JPS5939447Y2 - Solid-liquid separator - Google Patents

Description

[Detailed description of the invention] The present invention relates to a solid-liquid separation device for factory processing liquid, and in particular,
The present invention relates to an apparatus for continuously separating membrane solids in a liquid processed by the first etching method, which is one of metal precision processing methods.

Generally, in the process of manufacturing a printed circuit board or the like, a first resist film is first coated on the board, adhered, and baked, a developer conductive film is etched, and then this photoresist film is peeled off.

In this first stripping of the resist film, it is swollen with a stripping solution and then stripped, and the above-mentioned solid-liquid separator is used to separate the peeled so-called solid film from the stripping solution.

With this type of solid-liquid separator, the conventional technology with a processing capacity of about 200☆/min is the sedimentation separation method in a tank if the processing capacity is below the above-mentioned processing capacity, and the rotary centrifugal separation method if the capacity is to be increased. There is a method separation method for Bell I/Kake by Metschwert.

All of them required manpower and were difficult to use.

In other words, the precipitation separation method requires a tank and is suitable for processing very small amounts, but if the amount of processing is large, the precipitation tank becomes large and takes up space, making it unsuitable. If a continuous system is used, the equipment will be large and expensive, and if it is small, it will take time and effort to manually remove the solid content from the membrane.

In addition, the belt hanging method using Metsch belt is separated by
It is only a filtration method using a menschbelt, and its separation ability is difficult.

On the other hand, rotary cylindrical mesh filtration tubes have traditionally been used when processing tap water mixed with filth in large quantities, but in order to remove solid matter adhering to the mesh, it is necessary to partially remove clean water. Separated water and clean water may be mixed by spraying from the outside, and the structure is complicated.

It would be very expensive to directly use the darning mechanism as part of a factory treatment liquid reuse system like the one proposed in this invention.

The present invention was devised in view of the above circumstances, and provides a small, inexpensive, and easy-to-handle device suitable for solid-liquid separation of processing liquids in precision processing such as photoetching.

To explain this with reference to the embodiment shown in the drawings, Fig. 1 shows a partially broken front view, and Fig. 2 shows a partially broken side view.
is a closed housing having a bottom plate 2, and inside the housing 1, a cylindrical mesh filter cylinder 4 with one side open [3] is inserted into a liquid injection pipe 5.
It is cantilever supported and rotatably suspended horizontally.

Specifically, the liquid injection pipe 5 passes through a boss 6 fixed to the outer wall of the housing 1, and the boss 6 is reinforced and supported by a plurality of bracket plates 7'.

Further, a tube shaft 7 is loosely fitted between the boss 6 and the liquid stopper inlet tube 5, one end of the tube shaft 7 is fixed to the end plate 8 of the mesh filtration tube 4, and the other end is fixed to the bottom plate of the housing 1. A sprocket (not shown) is provided, which is rotated at a speed of about 1 to 10 rpm via a chain by a drive motor 9 built in below the sprocket.
The mesh filter cylinder 4 is slowly rotated by the motor 9 via the tube shaft 7.

The outer end of the liquid injection pipe 5 is provided with a flange 10 so that it can be connected to a desired processing site, and 11 indicates a chain cover.

Next, the mesh filtration tube 4 is composed of a 30-mesh wire mesh made of stainless steel, and as described above, one side is open 13 and the other side is made of a wall with a mirror plate 8.

On the inner periphery of the mesh filter cylinder 4, along the cylinder axis direction, and
A large number of plate-shaped fins 12 facing in the radial direction are planted inside,
As a result, the inner periphery is formed into a shallow compartment, and the membrane solid content accumulated in the rotating mesh filtration cylinder 4 can be carried out to a depth h.

An air pipe 13 is installed on the outer upper side of the mesh filter cylinder 4, and a horizontal air pipe 13 is installed parallel to the axial direction of the mesh filter cylinder 4.
A large number of compressed air holes 14 are bored at intervals of about 15 mm in the hole, so that air is blown out and acts as a so-called air knife.

The air pipe 13 is connected to a compressor via a valve 15.

