法粕撓を−１げることがされめて］第４緊ＩＩ
Ｃ＋１’Ｊる。'y Shira+: l/I L, 1. ．． 1. - rij L
/ /JJ, -)Ij /')Iy Mino/Mu9
``There are 10,000 people C' who can take +j--zo for 10 times,
P) し f, -uno, fiゞ) J-zo jv is thin and soft f, so the whole flexural body-11\zono (1 inch thicker every 1 inch?, f
l+;', i or t'y>''), from this there is a drawback that it is difficult to produce = 1 lees 1 of Normium seedlings at t11.Especially in the case of Fig. 1. J Sea urchin metal strip 1
- When forming a multi-striped nofluminium coating in the form of a stoichiometry, 1. L, aluminum retained phase L1 in the cladding method
It was decided that the difference between J and J method would be reduced by -1] 4th tense II
C+1'Jru.
す／ｊわらクラッド法に３Ｊ、れば、アルミーウム；ｒ
１デーノを）ｉ−延１］−ルＩｎ Ｊ、り月越＋’−１
，ＪＢりる際、（１）例えば１【ｊさ１０〜２０μのア
ルミニウムｆＰｉ ｊ−−−１を：どの−１ツヂ部をｂ
つ（刀イド「−１−ルにＪ、す１１シ置決めｃＪる場合
にｄハノる前記土ツヂ部のまくれ、（２）圧延１−１−
ルの動きによるアルミーウム；Ｉゞｊテープの４１°１
１方向の移動、（：））汀延月二接前のアルミニウムＲ
′ｉｉ”−ノ゛の泳さ゛、（／ｌ） Ｉ：ｔ−延力の分
イ１ｊにＪ、るノノルミーウＩｓ ｆＰ！ ’ｊ−ノ゛
の蛇（Ｊ等を（１じ、これが原因と４１ってアル）ミー
ウノ、ｆ！”Ｊ ｊ−ノの１１′！置決めを国辣＋、Ｙ
Ｌ ’−（いる１、さらにまたり゛ノットｄ１にＪ、
れば／フルミーウノ、ｉ！’Ｉ ’ −Ｊは張力が弱い
ため（こ金属系１木、１に連わ、的（、−１延１Ｌ接り
る場合にりれ易く、このことから１：延ス〔−１・を高
速化できないと共に、テーノ゛月ｊと部分（３１他の部
分ｊ、すｒＬ’ｉ１’ｚ応力が１；゛ら；１：る〕ε−
めｌ５．．１ｆを残ｌノ）゛）りく、打抜き後疫形を生
じるおイれがある。If 3J is applied to the straw cladding method, then aluminum; r
1 Deno) i-en 1]-le In J, ritsukoshi+'-1
, When installing JB, (1) For example, 1[j is 10~20μ aluminum fPi j ---1: Which -1 joint part is
(2) Rolling 1-1-
Aluminum due to the movement of the le; 41°1 of Iji tape
Movement in one direction, (:)) Aluminum R in front of the two tangents
'ii''-No's swimming, (/l) I: t-Nonormiu Is fP! 'j-No's snake (J, etc.) 41 is al) Miuno, f!” J j-no’s 11’! Placement is national +, Y
L'-(1, then J to knot d1,
If / Full Mi Uno, i! 'I' -J has a weak tension (this metal type 1 wood, connected to 1, target (, -1 extension 1L), so it is easy to break, and from this, 1: extension 〔-1. It is not possible to increase the speed, and the stress on the part (31 other parts j, srL'i1'z is 1;
Mel5. ．． If 1f is left unused, there is a tendency for a mold to form after punching.
