JPS59224527A - Light power meter - Google Patents
Light power meterInfo
- Publication number
- JPS59224527A JPS59224527A JP9897983A JP9897983A JPS59224527A JP S59224527 A JPS59224527 A JP S59224527A JP 9897983 A JP9897983 A JP 9897983A JP 9897983 A JP9897983 A JP 9897983A JP S59224527 A JPS59224527 A JP S59224527A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- measurement light
- acoustic waveform
- oscillator
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
- G01J5/44—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using change of resonant frequency, e.g. of piezoelectric crystals
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、光パワーメータに関するものであって、詳し
くは、測定光を熱エネルギーに変換して測定する装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical power meter, and more particularly to a device that converts measurement light into thermal energy for measurement.
光パワーの大きさを測定する装置の一種に、測定光を熱
エネルギーに変換して測定するように構成されたものが
ａる。One type of device for measuring the magnitude of optical power is one that is configured to convert measurement light into thermal energy for measurement.
従来、このような光−熱変換形の光パワーメータとして
は、熱電対の温接点に黒体を設けて測定光を黒体に照射
させ、熱起電力の大きさから測定光のパワーの大きさを
求めるように構成されたものが用いられていた。Conventionally, such a light-to-thermal conversion type optical power meter has a black body installed at the hot junction of a thermocouple, the measuring light is irradiated onto the black body, and the power of the measuring light is determined from the magnitude of the thermoelectromotive force. A structure designed to achieve the highest quality was used.
しかし、このような構成によれば、半導体のＰ−Ｎ接合
を利用した量子形光パワーメータのような波長依存性は
ないものの、応答性が遅く 感度が低いという欠点があ
る。また、出方信号はアナログ信号であシ、デジタル処
理を行うためＫは信号変換しなければならない。However, although such a configuration does not have wavelength dependence like a quantum optical power meter that uses a semiconductor PN junction, it has the drawbacks of slow response and low sensitivity. Further, the output signal is an analog signal, and K must be converted into a signal in order to perform digital processing.
本発明は、このような欠点を解決したものであシ、高速
応答、高感度特性を有し、さらＫ、デジタル信号出力が
得られる光パワーメータを提供するものであって、表面
に黒体層が設けられこの黒体層に測定光が入射される第
１の表面弾性波形発振器と、第１の表面弾性波形発振器
と同材質で同形状に形成され測定光が入射されない第２
の表面弾性波形発振器と、これら第１の表面弾性波形発
振器と第２の表面弾性波形発振器の出力信号の周波数の
差を送出するミキサーとで構成したことを特徴とする特
許
以下、図面を用いて詳細に説明する。The present invention solves these drawbacks, and provides an optical power meter that has high-speed response and high sensitivity characteristics, and further provides a digital signal output, and has a black body on the surface. A first surface acoustic waveform oscillator is provided with a black body layer and the measurement light is incident on the black body layer, and a second surface acoustic waveform oscillator is formed of the same material and the same shape as the first surface acoustic waveform oscillator and does not receive the measurement light.
This patent is characterized by comprising a surface acoustic waveform oscillator, and a mixer that transmits the difference in frequency between the output signals of the first surface acoustic waveform oscillator and the second surface acoustic waveform oscillator. Explain in detail.
第１図は、本発明の原理説明図であって、１は第１の表
面弾性波形発振器（以下ＳＡＷという）、２は第２のＳ
ＡＷ、３はミキサー、４Ｆｉ出力端子である。第１の５
ＡＷＩの表面には黒体層が設けられていて、この黒体層
には測定光が入射される。第２の５ＡＷ２は第１のＢＡ
ＷＬと同材質で形成されたものであって、この第２の５
ＡＷ２には測定光は入射されない。ミキサー３には各Ｂ
ＡＷＬ、 ２の出力信号が加えられ、これら両信号の周
波数の差が出力端子４に送出される。FIG. 1 is a diagram explaining the principle of the present invention, in which 1 is a first surface acoustic wave oscillator (hereinafter referred to as SAW), and 2 is a second SAW.
AW, 3 is a mixer, 4Fi output terminal. 1st 5
A black body layer is provided on the surface of the AWI, and measurement light is incident on this black body layer. The second 5AW2 is the first BA
It is formed of the same material as WL, and this second 5
No measurement light is incident on AW2. Mixer 3 has each B
The output signals of AWL, 2 are added, and the difference in frequency between these two signals is sent to output terminal 4.
