JPS5923731U - Diffusion jig - Google Patents

Diffusion jig

Info

Publication number
JPS5923731U
JPS5923731U JP11909582U JP11909582U JPS5923731U JP S5923731 U JPS5923731 U JP S5923731U JP 11909582 U JP11909582 U JP 11909582U JP 11909582 U JP11909582 U JP 11909582U JP S5923731 U JPS5923731 U JP S5923731U
Authority
JP
Japan
Prior art keywords
wafer
diffusion jig
support fitting
diffusion
wafer support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11909582U
Other languages
Japanese (ja)
Inventor
臣二 関家
Original Assignee
株式会社テクニスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社テクニスコ filed Critical 株式会社テクニスコ
Priority to JP11909582U priority Critical patent/JPS5923731U/en
Publication of JPS5923731U publication Critical patent/JPS5923731U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図は従来の拡散治具、第３図は本考案拡散
治具の斜視図、第４図は要部断面図。 ６・・・支承板、８，８′・・・ウェーハ支持体嵌合部
、９、　９’・・・・ノエーハ支持体、１１・・・ウェ
ーハ支承溝、１２・・・切欠部、１３・・・おねじ部、
１４・・・固定ナツト。1 and 2 are a conventional diffusion jig, FIG. 3 is a perspective view of the diffusion jig of the present invention, and FIG. 4 is a sectional view of a main part. 6... Support plate, 8, 8'... Wafer support fitting portion, 9, 9'... Noefer support, 11... Wafer support groove, 12... Notch, 13.・・Male thread part,
14...Fixing nut.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 広面にウェーハ支持体嵌合部を形成した支承板２個を直
立対面させ、その中間に位置して複数個のウェーハ支持
体をその両端部を前記ウェーハ支持体嵌合部に嵌合させ
架設する拡散治具において前記ウェーハ支持体の少なく
とも一本はその両端部を前記ウェーハ支持体嵌合部を貫
通して外方へ突出するよう構成すると共にその突出部周
縁にはおねじ部を形成しそ、該おねじ部にはナツトを螺
合して固定するよう構成して成ることを特徴とする拡散
治具。Two support plates each having a wafer support fitting portion formed on a wide surface thereof are placed vertically facing each other, and a plurality of wafer supports are positioned between them and are installed by fitting both ends of the support plates into the wafer support fitting portion. In the diffusion jig, at least one of the wafer supports is configured such that both ends thereof penetrate the wafer support fitting part and protrude outward, and a male thread is formed on the periphery of the protrusion. A diffusion jig characterized in that the male threaded portion is configured to be fixed with a nut screwed together.
JP11909582U 1982-08-05 1982-08-05 Diffusion jig Pending JPS5923731U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11909582U JPS5923731U (en) 1982-08-05 1982-08-05 Diffusion jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11909582U JPS5923731U (en) 1982-08-05 1982-08-05 Diffusion jig

Publications (1)

Publication Number Publication Date
JPS5923731U true JPS5923731U (en) 1984-02-14

Family

ID=30273468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11909582U Pending JPS5923731U (en) 1982-08-05 1982-08-05 Diffusion jig

Country Status (1)

Country Link
JP (1) JPS5923731U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104630U (en) * 1988-11-25 1990-08-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944509U (en) * 1972-07-21 1974-04-19
JPS5636140B2 (en) * 1977-09-09 1981-08-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944509U (en) * 1972-07-21 1974-04-19
JPS5636140B2 (en) * 1977-09-09 1981-08-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104630U (en) * 1988-11-25 1990-08-20

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