一方、気相メツ−１法は全屈条体１にノフルミーウム被
覆を要づる部分を開口したＩ、’、１定あるい【、１移
動ンスクを当て−Ｃノアルミニウムをハ・トン１、スパ
ックリングあるい（、ＬイＡンゾレーｊイング（する方
’＜ｉ、（（ｉりるが、このツノｄ１は１ｆＩｌ ｉｌ
Ｌ！ンメクにノ！ルミ−、ウノ、が１・ｊ着ｊ１１．槓
り−るノ、めに例えば蒸着の境界が長手方向、１（時間
にねｌ、り鮮明に維持でさないと共に移動ンスクどして
ｊ−グを用いる場合う−ブを１回ｆり別−［稈Ｃ洗浄（
アルミ−ラム除去）りる必要かあり、１−稈が複雑ｅあ
る。On the other hand, in the vapor phase method, a part of the entire flexural body 1 that requires coating with noflumium is opened, and a constant or moving mask is applied to the entire flexural body 1. ring or (, L i A n z o l e j ing (the one who does it'<i, ((i ruru, but this horn d1 is 1fIl il
L! Nmeku ni no! Rumi and Uno arrived at 1.j.j11. For example, if the boundaries of the evaporation are not kept sharp in the longitudinal direction, then the edges of the evaporation should be kept sharp for a period of time, and when using a jig such as a moving screen, the Separate - [Culm C cleaning (
There is a need to remove aluminum (ram removal), and the 1-culm is complicated.
本発明の「１的は、１）Ｏ記従来ｊ★ｉ（，１の欠点を
Ｆ＋’〆消ｌ・、アルミニウム被覆のくＪ法位置精亀か
１１；ｊい筒中（パ１業的なアルミニウム被覆リードフ
レー１）の製ノ青７７法を提供することにある。The first object of the present invention is 1) Eliminate the drawbacks of the conventional method described in An object of the present invention is to provide a 77 method for producing aluminum-coated lead flakes 1).
すなわら本発明の要旨は、７フルミーウム被覆り−Ｉ〜
ル−ムの製造１ノ法にａヌい−（’ 、 （１）帯状■
属梨捧の全面あるいＣｌリードフレームどしこの機能面
に相当りる部分に連わ’Ｉ： ＣＪる均一イ「ｊ−３さ
のノフルミーウムン皮）胃をｈ色！１１稈、（２）ｊツ
ノ−フグ１ノジス１−を［」的どじた１−ル９条のデス
１ンクテーゾを前記全屈条体のｊ）ルミーウノ＼被覆Ｊ
＝ ！９１定位１１゛ｌに連続しく貼りｆ・Ｉ ｆＪる
一］稈、 （Ｃ＋］前記金１１１条体のマス（ングｊ−
−１貼イ・１部分から）′ルミ−ラム被覆請出部分を一
１ツＪング除ノ、りる１−程、ｆ’ｌ） ｉ’ｉｊ記金
屈条体から７メー１゜ンクノーノ゛を剥因１してマス−
１−ング゛アー−ｆの下から所定の幅のス１−ノイゾ状
のアルミ−ラム被覆を露出さける一］程、（！〕）前記
ｊフルミーラム被預金ｍ条体を所定のパターン形状に４
１１々く一１稈からイｒす、かｌ少＜ｃ ＜と６」二１
、己（２）、に３）、（／ＩＪ （Ｄ ］−程が１ ”
／ −（ンｅ連わ’ｌ： シ’（ｆｊ４’Ｊれることを
特徴どりるアルミーウ１１被覆リードノ１ノームの製ｊ
告ｈＦ人（こある。In other words, the gist of the present invention is that 7 flumium coating-I~
(1) Band-shaped ■
The whole surface of the genus pear or the Cl lead frame is connected to the part corresponding to the functional aspect of this. j) Rumiuno\covering J) Lumi uno\coating J
=! Paste continuously on the 91st position 11゛l f・I fJruichi] culm, (C+) the square of the gold 111 stripes (ng j−
-1 pasting, 1 part)'Remove the exposed part of the Lumilum coating by 7 meters, 1 degree, f'l) i'ij from the metal bending body 7 meters 1 degree.゛Exfoliate 1 and mass
1. A strip of a predetermined width from below the ringer f. 1. Avoid exposing the noise-like aluminum ram coating.
11 times 11 years from the culm, or less <c < and 6''21
, self (2), ni3), (/IJ (D] - degree is 1)
/ - (N e continuous 'l: shi'(fj4'J made of aluminum coated with lead no.1)
Confession F person (there is this).
ｌ １ｉＬ！ ｈ日）明らか＜Ｌ Ｊ、うに本発明はノ
フルミニウノ、被覆−１にマス１−ングｉ−−’、ｆを
貼り（−＝Ｉ （〕て−〕■−ツツノンを４＋うことを
四点どじ、したかつ（）′ルミ−ラム被覆方法どしＣは
クラッド法ｄりるいは気（１１メツ−１−法のいずれＣ
′も長いしの（＝ある。l 1iL! h day) Clear < L J, sea urchin This invention is Noflumini Uno, pasting mass 1-ng i--', f on coating-1 (-=I (]te-]■-tsutsunon 4+ , Shikatsu()' Lumylum coating method C is either cladding method or air (11meth-1-method)
' is also long (= there is.