このような構成において、第１のＢＡＷＬの黒体層に測
定光が照射されると、第１の５ＡＷ１．の表面温度が上
昇し、その出力周波数が変化する。一方、第２の５ＡＷ
２ Ｋは測定光は照射されないので、測定光の照射以外
の周囲温度の変化による出力周波数の変化は打ち消され
ることになる。すなわち、黒体層に測定光が照射されな
い状態を考えると、第１周波数変化をすることになり、
周囲温度の変化の影響がミキサー３の出力周波数に現わ
れることはない。一方、第１の５ＡＷ１の黒体層に測定
光が照射されると、第１の５ＡＷＩには周囲温度の変化
に測定光の照射による温度変化が加算されるととＫなる
が、前述のように周囲温度の変化の影響は第２の５ＡＷ
２の出力により打ち消されているので、ミキサー３の出
力周波数には測定光の照射量に関連した周波数変化のみ
が現われることＫなる。従って、出力周波数の変化の大
きさから、測定光の光パワーの大きさを求めることがで
きる。In such a configuration, when the black body layer of the first BAWL is irradiated with measurement light, the first 5AW1. surface temperature increases and its output frequency changes. On the other hand, the second 5AW
Since measurement light is not irradiated at 2 K, changes in the output frequency due to changes in ambient temperature other than the measurement light irradiation are canceled out. That is, if we consider a state in which the measurement light is not irradiated to the black body layer, the first frequency will change,
The effect of changes in ambient temperature does not appear on the output frequency of the mixer 3. On the other hand, when the black body layer of the first 5AW1 is irradiated with the measurement light, the first 5AWI will be K if the temperature change due to the irradiation of the measurement light is added to the change in the ambient temperature. The effect of changes in ambient temperature on the second 5AW
Since the output frequency of the mixer 3 is canceled by the output of the mixer 3, only the frequency change related to the irradiation amount of the measurement light appears in the output frequency of the mixer 3. Therefore, the magnitude of the optical power of the measurement light can be determined from the magnitude of the change in the output frequency.
第２図は、本発明の一実施例の要部を示す構成説明図で
ろって、１１は取付体、１２は圧Ｎ１体基板、１３は第
１の５ＡＶＥを構成するための第１のすだれ状電極、１
４は第２の８ＡＷ２を構成するための第２のすだれ状電
極、１５はこれら第１の８ＡＷ１及び第２の５ＡＷ２の
表面に設けられた絶縁層、１６は絶縁層１５上に設けら
れた黒体層、１７はカバーである。FIG. 2 is a configuration explanatory diagram showing the main parts of an embodiment of the present invention, in which 11 is a mounting body, 12 is a pressure N1 body substrate, and 13 is a first blind for configuring the first 5AVE. shaped electrode, 1
4 is a second interdigital electrode for configuring the second 8AW2; 15 is an insulating layer provided on the surfaces of the first 8AW1 and the second 5AW2; 16 is a black electrode provided on the insulating layer 15; The body layer 17 is a cover.
取付体１１は高熱伝導率を有するものであって、例えば
銅板を用いる。圧電体基板１２としては、例えばＹカッ
ト水晶板を用いる。すだれ状電極１３゜１４は例えば公
知のフォトリソグラフィ技術を用いて形成する。絶縁層
１５は黒体層１６によるすだれ状電極１３．１４間の短
絡を防ぐものであって、例えば２酸化シリコン膜を用い
る。黒体層１６としては例えばカーボン膜を用いる。カ
バー１７には第１の５Ａ１１にのみ測定光を照射するた
めの開口１８が設けられていて、例えば黒色塗装された
アルミ板を用いる３、実験例によれば、測定光が照射さ
れない状態において各５ＡＷ１．２からは約４０ ＭＨ
ｚの周波数信号が得られ、恒温槽内で一定温度に保った
場合の周波数変化は±１Ｈｚであシ、温度を変化させた
場合には約４ｋｌ（ｚ／’Ｃの周波数変化が得られた。The mounting body 11 has high thermal conductivity, and is made of, for example, a copper plate. As the piezoelectric substrate 12, for example, a Y-cut crystal plate is used. The interdigital electrodes 13 and 14 are formed using, for example, a known photolithography technique. The insulating layer 15 prevents a short circuit between the interdigital electrodes 13 and 14 caused by the black body layer 16, and is made of, for example, a silicon dioxide film. For example, a carbon film is used as the black body layer 16. The cover 17 is provided with an opening 18 for irradiating the measurement light only on the first 5A11, and according to an experiment using, for example, a black-painted aluminum plate, when the measurement light is not irradiated, each Approximately 40 MH from 5AW1.2
A frequency signal of z/'C was obtained, and when the temperature was kept constant in the thermostatic oven, the frequency change was ±1 Hz, and when the temperature was changed, a frequency change of about 4kl (z/'C was obtained. .
