JPS6197983A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPS6197983A JPS6197983A JP21869684A JP21869684A JPS6197983A JP S6197983 A JPS6197983 A JP S6197983A JP 21869684 A JP21869684 A JP 21869684A JP 21869684 A JP21869684 A JP 21869684A JP S6197983 A JPS6197983 A JP S6197983A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- laser oscillator
- gas
- gas laser
- oscillator according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はガスレーザ発振器に関し、特に励起効率を向
上した励起放電管の構成に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas laser oscillator, and more particularly to the configuration of an excitation discharge tube with improved excitation efficiency.
従来、この種の装置の一例として第４図に示すものがあ
った。図において、共振器は出力ミラー（１）と高反射
ミ？（２）によって構成されており、し−ザ媒質ガスで
あるＣＯ□ガス励起のための円筒形放電管は複数の同一
径の円筒形放電管（６ａ）によって構成され、共振器ミ
ラー中心軸にそって、前記軸と同軸状に配置されている
。前記放電管内に放電を生じさせることによりレーザ媒
質ガスの励起を行い、共振器中にレーザ共振をおこなわ
せる。Conventionally, there has been one shown in FIG. 4 as an example of this type of device. In the figure, the resonator is connected to the output mirror (1) and the high-reflection mirror (1). (2), and the cylindrical discharge tube for excitation of CO□ gas, which is the laser medium gas, is composed of a plurality of cylindrical discharge tubes (6a) with the same diameter, and the central axis of the resonator mirror is Therefore, it is arranged coaxially with the aforementioned axis. The laser medium gas is excited by generating a discharge in the discharge tube, causing laser resonance in the resonator.
なお、円筒形放電管は直流放電方式や無声放電方式が用
いられる。Note that a direct current discharge method or a silent discharge method is used for the cylindrical discharge tube.
第７図に直流放電方式の円筒形放電管を示す。Figure 7 shows a cylindrical discharge tube using a direct current discharge method.
第７図（ａ）は正面断面図、第７図（′ｂ）は側面断面
図である。図において、（３）は放電管、（８）は針状
陰極、（９）はリング状陽極である。この構成において
、放電は陰極（８）と陽極（９）開、すなわち放電管と
平行におこり、放電空ｒ＃ｒＪ（６１を形成する。なお
、＠極（８）と陽極（９）は周知の手段により放電管に
固定されている。FIG. 7(a) is a front sectional view, and FIG. 7('b) is a side sectional view. In the figure, (3) is a discharge tube, (8) is a needle-shaped cathode, and (9) is a ring-shaped anode. In this configuration, the discharge occurs with the cathode (8) and anode (9) open, that is, parallel to the discharge tube, forming a discharge space r#rJ (61). It is fixed to the discharge tube by means of.
第８図に無声放電方式の円筒形放電管を示す。Figure 8 shows a silent discharge type cylindrical discharge tube.
第８図（ａ）は正面断面図、第８図（ｂ）は側面断面図
である。無声放電方式においては、放電管αＱが誘電体
層であり、放電管外周に密着し、かつ互に対向する位置
に設けられた金属電極（１１）とともに無声放電電極を
構成している。無声放電では金属部の表面に誘電体層が
必ず必要であり、放電管００）は電６の役目も果してお
り、放電電極管になっている。FIG. 8(a) is a front sectional view, and FIG. 8(b) is a side sectional view. In the silent discharge method, the discharge tube αQ is a dielectric layer, and forms a silent discharge electrode together with metal electrodes (11) provided in close contact with the outer periphery of the discharge tube and at positions facing each other. In silent discharge, a dielectric layer is always required on the surface of the metal part, and the discharge tube 00) also serves as the electrode 6, serving as a discharge electrode tube.
放電は放電電極には垂直におこり、放電空間（６）を形
成する。The discharge occurs perpendicularly to the discharge electrode, forming a discharge space (6).
前記共振器において、レーザ共振をおこなうと共振器の
中に定在波（共振ビーム）（４）が発生する。When laser resonance occurs in the resonator, a standing wave (resonant beam) (4) is generated within the resonator.
この共振ビーム（４）の外径は一般に共振器長方向に対
して変化する。The outer diameter of this resonant beam (4) generally changes in the resonator length direction.
放電管内ではほぼ均一に放電がおこっており、放電エネ
ルギーは第５図、第６図に示す放電管内の放電空間（６
）にほぼ均一に分布していると考えられる。Discharge occurs almost uniformly within the discharge tube, and the discharge energy is distributed in the discharge space (6) within the discharge tube shown in Figures 5 and 6.
