JPS5920629U - Diffusion jig - Google Patents

Diffusion jig

Info

Publication number
JPS5920629U
JPS5920629U JP11601982U JP11601982U JPS5920629U JP S5920629 U JPS5920629 U JP S5920629U JP 11601982 U JP11601982 U JP 11601982U JP 11601982 U JP11601982 U JP 11601982U JP S5920629 U JPS5920629 U JP S5920629U
Authority
JP
Japan
Prior art keywords
support
wafer
utility
diffusion jig
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11601982U
Other languages
Japanese (ja)
Inventor
臣二 関家
Original Assignee
株式会社テクニスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社テクニスコ filed Critical 株式会社テクニスコ
Priority to JP11601982U priority Critical patent/JPS5920629U/en
Priority to EP83107498A priority patent/EP0100539A3/en
Priority to KR1019830003575A priority patent/KR920001025B1/en
Publication of JPS5920629U publication Critical patent/JPS5920629U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図及び第２図は従前の拡散治具の斜視図、第３図は
本考案拡散治具の斜視図。第４図は他の実施例を示す斜
視図、第５図は他のウェーハ支持体の実施例を示す要部
平面図。1 and 2 are perspective views of a conventional diffusion jig, and FIG. 3 is a perspective view of the diffusion jig of the present invention. FIG. 4 is a perspective view showing another embodiment, and FIG. 5 is a plan view of main parts showing another embodiment of the wafer support.

Claims (4)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）二個の支承板を直立対面させて、その中間に位置
して三本のウェーハ支持体を架設した拡散治具において
、前記各支承板はその対向広面上部両端部に支持体嵌合
部を並列状に形成すると共に、該両底合部の中間で下方
に位置してもう一つの支持体嵌合部を形成し、該缶底合
部に前記各ウェーハ支持体の各両端部を各々嵌合架設さ
せて楔またはビスの固定部材をもって固定する如く構成
して成ることを特徴とする拡散治具。(1) In a diffusion jig in which two support plates face each other upright and three wafer supports are installed between them, each of the support plates is fitted with a support at both ends of the upper part of the opposing wide surface. forming the support fitting parts in parallel, and forming another support fitting part located below in the middle of the two bottom joining parts, and connecting both ends of each of the wafer supports to the can bottom joining part. 1. A diffusion jig characterized in that the dispersion jig is constructed so that the respective parts are fitted together and fixed using fixing members such as wedges or screws. （２）前記支承板はその広面に少なくとも三個以上の貫
通孔から成るウエーノ・支持体嵌合部を形成して成るこ
とを特徴とする実用新案登録請求の範囲第１項記載の拡
散治具。(2) The diffusion jig according to claim 1 of the utility model registration claim, characterized in that the support plate has a wafer/support fitting part formed of at least three through holes on its wide surface. . （３）前記支承板はその広面に両側上部の横方向切欠部
及び中央上部から下方へ向かう垂直状の切欠部とから成
るウェーハ支持体嵌合部を形成して成ることを特徴とす
る実用新案登録請求の範囲第１項記載の拡散治具。(3) A utility model characterized in that the support plate has a wafer support fitting part formed on its wide surface, which is made up of horizontal notches at the top of both sides and a vertical notch extending downward from the top of the center. A diffusion jig according to registered claim 1. （４）前記支承板、ウェーハ支持体、固定部材ともにシ
リコンまたは石英ガラス材の単一使用、或いはシリコン
と石英ガラス材とから形成された組合せから成ることを
特徴とする実用新案登録請求の範囲第１項記載の拡散治
具。(4) Utility model registration claim 1, characterized in that the support plate, wafer support, and fixing member are all made of silicon or quartz glass, or are made of a combination of silicon and quartz glass. Diffusion jig according to item 1.
JP11601982U 1982-07-30 1982-07-30 Diffusion jig Pending JPS5920629U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11601982U JPS5920629U (en) 1982-07-30 1982-07-30 Diffusion jig
EP83107498A EP0100539A3 (en) 1982-07-30 1983-07-29 Assembled device for supporting semiconductor wafers or the like
KR1019830003575A KR920001025B1 (en) 1982-07-30 1983-07-30 Assembled device for supporting semiconductor wafers or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11601982U JPS5920629U (en) 1982-07-30 1982-07-30 Diffusion jig

Publications (1)

Publication Number Publication Date
JPS5920629U true JPS5920629U (en) 1984-02-08

Family

ID=30267617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11601982U Pending JPS5920629U (en) 1982-07-30 1982-07-30 Diffusion jig

Country Status (1)

Country Link
JP (1) JPS5920629U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0279023U (en) * 1988-12-06 1990-06-18
JPH02104630U (en) * 1988-11-25 1990-08-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5540539B1 (en) * 1970-03-10 1980-10-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540539B1 (en) * 1970-03-10 1980-10-18
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104630U (en) * 1988-11-25 1990-08-20
JPH0279023U (en) * 1988-12-06 1990-06-18

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