JPS5931150U - Wiring piping duct for electron beam lithography equipment - Google Patents
Wiring piping duct for electron beam lithography equipmentInfo
- Publication number
- JPS5931150U JPS5931150U JP12681482U JP12681482U JPS5931150U JP S5931150 U JPS5931150 U JP S5931150U JP 12681482 U JP12681482 U JP 12681482U JP 12681482 U JP12681482 U JP 12681482U JP S5931150 U JPS5931150 U JP S5931150U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam lithography
- duct
- lithography equipment
- piping duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は本考案の一実施例を示し第１図は
細面図、第２図は上面図、第３図は本考案の他の実施例
における側面図である。
２．３・・・・・・配線、６・・・・・・架台、１４・
・・・・・定盤。1 and 2 show one embodiment of the present invention; FIG. 1 is a detailed view, FIG. 2 is a top view, and FIG. 3 is a side view of another embodiment of the present invention. 2.3... Wiring, 6... Frame, 14.
...Surface plate.
Claims (1)
アヤクッションを介して支持する架台の一部をダクト状
に構成し、前記ダクト状内へ配線および或いは配管を配
置したことを特徴とする電子ビーム描画装置の配線配管
ダクト。A part of the pedestal that supports the surface plate and identification plate on which the electron beam column and sample chamber are mounted via an air cushion is configured in the shape of a duct, and wiring and/or piping is arranged inside the duct shape. A wiring piping duct for an electron beam drawing device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12681482U JPS5931150U (en) | 1982-08-21 | 1982-08-21 | Wiring piping duct for electron beam lithography equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12681482U JPS5931150U (en) | 1982-08-21 | 1982-08-21 | Wiring piping duct for electron beam lithography equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5931150U true JPS5931150U (en) | 1984-02-27 |
Family
ID=30288224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12681482U Pending JPS5931150U (en) | 1982-08-21 | 1982-08-21 | Wiring piping duct for electron beam lithography equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931150U (en) |
-
1982
- 1982-08-21 JP JP12681482U patent/JPS5931150U/en active Pending
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