以上、本発明を添（＝Ｉ図面に承り実施例（こ１．ｌ、
か−）（さらに：ｉ１２明りる。The present invention has been described above with reference to the drawings.
ka-) (More: i12 light.
第１図にｔＩい（、厚さ０ 、３ ｚｌ ｎｎｎ、＋ｌ
＋ ！ＪＯｍｍ、長さ５００７＋１の４２ ’ｊ’ ＋
１イから４ｒる（１１・私金１出条（本」に厚さＣｊ
、 ０１３ ｍｍ 、 ＩＩＪ ５０ ｎｎｎのｉｌル
ミーウノ、Ｗ）フーーブをクラッド法により片面全面に
圧延１接りる。これにＪ、って１！Ｉられるノ′ルミー
ウム被前金属条体１の全体の几Ｉさけ０ 、１３ｍｍ、
アルミ−“ツム被覆２の１１．Ｊさくま０．○Ｏ／１７
ｍｍ （あり、ＩＩＪ ＩＪ、月越後さらに両側をス
リン１〜？ｌること（・二、ｊ、’：） （、ｈ’ｙ
Ｉ’ａ的に素ＨのＩＩＪと同じ５０ ｍｍどηる、。Figure 1 shows tI (, thickness 0, 3 zl nnn, +l
＋! JOmm, 42 'j' + length 5007 + 1
1 to 4r (11.Private money 1 article (book) thickness Cj
, 013 mm, IIJ 50 nnn ill Lumie Uno, W) A hoove is rolled on the entire surface of one side by the cladding method. J to this is 1! The overall size of the normium front metal strip 1 to be treated is 0, 13 mm,
Aluminum - “Tsum Coating 2 11.J Sakuma 0.○O/17
MM
In terms of I'a, it is 50 mm, which is the same as IIJ of elementary H.
つぎに第２図にｄ３いて、前記アルミニウム波Ｆｉ金屈
条体１のアルミニラ１１被預？−１に３３条のンスキン
グデーノ゛Ｊ ＋ Ｊ ＋ Ｊをぞれ−それｂ ｍｍ間
１’ｌｙｉ （−７１，’位［どｊに連続しく貼りｆ＝
Ｊ Ｉ）る１、イし、む：＋（ｊ ｔ３図にＪｊいＣ１
前記マス４ングアー１３− ｃｌ ｌ Ｌ−３の貼り１
・ｊ（〕ど同一ラインをｔ）・）（７ス１ンクｌ−ｆ貼
ｆ−１：：１＋介り目らはみ出たアルミニウム被覆露出
部分／Ｉ会１ソｆンク除去し、さら（こ回−ラインを＋
３−、＋７−第１１図におい（マス）ング）−ゾｊ３．
ｃ３１を、ｔり白１し、−どの１・から１’＝’：ｒ
ｉｌ’７１’ｉ １ｗ １１′／、 ｉｉ？７ ｆ’ｌ
ｌ ｕ しｉ、： ／ ｔ−ｆｙ イ、／”４人のノ
′ルミーウム押支覆５，５．３ンを露出さυる。Next, at d3 in FIG. 2, where is the aluminum 11 of the aluminum wave Fi metal bending body 1 deposited? -1, paste 33 strips of scanning denomination J + J + J, respectively - b mm between 1'lyi (-71,') [Continuously paste f =
J I) Ru1, Ishi, Mu: + (j t3 figure Jj C1
Pasting 1 of the mass 4 Nguar 13-cl l L-3
・J(〕Do the same line t)・)(7th inch l-f pasted f-1::1+Exposed part of aluminum coating protruding from the gap/I side 1 inch) times - line +
3-, +7-Figure 11 (mass) - zoj3.
c31, t minus 1, - which 1. to 1'=':r
il'71'i 1w 11'/, ii? 7 f'l
/ t-fy / ``Four people's Norman presses 5, 5.3 exposed.
