JPS5931421A - Vibration sensor - Google Patents

Abstract

PURPOSE:To set a low resonance frequency optionally, not to mention a high resonance frequency by an extension part which has specific length and width at the free end of a thin elastic plate, and fitting a weight of specific mass atop of this extension part. CONSTITUTION:A vibration sensor 10 has a vibrator 18 formed by adhering a piezoelectric element 20 to the thin elastic plate 22 cut in a specific shape. The thin elastic plate 22 is supported on cantilever basis so that one end side is a fixed part 24 and the other end side is the free end. The extension part 28 having the specific length and width is provided at the free end side 26, and the weight 30 of the specific mass is fitted atop of the extension part 28 with an adhesive, etc. The resonance frequency is set depending upon the compliance of the extension part 28 and the mass of the weight 30. Consequently, the resonance frequency, i.e. detection frequency is set freely either in a high frequency range or in a low frequency range.

Description

[Detailed Description of the Invention] This invention is based on Oscillation Renly, '1. It relates to a 1°lJ product that uses a piezoelectric material.

In general, piezoelectric power is used and shaken! Compared to other mechanical-to-electrical converters such as fIIJ1inley1;L, for example electromagnetic tie I's /f, Are you planning to write this in NV1?
The publication Q that can be done is 1, 1! Eyes,
11 bullets on one side of bullet f'l Ii914n%-1/+
'i'i' and the vibrating body (the structure is called the Koni 1-ruf type, -ξ spelling 11 meters tji' / plate - (4, j circumferentially 021j, j: l, other end be the free end!
JJ, Preface 1:' [Six generations of swing! l1IJ Hinley is the simplest r-0 in oscillation l Conley using 11 electric rest (f structure is ε and ε\. , sea urchin, bullet 14 A piezoelectric material is pasted on one side of a d plate, and a vibrating body and /I-IJ are formed by attaching a piezoelectric material to one side of the plate and attaching it together with a vibrating body and /I-IJ. It is the same as the one on the right. j (oscillation frequency Cma, 1. i
cezl l'l 1i (i 4bt 〕?i t'l
For example, 111. Detecting the vibration θ of the circumference d2/number of angles 1
- Record 1 ↑] 1 Thin bullet 111 constants, 11 To reduce the fiance, and b 1 - Voltage distribution electric body' (:
i fit b 'IXa < L/ (al. anti-tJ
D, flC I circumference Flz Number 6 JI IjE Vibration sensor that detects the vibration (, ↓, the above elastic thin (Le 11
wooden? 1 tA is also very crowded. In this way, the imaging lens using this type of piezoelectric material can set the detection frequency to any value within the frequency uI range of the width of a certain culm 1a. It is possible to change the setting. However, especially in the high frequency range or CL 11 (
In the frequency range (゛(J, = 1 resonance of the tenth bullet thin plate and 1 - the mass of the voltage distribution electric body are manipulated) (C becomes difficult to obtain a predetermined resonant frequency and becomes U.

In particular, in vibration sensors using piezoelectric materials, it is possible to achieve a higher resonant frequency (relatively 1!l) in the cylinder, but obtaining a lower resonant frequency below the audible frequency is worth the lower frequency. ``We have to carry a heavy load, and for this purpose, the shape of the piezoelectric body has become excessively large, and it is difficult to actually construct it (↓I r, it is difficult to rotate it).
). 1] "Den 1 production 3i, generally it is difficult to form large objects, and if you were able to do 1i7, η also 4'1 is 1 always high school 21st h
/J'b's 3. Vibration sensor using a piezoelectric material (with medium structure and low speed)
1g, Niudorire fJ, the application frequency of A (
,1 What is expensive?1 I don't like it! ? ＜、c、
, -) +L, using a conventional piezoelectric material, -vibration 1? 91, low frequency @ l; T response 71° can be 1! Tatsu!1'JJ l:?Nri-
The application is (using a piezoelectric material of η) h<dynamic]
! In the high frequency range J, C),
Rather, they occur mostly in the frequency range below the audible frequency. For example, in general mechanical equipment, abnormal vibrations caused by abnormal operation are at frequencies as low as several tens of hertz. Therefore, in order to use it in the safety system of Konera's machine 'AEjl', it is necessary to reliably detect low frequencies.

This invention was made based on the problem of J:U'/r Y,'(, bundles of 1s10), and its purpose and 1j are based on the small size, which is a characteristic of the vibrating lens using a piezoelectric material. And low 1st stroke (-1. ", while making use of Mi as it is: L, to] 1 fJ" (the vibration frequency is braron,
For example, set the resonant frequency to 11 (several 1 hertz) /= 11(). Also, if you use it enough, you can use it to make Furinohimsa iI[!IIξ.

