JPS59226417A - Corrosion resistant electrode structure - Google Patents

Corrosion resistant electrode structure

Info

Publication number
JPS59226417A
JPS59226417A JP10093483A JP10093483A JPS59226417A JP S59226417 A JPS59226417 A JP S59226417A JP 10093483 A JP10093483 A JP 10093483A JP 10093483 A JP10093483 A JP 10093483A JP S59226417 A JPS59226417 A JP S59226417A
Authority
JP
Japan
Prior art keywords
vapor
electrode structure
deposited layer
deposited
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10093483A
Other languages
Japanese (ja)
Inventor
下り藤 勝正
望月 清人
篤 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Metallizing Co Ltd
Original Assignee
Toyo Metallizing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Metallizing Co Ltd filed Critical Toyo Metallizing Co Ltd
Priority to JP10093483A priority Critical patent/JPS59226417A/en
Publication of JPS59226417A publication Critical patent/JPS59226417A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は、プラスチックフィルム、シートあるいは成型
物上に直接金属蒸着した電極構造物、あるいは該素材上
に転写して得られる電極構造物に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode structure in which metal is deposited directly on a plastic film, sheet, or molded product, or an electrode structure obtained by transferring the metal onto the material.

近年、事務用電子機器、家庭用電気機器等の中で用いら
れる接点材料、あるいはフラットケーブル用シールド膜
等において、ポリエステルフィルムにアルミニウム、亜
鉛、もしくは銅等を直接蒸着したもの、あるいはそれら
金属の蒸着膜転写品が使用されている。例えば接点電極
材にそれらの電極構造物を用いる場合には、接点部が機
器の性能を直接左右するものであり、電気的信号のオン
−オフにわずかの誤動作も生じないものが要求される。
In recent years, polyester films with direct vapor deposition of aluminum, zinc, copper, etc., or vapor deposition of these metals, have been used as contact materials used in office electronic equipment, household electrical equipment, etc., or as shielding films for flat cables. Membrane transfer products are used. For example, when such an electrode structure is used as a contact electrode material, the contact portion directly affects the performance of the device, and is required to be able to turn on and off electrical signals without causing even the slightest malfunction.

しかし、一方、最近これらの・機器を使用する環境が多
様化したことにより、誤動作が発生する機会が多くなっ
て来ている。
However, recently, as the environments in which these devices are used have become more diverse, there are more opportunities for malfunctions to occur.

一般にキーボード等に代表される接点材料には、導電の
ための低表面抵抗性、各種雰囲気に対する金属膜表面の
安定性(耐食性)、接着貼付は等による作業性の良さ、
および品質安定性とが必要とされる。また常時使用する
ことに対づる安定性、例えば電流による蒸着膜の消失が
無いこと等も要求される。しかし、今のところ最も実用
的可能性があると考えられるアルミニウム真空蒸着ポリ
エステルフィルムの場合には、表面低抵抗性、生産性、
熱処理等による寸法安定性は満足できる範囲にあるが、
耐食性、電流断続印加による蒸着膜の消失が大きく、そ
のままでは安定した実用には供せられない。また、特に
キーボード部品として、各種発泡体材料の上に該アルミ
ニウム蒸着ポリエステルフィルムを貼付けて使用する場
合には、該貼付は工程での溶媒、接着剤、乾燥熱等がア
ルミニウム蒸着面に影響し、表面抵抗値の増加を生じる
という劣化現象が生じる。
In general, contact materials such as keyboards have low surface resistance for conductivity, stability of the metal film surface against various atmospheres (corrosion resistance), and good workability due to adhesive attachment, etc.
and quality stability are required. It is also required to have stability against constant use, for example, that the deposited film does not disappear due to electric current. However, in the case of aluminum vacuum-deposited polyester film, which is currently considered to have the most practical potential, it has low surface resistance, productivity,
Although the dimensional stability due to heat treatment is within a satisfactory range,
Due to corrosion resistance and the loss of the deposited film due to intermittent current application, it cannot be put into stable practical use as it is. In addition, especially when the aluminum-deposited polyester film is used as a keyboard component by pasting it on various foam materials, solvents, adhesives, drying heat, etc. during the pasting process may affect the aluminum-deposited surface. A deterioration phenomenon occurs in which the surface resistance value increases.