) is considered to be almost uniformly distributed.
放電空間（６）中の入力エネルギーによってレーザ媒質
は励起状態となるが、この励起された媒質のうち（４）
の共振ビームの存在する空間からのみレーザ光が取り出
され、入力放電エネルギーがレーザ光エネルギーに変換
される。従って、ある点での放電空間（６）の断面積と
、その点におけるビーム断面積の比が放電エネルギーの
有効利用率であり、これを放電空間有効利用率とする。The laser medium is brought into an excited state by the input energy in the discharge space (6), but among this excited medium (4)
Laser light is extracted only from the space where the resonant beam exists, and input discharge energy is converted into laser light energy. Therefore, the ratio of the cross-sectional area of the discharge space (6) at a certain point to the beam cross-sectional area at that point is the effective utilization rate of discharge energy, and this is taken as the effective utilization rate of the discharge space.
第５図に示した第４図のＡ−Ａ断面ではビーム径が放電
管内径に近いので前記放電空間有効利用率はほぼ１に近
いと考えられるが第６図に示したようにＢ−Ｂ断面にお
いては、Ａ−Ａ断面よりビーム径が小さくなっており、
前記放電空間有効利用率はＡ−Ａ断面に比べて小さくな
っている。In the section A-A of FIG. 4 shown in FIG. 5, the beam diameter is close to the inner diameter of the discharge tube, so the discharge space effective utilization factor is considered to be close to 1, but as shown in FIG. In the cross section, the beam diameter is smaller than the A-A cross section,
The discharge space effective utilization rate is smaller than that in the AA cross section.
従来の装置は以上のように構成されているので、相対的
なビーム径の小さい部分での放電空間有効利用率が悪く
、有効なる放電人力エネルギーの利用ができないという
問題点があった。Since the conventional device is configured as described above, there is a problem in that the effective utilization rate of the discharge space is poor in the portion where the relative beam diameter is small, and it is not possible to effectively utilize the discharge human power energy.
この発明は上記のような従来のものの問題点を解決する
ためになされたもので、共振器内で変化する共振ビーム
径に対して、共振ビーム径の小さい部分での放電空間有
効利用率を向上させて、有効なる放電入力エネルギーの
利用を行い、総括的な発振効率の向上を図ったガスレー
ザ発振器を得ることを目的としている。This invention was made in order to solve the above-mentioned problems of the conventional method, and it improves the effective utilization rate of discharge space in the part where the resonant beam diameter is small as the resonant beam diameter changes within the resonator. The purpose of this invention is to obtain a gas laser oscillator that utilizes effective discharge input energy and improves overall oscillation efficiency.
この発明に係るガスレーザ発振器は、共振器内で変化す
る共振ビーム径に対して、放電管内径が太くなりすぎな
いように内径の異なった放電管を同一発振器の中に、共
振器ミラー中心軸に同軸状に配列したものである。In the gas laser oscillator according to the present invention, discharge tubes with different inner diameters are placed in the same oscillator and arranged on the center axis of the resonator mirror so that the inner diameter of the discharge tube does not become too thick in response to the resonant beam diameter changing within the resonator. They are arranged coaxially.
この発明においては、共振器内で変化する共振ビーム径
に対して、共振ビーム径の大きい部分でも、共振ビーム
径の小さい部分でも放電空１９５有効利用率をほぼ１に
近づけることができるから、総括的な発振効率を向上す
ることができる。In this invention, as the resonant beam diameter changes within the resonator, the effective utilization factor of the discharge space 195 can be brought close to 1 in both the large resonant beam diameter part and the small resonant beam diameter part. oscillation efficiency can be improved.
第１図はこの発明の一実施例を示す購成図、第２図は第
１図のＣ−Ｃ線断面図である。第１図において、放電管
（３）の内径は、共振ビーム径より太くなりすぎないよ
うに、前記ビニム径に合わせてその内径の違うもの（３
ａ） 、 （３ｂ） 、 （３Ｃ）を配置シている。FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line C--C in FIG. 1. In Fig. 1, the inner diameter of the discharge tube (3) is different from the diameter of the vinyl tube (3) so as not to be too thick than the resonant beam diameter.
a) , (3b) and (3C) are arranged.
従って、第２図に示したビーム径の小さいＣ−Ｃ線断面
についても放電空間（６）の断面積と共振ビーム（４）
の断面積の差は小さく、放電空間有効利用率は１に近い
ものとなる。放電管（６ｂ）の部分についても同様であ
る。Therefore, the cross-sectional area of the discharge space (6) and the resonant beam (4) are
The difference in cross-sectional area is small, and the discharge space effective utilization rate is close to 1. The same applies to the discharge tube (6b) portion.
