JPS5921662U - sputtering equipment - Google Patents

sputtering equipment

Info

Publication number
JPS5921662U
JPS5921662U JP11586982U JP11586982U JPS5921662U JP S5921662 U JPS5921662 U JP S5921662U JP 11586982 U JP11586982 U JP 11586982U JP 11586982 U JP11586982 U JP 11586982U JP S5921662 U JPS5921662 U JP S5921662U
Authority
JP
Japan
Prior art keywords
film
reel
substrate
sputtering
take
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11586982U
Other languages
Japanese (ja)
Other versions
JPS5935580Y2 (en
Inventor
潮田　友四郎
Original Assignee
株式会社徳田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社徳田製作所 filed Critical 株式会社徳田製作所
Priority to JP1982115869U priority Critical patent/JPS5935580Y2/en
Publication of JPS5921662U publication Critical patent/JPS5921662U/en
Application granted granted Critical
Publication of JPS5935580Y2 publication Critical patent/JPS5935580Y2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案の一実施例に係るスパッタリング装置におけ
る要部の模式的縦断面図である。 １・・・真空容器、１２・・・供給リール、１７・・・
巻取リール、１３．　１４；　　１５．１６・・・ワー
クロール、１８・・・ガイドロール、２１．　２２．　
２３．　２４゜２５．２６，２７．２８・・・スパッタ
源、Ｐ・・・フィルム状基体。The figure is a schematic vertical cross-sectional view of the main parts of a sputtering apparatus according to an embodiment of the present invention. 1... Vacuum container, 12... Supply reel, 17...
Take-up reel, 13. 14; 15.16... Work roll, 18... Guide roll, 21. 22.
23. 24°25.26, 27.28...Sputtering source, P...Film-like substrate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 供給リールから巻戻されたフィルム状基体を複数のワー
クロールの外周面に順次沿わせて移送させた後に巻取リ
ールで巻取るとともに上記フィルム状基体が上記供給リ
ールから上記巻取リールに至る間に各ワークロールに対
向して設けられたスパッタ源で上記フィルム状基体の両
面にスパッタ薄膜を形成するようにしたスパッタリング
装置において、前記フィルム状基体を、この基体の表裏
面が前記各ワークロールの外周面に交互に接触するよう
に案内する案内機構を設けてなることを特徴とするスパ
ッタリング装置。The film-like substrate unwound from the supply reel is transferred sequentially along the outer circumferential surface of a plurality of work rolls, and then wound on the take-up reel, and the film-like substrate is transferred from the supply reel to the take-up reel. In a sputtering apparatus, a sputtering source is provided facing each work roll to form a sputtered thin film on both sides of the film-like substrate. A sputtering device characterized by being provided with a guide mechanism that guides the outer peripheral surface so as to alternately come into contact with the outer circumferential surface.
JP1982115869U 1982-07-30 1982-07-30 sputtering equipment Expired JPS5935580Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982115869U JPS5935580Y2 (en) 1982-07-30 1982-07-30 sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982115869U JPS5935580Y2 (en) 1982-07-30 1982-07-30 sputtering equipment

Publications (2)

Publication Number Publication Date
JPS5921662U true JPS5921662U (en) 1984-02-09
JPS5935580Y2 JPS5935580Y2 (en) 1984-10-01

Family

ID=30267322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982115869U Expired JPS5935580Y2 (en) 1982-07-30 1982-07-30 sputtering equipment

Country Status (1)

Country Link
JP (1) JPS5935580Y2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165170U (en) * 1985-04-03 1986-10-14
JPS62130474U (en) * 1986-02-13 1987-08-18
JPH06319420A (en) * 1993-04-28 1994-11-22 Silver Star Co Ltd Reel attaching structure for fishing rod
JP2011184733A (en) * 2010-03-08 2011-09-22 Sanyo Shinku Kogyo Kk Film deposition device
JP2012026025A (en) * 2010-07-28 2012-02-09 Sumitomo Metal Mining Co Ltd Film deposition method, method for manufacturing resin film with metal base layer and sputtering apparatus
WO2012086119A1 (en) * 2010-12-24 2012-06-28 株式会社神戸製鋼所 Take-up-type continuous film-forming apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423507A (en) * 1977-07-22 1979-02-22 Matsushita Electric Ind Co Ltd Producing apparatus of magnetic recording media
JPS56112471A (en) * 1980-02-08 1981-09-04 Toshiba Corp Sputtering device
JPS5724022A (en) * 1980-07-16 1982-02-08 Toshiba Corp Production of magnetic recording substance
JPS5778628A (en) * 1980-10-31 1982-05-17 Matsushita Electric Ind Co Ltd Manufacture of magnetic recording medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5423507A (en) * 1977-07-22 1979-02-22 Matsushita Electric Ind Co Ltd Producing apparatus of magnetic recording media
JPS56112471A (en) * 1980-02-08 1981-09-04 Toshiba Corp Sputtering device
JPS5724022A (en) * 1980-07-16 1982-02-08 Toshiba Corp Production of magnetic recording substance
JPS5778628A (en) * 1980-10-31 1982-05-17 Matsushita Electric Ind Co Ltd Manufacture of magnetic recording medium

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165170U (en) * 1985-04-03 1986-10-14
JPS62130474U (en) * 1986-02-13 1987-08-18
JPH06319420A (en) * 1993-04-28 1994-11-22 Silver Star Co Ltd Reel attaching structure for fishing rod
JP2011184733A (en) * 2010-03-08 2011-09-22 Sanyo Shinku Kogyo Kk Film deposition device
JP2012026025A (en) * 2010-07-28 2012-02-09 Sumitomo Metal Mining Co Ltd Film deposition method, method for manufacturing resin film with metal base layer and sputtering apparatus
WO2012086119A1 (en) * 2010-12-24 2012-06-28 株式会社神戸製鋼所 Take-up-type continuous film-forming apparatus

Also Published As

Publication number Publication date
JPS5935580Y2 (en) 1984-10-01

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