；’ｉ り図は、第４図に示されたス１〜′ノイノ゛状
７′ルミーウｌ＼の被覆；貸屈条（Ａ（３を・３３条に
づ） １ｉＪｉ Ｌ／ ／Ｊ）らの′１つのを小り（３
０）ζ゛ある。;'i The diagram shows the coatings of the strips 1 to 7' Lumieur shown in Fig. 4; '1 is smaller (3
0) There is ζ゛.
不ブト明の！ｌｊＪ長は、第４図（こ示りＪ、う４１夫
々＋：’：＋ ’Ｉｔｓ１αに１１ン置ｆ′ＮＩ ｉＪ
されたストライブ状のアルミニウム被Ｓｉ’ｊ ！：）
＋ ！、） 、 ５）を多条形成りることが容易な貞
にあるが、これを１．）１来のクラッド法Ｃ完成さＩＩ
よ）と・ノるど従来技術のＩＪ１明で述へたＪζうにｊ
′ルミーウＬＸ被）Ｃ゛の１」法粕１良を確保りること
かされめＣ困グｉｔ ｃ ｔ＋リ る １゜
不発明ｉＪ、 Ｊ、す、最初から第５）図の」、うな゛
ＩＩＩ、シ了ゾｊ′ルミーウム被留金属条体６゛を製造
することｔ） ｌ’Ｊ （ｊ’Ｇ （あり、この場合従
来のクノツド＞Ｊ、ＣしＩｉ ／Ｉ図４ｊ、す【、１〕
′ルミーウｌ→Ｈ？！の一’Ｊ法粕度を１げることが（
゛さるが、この」ん；合（゛６本発明の／ｊは従来のク
ノッ１へ法と比較して次の点（右利である。Akira Fubuto! The length of ljJ is shown in Figure 4 (shown in J and U41, respectively +:':+').
Striped aluminum coating Si'j! :)
＋! , ), 5) are easy to form into multiple strips, but this is 1. ) Completion of the previous cladding method C II
Jζ sea urchin described in IJ1 light of conventional technology
``Rumiu LX Covered)C゛No. 1''C゛It is difficult to secure the law 1st grade.゛III.Producing a lumium-retained metal strip 6゛t) l'J (j'G (Yes, in this case the conventional knod > J, C and Ii /I Fig. 4j, , 1]
'Rumiuru→H? ! It is possible to increase the degree of lees by 1'J method (
``Saru, but this''; (6) The /j of the present invention has the following points (right-handed) compared to the conventional method.
（１） ス（−ライブ状）１ルミニウノ、被覆の１）
７置１ｒ’＋ Ｉ・４ 、に昌くりることがＣ６＼る１
７例えば従来の夕、・ツトｒ人（”は：！： Ｏ、：３
ｍｍ Ｕあるが、不発明１−二Ｊ、れ（、［１０，１
ｍｍに向上づることが（さる、。(1) Su (-live) 1 Luminous, coated 1)
7th place 1r'+ I・4, to change to C6\ru1
7 For example, in the traditional evening, ・tutor person (” is:!: O, :3
There is mm U, but non-invention 1-2 J, Re(, [10,1
It can be improved to mm (monkey,.
（２） 生産性を高めることが（８る。ＩＺＩえばｉ
；Ｌ束のクラッド法Ｃ゛は月越］稈におい（ツノルミ−
曜ンノ、；１）が細巾なためにハックデンジ１ンか怖く
か（）１うれづ゛、ＩＪ：延スピードはｉ ５７７１．
／” Ｉｎ ！ ＩＩ ｊ２しか１げられない。しかし
本発明て゛は１ｉｉｌ Ｉ、”ハ１ｊ４−１程（ｂ広１
１のアルミ−ラムｉ６を用いる（二どか（３−＼ろため
、片面全面ノフルミ三アム被覆の場合１延スピードは３
イ１３強の５０Ｔｎ、 ／ ｍ Ｉ ＩＴ ｋリル（二
と；ｉ）＜ （□。＼、後の１ツヂング］−程を考ｊ〜
に入れン、１）本発明の力がはるかに能率的Ｃ゛ある。(2) Increasing productivity (8).
;L bundle cladding method
Yoonno, ;1) is so thin that I'm afraid it's a hack away ()1, IJ: The speed is i 5771.
/"In! II j2 can only be 1. However, the present invention is 1iil I, "Ha1j4-1 (b wide 1
1 aluminum ram i6 is used.