Next, reference numeral 16 is a drawer-shaped tray made of mesh, which is installed in the apparatus for a predetermined period of time, so that the moisture in the membrane solid content that has fallen into the tray 16 can be dripped. , adhering to the inner periphery of the mesh filter cylinder 4 [7] While allowing the membrane solids carried upward by the rotation to fall freely,
In some cases, compressed air is used to blow it down into the tray 16, but since the fins 12 divide the membrane solids into sections, the membrane solids will not roll due to gravity or come out within the divisions. It collects well and falls on the receiving skin in a dumpling shape.

A handle 17 is provided at the outer end of the tray 16, and the handle 17 is supported by the outer periphery of the static liquid injection tube 5, such as the wall of the housing 1.

18 is a liquid discharge pipe, which is visible on the bottom plate 2, and
19 is an exhaust gas which discharges the compressed air and liquid gas blown in in step 1 upward to prevent leakage of the processing liquid.

As mentioned above, when the mixed treated waste liquid of the membrane solid and the stripping liquid is allowed to flow into the liquid input tube 5, since the reading tube 5 extends into the center of the mesh filtration cylinder 4, the mixed treated waste liquid is The liquid is discharged from the center of the mesh filtration tube and passes through the mesh to the drain pipe 1.
8 is carried away.

The processing liquid is then collected and sent to the membrane stripping process again.

On the other hand, the J-membrane solids remaining in the mesh filtration tube 4 are scooped up by the fins 12 installed in the tube 4 and stuck to the mesh as they are lifted upwards and are subject to the influence of gravity. It peels off from the mesh, clumps into a ball, and falls into the saucer 16 at an upper position.

Also, at 1.15 pm, the remaining film partially stuck to the mesh is blown off by FF and air contraction □t from the air knife.

In this way, the solid-liquid separation of the treatment liquid is carried out continuously, and from time to time the prisoner 16 is manually taken out and the membrane solid is released.

■ Since a large number of fins 12 are installed on the inner periphery of the rotating mesh filter tube 4, the mud-like membrane to be filtered can be divided by these fins 12 and formed into a dumpling shape, so that the solid content of the membrane can be rotated. The mesh filtration tube 4 does not fall while adhering to the inner wall, but is lifted up to the upper position 1', where it falls exactly onto the solid tray 16, and the work involves inserting and removing the solid tray 111L16 intermittently. (for example, 1" for 1"), and together with the high position of the saucer, it is possible to easily take out the solids from the cylinder.

■ The mixed processing solution of the substrate film and stripping solution is continuously supplied, but the separated film is taken out intermittently on the solid receiving surface, so it is clear that the solid content is Not only can it conveniently separate mixed processing liquids that have a relatively large liquid content, but the operating power of this device is
Only the rotating mesh filtration tube is required, and the liquid stopper inlet tube 5 is also used as a four-way support for the mesh filtration tube 4, reducing the number of parts. Since one end is supported by the filtration tube 4, the structure can be extremely simplified, making it suitable for use as a semi-automatic solid-liquid separator at low cost, and there are no parts protruding from the periphery of the filter cylinder 4, so it does not take up much space. .

■ In particular, in the process of manufacturing printed circuit boards, etc., a mixed solution of various films and their stripping solutions is generated, and in order to reuse the stripping solution in the solution, a solid-liquid separation operation is required. For,
Since the amount of film such as photoresist is small, the amount accumulated in the solid tray only needs to be taken out once or several times, so there is no need for a continuous solid-liquid separator, so it can be used semi-automatically. The equipment performs its function satisfactorily.

Therefore, there is a need for this type of device to be simple and inexpensive, and the above-mentioned
Effects specific to the treated product (2) can be achieved.

[Brief explanation of the drawing]

FIG. 1 shows a front view, and FIG. 2 shows a side view. 3...Open-1, 4...Mesh filtration cylinder, 5...Liquid stopper entry pipe, 12...Fin, 16... saucer.

Claims (1)

[Scope of utility model registration request] At least one side of the rotating mesh overflow tube 4 is opened 3, and a large number of fins are installed on the inner periphery of the mesh overflow tube 4 in the direction of the axis of the cylinder, and the liquid stopper inlet tube 5 that supports the cylinder 4 in a cantilever manner is inserted into the cylinder. A solid receiver 6 holds the mud-like solid content in the mixed liquid discharged into the liquid mixture 6 in the front upward direction so that it extends 1 inch, can be freely inserted and removed through the opening 3, and has one end supported by the liquid stopper entry pipe 5. Let it fall on top,
A substrate membrane and its stripping liquid separation device that extracts solid content intermittently.