JPS5936983A - Gas laser device - Google Patents

Abstract

PURPOSE:To contrive to change the device into high output one by increasing the cooling effect of a laser medium by a method wherein an inner tube provided with a resonator, an outer tube which is arranged in the outer periphery of the inner tube and passes coolant into the inside, and an ground electrode wound around this outer tube are equipped. CONSTITUTION:Using a double glass tube, the inner tube 1 is decided as a discharge tube, and the outer tube as a cooling tube. Electrodes 3 are provided at the inner end of the inner tube 1, and a total reflection mirror 6 and a partial transmission mirror 7 are provided at both ends as the resonator. DC glow discharge is produced between the electrodes by passing the laser medium 4 into the inside and accordingly impressing a DC voltage between the both electrodes 3, resulting in the resonance of the glow discharge by means of the total reflection mirror 6 and the partial transmission mirror 7, and then a part of the resonace is taken out as a laser beam by means of the partial transmission mirror 7. The molecular oscillation of the coolant 5 is made active by winding the ground electrode 8 in spiral form partially around the outer tube 2 which passes the coolant 5, and accordingly the cooling effect is enhanced.

Description

[Detailed description of the invention] Industrial applications Invention C relates to a gas laser device.

Conventional configurations and their problems There are several types of gas laser (C02 laser) devices, but the most well-known general VC is the ``coaxial type,'' in which the original glaze, gas flow, and discharge direction are in the same direction. B. As shown in Fig. 1, this device is made of double glass glass, with the inner tube 1 used as a discharge tube and the outer tube 2 used as a cooling tube.Electrodes 3 are installed at both ends of the inner tube 1. is provided, and both ends V
C is provided with a total reflection mirror 6 and a partial transmission mirror 7 as resonators, and a laser medium 4t is caused to flow therein to
By applying a DC voltage between lii1Jt pole 3, υ,
A DC glow family wL is generated between vt and fM, and the glow family [is partially resonated by the total reflection mirror 61 partially transmitted #M7, and a part thereof is extracted as a laser beam (indicated by arrow A) by the transmitting mirror 7. It is something.

In such a gas laser device, it is necessary to increase the cooling effect of the laser medium VT4 in order to increase the laser output, and for this purpose, a cooling medium 5 such as cooling water or cooling oil is flowed and circulated in the outer tube 2. This prevents the laser medium 4 from becoming KIIA due to discharge.

However, simply circulating the cooling medium within the outer tube 2 has a limit on its circulation speed and heat diffusion, making it difficult to achieve high output.

OBJECT OF THE INVENTION An object of the invention is to increase the cooling effect of a laser medium,
An object of the present invention is to provide a gas laser device that achieves high output.

Composition of the Invention The gas laser device of the present invention has electrodes at both ends, and a V-laser medium is flowed inside to generate a direct current glow discharge between the two electrodes, which is resonated and a portion thereof is extracted as a laser beam. This gas laser device includes an inner tube provided with a resonator, and an outer tube disposed on the outer peripheral surface of the inner tube into which a cooling medium flows, in which a ground electrode is provided on the outer tube.

With this configuration, a DC current r is generated between both electrodes in the inner tube.
By applying f, a direct current glow discharge is generated between the electrodes, and at the same time, by applying an electric field to the cooling medium, the molecular vibrations of the cooling medium are activated and its cooling effect is increased, thereby achieving high output. can be obtained.

DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described based on Figure @2. That is, in this laser device, as shown in FIG.
4. The gas laser device shown in FIG.
Since the applied DC voltage between them is 28 KV on the anode side and 6 KV on the cathode side, the electric wire is spirally wound across the central part 60α of the outer wall surface of the outer tube 2 to form the ground electrode 8. When a DC voltage (l:l) is applied to the head of the pillow, an electric field is also applied to the cooling medium 5rC in the outer tube 2, causing the molecules of the cooling medium 50 to vibrate actively, thereby increasing the cooling effect.

FIG. 3 shows the relationship between the discharge current and the output of a gas laser device (example) provided with the ground electrode 8 shown in this example and a conventional gas laser device (comparative example) not provided with the ground electrode 8. As is clear from FIG. 3, the ground electrode 8
It can be seen that the output of the gas laser device equipped with this is increased compared to the conventional gas laser device.

Another embodiment of the present invention will be explained with reference to Figure 4 VC group.

That is, this gas laser device has a plurality of ring-shaped ground electrodes 8' mounted on the center of the outer tube 2 and extending around almost the entire circumference, as shown in Fig. 8g4.

In nine cases using such a ring-shaped ground electrode 8', an increase in output almost the same as in the previous embodiment was observed. The song is similar to the previous example.

In addition, although the case where a linear electrode was used was explained in each of these Examples, it goes without saying that a strip-shaped electrode may be used.

Furthermore, in these embodiments, a laser resonant structure is shown in which the total reflection mirror 6 and the partial transmission mirror 7 are arranged in a straight line, and the total reflection mirror 6 and the partial transmission mirror 7 are provided at both ends of one discharge section, respectively. There are many discharge sections, where the resonance is folded in multiple stages by an intermediate total reflection mirror, and a laser resonance structure with a terminal reflection mirror and a partially transmitting mirror, and a v-the resonance structure using partially transmitting mirrors at both ends. can also be applied in the same way.

Effects of the Invention The gas laser device of the present invention has the cooling effect of the laser medium 7
! There is a deer fruit that can increase IL and achieve high output.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing a conventional gas laser device, Fig. 2 is a partial sectional view showing an embodiment of the present invention, and Fig. 3 is a sectional view showing a conventional gas laser device.
, a club showing the relationship between flow and output. FIG. 4 is a partial sectional view showing another embodiment of the present invention.

Claims (1)

[Claims] A laser medium is caused to flow inside, and 'd1. The DC glow discharge generated between the electrodes is caused to resonate and a part of it is caused to become V-.
A gas laser includes an inner tube with a resonator for extraction as a laser beam, an outer tube placed around the outer circumference of the inner tube through which a cooling medium flows, and a ground electrode wrapped around the outer tube. Device.