I 13 strong 50Tn, / m I IT kril (two and; i) < (□.
1) The power of the present invention is much more efficient.
（＋３） リードル−ｊ１完成１νの１か少イ「い。(+3) Riedl-j1 completion 1ν of 1 or a little a.
）ｌルミ−ラム船を用い（Ｊの１延−１稈１．： Ｊ、
夕いＣｂ、不発明の方が広１１］のｊフルミーウムｎ！
１４用いる（二とがＣきるため、１、Ｊに片面会面被預
の場合ｊ・の問題はほとんど解消される。) using a lumi ram vessel (1 length of J - 1 culm 1.: J,
Evening Cb, non-invention is wider 11] j fullium n!
14 is used (because 2 and 2 are C-cut, the problem of 1 and J is almost solved when one side is deposited in J).
第６図に、１３い（、第；−）図に小されたス１−ノｒ
ノ゛状ｊ′ルミーウノ＼被苗金属条体０を図のＪ、うな
パターン形状【・薯Ｊ抜さ、（（Ｃリートルーム７さυ
る１，点わｉ（△の枠内Ｇ．ＬソイＡＩボン７゛ｒング
機ｆｊＩ面Ｃ゛少なくどしこの部分にＩｔＪ ’ｊ’ル
ミーウ１１被覆５５が必すヨどされる。ぞの他の部分、
す４１４）らインノーリート導入部Ｅ’３ 、Ｉｊ Ｊ
、σノ′ウターリード９ ｆ．ｊＴは特にｊ′ルミーウ
ム被覆は必要で４Ｔい。むしろアウターリード９には完
成品（、二．１５ける半導体装７１組−゛ｌの際のｌ′
Ｉｌｌ ｆＪ ＋−稈ｔ）” ｒツゾ’Ｉ’ ｆｉｌの
ぬれ１（１を害！Ｉく）／ごめ、ン′ルミニ「ンム被Ｂ
−７がＪうっｒ ｌａ Ｚｚらイ朱いといえる３、イン
ノー−リード尋人部Ｆ′ｌにはツノルミニウム被Ｖ（ｉ
はあつ（らか８上ｔ’） ’．Ｃいといえる、、＝−万
第７図にＪｊいＣ，第５図に示されたメ１ーライゾ状ノ
フルミニウム被覆金属条体６゛を図のＪ、）４Ｉ：パタ
ーン形状に４１扱さ、１〜シンジスタ川リードルーム１
０を完成さけることら（きく、、、ｌ−ランシスタの揚
台、最近］１抜金型の２沖、３３連取りが間イトされＣ
．１５す、例えば３連取りの場合第１図のＪ）ス１〜う
ｒツノ′ルミ−・ツム被覆金属条体６の段階Ｕｉｌｌル
くことか（゛き、第１５図のＪ、うイ，ー形に持−）Ｃ
いく必要がない。この場合本発明の刊Ｌ’、ｌ、ｊ．凸
’：＋ Ｌ二人きく、従来のクシラド法による１ス１〜
フイノノ′ルミニウム被覆の場合ど比＋′１すると【１
ｆ槓１ヒ１（、ＬライブくどもＪ （８ Ｉｆｏｂ ＜
、 Ｊ’Ｊ抜１稈ヲ５ｆ メルトＩＪ’３． 人１
０ Ｌ’＋の牛産性向十どなる１、
第８図はハ面ゲ面〕′ルミーウノ、被）℃金属条（４−
１への連続マスキングチーブ貼（”Ｊ− ■稈を；ｊ’
ｚ シ、前，１ｄ金金属体′１（Ｓ広１１」のマス−１
ングテーゾ３３′″を全面に貼り付け、所定間隔に保持
されたカッター刀１１ｒスリン１−を入れた後、小ソン
ｖ）ス１ンクノ−ブ３／を剥１１ｉ１１−Ｊる。このｈ
法にＪ、れば、マス１−ンクーｊ−ブ３の貼イ」位置は
カッター声ノ１１に，Ｉ、−（決定されるためにその位
置精磨はきわめＣ（：＋いしのどなる。In Figure 6, there is a small slot 1-r in the 13th (, -) figure.