そして、５ＡＶＥ Ｋ測定光を照射した場合πは測定光
のパワーの大きさに応じて８ＡＷ１の周波数は変化する
が８ＡＷ２０周波数けはとんど変化しないことが確認で
きた。It was confirmed that when 5AVEK measurement light was applied, the 8AW1 frequency changed depending on the power of the measurement light, but the 8AW20 frequency hardly changed.
なお、上記実施例では、各ＳＡＷを１ボート形で構成す
る例を示したが、２ポート形でおってもよい。In the above embodiment, each SAW is configured as a one-port type, but it may be configured as a two-port type.
また、各ＳＡＷを個別に作っておき、温度特性の揃った
ものを２個組み合わせて用いるようにしてもよい。Alternatively, each SAW may be made individually and two SAWs with the same temperature characteristics may be used in combination.
以上説明したように、本発明によれは、応答性が早く、
高感度特性を有するデジタル出力形の光パワーメータが
実現でき、光通信システムの光パワーの測定等に実用上
の効果は大きい。As explained above, the present invention provides quick response and
A digital output type optical power meter with high sensitivity characteristics can be realized, which has a great practical effect in measuring optical power of optical communication systems.
第１図は本発明の原理説明図、第２図は本発明の一実施
例の要部を示す構成説明図である。
１．２・・・表面弾性波形発振器、３・・・ミキサー、
４・・・出力端子、１１・・・取付体、１２・・・圧電
体基板、１３゜１４・・・すだれ状電極、１５・・・絶
縁層、１６・・・黒体層、１７・・・カバー、１８・・
・開口。FIG. 1 is a diagram illustrating the principle of the present invention, and FIG. 2 is a diagram illustrating the configuration of a main part of an embodiment of the present invention. 1.2...Surface acoustic waveform oscillator, 3...Mixer,
4... Output terminal, 11... Mounting body, 12... Piezoelectric substrate, 13° 14... Interdigital electrode, 15... Insulating layer, 16... Black body layer, 17...・Cover, 18...
・Opening.
Claims (1)
る第１の表面弾性波形発振器と、第１の表面弾性波形発
振器と同利質で同形状に形成され測定光が入射されない
第２の表面弾性波形発振器と、これら第１の表面弾性波
形発振器と第２の表面弾性波形発振器の出力信号の周波
数の差を送出するミキサーとを具備した光パワーメータ
。a first surface acoustic waveform oscillator provided with a black body layer on its surface and into which measurement light is incident; and a first surface acoustic waveform oscillator which is formed in the same material and shape as the first surface acoustic waveform oscillator and does not allow measurement light to enter therein. An optical power meter comprising a second surface acoustic waveform oscillator and a mixer that transmits the difference in frequency between the output signals of the first surface acoustic waveform oscillator and the second surface acoustic waveform oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9897983A JPS59224527A (en) | 1983-06-03 | 1983-06-03 | Light power meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9897983A JPS59224527A (en) | 1983-06-03 | 1983-06-03 | Light power meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59224527A true JPS59224527A (en) | 1984-12-17 |
Family
ID=14234132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9897983A Pending JPS59224527A (en) | 1983-06-03 | 1983-06-03 | Light power meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59224527A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61175531A (en) * | 1985-01-30 | 1986-08-07 | Anritsu Corp | Saw power sensor |
-
1983
- 1983-06-03 JP JP9897983A patent/JPS59224527A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61175531A (en) * | 1985-01-30 | 1986-08-07 | Anritsu Corp | Saw power sensor |
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