JPS5939928U - chemical vapor deposition equipment - Google Patents

chemical vapor deposition equipment

Info

Publication number
JPS5939928U
JPS5939928U JP13540582U JP13540582U JPS5939928U JP S5939928 U JPS5939928 U JP S5939928U JP 13540582 U JP13540582 U JP 13540582U JP 13540582 U JP13540582 U JP 13540582U JP S5939928 U JPS5939928 U JP S5939928U
Authority
JP
Japan
Prior art keywords
vapor deposition
chemical vapor
pressure
container
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13540582U
Other languages
Japanese (ja)
Inventor
後藤　泰山
宮崎　美彦
Original Assignee
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝機械株式会社 filed Critical 東芝機械株式会社
Priority to JP13540582U priority Critical patent/JPS5939928U/en
Publication of JPS5939928U publication Critical patent/JPS5939928U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例である化学気相成長装置を示す
概略的構成図である。 ６・・・反応室、５・・・容器、９・・・排気管、７，
８・・・圧力逃し部。The drawing is a schematic diagram showing a chemical vapor deposition apparatus that is an embodiment of the present invention. 6... Reaction chamber, 5... Container, 9... Exhaust pipe, 7,
8...Pressure relief part.

Claims (4)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）反応室を構成する容器と、この容器に接続され前
記反応室内のガスを排気させる排気管と、この排気管も
しくは上記容器の一部に設けられ所定圧力を受けること
により開放して圧力を逃□がす圧力逃し部とを具備して
なることを特徴とする化学気相成長装置。(1) A container constituting a reaction chamber, an exhaust pipe connected to the container to exhaust the gas in the reaction chamber, and a part of the exhaust pipe or the container that opens when it receives a predetermined pressure and pressurizes the gas. A chemical vapor deposition apparatus characterized by comprising a pressure relief part that releases □. （２）圧力逃し部は圧力破壊窓としたことを特徴とする
実用新案登録請求の範囲第１項記載の化学気相成長装置
。(2) The chemical vapor deposition apparatus according to claim 1, wherein the pressure relief portion is a pressure breaking window. （３）　　圧力逃し部は圧力開閉窓としたことを特徴と
する実用新案登録請求の範囲第１項記載の化学気相成長
装置。(3) The chemical vapor deposition apparatus according to claim 1, wherein the pressure relief portion is a pressure opening/closing window. （４）　　圧力逃し部は容器もしくは排気管の一部を他
の部分より耐圧強度を弱い構造としたことを特徴とする
実用新案登録請求の範囲第１項記載の化学気相成長装置
。(4) The chemical vapor deposition apparatus according to claim 1, wherein the pressure relief portion has a structure in which a portion of the container or the exhaust pipe has a lower pressure resistance than other portions.
JP13540582U 1982-09-07 1982-09-07 chemical vapor deposition equipment Pending JPS5939928U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13540582U JPS5939928U (en) 1982-09-07 1982-09-07 chemical vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13540582U JPS5939928U (en) 1982-09-07 1982-09-07 chemical vapor deposition equipment

Publications (1)

Publication Number Publication Date
JPS5939928U true JPS5939928U (en) 1984-03-14

Family

ID=30304776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13540582U Pending JPS5939928U (en) 1982-09-07 1982-09-07 chemical vapor deposition equipment

Country Status (1)

Country Link
JP (1) JPS5939928U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5998806U (en) * 1982-12-24 1984-07-04 吉田工業株式会社 compact container

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4955574A (en) * 1972-10-04 1974-05-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4955574A (en) * 1972-10-04 1974-05-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5998806U (en) * 1982-12-24 1984-07-04 吉田工業株式会社 compact container
JPS6239776Y2 (en) * 1982-12-24 1987-10-12

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