The shape of the seedling metal strip 0 is J in the figure, the eel pattern shape [・ 薯J is removed, ((C leet room 7 size υ
1, point i (in the frame of △G.L soi AI bomb 7゛rung machine fjI side C゛ItJ 'j' Rumiu 11 coating 55 is required to be applied to this part at least. other parts,
414) Innolito introduction part E'3, Ij J
, σ no' outer lead 9 f. jT is particularly necessary for j' lumium coating, which is 4T. Rather, the outer lead 9 has a finished product (l' in case of semiconductor device 71 set-l in 2.15).
Ill fJ +-culm t)"rtuzo'I'fil's wetness 1 (harm 1!
-7 can be said to be vermilion.
Haatsu (Raka 8 upper t')'. It can be said that C, = - 10,000 Jj in Figure 7. 1~Singista River Lead Room 1
In order to avoid completing 0 (Kiku..., L-Lancista's lifting platform, recently) 2nd and 33rd continuous cutting of 1st punching mold was completed.
．． 15. For example, in the case of three consecutive extractions, do you have to go through the steps J) in Fig. 1 to ,-shaped-)C
There's no need to go. In this case, the publications L', l, j. Convex': +L Two people listen, 1st 1~ by the conventional Kushirad method
In the case of fininoluminium coating, the ratio +'1 is [1
f 槓 1 hi 1 (, L Live Kudomo J (8 Ifob <
, 1 culm 5f without J'J Melt IJ'3. person 1
0 What happens to the cattle productivity of L'+? 1. Figure 8 shows the bare surface]
Continuous masking culm pasting on 1 ("J- ■ culm; j'
z Shi, front, 1d gold metal body '1 (S wide 11' square -1)
After pasting the cutting blade 33''' on the entire surface and inserting the cutter knife 11r Surin 1- held at a predetermined interval, peel off the small knife 11i11-J.
If the law is J, then the position of the square 1-n-cube 3 is determined by the cutter voice No. 11, I,-(, so that the position refinement is extremely C(:+Ishino-no-dou).
第９図において、マス：１ング）’．ｆ ｌ［ｌ’＋
（４ １変は引さ続ぎ連続的にアルミニラｌ＼（ニツノ
ング槽１２（−導かれ、ｒａ ４’ｉ的にＶ／λ−ｌン
グｊ−ゾ；３か剥Ｈ１，＼Ｌｔて得られたス１〜ライブ
状アルミーウ／、被覆金属条体６が巻き取られる。土ツ
チンクスピード（、１．１ツヂング槽１２の長さとアル
ミニウム被覆２の１・１！さにＪ、す）大、１、るが、
平均ｂ ｍ ／…白１ひある。この万２人に、１３い（
、）ｒルミ−ウノ、ンル１１°ｉ Ｕ） ／、 ｌ 、
／ （／’ ＩＩＩ １．ＬＩＩＡ少１ ｍｍよＣ′ｉ
ｉＪ能（゛あるが、通常はＪ −’ り Ｉｎｍ （’
ｄＱる。In Figure 9, square: 1 ng)'. f l[l'+
(4 1 change is continuously pulled and aluminum \\ (Nitsunong tank 12 (- led, ra 4'i V/λ-l ngj-zo; 3 peeling H1, \Lt is obtained. The coated metal strip 6 is wound up from the tub 1 to the live aluminum coating 6. The soil pulling speed (1.1 length of the tub 12 and the length of the aluminum coating 2 is 1.1!) is large. 1. Ruga,
Average b m /...1 white. To these 20,000 people, there are 13 people (
, ) r Rumi-Uno, Nru 11°i U) /, l ,
/ (/' III 1. LIIA small 1 mm C'i
iJ ability (゛, but usually J −'
dQru.
