JPS5945925U - Protection device for belt furnaces - Google Patents
Protection device for belt furnacesInfo
- Publication number
- JPS5945925U JPS5945925U JP14207882U JP14207882U JPS5945925U JP S5945925 U JPS5945925 U JP S5945925U JP 14207882 U JP14207882 U JP 14207882U JP 14207882 U JP14207882 U JP 14207882U JP S5945925 U JPS5945925 U JP S5945925U
- Authority
- JP
- Japan
- Prior art keywords
- protection device
- belt furnaces
- gas
- belt
- belt furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の保護装置の回路図、第２図は本考案実施
例の回路図である。
なお図において、１・・・・・・点火ヒーター０Ｎ−Ｏ
ＦＦスイッチ、２・・・・・・ヒユーズ、３・・・・・
・トランス、４・・・・・・点火ヒーター、５・・・・
・・タイマー、６・・・・・・タイマーに付属している
接点（ａ接点）、７・・・・・・電磁弁（ＮＣ）、であ
る。FIG. 1 is a circuit diagram of a conventional protection device, and FIG. 2 is a circuit diagram of an embodiment of the present invention. In addition, in the figure, 1...Ignition heater 0N-O
FF switch, 2... Fuse, 3...
・Transformer, 4...Ignition heater, 5...
... timer, 6 ... contact (a contact) attached to the timer, 7 ... solenoid valve (NC).
Claims (1)
爆発を防止するためＨ２ガス燃焼用点火ヒーターが完全
に赤熱した後、Ｈ２ガスが流れる事を特徴としたベルト
炉用保護装置。A protection device for a belt furnace in which H2 gas flows after an ignition heater for burning H2 gas becomes completely red-hot in order to prevent an explosion of H2 gas in a belt furnace in which semiconductor devices are mounted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14207882U JPS5945925U (en) | 1982-09-20 | 1982-09-20 | Protection device for belt furnaces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14207882U JPS5945925U (en) | 1982-09-20 | 1982-09-20 | Protection device for belt furnaces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5945925U true JPS5945925U (en) | 1984-03-27 |
Family
ID=30317573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14207882U Pending JPS5945925U (en) | 1982-09-20 | 1982-09-20 | Protection device for belt furnaces |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5945925U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9303223B2 (en) | 2006-09-05 | 2016-04-05 | Cerion, Llc | Method of making cerium oxide nanoparticles |
-
1982
- 1982-09-20 JP JP14207882U patent/JPS5945925U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9303223B2 (en) | 2006-09-05 | 2016-04-05 | Cerion, Llc | Method of making cerium oxide nanoparticles |
| US9340738B2 (en) | 2006-09-05 | 2016-05-17 | Cerion, Llc | Method of making cerium oxide nanoparticles |
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