JPS5930667A - Dressing device for slicer - Google Patents

Abstract

PURPOSE:To enable to lengthen life of a blade, by applying corrective dressing automatically only to a deteriorate part by detecting a gap in a cutting-in direction of the blade, in a slicer for a wafer. CONSTITUTION:Capacitor-type displacement detectors are provided on positions 6 and 7 before and behind entering of a rotary blade 1 into a cutting-off section of an ingot 5, and dressing of the upper part 3 of a diamond part 2 is done by tilting a dressing stone 8 and pressing it against the upper part by deciding that the upper part 3 does not cut well when it is detected that the blade is bent downward beyond a limit. On the other hand, when the blade is displaced upward the dressing of the lower part 4 is done. A clogging state of the blade can be decided even by measuring the lower surface of the ingot whose cutting-off is completed. Extension of life of the blade without deteriorating measure, shape and preciseness of the surface of a cut wafer becomes passible, as a well cutting state of the blade can be maintained in this manner.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for dressing a blade of a slicing machine that cuts an ingot into thin wafers during semiconductor manufacturing.

The blade of the slicing machine fixes diamond powder on the inner periphery of a washer-shaped base metal made of thin stainless steel plate, and uses this inner blade to cut the inserted ingot. In the diamond part 2 at the inner tip of the blade 1 shown in FIG. 1, if the upper surface part 3 has a more severe clogging of the surface of the diamond grinding wheel than the lower part 4, the sharpness of the upper part will be inferior to that of the lower part. As shown in Figure 2, the blade 1 is curved downward inside the ingot 5, making it impossible to obtain an accurate cutting surface. , and if the lower surface portion 4 becomes clogged, the cutting direction will conversely curve upward. Conventionally, dressing was performed by pressing a dressing stone against the blade at any time in the case of a 2-manual machine, or at a predetermined number of cuts or at each cutting time in the case of an automatic machine, but in the case of a 2-manual machine, manual effort was required. thing.

There are problems such as the work is dangerous and requires skilled skills.Automated methods can eliminate manual labor and reduce dressing time, but if dressing is infrequent, the size, shape, and shape of the cut wafers may be affected. There were problems such as a decrease in surface accuracy, that is, quality, and if the frequency was increased, the service life of the expensive blade would be unnecessarily shortened.

This invention constantly manages the blade or cutting surface, determines whether the deteriorated part of the cutting edge of the blade is upward or downward based on the curvature of the blade, the shape of the cut surface, and deformation, and automatically controls only the deteriorated part. An apparatus for performing corrective dressing is provided.

In FIG. 3, when the ingot 5 is pressed in the direction of the arrow and cut against the blade position that rotates twice,
7 before and after the position where the blade enters the cut surface of ingot 5
A displacement detecting device for the upper surface of the blade is provided at 6, 7 or one of the positions. This is, for example, a capacitor type displacement detector, and detects the amount of displacement of the upper surface of the blade. If it is detected that the blade is curved downward beyond a predetermined limit, it is determined that the state shown in FIG. As shown in Fig. 4, the dressing stone 8 is tilted and applied to the upper surface portion 3 and pressed in the direction of the arrow to dress the upper surface portion. As shown by the dashed line in FIG. 4, dressing is performed by tilting the stone 8 and applying it to the lower surface portion 4.

The clogging state of the blade can also be determined by measuring the surface after cutting. For example, in Figure 5,
By detecting the shape of the lower surface of the completed cutting with the measuring device 9 and knowing the direction of curvature, it is possible to determine whether the upper or lower surface is clogged. . It is also possible to detect this by inspecting the thin plate that has been cut, and to perform dressing on one side in the same manner as described above.

Fig. 6.7.8 shows an example of a mechanism for dressing the diamond part 2 by tilting the dressing stone 8. The dressing stone 8 is inserted vertically into the hole in the blade by a holder 11, which is supported horizontally on an upright post 13 by a support arm 12.

! A cylinder piston 15 is provided for tilting the stone 8 in a plane parallel to the upright column 13, and its operation causes an L-shaped lever 16 to pivot and a cylinder 17 to swing around a bearing 21 as a fulcrum. A rotating shaft 18 of a stone is inserted into the cylinder 17 and rotates together with the two cylinders 17, thereby causing the upper plate 19 to rotate. A cylinder 20 is attached to the plate 19, and a stone holder 11 is attached to the tip of the cylinder 20.
The stone 8 is rotated to take an arbitrary inclined position.

Incidentally, the cylinder 20 is used to carry out a feeding operation for moving stones in and out of the blade position. A fulcrum of a rod 14 is provided in the middle of the support arm 12, and by pulling the rod downward as shown in FIG. ” By pulling it away from the blade. That is, by operating the cylinder 15,
By tilting the stone so that it touches the upper and lower surfaces of the diamond part and pulling the rod 14 downward, the stone can be pressed against the blade, allowing partial dressing in the state shown in FIG. 4. Note that if the rod 14 is pulled without tilting the stone, that is, in a vertical position, the upper and lower surfaces can be dressed simultaneously in the conventional manner.

In the above, a vertical type was explained in which the blade is set horizontally and the ingot is inserted vertically.

The same is true for the horizontal type in which the blade is positioned vertically and the ingo knife is installed horizontally for cutting.

As described above, according to the present invention, the sharpness of the upper and lower surfaces of the blade can be always aligned to prevent the cutting direction from curving, and the sharpness can be maintained by simple drainage in two parts. All of these operations can be performed automatically, making it possible to extend the life of the blade without compromising shape or surface accuracy.

A very large effect can be obtained.

[Brief explanation of drawings]

Figure 1 is an enlarged explanatory diagram of the blade part of the grade. FIG. 2 is an explanatory diagram showing curvature in the cross-sectional direction due to clogging of the upper surface portion, and FIG. 3 is a plan view of the blade. Fig. 4 is a diagram explaining the operation of the present invention, Fig. 5 is an explanatory diagram of clogging detection by measuring a cut surface, and Fig. 6 is a drawing of the dressing star.
FIG. 7 is a side view, and FIG. 8 is a sectional view taken along line VIII-Vllll in FIG. 7. 1 Blade 2 Diamond part 3 Top part
4 Bottom part 5 Ingot 6.7. Detection A 8
Dressing Stone 11 Stone Holder
12. Support arm 13 Upright column 14. Dressing rod 15 Piston cylinder for tilting Figure 1 Figure 2 Figure 6

Claims (3)

[Claims] (1) Detects deviation in the cutting direction of the blade. A mechanism that holds the dressing stone erected in the inner edge of the blade at an angle so that it partially contacts the upper and lower surfaces of the diamond part on the inner circumference of the blade depending on the direction of deviation, and presses it against the blade. Dressing equipment for slicing machine with. (2) In the description of claim 1, the slicing machine detects the deviation of the blade in the cutting direction by measuring the displacement of the blade before the blade enters the ingot, after the blade enters the ingot, or at both positions. dressing equipment. (3) A dressing device for a slicing machine as set forth in claim 1, which detects a deviation in the cutting direction of the blade by measuring the shape of the cut surface of the ingot.