次ｉごｉｌ−末のクノットｖ１どの比較のため、本発明
の他の実施例どじ（、上記実施と同様のｂ法（こＪ、り
厚さ０ 、ｌ ３ ｔｒｕｎ、ＩＩＪ ｊ Ｏｍｍの／
１２アロイから４ｆる金属条体の長ｆ−１ｊ向中火位ｕ
へ′にＪワさ ０．００／１７μ、＋１Ｊ ２ ｍｍの
完成Ｊ法をｂつ（ノ′ルミニウム被覆をメトライ／状に
説（ノた。ｃ、 （１）場合圧延スピードは５３ｙｒｉ
、′ｍｉｎ、ストノイノ状アルミーウム被１υの位置精
度は±０ 、１ ｍｍ−Ｃあった３、これに夕１し、同
様の）１ｆ人のらのを（、′Ｌ束のクノッドン去Ｃ実施
しＩこ場合月越スピード１よ０ 、５ ｙＩｔ ／’
ｍｉｍ 、アルミニウム被覆Ｕ） （＋’／ 置ｔｉｊ
１ｍ ｆ、Ｌ −Ｉ Ｏ、３ｍｍ ’ＣｔＰ＞ Ｖ）、
Ａ＜ 光ＩＪＩＪ Ｊ、す劣ルことが確認された３゜
以１説明したＪ、−）に、本発明にＪ、れぼ、金属条体
」−に設【ノられ／、Ｔ広（１」の）′ルミ−ラム被覆
十にマス〜ンクＪ−１を貼りイｋＪ ｔＪ （、、Ｌツ
チングすること（ＪＪ、リストフィシ状の〕′ルミ−ラ
ム被覆を形成することから、ス１へライー／状ノフルミ
ーウム被）ζ“ズを＋：’：１才Ｉ′Ｉ曳に位置Ｆｌり
りることか（・さく：＋ 、、 、１． ／ご１．１１
題））タラットン入ど比中φしＵ ’Ｉメ’？性が７’
：、 シ＜向１し、ＩＪ Ｉムと）後の変形の問題も少
なくりる（とが（（＼る１゜図面の簡単な３凭朗
第′１図は本発明の 実施例に係る））１川４＼而ｉ）
ルミ−ラム被覆金属条体の５１ｉ面図、第２図は回・′
スー１ングデーブ貼ｆ＝Ｊ俊の平面図、第３３図１３０
Ｆｉｌ−，１ツ１ング後の平面図、負’： ／１図は同
マスキングｉ−プ；１゛す踏］接の平面図、第５図は同
スリットｊ省の 部を小り平面図、第６図はｔｒｉ］打
抜後打抜面図、）′ｊ７図１．１木発明の他の実施例に
係るＩＪ抜き後の平面図、第（３図（ま本発明の一実施
例に係る連続マス）−ンクシー／貼イＪ ４．ｉ、 ｆ
Ｉｊ＋′の斜視図、第９図は１１１連続マス１ング１．
［ツチング］稈の概要を示”ｌ ３１’而図１” Ａす
る。。Next, for the sake of comparison, the other embodiments of the present invention, the same method as the above implementation (this method), with thickness 0, l 3 trun, IIJ j Omm /
12 alloy to 4f metal strip length f-1j direction medium heat point u
In the case of (1), the rolling speed is 53 years.
,'min, the positional accuracy of 1υ of the stoline-like aluminum was ±0, 1 mm-C. In this case, the monthly speed is 1 to 0, 5 yIt /'
mim, aluminum coated U) (+'/ place tij
1m f, L-IO, 3mm 'CtP>V),
A < Optical IJIJ J, J, J, -), which has been confirmed to be inferior to 3° or more, the present invention is applied to J, Rebo, metal strip" - [not /, T wide (1) '')' Paste the mask J-1 on the lumi-lam coating 1. kJ tJ /-shaped Noflumium) ζ"Z +:': 1 year old
Title)) Do you want to enter Hichu? Gender is 7'
:, The problem of deformation after the direction 1 and IJI is also reduced. )) 1 river 4\and i)
51i side view of the Lumilum coated metal strip, Figure 2 is
Sue 1 Ng Dave pasted f = J Shun's plan view, Fig. 33 130
Figure 5 is a plan view of the same masking i-p; , FIG. 6 is a punching surface view after punching, )'j7 FIG. 1.1 is a plan view after IJ punching according to another embodiment of the wood invention, and FIG. Continuous squares related to)
A perspective view of Ij+', FIG. 9 shows 111 continuous mass 1 ring 1.
[Tsching] An overview of the culm is shown in Figure 1. .
