JPS59206733A - Monitoring device of vacuum in vacuum apparatus used in connection to high potential - Google Patents

Abstract

PURPOSE:To monitor the degree of vacuum visually even if a vacuum apparatus is connected to high potential by forming a fluorescent material layer to be acted by an electric field increasing in accordance with the rise of the degree of vacuum close to the vacuum apparatus. CONSTITUTION:A pair of electrodes 1, 2 are arranged in a shield 7 and a vacuum monitoring device 8 is arranged on the outside of the shield 7. The layer of an electroluminescent fluorescent material 9 is formed on the surface of a glass plate 10 provided with an electrode 11. When a pressure in a vacuum case is low, the voltage between the shield 7 and the electrode 11 is low, so that an electric field applied to the fluorescent material 9 is low and light is not almost emitted. When the pressure is increased, the voltage between the shield 7 and the electrode 11 is increased and the fluorescent material 9 emits light. The emitted light is guided to a photoelectrical conversion element 14 through the transparent electrode 11 and the output of the element 14 is measured by a detector 16 through a resistor 15. The degree of vacuum is detected from the detected fluorescent intensity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a vacuum monitoring device for vacuum equipment connected to a high potential such as a vacuum circuit breaker or power pipe.

[Prior art and its problems]

Mononoke's high-output microwave tube is a vacuum device that is conventionally connected to a high potential and is equipped with a vacuum monitoring device.

For example, Klystron is equipped with an ion pump that also serves as a vacuum pump. It was a complex and large vacuum monitoring device.

Most vacuum equipment is manufactured based on our many years of experience and track record.
The service life regarding vacuum pressure is evaluated based on the pressure at the time of equipment manufacturing. There are also devices that monitor the degree of vacuum by installing a Pockels element, liquid crystal element, etc. near the vacuum equipment, taking advantage of the fact that the electric field strength changes depending on the degree of vacuum, but they require a light source to obtain the signal. , visual monitoring was not possible in the dark. - [Object of the Invention] As mentioned above, the present invention provides an entire device that does not require a vacuum monitoring device and can clearly monitor the vacuum even when connected to a high potential.

[Summary of the invention]

The present invention utilizes the fact that the intensity of light from a fluorescent substance changes with the intensity of the electric field, which depends on the degree of vacuum. In addition, for example, the electric field between the shield inside the vacuum load of a vacuum circuit breaker and the ground increases as the internal pressure of the vacuum device increases, which can be used to increase the light intensity from the fluorescent material. This is a vacuum monitoring device that is a vacuum-like device that monitors pressure and is connected to a high potential.

Therefore, the vacuum monitoring device and the circuit breaker are spatially separated and can be visually checked. Another feature is that the emitted light can be guided through optical fibers and measured remotely visually or with an instrument.

〔Effect of the invention〕

The present invention provides the following effects. (1) Vacuum monitoring can be easily performed at ground potential even when the vacuum circuit breaker is connected to a high potential. (2) Direct visual confirmation. Easy to measure. (3) Remote measurement is possible and central monitoring is possible.

[Embodiments of the invention]

FIG. 1 shows an embodiment of the present invention.

The pair of electrodes 1, 2 is enclosed within a vacuum vessel by a mounting flange 8.4, an insulating envelope 5 and a bellows 6, respectively. Further, a shield 7 is installed around the pair of electrodes 1.2. Shield 7 is electrically insulated. Further, a vacuum monitoring device 8 is installed outside the insulating envelope 5.

Figure 2 shows a configuration diagram of the vacuum monitoring device.

The fluorescent element S is constructed by coating a glass plate 10 with a fluorescent substance 9. As the fluorescent substance, zinc sulfide, magnetized cadmium, or the like is used. An electrode 11 is provided on a part of the surface of the glass plate 1o that is different from the surface coated with the fluorescent substance 9, and at least one pair of terminals of the electrode 11 are provided and connected to a groundable switching element 12. In addition, the electrode 11 may have a small hole in a portion of the electrode 11 to transmit the light emitted from the fluorescent material 9;
Alternatively, the light-transmitting conductive film is discarded using the glass plate 10. Also, the light is guided to the photoelectric conversion element 14 through the light guide 13.Then, the light intensity at both ends of the resistor 15 is The corresponding voltage change is measured by the detector 16.

FIG. 3 shows the relationship between the degree of vacuum inside the vacuum circuit breaker, the voltage and electric field of the shield 7 and the electrode 11, and the relationship between the intensity of light emitted from the fluorescent substance.

The operation of the embodiment of the present invention will be explained using FIG. When the degree of vacuum is good, that is, when the pressure is low, the voltage between the shield 9 and the electrode 11 is low, so the electric field applied to the fluorescent material 9 is low and almost no light is emitted.

Also, if the degree of vacuum is poor and the pressure increases, the voltage between the shield 9 and the electrode 11 will not be high, and the electric field applied to the fluorescent substance 9 will be high, causing light emission. It gets bigger as it rises. In this way, the vacuum inside the vacuum circuit breaker can be determined from the luminescence intensity. In this embodiment, signal processing methods such as a method of introducing light and a method of electrically converting received light are not described, but any method may be used as long as it achieves the object of the present invention.

Moreover, even if the switch element 12 is not installed, exactly the same effect can be obtained. Fluorescent substance 9 is a substance that emits light in response to a field (voltage). Included in 1'U.

