JPS59219458A - Solution for holding activity of electroless plated copper film - Google Patents
Solution for holding activity of electroless plated copper filmInfo
- Publication number
- JPS59219458A JPS59219458A JP9356583A JP9356583A JPS59219458A JP S59219458 A JPS59219458 A JP S59219458A JP 9356583 A JP9356583 A JP 9356583A JP 9356583 A JP9356583 A JP 9356583A JP S59219458 A JPS59219458 A JP S59219458A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- electroless
- plated copper
- copper film
- copper plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
Abstract
Description
【発明の詳細な説明】
本発明は、無′屯解制「1メツキ膜の活性保持溶液に関
し、詳しくはプリント配線板のスルホール無電解銅メッ
キを施しだ後、電気銅メッキを施こす前まで無電解銅メ
ッキ膜を活性に保持するだめの溶液に関する。[Detailed Description of the Invention] The present invention relates to an active retention solution for a plating film that does not need to be decomposed. This invention relates to a solution that keeps an electroless copper plating film active.
一般にスルホールプリント配線板は、絶縁板の書面に銅
層を設けた銅張積層板を出発制料とし、との銅張積層板
の所望の位置にドリルなどで孔明、けし、次いで銅張積
層板の表面及び孔壁に厚さ0.2〜0.5μmの無電解
銅メッキ膜を析出させ、次いで所望する厚さの電気銅メ
ッキ膜を無電解銅メッキ膜上に析出させ、欠いて印刷お
よびエツチング手段によって導電回路を形成して製造さ
れている。銅張積層板の表面及び孔壁に厚さ0.2〜0
,5μmμm無電解ツメツキ膜出させ、水洗した彼、こ
の銅張積層板は電気銅メッキを行なうまでは純水中に保
管される。しかし純水中に保管されている該銅張積層板
の表面及び孔壁に析出した無電解銅メッキ膜は錆びが発
生しやすく、無電解銅メッキ後の数時間以内に次の電気
銅メッキを行なわないと電気銅メッキ膜が銅張積層板の
表面及び孔壁に均一に析出しない。特に孔壁に析出する
電気銅メッキ膜にはピンホールがしばしは発生する。従
って無電解1:1)メツヤニ程での製品の作りだめもす
ることができず、無1L解銅メツキ装い−の有効活用が
できなかった。In general, through-hole printed wiring boards start with a copper-clad laminate with a copper layer provided on an insulating board, and then drill holes in the desired positions of the copper-clad laminate. An electroless copper plating film with a thickness of 0.2 to 0.5 μm is deposited on the surface and the hole wall, and then an electrolytic copper plating film with a desired thickness is deposited on the electroless copper plating film, and then printed and printed. It is manufactured by forming a conductive circuit by etching means. Thickness of 0.2 to 0 on the surface of copper clad laminate and hole wall
The copper clad laminate was then deposited with a 5 μm μm electroless plating film and washed with water. The copper clad laminate was stored in pure water until electrolytic copper plating was performed. However, the electroless copper plating film deposited on the surface and hole walls of copper-clad laminates stored in pure water is susceptible to rust, and the next electrolytic copper plating film must be removed within several hours after electroless copper plating. If this is not done, the electrolytic copper plating film will not be uniformly deposited on the surface of the copper-clad laminate and on the hole walls. In particular, pinholes often occur in the electrolytic copper plating film deposited on the hole walls. Therefore, it was not possible to make a product using electroless 1:1) plating, and it was not possible to make effective use of the 1L electrolytic plating system.
従って本発明は、スルホールプリント配線板の製造の無
也肩7111メッキ工程懐、すなわち次の電気銅メッキ
ニーm t 1°テなう前′までの待ち時間が延長され
ても銅張積層板の表面及び孔壁の無電解銅メッキ膜の錆
びの通行を抑制し焦電;ヅト矩メッキ膜ケ活性に@持す
る浴液を提供することにある。Therefore, the present invention provides a seamless plating process in the production of through-hole printed wiring boards, that is, even if the waiting time until the next electrolytic copper plating knee m t 1° is extended, the surface of the copper-clad laminate is Another object of the present invention is to provide a bath solution that suppresses the passage of rust through the electroless copper plating film on the hole wall and maintains the activity of the pyroelectric copper plating film.
本発明の無知、層線すメソキ膜活性保持溶液(以下活性
保持欣と称t)は水溶液11あたりホルムアルデヒドを
4v以上と、第2銅イオンの錯化剤として、N、 N、
N’ 、 N’−テトラキス−2−(2−ヒドロキプ
ロビル)エチレンジアミンまたはシクロヘキサン−1,
2−ジアミン−N、 N、 N’ 、 N’ −テトラ
酢酸を5v以上とを金山し、かつ水溶液のpt−iが1
1以上で、さらに水溶液中の溶存酸素の濃度が3ppm
以−トであるととを特徴とする。Ignorance of the present invention, the layered membrane active retention solution (hereinafter referred to as activity retention solution) contains formaldehyde of 4 V or more per aqueous solution 11, N, N, as a complexing agent for cupric ions.