１ニアルミ−、ラム被覆金属条体、
２：アルミ−ラム被７ａ、３：７ス：１ングｊ゛−ブ、
４：ノフルミーウム？ｌ！／ Ｉυ露出部品、Ｅ）ニス
ドライブ状）フルミニラム被冗ｉ、６：ス１〜ライブ状
ノフルミーウム被覆金屈条１小、７：ＩＧリードフレー
ム、
１０ ： トランジスタ用す−ドノーム、１１：カッタ
ー刃、
１２ニアルミニウムＬツＪング槽。1 Ni aluminum, ram coated metal strip, 2: Aluminum ram covered 7a, 3: 7 space: 1 ring jib,
4: Noflumeium? l! / Iυ exposed parts, E) varnish drive type) full miniram redundancy i, 6: S1 ~ live noflumium coated gold bending strip 1 small, 7: IG lead frame, 10: transistor dome, 11: cutter blade, 12 Aluminum L-Jing tank.
Ｍ ｌ （２１Ｊ％ ２１２１ ％ ３ メ輩
８ 図
茅ｑ （２）
２
＝２７７M l (21J% 2121% 3 mehai 8 茅q (2) 2 =277
Claims (1)
にｄノ゛い（、（１）帯状金属条体の全面あるいはリー
ドフレームどじ（の１幾重面に相当りる部分に連続づる
均一、 イ、岸さのアルミ−ラム被覆を施り−Ｉ−稈、
（２） ：Ｉ’−ップングレジス１〜を１目的どした１
〜数条のマスキングｉ−ノを前記金属条体のアルミ−ラ
ム被ＦＪ上ノリＪ定１−シ、７ｆに連続しＣ貼りｆ］り
る王（１１、に３）前記金属条体の７スキングデープ貼
（Ｎ１部分からはみ出たアルミルラム被覆露出部分を土
ツ１ング除去するＴ稈、（４）前７＋＋シ金属条体から
マス−１、ングｙ−−，１’ｉ ｆ？ｉ ｉ可１しくジ
ス−１ング−７−／の＋ｌｐ ｒう所定の幅のストライ
ノ状のノノルミーウム被覆を露出さける１程、（５ｊ）
前記ツノルミニウム被覆金属条体を所定のパターン形状
に４」抜くＹ稈からなり、かつ少なくとも上記（２）、
（３３）、（／ｌ）の］稈が１ライン（、゛連続しく（
−１われることを特徴どするノノルミーウム被覆す−ド
ル−ムの製造ｌｊ法□。The method for producing a standard x-wave iTi lead frame has the following advantages: (1) A continuous, uniform, i , shore-shaped aluminum-ram-coated-I-culm,
(2): 1 with 1 purpose of I'-Pung Regis 1~
~ Paste several strips of masking on the aluminum laminate FJ of the metal strip in a continuous manner on 7f] Skinning tape pasting (T culm to remove the exposed part of the aluminum ram coating protruding from the N1 part, (4) front 7++ metal strip mass -1, ng y--, 1'i f?i i possible 1 Avoid exposing the strino-shaped nonormium coating of a predetermined width by +lpr of +lp r of +lp r for about 1 minute, (5j)
It consists of a Y culm in which the tunoruminium-coated metal strip is cut out in a predetermined pattern shape by 4 inches, and at least the above (2),
(33), (/l)] culms are one line (, ゛continuous (
-1 Method for producing a nonormium-coated dorm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15642882A JPS5946053A (en) | 1982-09-08 | 1982-09-08 | Manufacture of aluminium coated lead frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15642882A JPS5946053A (en) | 1982-09-08 | 1982-09-08 | Manufacture of aluminium coated lead frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5946053A true JPS5946053A (en) | 1984-03-15 |
Family
ID=15627526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15642882A Pending JPS5946053A (en) | 1982-09-08 | 1982-09-08 | Manufacture of aluminium coated lead frame |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5946053A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60120544A (en) * | 1983-12-02 | 1985-06-28 | Sumitomo Electric Ind Ltd | Lead frame for semiconductor device |
| JPS6113653A (en) * | 1984-06-29 | 1986-01-21 | Dainippon Printing Co Ltd | Coating method of metallic section of semiconductor lead frame |
-
1982
- 1982-09-08 JP JP15642882A patent/JPS5946053A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60120544A (en) * | 1983-12-02 | 1985-06-28 | Sumitomo Electric Ind Ltd | Lead frame for semiconductor device |
| JPS6113653A (en) * | 1984-06-29 | 1986-01-21 | Dainippon Printing Co Ltd | Coating method of metallic section of semiconductor lead frame |
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