JPS5923223A - Vibration sensor - Google Patents
Vibration sensorInfo
- Publication number
- JPS5923223A JPS5923223A JP57132732A JP13273282A JPS5923223A JP S5923223 A JPS5923223 A JP S5923223A JP 57132732 A JP57132732 A JP 57132732A JP 13273282 A JP13273282 A JP 13273282A JP S5923223 A JPS5923223 A JP S5923223A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibration
- vibration sensor
- adhesive
- stuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005452 bending Methods 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims abstract description 10
- 229910000679 solder Inorganic materials 0.000 claims abstract description 3
- 230000005496 eutectics Effects 0.000 claims description 2
- 230000010287 polarization Effects 0.000 claims description 2
- 239000012790 adhesive layer Substances 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 3
- 239000011888 foil Substances 0.000 abstract description 2
- 238000003763 carbonization Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H13/00—Measuring resonant frequency
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は振動物体における弾性振動全検出するのに適し
た共振型振動センサ、特に所定の周波数について検出感
度の優れた共振型振動センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a resonant vibration sensor suitable for detecting all elastic vibrations in a vibrating object, and particularly to a resonant vibration sensor with excellent detection sensitivity at a predetermined frequency.
従来、振動物体における弾性振動全検出するセンサとし
て、振動物体の固有振動数に共振周波数を含わぜた屈曲
振動モードの片持ちはり構造の矩形状バイモルフ圧電振
動子がよく知られている。BACKGROUND ART Conventionally, a rectangular bimorph piezoelectric vibrator having a cantilever structure and having a bending vibration mode in which a resonance frequency is included in the natural frequency of a vibrating object is well known as a sensor that detects all elastic vibrations in a vibrating object.
しかしながら、機械的に、あるいは温度変化なとによっ
て発生する応力により、支持部にずれが生じ、安定な共
振周波数が得られないという欠点を有していた。ところ
が、貼９合わせ圧電振動子中にレーザ加工機等の溶融切
断手段で所定の周波数に共振を有する屈曲振動子を作製
し、この屈曲振動子の周辺を支持固定することによって
安定な共振周波数金有する共振型振動センサが得られる
。However, it has had the disadvantage that the supporting portion may shift due to stress generated mechanically or due to temperature changes, making it impossible to obtain a stable resonant frequency. However, by creating a bending vibrator that resonates at a predetermined frequency in a laminated piezoelectric vibrator using a melt-cutting means such as a laser processing machine, and by supporting and fixing the periphery of this bending vibrator, a stable resonance frequency can be achieved. A resonant vibration sensor having the following characteristics is obtained.
しかし、貼り合わせ圧電振動子の接着には、これまで有
機系接着剤特にエポキシ系接着剤が用いらｔＦ用い７
れていたが、レーザ加工機←す今特溶融させて切削する
と有機系接着剤は炭化し、屈曲振動子の出力取り出し用
電極間を短絡させてしまうという問題がある。However, until now, organic adhesives, especially epoxy adhesives, have been used to bond bonded piezoelectric vibrators. There is a problem in that it carbonizes and causes a short circuit between the output extraction electrodes of the bending vibrator.
本発明はこのような共振型振動センサの問題点を解決せ
んとするものであシ、複数枚の板状圧電素子全無機接着
剤で接着した貼９合わせ圧電振動子中に屈曲振動モード
の振動子を溶融切断して、安定に弾性振動を検出できる
振動センサ全提供することを目的としている。The present invention aims to solve the problems of such a resonant vibration sensor.It is an object of the present invention to solve the problems of such a resonant vibration sensor. The object of the present invention is to provide a vibration sensor that can stably detect elastic vibrations by melting and cutting a child.
す、下、本発明の一実施例ｋｌＥ而を用いて詳細に説明
する。図は、本発明にかかる振動を検知する屈曲振動モ
ードの振動子を、厚さ方向に分極軸を有する円板状圧電
素子二枚を貼り合わせた圧電振動子中に局在さゼた構造
・２示している。なお、第１図は上面図、第２図は縦断
面図、第３図は底面図である。Below, one embodiment of the present invention will be explained in detail using an example. The figure shows a structure in which a bending vibration mode vibrator for detecting vibration according to the present invention is localized in a piezoelectric vibrator made by bonding two disc-shaped piezoelectric elements with polarization axes in the thickness direction. 2 is shown. Note that FIG. 1 is a top view, FIG. 2 is a longitudinal sectional view, and FIG. 3 is a bottom view.