N', N'-tetrakis-2-(2-hydroxyprovir)ethylenediamine or cyclohexane-1,
2-diamine-N, N, N', N'-tetraacetic acid was added to the gold mine with 5 V or more, and the pt-i of the aqueous solution was 1.
1 or more, and the concentration of dissolved oxygen in the aqueous solution is 3 ppm
It is characterized by:
ホルムアルデヒドとしては37重量%のホルマリン水溶
液−またはパラホルムアルデヒドを使用することができ
、活性保持液中のホルムアルデヒドの濃度は4 ?、#
以上が有効であり、ホルムアルデヒドの濃度が4Y/l
より減少すると無電解(1i1メツキ膜の酸化抑制効
果が著しく減少する。活性保持液のpHは水酸化ナトリ
ウム水溶液または水酸化カリウム水溶液を使用l、て調
整される。油性保持液のpHは1]以上が有効であり、
通常、油性保持液のpHは11〜12.5に調整される
。活性保持液のpHが11より減少するとホルムアルデ
ヒドの濃度に関係なく活性保持液の無電解砕jメッキ膜
の酸化抑制効果か著しく減少する。第2銅イオンの錯化
剤としては、N、 N、 N’ 、 N’−テトラキス
−2−(2−ヒドロキシプロピル)エチレンジアミンま
たはシクロヘキサン−1,2−ジアミン−N、 N、
N’ 、 N’−テトラ酢酸が使用芒れ、その活性保持
液への添加量は57/1以上か有効であり、これら第2
銅イオンの錯化剤は無電解銅メツ9後の水洗工程で無電
解銅メッキ表面に生成した酸化膜の除去及び活性保持液
中に銅張@層数と共に持ちこまれる鉄イオン等による水
酸化物の生成を抑制し、無相、%lイ銅メッキ表面會活
性に保持する効果がある。活性保持液中の溶存酸素濃度
は3ppm以下に制御する必要があり、溶存酸素の瀦朋
が3ppm以下活性保持歇のpHが11以上、ホルムア
ルデヒド
銅メッキ膜の酸化抑制効果が最も太きい。As formaldehyde, a 37% by weight formalin aqueous solution or paraformaldehyde can be used, and the concentration of formaldehyde in the active retentate is 4? ,#
The above is effective, and the concentration of formaldehyde is 4Y/l.
When the pH value decreases more than 1, the oxidation inhibiting effect of the electroless (1i1 plating film) decreases significantly.The pH of the active retentate is adjusted using an aqueous sodium hydroxide solution or an aqueous potassium hydroxide solution.The pH of the oil-based retentate is 1] The above is valid,
Usually, the pH of the oily retentate is adjusted to 11 to 12.5. When the pH of the activated retentate decreases below 11, the oxidation inhibiting effect of the activated retentate on the electroless pulverized plating film is significantly reduced, regardless of the formaldehyde concentration. Complexing agents for cupric ions include N, N, N', N'-tetrakis-2-(2-hydroxypropyl)ethylenediamine or cyclohexane-1,2-diamine-N, N,
N', N'-tetraacetic acid is used, and the amount added to the active retentate is 57/1 or more.
The copper ion complexing agent is used to remove the oxide film formed on the electroless copper plating surface during the water washing process after electroless copper plating 9, and to remove the hydroxide caused by iron ions, etc., which are brought into the active retaining solution along with the number of copper plating layers. It has the effect of suppressing the formation of copper plating and maintaining the activity of the phaseless copper plating surface. The dissolved oxygen concentration in the activated retentate must be controlled to 3 ppm or less, and when the dissolved oxygen concentration is 3 ppm or less and the pH of the activated retentate is 11 or higher, the formaldehyde copper plating film has the greatest oxidation inhibiting effect.
以下、本発明を芙路側に基いて具体的に説明する。Hereinafter, the present invention will be specifically explained based on the Fuji side.
(実施例)
純水約81にプラスチック容器に入れ、次いでN, N
, N’ 、 N’−テトラキス−2−(2−ヒドロキ
シプロピル)エチレンジアミンを10(l加え、完全に
溶解ちせる。(Example) Pour approximately 81 liters of pure water into a plastic container, then add N, N
, N', N'-Tetrakis-2-(2-hydroxypropyl)ethylenediamine (10 liters) was added and completely dissolved.
次に37車量係のホルマリン水溶液を200FTll加
え、水酸化すl− IJウム水浴液で溶11(のpl(
を約12に訓!叶した後、全体を純水でl O lとし
、活性保持液を調製した。ここで活性保持液中のホルム
アルデヒドの濃度は8 t/l, N, N, N’
、 N’ −テトラキス−2−(2−ヒドロキシプロピ
ル)エチレンジアミンの濃度は1 0 Y/lである。Next, add 200 FTll of formalin aqueous solution of 37 liters, and add 11 pl(
About 12 lessons! After this, the whole was diluted with pure water to prepare an active retentate. Here, the concentration of formaldehyde in the active retentate is 8 t/l, N, N, N'
, the concentration of N'-tetrakis-2-(2-hydroxypropyl)ethylenediamine is 10 Y/l.