本発明者らは、このような現状に鑑み、鋭意検討を重ね
た結果、雰囲気に対する非常に安定性の高い電極構造物
を見出したものである。
In view of the current situation, the present inventors have made extensive studies and have discovered an electrode structure that is highly stable against the atmosphere.

すなわち、本発明は、プラスチックフィルム、シート、
あるいは成型物上に比電気抵抗の小さい金属であるアル
ミニウム、亜和、もしくは銅等の第1蒸着層を設け、さ
らに不動態化しやすい金属であるクロム、ニッケル、ニ
クロム、ステンレス、ハステロイ合金、もしくはチタン
等の第2蒸着層を設け、該第1および第2の蒸着層の組
み合せより成る導電層によって電極を構成したことを特
徴とする電極構造物を提供するものである。
That is, the present invention provides plastic films, sheets,
Alternatively, a first vapor deposition layer of aluminum, aluminum, copper, etc., which is a metal with low specific electrical resistance, is provided on the molded product, and then a layer of chromium, nickel, nichrome, stainless steel, Hastelloy alloy, or titanium, which is a metal that is easily passivated, is provided on the molded product. The present invention provides an electrode structure characterized in that a second vapor deposited layer is provided, and an electrode is constituted by a conductive layer made of a combination of the first and second vapor deposited layers.

以下、本発明の内容について図面を用いて説明する。Hereinafter, the content of the present invention will be explained using the drawings.

第1図はポリエステルフィルム1の上に通常の貞空蒸着
により、表面抵抗の小さい第1蒸着層2を設け、その後
エレクトロンビーム加熱、あるいはスパッタ蒸着等によ
り第2蒸着層3を設(プだものの断面図である。一般に
第1蒸着層2を電流負担部として考えると、蒸着金属は
比電気抵抗が一〇 10 X 10 (ohm−am)より小さく、かつ蒸
着後の表面抵抗の低いアルミニウム、亜鉛、もしくは銅
が好ましい。しかし、表面抵抗を低くするために、あま
り厚膜蒸着すると、基板との接着力が弱くなるという欠
点を持っている。従って該@1蒸着層2としては、厚み
と相関を持つ表面抵抗は0.1〜10Ω/口(この場合
の表面電気抵抗Ω/口の測定は、JLS(、−2318
に準じる。)が最も好ましい範囲であるが、勿論これ以
上高抵抗の場合にも使用出来る。また、第1蒸着層2を
外部の雰囲気から保護する第2蒸着層3は、酸素雰囲気
中で不動態化し易い金属、例えば、チタン、クロム、ニ
ッケル、ステンレス、ハステロイ合金、ニクロム等の蒸
着層であり、その厚みは厚い方が好ましいが、生産性を
考慮した実用的見地からは、効果の期待できる必要最小
限度である10〜1000Ω/口の範囲が好ましい。
Figure 1 shows that a first vapor deposition layer 2 with low surface resistance is formed on a polyester film 1 by ordinary air vapor deposition, and then a second vapor deposition layer 3 is formed by electron beam heating or sputter deposition. It is a cross-sectional view.Generally, considering the first vapor deposition layer 2 as a current-bearing part, the vapor deposited metal has a specific electrical resistance smaller than 1010 x 10 (ohm-am) and has a low surface resistance after vapor deposition such as aluminum or zinc. or copper is preferable. However, if the film is deposited too thickly in order to lower the surface resistance, it has the disadvantage that the adhesive force with the substrate becomes weak. Therefore, as the @1 deposited layer 2, the thickness The surface resistance of
According to. ) is the most preferable range, but it can of course be used in cases where the resistance is higher than this range. Further, the second vapor deposited layer 3 that protects the first vapor deposited layer 2 from the external atmosphere is a vapor deposited layer of a metal that is easily passivated in an oxygen atmosphere, such as titanium, chromium, nickel, stainless steel, Hastelloy alloy, nichrome, etc. Although it is preferable that the thickness be thicker, from a practical standpoint in consideration of productivity, a range of 10 to 1000 Ω/hole is preferable, which is the minimum necessary level to be expected to be effective.