[Other embodiments of the invention]

FIG. 4 shows another embodiment of the present invention.

,! ! ! Limbo external envelope 5 For example, light? In the case of transparent glass, the same effect can be obtained by using the fluorescent material 9 inside the insulating envelope 5.

[Brief explanation of drawings]

)1 Figure 1 is a cross-sectional view of the vacuum monitoring moss attached to the empty shield moss, Figure 2 is a cross-sectional view of the fluorescent W-light output section, and a configuration diagram of the photoelectric conversion device, H3pq FIG. 4 is a diagram showing the relationship between pressure, voltage, electric field applied to a fluorescent substance, and light emission; FIG. 8... Fluorescent detection unit, 9... Fluorescent substance, 10. Glass plate, 11... Electrode, 13... Light guide. 14...Photoelectric conversion element. Figure 1 Figure 3 Figure 4 Figure procedural amendment (voluntary) Showa s? e, 5s Mr. Commissioner of the Japan Patent Office 1, Indication of Case, Patent Application No. 58-69978 2, Title of Invention: Vacuum Monitoring Device for Vacuum Equipment Connected to High Potential 3,
Relationship with the case of the person making the amendment Patent applicant (307) Toshiba Corporation 4, agent 1-1 Shibaura-chome, Minato-ku, Tokyo 105 (1) Claims column of the specification (2) Specification Column 3: Detailed explanation of the invention in the specification (3) Column 6: Brief explanation of the drawings in the specification, content of amendments (1) The scope of the claims described in the specification of the present application will be corrected as attached. (2) "Shield 9" described on page 5, line 12 of the specification of the present application
" is corrected to "1 shield 7". (3) "1 Shield 9" written in lines 14 to 15 of the same page is corrected to "Shield 7". (4) ``Switch element 12'' described in page 6, line 3 of the same as above.
``In order to protect the fluorescent element S from the surrounding high electric field atmosphere when this measurement is not performed, insert the following phrase after ``.''.''. (5) Between the 10th and 11th lines of the same page K, [As shown in FIG. 5, light like a selenium film is irradiated between the glass plate 10 and the electrode 11. By providing the photoconductive layer 17 whose electrical resistance changes as shown in FIG. For example, this photoconductive layer 17 has a high electrical resistance when the electric field is low and the fluorescent substance 9 does not emit light and no light is incident, and the voltage applied to the optical substance 9 becomes small, and the fluorescent substance 9 becomes more active. It becomes difficult to emit light. When the fluorescent substance 9 emits light, the electrical resistance of the photoconductive layer 17 decreases, the voltage applied to the fluorescent substance 9 increases, and a corresponding voltage emission occurs. Therefore, by providing this photoconductive layer 17, a light emission amplification effect can be obtained, and even small changes in light emission can be monitored without overlooking when monitoring the degree of vacuum. In order to further increase the sensitivity of the fluorescent element S, the fluorescent material is irradiated with light from a light source 19 introduced through a light guide 8, thereby further amplifying the light and creating a highly sensitive device. Can be configured. 0 (6) Insert ``, Figure 5 is a configuration diagram showing another embodiment of the present invention'' after ``...partial view'' on line 17 of the same page. do. (7) Figure 3 of the drawings in the application is corrected as a separate layer. (8) Figure 5 is added to the above drawing. 2. Claims (1) A vacuum used by connecting to a high voltage, characterized in that a fluorescent element that emits light due to an electric field is placed near a vacuum device used by connecting to a high voltage. Equipment vacuum monitoring device. (2) A patent characterized in that the fluorescent element is composed of a light-transmissible dielectric substrate, a fluorescent substance attached to one surface of the substrate, and a conductive electrode provided on the other surface of the substrate. A vacuum monitoring device for vacuum equipment connected to a high potential according to claim 1. (3) A vacuum device used by being connected to a high potential according to claim 2, characterized in that the substrate surface of the fluorescent element is arranged parallel to a shield surface provided in the vacuum device. Vacuum monitoring device. (4) The device according to claim 1 is configured to receive a signal obtained by receiving light emitted from a fluorescent element by a light guide at substantially ground potential. A vacuum monitoring device for vacuum equipment that is connected to a potential. 2. A sky monitoring device according to claim 2, further comprising a layer. Vacuum monitoring device for vacuum equipment used in Figure 18 Figure 5

Claims (4)

[Claims] (1) A vacuum monitoring device for vacuum equipment that is connected to a high voltage and is used by connecting to a high voltage, characterized in that a fluorescent element that emits light due to an electric field is placed near the vacuum equipment that is used by connecting to a high voltage. (2) A patent claim characterized in that the fluorescent element is composed of a light-transmissible dielectric substrate, a fluorescent substance attached to one surface of the substrate, and a conductive electrode provided on the other surface of the substrate. A vacuum monitoring device for vacuum equipment connected to the high potential described in item 1. (3) A vacuum device used by being connected to a high potential according to claim 2, characterized in that the substrate surface of the fluorescent element is disposed parallel to a shield surface provided in the vacuum device. Vacuum monitoring device. (4) The first aspect of the present invention is characterized in that the light emitted from the fluorescent element is received by a light guide, and the signal is received by a grounding telegraph. Vacuum monitoring device for vacuum equipment used by connecting to the high potential described in Section 2.