JPS5931435A - Oil deterioration monitoring device of oil rotating pump - Google Patents

Abstract

PURPOSE:To know the deterioration extent of a hydraulic operating fluid accurately by guiding the hydraulic operating fluid to a light transmissive cell, irradiating with two kinds of transmitted light with different wavelengths sidewise, and calculating the intensity ratio of those two kinds of transmitted light. CONSTITUTION:The hydraulic operating fluid from an oil rotating pump 1 is guided through the light transmissive cell 2, which is supplied with the circulating hydraulic operating fluid through a filter 3 and a circulating pump 4. A light source 5 using a while light electric lamp consisting of a cool white fluorescent lamp which radiates light beams within a 5,000-7,000Angstrom wavelength range is provided by the cell 2, and the intensity of light transmitted through the cell 2 is detected by semiconductor photodetectors 6 and 7; the photodetector 6 is provided with a filter 8 for light transmission of about 5,000Angstrom wavelength and the photodetector 7 is provided with a filter 9 for that of about 7,000Angstrom wavelength. Then, the deterioration degree of the hydraulic operating fluid which deteriorates owing to mixing of reactive gas is detected from the ratio of photodetected values of both photodetectors 6 and 7.

Description

[Detailed description of the invention] The present invention relates to an oil deterioration monitoring device for an oil rotary pump.

Conventionally, this pump has been used for a long time as a means to create a high vacuum when semicircular devices are manufactured by dry processes such as low-pressure OVD, plasma OVD, plasma oxidation, and plasma etching. , The construction of this pump!IJJJ nlt&Moss The reactive gas used in the moss drying process, for example OF4.0014, tends to get mixed in due to the structure of the exhaust system, and deterioration of the hydraulic oil due to this is unavoidable. When the oil deterioration exceeds a certain value of 1η, the ultimate pressure rapidly decreases and the pump performance deteriorates, reducing the operating efficiency of the dry process. It is desirable to have a device tC that allows you to know when to replace the battery.

The object of the present invention is to provide a device a suitable for this purpose, in which the hydraulic oil of an oil rotary pump is guided into a translucent cell, and a white light bulb or other light source is installed on the side of the cell. , and a light receiver that respectively detects the intensity of transmitted light of two different wavelengths from the light source passing through the cell, and a circuit is connected to both light receivers to calculate the ratio of the detected values. It is characterized by

An embodiment of the device of the present invention will be explained with reference to the drawings. In Fig. 1, (1) is an oil rotary pump, and (2) is a translucent tube through which the hydraulic oil of the nuclear oil rotary pump (1) is guided. indicates a cell,
The cell (2) has a filter (31?I+'j 5't
The hydraulic oil of the pump (11) is circulated and supplied through the pump (4). A light source of a white light bulb consisting of a white fluorescent lamp emitting a leading edge containing ((i) (71 is the r!5 intensity of the light source (5) transmitted through the cell (2)) In the integrated light receiver, a filter (8) is provided on the n1f side of one light receiver (6) to pass light with a wavelength around 5000X by 1:!5, and a filter (8) is installed on the n1f side of one light receiver (6), and a A filter (9) that transmits and detects light with a wavelength around 7oooX is installed on the side.
A light source (2 out of 9 from (U) that passes through cell (2) by 6
The strength of the divine wavelength (,・) has been made known. As mentioned above, hydraulic oil deteriorates when mixed with gas, but according to experiments, it can be monitored depending on the degree of deterioration. It has been found that the light is concentrated in 11 with the wavelength fJ'<existence.

In the case of a dry process for etching A1 using 0014 as a reaction gas, the ratio of the two light intensities is approximately 2 As shown in the diagram, when measuring the transmitted light intensity of approximately 1 oil of hydraulic oil as 1.0, the number of days of use is 1.
In other words, by knowing the ratio of the filtered light intensities of both wavelengths, it is possible to know the state of deterioration of the hydraulic oil.

According to this point of view, each photoreceiver (61 (71) is connected to an arithmetic circuit (1
Connect to 01 and connect each receiver (61 (tested at 71) 1.I
tt of the transmitted light intensity is calculated, and if the ratio becomes, for example, 1.25, the deterioration of the hydraulic oil progresses and it can be predicted that the pressure at which tu of the oil rotary pump (11) will soon decrease, and the operation It can be determined that the time for oil change is approaching.The arithmetic circuit 00) has a display display that displays the calculated ratio, or a display that indicates that the ratio has exceeded 1. b-reporting device (it is possible to connect groups).

As a light source (5), a red light emitting diode (5a) such as GaAo that emits a light beam of about 700 OA as shown in Figure 5 is used.
A blue light emitting diode (5b) such as SjO that emits light of about 500OA is used, and each diode (5a) (
A lens (12) may be provided on the 'ftU side of 5b) and each light receiver (61f71) to condense the light.Furthermore, the light receiver (6) may be
The two wavelengths of the transmitted light received by (7) are selected as appropriate, and the wavelength of the light source (5) is selected accordingly.

To explain its operation, hydraulic oil of 3!J is pumped into a translucent cell (2) by a circulation pump (4).
There, the light intensity j (y) of two wavelengths transmitted from the light source (5) through the cell (21) is expressed as the light intensity j (y) of the light receiver f61 (7
The state of deterioration of the hydraulic oil is determined by detecting in step 1 and calculating the ratio of the detected values using circuit (10).

As described above, according to the present invention, by knowing the dM transmission ratio of two wavelengths that pass through the hydraulic oil in the salmon cell, it is possible to prevent the deterioration of the hydraulic oil. It is possible to know the lJ degree, and it is possible to detect when it is time to change the hydraulic oil, and to prevent the occurrence of an unexpected situation where the oil rotary pump's 1/I-performance decreases while it is operating. There are 4j effects that are effective in improving the operating efficiency of processes and the like.

[Brief explanation of drawings]

Is Figure 1 a redundant device? FIG. 2 is a diagram of the production side of I, FIG. 2 is a line 1 of four people's width of deterioration of hydraulic oil, and FIG. 6 is a diagram of a modification of the device a of the present invention. (1)... Oil rotary pump (2)... Cell (1)... Light i11
Mouse (6) (7)...Light receiver (11))...lσ! Sankai IJii Patent Outlet 1
Person 1] Book vacuum technique 11i + 4: '14 Shikikai t[yo
Rihito Kitagi J1S −
'1' Evening 12 people Figure 2 It 1) Sun Australian woman

Claims (1)

[Claims] The hydraulic oil of the oil rotary pump is pumped into a translucent cell, and on the side of the cell, a white '1↓f bulb and other light sources and two different light sources from the light source transmitting h1 through the cell are placed. An oil deterioration monitoring device for an Ml+rotary pump, characterized in that a light receiver is provided for detecting the transmitted light intensity of each wavelength, and an arithmetic circuit for calculating the detection (1ii) ratio is attached to both light receivers.