第1図の基本構成の場合は、プラスチックフィルム1を
接着剤等で他素材に貼り合せる際、1のプラスチックフ
ィルムの厚み方向を通して、溶剤、水分等が透過し第1
蒸着層2の抵抗値劣化を誘発する可能性がある。また、
これらの透過した溶剤等による1のプラスチック表面と
第1蒸着層2の界面での接着力が低下することも考えら
れる。第2図は、これらの欠点を改良する一つの基本構
成を示したものであって第1蒸着層2の両側に第2蒸着
層3を設けたものである。
In the case of the basic configuration shown in Figure 1, when the plastic film 1 is bonded to another material with an adhesive or the like, solvents, moisture, etc. permeate through the thickness of the plastic film 1.
This may induce deterioration in the resistance value of the vapor deposited layer 2. Also,
It is also conceivable that the adhesive force at the interface between the plastic surface 1 and the first vapor deposited layer 2 is reduced due to these permeated solvents and the like. FIG. 2 shows one basic configuration for improving these drawbacks, in which second vapor deposited layers 3 are provided on both sides of the first vapor deposited layer 2.

以下、実施例と比較例の比較結果について述べる。Below, the results of comparison between Examples and Comparative Examples will be described.

75μポリエステルフイルムに通常の方法によりアルミ
ニウムを蒸着し、さらにスパッタ蒸着法でクロムを蒸着
した。そして、この場合の最終表面電気抵抗は1.1Ω
/口であった。該蒸着物を80℃、90%RH雰囲気に
さらし、その表面抵抗値の経時変化を測定したが、10
01+r後も本発明の場合は安定しており、殆ど表面電
気抵抗値の変化もなく、効果があることが1ift認で
きた。一方、比較のために実施したアルミニウムによる
第1蒸着層のみの場合には、初期値1.1Ω/口から同
条件下で200/口に変化して特性劣化が大きかった。
Aluminum was deposited on a 75μ polyester film by a conventional method, and chromium was further deposited by a sputter deposition method. And the final surface electrical resistance in this case is 1.1Ω
/It was a mouth. The deposited material was exposed to an atmosphere of 80° C. and 90% RH, and the change in surface resistance value over time was measured.
Even after 01+r, the present invention remained stable, with almost no change in the surface electrical resistance value, proving that it was effective. On the other hand, in the case of using only the first vapor deposited layer of aluminum, which was carried out for comparison, the initial value of 1.1 Ω/hole changed to 200/hole under the same conditions, resulting in a large characteristic deterioration.

【図面の簡単な説明】[Brief explanation of the drawing]

第1.2図は本発明による基本構成の断面図を示す。 1・・・プラスチックフィルム、2・・・第1蒸着層、
3・・・第2蒸着層
FIG. 1.2 shows a sectional view of the basic arrangement according to the invention. 1... Plastic film, 2... First vapor deposition layer,
3...Second vapor deposition layer

Claims (1)

【特許請求の範囲】[Claims] プラスチックフィルム、シートあるいは成型物上に、ア
ルミニウム、亜鉛、もしくは銅の第1蒸着層を設け、さ
らにクロム、ニッケル、ニクロム、ステンレス、ハステ
ロイ合金、もしくはチタンの第2蒸着層を設け、該第1
および第2の蒸着層の組み合せより成る導電層によって
電極を構成したことを特徴とする電極構造物。
A first vapor deposited layer of aluminum, zinc, or copper is provided on a plastic film, sheet, or molded article, and a second vapor deposited layer of chromium, nickel, nichrome, stainless steel, Hastelloy alloy, or titanium is provided on the first vapor deposited layer.
An electrode structure characterized in that an electrode is constituted by a conductive layer made of a combination of a second vapor-deposited layer and a second vapor-deposited layer.
JP10093483A 1983-06-08 1983-06-08 Corrosion resistant electrode structure Pending JPS59226417A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10093483A JPS59226417A (en) 1983-06-08 1983-06-08 Corrosion resistant electrode structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10093483A JPS59226417A (en) 1983-06-08 1983-06-08 Corrosion resistant electrode structure

Publications (1)

Publication Number Publication Date
JPS59226417A true JPS59226417A (en) 1984-12-19

Family

ID=14287176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10093483A Pending JPS59226417A (en) 1983-06-08 1983-06-08 Corrosion resistant electrode structure

Country Status (1)

Country Link
JP (1) JPS59226417A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247908A (en) * 1985-08-27 1987-03-02 日本写真印刷株式会社 Conducting film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247908A (en) * 1985-08-27 1987-03-02 日本写真印刷株式会社 Conducting film

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