円板状圧電素子１．２を、それぞれの電極１ａ。A disc-shaped piezoelectric element 1.2 is connected to each electrode 1a.
２ａで電気的に導通するように、十分に薄い無機接着剤
層３で接着されており、さらにこの貼り合わせ圧電振動
子をレーザ加工機によりコ字状に切断されて、スリット
４が設けられている。そして、電極１ｂ、２ｂにはそれ
ぞれリード線５．６が接続されている。この貼り合わせ
原電振動子の、スリット４の周辺から外周捷での部分を
被支持部とすれば、スリット４で囲まれた部分が屈曲振
動モードのいわゆるハ持ちはり型振動子として機能する
。振動によって発生する出力電圧は、前記貼り合わゼ圧
電振動子の」ユニ面電極１ｂ、２ｂ間に得られ、リード
線５．６間から取り出される。共振周波数Ｆｒ は振動
部の板厚ｉＴ、スリット４で囲まれた部分の長平方向の
長き”ｋｌとすれば、ＦｒはＴ／β２比例するので、こ
れら寸法Ｔ、βにより所定の値に設定できる。2a is bonded with a sufficiently thin inorganic adhesive layer 3 so as to be electrically conductive, and this bonded piezoelectric vibrator is further cut into a U-shape using a laser processing machine to form a slit 4. There is. Lead wires 5.6 are connected to the electrodes 1b and 2b, respectively. If the part of this bonded electromagnetic vibrator from the periphery of the slit 4 to the outer periphery is used as the supported part, the part surrounded by the slit 4 functions as a so-called C-shaped beam type vibrator in the bending vibration mode. The output voltage generated by the vibration is obtained between the uniplane electrodes 1b and 2b of the bonded piezoelectric vibrator, and is taken out between the lead wires 5.6. The resonant frequency Fr can be set to a predetermined value using the dimensions T and β, since Fr is proportional to T/β2, assuming that the plate thickness of the vibrating part is iT and the length of the part surrounded by the slit 4 in the longitudinal direction is "kl". .
このように貼り合わせ圧電振動子中に屈曲振動モードの
振動子を局在させることにより、貼り合わせ圧電振動子
の支持固定する部分の変化に対して、屈曲振動子の共振
周波数変化は少なく、安定である。しかし、円板状圧電
素子を有機性接着剤で接着した場合、有機性接着剤はレ
ーザ光の照射によって炭化し、スリットの内壁面に付着
して、貼り合わせ面側の電極と外側の電極とを短絡ζぜ
てしまうおそれがきわめて太きい。By localizing the flexural vibration mode vibrator in the bonded piezoelectric vibrator in this way, the resonant frequency of the flexural vibrator changes little and remains stable even when the parts that support and fix the bonded piezoelectric vibrator change. It is. However, when disc-shaped piezoelectric elements are bonded with an organic adhesive, the organic adhesive is carbonized by laser light irradiation and adheres to the inner wall surface of the slit, causing the electrode on the bonding surface side to connect with the outer electrode. There is an extremely high risk of short-circuiting and damaging the circuit.
板状圧電素子の貼り合わせに使用する無機性接着剤とし
てはたとえばガラス性の接着剤がある。Examples of inorganic adhesives used for bonding plate-shaped piezoelectric elements include glass adhesives.
これは溶融状態になっても有機物接着剤のように炭化す
ることがなく、円板状圧電素子電極間の短絡が起こらな
い。ｉ ｆｔ、ガラスに代えてハンダの薄い箔を使用し
て電極開音／・ンダ伺けしたり、あるいは接着物の一方
をＡｕ蒸着電極、他方をＡｕ表面にＳｉ ｆ）蒸着した
電極としておけば数百度の温度でＡｕとＳｌの共晶接着
をしたりしても、同じ効果を得ることができる。Even when it is in a molten state, it does not carbonize unlike organic adhesives, and short circuits between the disc-shaped piezoelectric element electrodes do not occur. If you use a thin foil of solder instead of glass to open the electrode, or use one side of the adhesive as an Au vapor-deposited electrode and the other as an electrode made of Si vapor-deposited on the Au surface, the number of electrodes can be reduced. The same effect can be obtained by eutectic bonding of Au and Sl at a temperature of 100 degrees.