第６図はこの発明の他の実施例を示す構成図である。こ
の実施例は、共振器内ビーム回路に折返し光路ＴＪ１＋
”２＋ ”３ を有するものである。そして、折返し
光路毎に違った内径の放電管を配置し、同一折返し光路
内では放電管の内径が等しくなっている。即ち、ある本
数、ここでは２本を１つのユニットとして、ユニット毎
に内径の違う放電管（３ａ）、（３ｂ）を配置している
。FIG. 6 is a block diagram showing another embodiment of the present invention. In this embodiment, the optical path TJ1+ is returned to the intra-cavity beam circuit.
It has "2+"3. Discharge tubes with different inner diameters are arranged for each folded optical path, and the inner diameters of the discharge tubes are equal within the same folded optical path. That is, a certain number of discharge tubes (3a), (3b) having different inner diameters are arranged for each unit, with a certain number of discharge tubes (2 in this case) being considered as one unit.
上記実施例では、折返し光路Ｌ２には放電管を配置して
いないが、全折返し光路に配置してもよい。In the above embodiment, the discharge tube is not arranged in the folded optical path L2, but it may be arranged in all the folded optical paths.
又、折返しの回数は２回としたが、１回であっても、３
回以上であっても同様に実施できる。さらに、上記何れ
の実施例も、レーザ媒質ガスはＣＯ２ガスに限らず、他
のガスレーザについても同様に実施できる。In addition, although the number of callbacks was set to 2, even if it was only 1 time, it would be 3 times.
It can be carried out in the same manner even if the number of times or more is exceeded. Furthermore, in any of the above-mentioned embodiments, the laser medium gas is not limited to CO2 gas, and can be similarly implemented with other gas lasers.
この発明は以上説明したとおり、共振器内で変化する共
振ビーム径に対して、放電管内径が太くなりすぎないよ
うに内径の異なった放電管を同一発振器中に、共振器ミ
ラー中心軸に同軸状に配列したから、放電空間有効利用
率を発振器全体にわたって、１に近づけることができ、
放電人力エネルギーの有効な利用が行なえ、総括的な琵
振効半の良いガスレーザ発振器を得ることができる。As explained above, in order to prevent the inner diameter of the discharge tube from becoming too thick in response to the changing resonant beam diameter within the resonator, the present invention is designed to install discharge tubes with different inner diameters in the same oscillator, coaxially aligned with the center axis of the resonator mirror. Since they are arranged in a shape, the discharge space effective utilization factor can be brought close to 1 over the entire oscillator.
A gas laser oscillator with good overall oscillation efficiency can be obtained by making effective use of electric discharge energy.
第１図はこの発明の一実施例を示す構成図、第２図は第
１図のＣ−Ｃ線断面図、第６図はこの発明の他の実施例
を示すｉ′台成図、第４図は従来のガスレーザ発振器の
構成を示す構成図、第５図は第４図のＡ −Ａ線断面図
、第６図は第１図のＢ−Ｂ線断面図、第７図は直流放電
方式の円筒形数−管を示す図で、ＭＺ図（ａ）は正面断
面図、＠７因ｆｂ）は側面断面図、第８図は無声放電方
式の円層形ｂｙ：電個゛を示す図で、第８図Ｃａ）は正
面晶面図、第８ｉＷ（ｂ）は側面断面図である。
図において、（１）は出力ミラー、（２）、は高反射ミ
ラー、（３） 、 （３ａ） 、 （３ｂ） 、 （３
ｃ）は放電管、（４）は共振ビーム、（５）は出力ビー
ム、（６）は放電空間、（力は折り返しミラーである。
なお、各図中同一符号は同一または相当部分を代理人
弁理士 木 村 三 朗
第３図
第４図
第５図
第６図
第７図
第８図
手続抽正書（自発〕
昭和６０年１０月 ７日FIG. 1 is a configuration diagram showing one embodiment of the present invention, FIG. 2 is a sectional view taken along the line CC in FIG. 1, and FIG. Figure 4 is a block diagram showing the configuration of a conventional gas laser oscillator, Figure 5 is a sectional view taken along line A-A in Figure 4, Figure 6 is a sectional view taken along line B-B in Figure 1, and Figure 7 is a direct current discharge diagram. The figure shows the cylindrical number-tube of the method, where MZ diagram (a) is a front cross-sectional view, @7 factor fb) is a side cross-sectional view, and Figure 8 is a circular type of silent discharge method. In the figures, FIG. 8Ca) is a front crystal view, and FIG. 8iW(b) is a side sectional view. In the figure, (1) is the output mirror, (2) is the high reflection mirror, (3), (3a), (3b), (3
c) is the discharge tube, (4) is the resonant beam, (5) is the output beam, (6) is the discharge space, (the force is the folding mirror. Note that the same symbols in each figure represent the same or equivalent parts.