次いて活性保持液中に窒素ガスを吹き込み、活性保持液
中の溶存酸素の(′1長度をappm以下とした。次に
本活性保持液中に孔のあけられたエポキシガラスt1・
う張抗層板に無電解銅メッキを厚さ約0.4μmjf占
した試料を10日間浸漬した後、銅張積層板孔壁の無電
解銅メッキ膜の酸化状態を観察しだところ、孔壁の無1
L解銅メツキ膜の醇化の進イ」は抑flil」さiてい
ることが判明した。また上記活性保持液の第2銅イオン
錯化剤としてシクロヘキサン−1.2−ジアミンーN,
N, N’ 、 N’ −テトラ酢酸(活性保持液中
の旋度1 0 ?/l )を使用した場合も同様な効果
が立制された。Next, nitrogen gas was blown into the active retentate to make the ('1 length of the dissolved oxygen in the active retentate less than appm.) Next, the epoxy glass t1 with holes drilled in the active retentate.
After immersing a sample of a clad laminate plate with electroless copper plating to a thickness of about 0.4 μm for 10 days, we observed the oxidation state of the electroless copper plating film on the hole walls of the copper clad laminate. no no 1
It was found that the progress of smelting of the L-copper plating film was inhibited. In addition, as a cupric ion complexing agent for the above active retentate, cyclohexane-1,2-diamine-N,
A similar effect was observed when using N,N',N'-tetraacetic acid (rotation of 10?/l in the active retentate).
一力、本発明を比較のため純水中に浸漬した銅張積層板
の試料の無1L解銅メツキg<% (メッキの厚さ約o
.4Ixm)は純水に1日浸漬後のゼ、態で完全に酸化
された。First, for comparison of the present invention, a sample of a copper-clad laminate immersed in pure water had no 1L copper plating g<% (the thickness of the plating was approx.
.. 4Ixm) was completely oxidized in the zeolite state after being immersed in pure water for one day.
以上、本発明により、次の効果かある。As described above, the present invention has the following effects.
(1)銅張積層板孔壁の無電解銅メッキ膜の酸化による
錆びをほとんど発生させない。(1) Rust caused by oxidation of the electroless copper plating film on the hole walls of the copper-clad laminate hardly occurs.
(11)従って、電気銅メッキまでの待ち時間を長くす
ることができるので、製品の作りだめをすることができ
る。(11) Therefore, it is possible to lengthen the waiting time until electrolytic copper plating, so it is possible to stock up on products.
325−325-
Claims (1)
イオンの錯化剤としてN、 N、 N’ 、 N’−テ
トラキス−2−(2−ヒドロキシプロピル)エチレンジ
アミンまだはシクロヘキサン−1,2−ジアミン−N、
N、 N’、 N’−テトラ酢酸を59以上とを會有
し、かつ水溶液のpi−iが11以上で、さらに水溶液
中の溶存酸素の濃度が3ppm以下であることを特徴と
する無電解銅メッキ膜の活性保持溶液。An aqueous solution of 116 cyformaldehyde with 4f or more and N, N, N', N'-tetrakis-2-(2-hydroxypropyl)ethylenediamine as a complexing agent for cupric ions and cyclohexane-1,2-diamine-N ,
An electroless solution containing N, N', N'-tetraacetic acid of 59 or more, an aqueous solution having a pi-i of 11 or more, and a dissolved oxygen concentration in the aqueous solution of 3 ppm or less. Active retention solution for copper plating films.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9356583A JPS59219458A (en) | 1983-05-27 | 1983-05-27 | Solution for holding activity of electroless plated copper film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9356583A JPS59219458A (en) | 1983-05-27 | 1983-05-27 | Solution for holding activity of electroless plated copper film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59219458A true JPS59219458A (en) | 1984-12-10 |
Family
ID=14085768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9356583A Pending JPS59219458A (en) | 1983-05-27 | 1983-05-27 | Solution for holding activity of electroless plated copper film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59219458A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61288078A (en) * | 1985-06-14 | 1986-12-18 | Sony Corp | Plating method |
US5059243A (en) * | 1989-04-28 | 1991-10-22 | International Business Machines Corporation | Tetra aza ligand systems as complexing agents for electroless deposition of copper |
-
1983
- 1983-05-27 JP JP9356583A patent/JPS59219458A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61288078A (en) * | 1985-06-14 | 1986-12-18 | Sony Corp | Plating method |
US5059243A (en) * | 1989-04-28 | 1991-10-22 | International Business Machines Corporation | Tetra aza ligand systems as complexing agents for electroless deposition of copper |
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