In order to compose [target 1] of item 1, this invention kl, bullet ↑
11 A piezoelectric material is pasted on a thin plate r'1 and it becomes a vibrating body.
+;: 1, H1il l'l ts91 In the preface-holding type vibration sensor formed by setting the breather of H1il l'l ts91 as a fixed end and the other end as free width: C11 note fi H'j
At the free end side of the plate, an extension of a predetermined width is provided on the pole, and at the tip of this extension, a sacred city of a predetermined quality f1j is provided (-
J is characterized in that the resonance frequency can be arbitrarily set depending on the quality and width of the extension part and the mass of the saliva part.

The preferred embodiments of the present invention will now be described with reference to the drawings. a5, please use the same reference numerals for common or equivalent parts in each figure.

Fig. 1 d and Fig. 2 (,1 i%i i according to this invention
l] I! ] An example of the glue is shown in the same figure. No. 101; L, first, cut out the bullet into a predetermined shape. Paste the piezoelectric element 20 on the plate 22.
6 L/-c f, r Ih% motion body 18.

This vibrating body 18 has sheath parts 12J1, 1, 2, 'aF
11v is housed in the case 12 that holds ili 12 II /) + +3. The thin plate 22 has its end side connected to the fixed part 24 and 11, and its thin end side at the straddle is the free end. A hole 32, 32 is drilled in the fixing part 24 of the plate 22, and the cutout part 14 of the sheath part 10 is inserted into the hole 32, 32. Fixed to the surface: 11.Furthermore,
h f"L' (The upper end surface of the partition part 16 integrally provided on the lower surface of the 7 part 12 matches the upper end surface of the cut part 14 on the rough part 10 side? J, sea urchin "-) 13. With this, the fixing part 24 is connected to each partition part 14 of the sheath part 10 and the lid part 12.
．． It is held between 16. 1” The voltage distribution electric body 20 is actually hi! In example i, it is formed into a disk shape, and the to side of
The elastic plate 22 (not shown) whose lower surface is in contact with each other is made of metal, and this bullet II1. tiu board 2 board thickness 2 electric body 20
form the lower electrode. The upper electrode of the piezoelectric body 20 and the fixed end side of the bullet ↑'l envelope 22 are connected to the C external drawer 1) and the pull 38 via lead wires 40 and 42.

In addition, a double-sided adhesive sheet 1-44 is attached to the outer bottom surface of J-note/7-S 12 fi (=J I:J (there, J is measured on this one random sheet 44) Z!Easy to things 1
It is designed to be pasted on. Here C1l IX+
! zu't'l'l+'+9On the free end side of the plate 22,
An extension part 28 having a predetermined length + 3 width is extended, and the extension part 28 is roughly extended. 8 Glue specified quality on the L end! ■ Weight 3
0h” IB tr agent fragrance fJ to RiH (actual L:: r
& (= J iJ has been done. Juki 1! 1 Abe 28 is
In the illustrated embodiment, IJ has the same width as the rest of the part.
I'm here.

Now, the J of J's 1, the vibration Ron 1 no 10 made up of sea urchins.
(,1) By being attached to the limb measurement object, it vibrates together with the object to be measured.This vibration causes the elastic thin plate 22 mentioned above to resonate and vibrate, and this vibration causes the It is electrically converted into Cl by the body 20 and output to the outside via the cable 38.

At this time, 1-vibration of the bullet bamboo thin plate 22 [J, piezoelectric body 20
In addition to the mass of the 111
Vibration 7 Ii fi4 (iJ,) (determined + 7. Neru's unique resonant frequency (・row i; ゛are.) 'i: +3 and play! 1 calendar board 1] Nno Raishi 7
J: ＝) was almost determined in this case, and here it is written as
) and the distal end of the extension part 28 (=I and Jζ-) to set the resonant frequency (\4).
I am like i-). As a result, the vibrating body 18 (
J, 1゛By the courtier 2B and 11th by the gentleman 30, it is possible to do 1 [A] in 1 minute, and 1 [human quality O1] in 1 minute for Sear + Appliance etc. 7) 'C,%
Resonance frequency (41 conventional l',) (j') J, 5
) '43 people wide to 11 (you can set it) to 1. suffer. As a result, it is now possible to have a resonance frequency as low as several tens of hertz, which was previously impossible, in the cylinder.
It is possible to detect the high-sensitivity IJ photographed by the 17th boat; the frequency sensitivity of the sea urchin is 1α. A very short comb with a small compliance and a gentle 30 G
; is based on a small -b, the detection impression characteristic ↑11 can also be brought to a high frequency -) and the line lI' can be heard during the b song. In other words, the vibration caused by this invention [? In Series 10, the frequency range to be measured is 1h < 11th, which is a low frequency region. The goodness of the part 28 + 5 and its width and the trade of the 11th mark 30; + 4. Select (by 2 and C it can correspond to 1 -). Furthermore) 1st eye What you should do is vibrate 1
Even if you set the resonance frequency of +18 extremely low, the setting is -1-J, -) (
Since the length of row A1 is C, there is no need to make the shape of the piezoelectric body 20 more popular. 1), and when the elastic thin plate 22 is cut out, it is formed at 1.+1, which increases the trouble of manufacturing and assembly. Is the piezoelectric type vibration l? The advantages of this are not diminished in the slightest.

