JPS5939649A - Film band continuous type processing device - Google Patents

Abstract

PURPOSE:To reduce slackening of a film band and occurring of damages on a processed surface of the film band by transporting the film band by a plurality of guide rolls disposed in such a manner that the film band is curved in one direction to be transported. CONSTITUTION:A continuous type processing device includes a transport roll installation chamber 8 for accomodating a feed roll 1 for feeding out a film band 3 and a take-up roll 2, and processing chambers 4A-4C for performing specified processings for the transferred film band 3, wherein intermediate chambers 9 are interposed between the above respective chambers to prevent gas from flowing into the adjacent chamber. Vacuum exhaust systems 10 are respectively connected to the chambers 4A-4C, 8 and 9, and gas introduction systems 11 for putting gas required for processing the film band 3 are connected to the processing chambers 4A-4C. In order to transport the film band 3 curved in one direction, a plurality of guide rolls 7 are disposed, for example, to be U-shaped.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the formation of a thin film of various substances on the surface of a film strip made of cloth, plastic, metal, etc. by means such as vapor deposition, vapor phase growth, plasma polymerization, etc. Concerning continuous film strip processing equipment that performs multiple surface treatments in succession 1. In general, a film strip with a thin film formed on the surface of the film strip is set on a feed roller provided at one end of the processing equipment. After the fed-out film strip is subjected to predetermined processing in a plurality of processing chambers such as a film forming chamber, it is wound up by a winding roller provided at the other end of the processing device. FIG. 1 is a schematic front view of a conventional continuous film strip processing device, in which 1 is a feed-out roller that sends out a film strip 3, 2 is a take-up roller, and 4A to 4c are the surfaces of the film strip 3. It is a processing chamber that performs prescribed processing,
Electrodes 5A and 5B are provided in the processing chambers 4A to 4C, respectively. Further, a heater 6 is attached to the electrode 5B as required. Reference numeral 7 denotes a guide roller that comes into contact with the front and back surfaces of the film strip 3 and holds the film strip 3 horizontally. However, in FIG. 1, the vacuum evacuation system, gas introduction system, etc. are omitted.

However, since the conventional processing apparatus conveys the film strip 3 in a straight line, it is easy to cause slack in the intermediate portion, and as a result, the surface treatment is uneven, and the guide roller 7
Since it comes into contact with the treated surface of the film strip 3, it also has the disadvantage that the treated surface is damaged.

The present invention has been made in order to eliminate the above-mentioned drawbacks, and it is an object of the present invention to provide a continuous processing device for film strips that causes less sagging of the film strips (and extremely less damage to the processing surface). It is an object.

For this purpose, the continuous processing device for film strips according to the present invention brings the back side of the film strip into contact with a plurality of guide rollers arranged so that the film strip is conveyed while being curved in one direction. It is characterized by conveying the film strip by moving the film.

Examples of the present invention will be described below.

FIG. 2 is a schematic plan view of an embodiment of the continuous processing apparatus for film strips according to the present invention. In the same figure, the same parts as in FIG. 1 are indicated by the same reference numerals, 8 is a transport roller installation chamber where each roller 1 and 2 is housed, 9 is a transport roller installation chamber 8 and each chamber of processing chambers 4A to -4C. This is an intermediate chamber provided between the two chambers to prevent waste from flowing into the adjacent chamber.

A vacuum exhaust system 10 is installed in the processing chambers 4A to 4C1, the conveyance roller installation chamber 8, and the intermediate chamber 9, and
A gas introduction system 11 for introducing gas (monomer in the case of plasma processing) necessary for processing the film strip is connected to each of C.

On the other hand, the plurality of guide rollers 7 in this embodiment are arranged so that the film strip is conveyed while being curved in one direction.
For example, it has a "U" shape. As is clear from FIG. 2, the film strip 3, which is sent out with the treated surface erected, is conveyed with its back side, which is not subjected to surface treatment, in contact with the guide roller rough, and is transported into each of the treatment chambers 3. After film formation by, for example, plasma treatment and other surface treatments are continuously performed in steps 8 to 4C, the film is wound up on a winding roller 2. At this time, as described above, since the processed surface of the film strip 3 is conveyed and processed in a state parallel to the vertical plane, no dust adheres to the processed surface.

As is clear from the description of the above embodiments, the continuous film strip processing apparatus according to the present invention is equipped with a plurality of guide rollers arranged so that the film strip is conveyed while being curved in one direction. Since the film strip is conveyed with the back surface of the film strip in contact with the film strip, sagging is less likely to occur in the middle portion of the film strip, and variations in surface treatment can be reduced.

Further, as mentioned above, there is less dust adhesion, and furthermore, since the guide rollers do not damage the processing surface of the film strip, the quality of the film strip can be improved.

In addition, in the examples, the hydra rough curves the film strip in one direction. As an example of transporting the film, we have shown an example in which the film is transported in a U-shape, but the present invention is not limited to this. It may be arranged in a rectangular shape or in a rectangular annular arrangement.

In addition, the processing apparatus described in the examples conveys the firno and stripes with their processing surfaces parallel to the vertical plane.
This also includes embodiments in which the processing surface is transported horizontally.

4. DETAILED DESCRIPTION OF THE INVENTION Fig. 2 is a schematic front view of a conventional film strip continuous processing apparatus, and Fig. 2 is a plan view of an embodiment of the Callum strip continuous processing apparatus according to the present invention. FIG.

1...Feeding roller, 2...Take-up roller, 3
...Film strip, 4A-4C...Processing chamber, 7...
・Guide roller.

Patent applicant: Shimadzu Corporation Representative Patent Attorney Koji Daii

Claims (1)

[Claims] In a processing device that continuously performs multiple surface treatments on the surface of a film strip made of cloth, plastic, metal, etc., a plurality of idle rollers are used to convey the film strip while curving it in one direction. A continuous processing device for film strips, characterized in that the above-mentioned surface treatments are carried out between the guide rollers, and the film strips are conveyed so that the back surface of the film strips comes into contact with each of the guide rollers. 1
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