JPS5931431A - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPS5931431A
JPS5931431A JP14106982A JP14106982A JPS5931431A JP S5931431 A JPS5931431 A JP S5931431A JP 14106982 A JP14106982 A JP 14106982A JP 14106982 A JP14106982 A JP 14106982A JP S5931431 A JPS5931431 A JP S5931431A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
glass die
gauge
gauge chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14106982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0366609B2 (enrdf_load_stackoverflow
Inventor
Norio Ichikawa
市川　範男
Hitoshi Minorikawa
御法川　斉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14106982A priority Critical patent/JPS5931431A/ja
Publication of JPS5931431A publication Critical patent/JPS5931431A/ja
Publication of JPH0366609B2 publication Critical patent/JPH0366609B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP14106982A 1982-08-16 1982-08-16 半導体圧力センサ Granted JPS5931431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14106982A JPS5931431A (ja) 1982-08-16 1982-08-16 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14106982A JPS5931431A (ja) 1982-08-16 1982-08-16 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS5931431A true JPS5931431A (ja) 1984-02-20
JPH0366609B2 JPH0366609B2 (enrdf_load_stackoverflow) 1991-10-18

Family

ID=15283508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14106982A Granted JPS5931431A (ja) 1982-08-16 1982-08-16 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS5931431A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12318739B2 (en) 2019-05-14 2025-06-03 Sodastream Industries Ltd. Carbonation machine and a gas canister for a carbonation machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12318739B2 (en) 2019-05-14 2025-06-03 Sodastream Industries Ltd. Carbonation machine and a gas canister for a carbonation machine

Also Published As

Publication number Publication date
JPH0366609B2 (enrdf_load_stackoverflow) 1991-10-18

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