JPS5920656U - gas laser equipment - Google Patents

gas laser equipment

Info

Publication number
JPS5920656U
JPS5920656U JP11492982U JP11492982U JPS5920656U JP S5920656 U JPS5920656 U JP S5920656U JP 11492982 U JP11492982 U JP 11492982U JP 11492982 U JP11492982 U JP 11492982U JP S5920656 U JPS5920656 U JP S5920656U
Authority
JP
Japan
Prior art keywords
gas laser
gas
discharge section
laser equipment
laser medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11492982U
Other languages
Japanese (ja)
Other versions
JPS6022634Y2 (en
Inventor
昌良 渡辺
直人 西田
柿崎　克行
忠 高橋
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP11492982U priority Critical patent/JPS6022634Y2/en
Publication of JPS5920656U publication Critical patent/JPS5920656U/en
Application granted granted Critical
Publication of JPS6022634Y2 publication Critical patent/JPS6022634Y2/en
Expired legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案の一実施例を示し、第１図は装置全体の構
成図、第２図は放電部の横断面図である。 １・・・装置本体、２・・・放電部、３・・・熱交換器
、４・・・送風機、８・・・センサ、９・・・ヒータ、
１ｏ・・・制御装置。The drawings show an embodiment of the present invention, with FIG. 1 being a block diagram of the entire device, and FIG. 2 being a cross-sectional view of the discharge section. DESCRIPTION OF SYMBOLS 1... Device body, 2... Discharge part, 3... Heat exchanger, 4... Air blower, 8... Sensor, 9... Heater,
1o...control device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 装置本体内に放電部、熱交換器および送風機が設けられ
、この送風機によってレーザ媒質ガスを高速循環させる
ガスレーザ装置において、上記放電部の上流側に、この
放電部に流入するレーザ媒質ガスを加熱するヒータおよ
びレーザ媒質ガスの・温度を検知して上記ヒータを制御
するセンサとを配置したことを特徴とするガスレーザ装
置。In a gas laser device in which a discharge section, a heat exchanger, and a blower are provided in the device main body, and the blower circulates the laser medium gas at high speed, the laser medium gas flowing into the discharge section is heated upstream of the discharge section. A gas laser device comprising a heater and a sensor that detects the temperature of a laser medium gas and controls the heater.
JP11492982U 1982-07-30 1982-07-30 gas laser equipment Expired JPS6022634Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11492982U JPS6022634Y2 (en) 1982-07-30 1982-07-30 gas laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11492982U JPS6022634Y2 (en) 1982-07-30 1982-07-30 gas laser equipment

Publications (2)

Publication Number Publication Date
JPS5920656U true JPS5920656U (en) 1984-02-08
JPS6022634Y2 JPS6022634Y2 (en) 1985-07-05

Family

ID=30265478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11492982U Expired JPS6022634Y2 (en) 1982-07-30 1982-07-30 gas laser equipment

Country Status (1)

Country Link
JP (1) JPS6022634Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03227080A (en) * 1990-01-31 1991-10-08 Shimadzu Corp Excimer laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03227080A (en) * 1990-01-31 1991-10-08 Shimadzu Corp Excimer laser device

Also Published As

Publication number Publication date
JPS6022634Y2 (en) 1985-07-05

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