3, 4 and 5 show other embodiments of the invention. Shown in the same figure? 1 example ("Ll, bullet ↑I [λ9 plate 2
A long hole 34, which is long in the direction of extension of the extension portion 28, is bored at the distal end side of the second extension portion 28, and a C weight 30 is inserted into the long hole 34 using a screw 36. By making this J: Una structure,! ll1301J l: Loosen the notation 36 (-Doni, Nisu, within the range of the goodness of the F hole 34.
(It is possible to freely adjust the resonant frequency of the moving body 18 to match the resonant frequency to the imaging frequency. Precisely adjust (J adjustment should be done here during 1r; 1, (
-4's purposeful vibrations can be detected with high sensitivity Iσ? Jro (- act like you're going to get angry.

;, I 7j, this invention is a vibration IJ+sen 1j- using a renotive vibrator [J is 4
1. Vibration using a bi-7 roots type vibrator! can be applied immediately. The Paimonef type oscillator is more difficult to make than the unimorph type as the one with the aforementioned 5#, IJ, however, jt and Ihi frequencies is more difficult to make than the unimorph type, but this is also as shown in Fig. 5, an example of which is shown. , 11 electric (A20.20 is attached from both sides +rlP1 throat '117 +1j 22 is r's I (
fence! I decided to attach a weight 30 to the extension part 28 having a width of 5mm and 9η at the tip of the extension part 28. Is it possible to easily set the resonant frequency to a sufficiently low value?
Bye-E Luno type vibration! 'Q) The advantage of high 1 ■pox, which is a 7''f symptom, is that the vibrating lentil that was mentioned in 31a can be made extremely simple and small.
! I can do it. Even if there is a J5 in this example, the wave number of the J vibration frequency 4 "straw detection 1, ', 1 is,
It is possible to arbitrarily set the IIQ from within a wide range of IIQ by operating the IIQ extension section 28 and the IQ extension section 30.

Like 1st I, the vibration hinge according to this invention ~let
, various advantages that can be obtained by using piezoelectric materials (-cJ), which are old, medium-sized, small, and low in size. The resonant frequency can be freely set to 5p to create a high frequency or to create a low frequency range.

[Brief explanation of drawings]

Figure 1 is a sectional view of an example of a lA% dynamic Hinley according to the present invention, Figure 2 is a plan view of one example of the lA% dynamic Hinley, and Figure 3 is a plan view of one example of the lA% dynamic Hinley according to the present invention. Showing an example of fruit angle 1J' 111+ side view, Figure 4 1.1ε1) 3 Figure IL
−,ilj lnoru vibration 1? A plan view of the vibrating body part taken out, Fig. 5 ILL M Example 6: /l'; ...Vibration top 12...
・・・・・・・・・／／ 'l. 12a...Excellent product 121+...Lid part 14.16...I1 cut part 18......... Pregnancy motion 1 ho 2
0 ... ... ... ... Piezoelectric 1 piece 22
・・・・・・・・・・・・Bullet↑iE94Fx2...
・ ・ ・ ・ ・ ・ ・ 1 constant part 26 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・
......Free end side 28...
・Extension part 30・・・・・・・・・・・・Shinto 32・・・・・・・・・・・・Take A・1 hole 34・・・・
......Slong hole 3G...Screw J (8...Couple 40.42...
・・・Lead line 44・・・・・・・・・Double-sided interview sheet Q! I
ii'l Applicant Tomi 1 Electrochemical Co., Ltd. 1
Agent BenjlJ! :f
-Ba Kano tjiI diagram

Claims (1)

[Claims] (1) A piezoelectric material is attached to an elastic thin plate to form a vibrating body.
I-1, 1-Ki bullet flalr Temporary end is fixed end and other end is self-111 end. Preface 1'
The vibration of jIh'j'c is set up on the free end side of the thin plate. Tip j of nl'=
81 (with the prescribed 71 and a half sacred items installed, the above extension 1 (length c 17.1, σ width and -F record J, 1 friend vibration frequency in the door) I will release a special feature that allows it to be set.
*In accordance with claim (1), the -1 weight part is movably moved in the direction of extension of the extension part.
Vibration Renry characterized by J IJ. (3) In claim (1) or (2) of Special Crystal '1, Juki bullet f/l: JF-only case in which the fixed end of the fit plate is affixed to the object to be measured, and the case. A vibrating hinley characterized in that it is supported by being sandwiched between a lid part that closes off.