以上の説明からも明らかなように、本発明によれば貼り
合わせ圧電振動子中に屈曲振動モードの振動子を溶融切
断加工することが可能となり、屈曲振動子の共振周波数
を安定させることができる。As is clear from the above description, according to the present invention, it is possible to melt and cut a bending vibration mode vibrator in a bonded piezoelectric vibrator, and the resonance frequency of the bending vibrator can be stabilized. .
第１図は本発明の一実施例の振動センサの上面図、第２
図はその断面図、第３図はその底面図である。
１ 、２−−−−板状圧電素子、１ａ、１ｂ、２ａ。
２ｂ・・・・・・電極、３・・・・・・接着剤層、４・
・・・・・スリット。
代ｆ１１！人の氏名 弁理士 中 尾 敏 男 ほか１
名第１図
第３図FIG. 1 is a top view of a vibration sensor according to an embodiment of the present invention, and FIG.
The figure is a sectional view thereof, and FIG. 3 is a bottom view thereof. 1, 2---Plate piezoelectric element, 1a, 1b, 2a. 2b... Electrode, 3... Adhesive layer, 4.
·····slit. Teenage f11! Person's name: Patent attorney Toshio Nakao and 1 other person
Figure 1 Figure 3
Claims (1)
を無機接着材で貼シ合わせた構造の圧電振動子中に、溶
融切断して所定周波数に共振を有する屈曲振動モードの
屈曲振動子を局在させたことを特徴とする振動センサ。 （２）板状圧電素子の貼シ合わゼにハンダ、またはＡｕ
とＳｌの共晶接着を用いたことを特徴とする特３′Ｆ請
求の範囲第１項記載の振動センサ。[Claims] Kogai (1) A piezoelectric vibrator having a structure in which a plurality of plate-shaped piezoelectric elements having polarization axes in the thickness direction are bonded together with an inorganic adhesive is melted and cut to resonate at a predetermined frequency. A vibration sensor characterized by having a localized bending vibrator in a bending vibration mode. (2) Use solder or Au to bond the plate-shaped piezoelectric elements together.
The vibration sensor according to claim 1, characterized in that eutectic adhesion of and Sl is used.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57132732A JPS5923223A (en) | 1982-07-28 | 1982-07-28 | Vibration sensor |
| DE8383107244T DE3379175D1 (en) | 1982-07-28 | 1983-07-23 | Vibration sensor |
| EP83107244A EP0100501B1 (en) | 1982-07-28 | 1983-07-23 | Vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57132732A JPS5923223A (en) | 1982-07-28 | 1982-07-28 | Vibration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5923223A true JPS5923223A (en) | 1984-02-06 |
| JPH0131578B2 JPH0131578B2 (en) | 1989-06-27 |
Family
ID=15088293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57132732A Granted JPS5923223A (en) | 1982-07-28 | 1982-07-28 | Vibration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5923223A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3930314A1 (en) * | 1988-09-09 | 1990-03-22 | Nissan Motor | PIEZOELECTRIC SENSOR FOR MONITORING A KINETIC MOTION SIZE |
| US5053671A (en) * | 1987-11-16 | 1991-10-01 | Nissan Motor Company, Limited | Piezoelectric sensor for monitoring kinetic momentum |
| CN111678664A (en) * | 2020-04-22 | 2020-09-18 | 中建深圳装饰有限公司 | Curtain wall plate falling risk discrimination method based on vibration analysis |
-
1982
- 1982-07-28 JP JP57132732A patent/JPS5923223A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5053671A (en) * | 1987-11-16 | 1991-10-01 | Nissan Motor Company, Limited | Piezoelectric sensor for monitoring kinetic momentum |
| DE3930314A1 (en) * | 1988-09-09 | 1990-03-22 | Nissan Motor | PIEZOELECTRIC SENSOR FOR MONITORING A KINETIC MOTION SIZE |
| CN111678664A (en) * | 2020-04-22 | 2020-09-18 | 中建深圳装饰有限公司 | Curtain wall plate falling risk discrimination method based on vibration analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0131578B2 (en) | 1989-06-27 |
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