Patent Attorney Mitsuro Kimura Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Procedure abstract (voluntary) October 7, 1985
Claims (7)
ザ媒質ガス励起の為の円筒形放電管を有するガスレーザ
発振器において、共振器内に発生する共振ビームの径に
対応して少なくとも２種類の違つた内径を持つ前記円筒
形放電管を、共振器ミラー中心軸に同軸状に配列したこ
とを特徴とするガスレーザ発振器。(1) In a gas laser oscillator having at least two reflecting mirrors and at least two cylindrical discharge tubes for excitation of the laser medium gas, at least two types of differences are available depending on the diameter of the resonant beam generated within the resonator. A gas laser oscillator characterized in that the cylindrical discharge tubes having a cylindrical inner diameter are arranged coaxially with a central axis of a resonator mirror.
しを有し、折返し光路毎に違つた内径の前記円筒形放電
管を配置し、同一折返し光路内では前記円筒形放電管の
内径が等しいことを特徴とした特許請求の範囲第１項記
載のガスレーザ発振器。(2) The intra-resonator beam circuit is folded back at least once, and the cylindrical discharge tubes are arranged with different inner diameters for each folded optical path, and the inner diameters of the cylindrical discharge tubes are equal within the same folded optical path. A gas laser oscillator according to claim 1, characterized in that:
ることを特徴とした特許請求の範囲第２項記載のガスレ
ーザ発振器。(3) The gas laser oscillator according to claim 2, which has a folded optical path in which no cylindrical discharge tube is arranged.
た特許請求の範囲第１項〜第３項の何れかに記載のガス
レーザ発振器。(4) The gas laser oscillator according to any one of claims 1 to 3, wherein the cylindrical discharge tube is a discharge electrode tube.
とした特許請求の範囲第１項〜第３項の何れかに記載の
ガスレーザ発振器。(5) A gas laser oscillator according to any one of claims 1 to 3, characterized in that the laser medium gas is excited by silent discharge.
とした特許請求の範囲第１項〜第３項の何れかに記載の
ガスレーザ発振器。(6) A gas laser oscillator according to any one of claims 1 to 3, characterized in that the laser medium gas is excited by direct current discharge.
とした特許請求の範囲第１項〜第６項の何れかに記載の
ガスレーザ発振器。(7) The gas laser oscillator according to any one of claims 1 to 6, wherein the laser medium gas is CO_2 gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21869684A JPS6197983A (en) | 1984-10-19 | 1984-10-19 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21869684A JPS6197983A (en) | 1984-10-19 | 1984-10-19 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197983A true JPS6197983A (en) | 1986-05-16 |
Family
ID=16723977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21869684A Pending JPS6197983A (en) | 1984-10-19 | 1984-10-19 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197983A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE1012408A3 (en) * | 1997-07-30 | 2000-10-03 | Matsushita Electric Ind Co Ltd | GAS LASER OSCILLATOR. |
| JP2015173220A (en) * | 2014-03-12 | 2015-10-01 | ファナック株式会社 | Laser oscillator equipped with discharge tube, and laser processing device |
-
1984
- 1984-10-19 JP JP21869684A patent/JPS6197983A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE1012408A3 (en) * | 1997-07-30 | 2000-10-03 | Matsushita Electric Ind Co Ltd | GAS LASER OSCILLATOR. |
| BE1012409A3 (en) * | 1997-07-30 | 2000-10-03 | Matsushita Electric Ind Co Ltd | GAS LASER OSCILLATOR. |
| US6249535B1 (en) | 1997-07-30 | 2001-06-19 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
| BE1013002A5 (en) * | 1997-07-30 | 2001-07-03 | Matsushita Electric Ind Co Ltd | GAS LASER OSCILLATOR. |
| US6331995B2 (en) | 1997-07-30 | 2001-12-18 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
| US6434181B2 (en) | 1997-07-30 | 2002-08-13 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
| JP2015173220A (en) * | 2014-03-12 | 2015-10-01 | ファナック株式会社 | Laser oscillator equipped with discharge tube, and laser processing device |
| US10128629B2 (en) | 2014-03-12 | 2018-11-13 | Fanuc Corporation | Laser oscillator provided with discharge tube and laser processing machine |
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