JPS59204269A - Solid-state image pickup element - Google Patents

Solid-state image pickup element

Info

Publication number
JPS59204269A
JPS59204269A JP58079722A JP7972283A JPS59204269A JP S59204269 A JPS59204269 A JP S59204269A JP 58079722 A JP58079722 A JP 58079722A JP 7972283 A JP7972283 A JP 7972283A JP S59204269 A JPS59204269 A JP S59204269A
Authority
JP
Japan
Prior art keywords
light
light transmittance
pixels
substrate
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58079722A
Other languages
Japanese (ja)
Inventor
Tetsuya Sekido
哲也 関戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Nippon Victor KK
Original Assignee
Victor Company of Japan Ltd
Nippon Victor KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd, Nippon Victor KK filed Critical Victor Company of Japan Ltd
Priority to JP58079722A priority Critical patent/JPS59204269A/en
Publication of JPS59204269A publication Critical patent/JPS59204269A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/148Charge coupled imagers
    • H01L27/14887Blooming suppression

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To restrain blooming and smear by laminating a photo transmittance variable element on the photo receiving surface of a substrate. CONSTITUTION:A clear electrode layer 8 is provided above an insulation film 5 at a fixed internval, and the clearance between this insulation film 5 is the clear electrode layer 8 is filled with nematic liquid crystal 9. A fixed voltage is impressed on the substrate and said variable element, thus making the photo transmittance at the position corresponding to each of a plurality of picture elements of said element variable according to the variation of the potential due to the photoelectric conversion of each of a plurality of the picture elements. Thereby, the photo transmittance decreases with the increase of the amount of the incident light, therefore the blooming that a strong light comes incident to some picture element, resulting in the inflow of photo charge flowing out of this picture element into a vertical transfer line, and the smear that the photo charges generated at the substrate bottom in proportion to the amount of the incident light diffuses to said line can be restrained satisfactorily.

Description

【発明の詳細な説明】 本発明は固体叩合・集子に係り、111板の受光面1に
光透過率7変索了を積層づることにJ、 l)、ノ゛ル
ーミング及びスミ\7を抑制υることのii]能仕固捧
囮(領水rを提(jじすることを目的とFする。。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to solid hammering and gathering, and involves laminating a light transmittance of 7 on the light-receiving surface 1 of a 111 plate. [ii] To suppress the υ] functional decoy (F for the purpose of providing (j) the territorial water r.

一般に、固体III ai X了ではある画素M強い光
か大川した際この画本に介/l(、た光電4’l /J
”を品l′を出しく垂直転送ラインに流れ込み、画面−
))こ(13(ゾ(尤か手直]°i向t、ニ帯を引くブ
ルーミンク4 ’l L’ /、−リ、基板深部に遂し
た)バ赤外尤による光°市イdlが1p両転送レインに
拡散し・1両面上においC尤が庄ll!11ノ向に帯を
引くスミ〜7を牛じlこり1ノる。。
In general, in solid-state III ai
" flows into the vertical transfer line that outputs the product l', and the screen -
)) This (13) Blue mink 4 'l L' /,-li, which has reached the deep part of the substrate, pulls two bands.Light by infrared light. is diffused to both 1p transfer rains, and C is on both sides! Draw a band in the direction of 11.

i・′(来ノリL記ゾルーミンクに′)い(IJ、A−
ハーフ[1−ド1ツインを設けたり縦形Δ−パーツ[1
−ドレイン構造とづ−ることにより過剰光電信y、、 
−/I 。
i・'(Nori Lki Zoruminkni') I (IJ, A-
Half [1-do 1 twin or vertical Δ-part [1
- excess opto-telegraph y, by means of the drain structure,
-/I.

バー7に1−ドレインに流し、強い光が入射したとぎ発
生rJろ゛ブルーミングを抑制している。
It flows into the 1-drain of bar 7 to suppress rJR blooming that occurs when strong light is incident.

しかし、スミ\ノは大川先部に比例してその光牛炙が増
加づるの(・、現在の固体撮像素子ではまだ充分に抑制
Cさないという欠点があった11例えば人剣光早に応じ
(光学系の絞りを可変してスミA7の発4Lを低く抑え
る方式等も考えられるが、被写体の一部のみが1121
に明るい場合はこの明るい部分に対してスミ(lが発生
し、このアイリス系によるスミャ抑制は不充分である。
However, in Sumi\no, the amount of oxidized beef increases in proportion to the Okawasaki area (・, the current solid-state image sensor still has the drawback of not being able to sufficiently suppress C11. (It is possible to keep the Sumi A7's 4L emission low by varying the aperture of the optical system, but if only part of the subject is 1121
If the image is bright, smear (l) will occur in this bright area, and the smear suppression by this iris system is insufficient.

本発明(,1上記の欠点を除去してbのであり、以下図
面どj(に各実施例につき説明する。
The present invention (1) eliminates the above-mentioned drawbacks and is described below with reference to the drawings.

第1図(L本発明に416固体撮像素子の第1実施例の
断面図を示11゜同図中、1はP形基板であり、この基
板1中にブX/ンネルストツパどして動作するP十形層
2、フォトダイオードとして動作するn十形層3、乗「
”1転送用の−IA7−ジカツプルドデイバイス(以下
rccDJという)として動作するn−形層4が形成さ
れている。基f21のP十形層2等が形成された受光面
−Lには二酸化シリコンの絶縁膜5の層が形成され、こ
の絶j−?、11φ;)中に14(板1 ト1,111
111 間L/ ”c、史ニ” 十形bi 3 トII
 −1je I’;g+ /1どの間のスレツシニ」−
ルドグート6.F1−形層j4及びP十形層2に対応し
て電極7が形成いれ゛(いる。
Figure 1 shows a sectional view of the first embodiment of the 416 solid-state image sensing device according to the present invention. P-decade layer 2, n-decade layer 3, which operates as a photodiode,
An n-type layer 4 is formed which operates as an -IA7-di-coupled device (hereinafter referred to as rccDJ) for ``1 transfer. A layer of an insulating film 5 of silicon dioxide is formed in this insulating layer 14 (plate 1, 1, 111).
111 Between L/ “c, history ni” Jugata bi 3 To II
-1je I';g+ /1 between sretsushini'-
Ludgut 6. Electrodes 7 are formed corresponding to the F1-type layer j4 and the P-type layer 2.

上記の絶縁膜5の上面には所定間隔4″U、つ(透明電
Jfi層E3が設りら1し、この絶縁II!、! bと
)ぺ明電(〜層8どの間にはネ−1!う一イック液晶1
)が/c il’j (:れ(いる。透明電極層9の上
面には透明万ラス層10が段りられ、更にこの透明カー
ノス層10の1−而はjΔ明保訛膜11に(71われて
J5す、この透明保訴膜11 中t、l CL ’7 
A1− 夕’−(オー1−を(1−1成りる11+形層
3に、 )J’ Ilトiル部分を除イテa tiik
 層12 カiiQ &1う’F(。
On the upper surface of the insulating film 5, a transparent conductive layer E3 is provided at a predetermined interval of 4''U, and between this insulating layer II!,! 1! Another quick liquid crystal 1
) is /c il'j (:re(). A transparent glass layer 10 is stepped on the upper surface of the transparent electrode layer 9, and furthermore, the transparent glass layer 10 is jΔMeibo accent film 11 ( 71Ware J5, this transparent appeal film 11 Nakat, l CL '7
A1-Yu'-(O1- to (1-1 consisting of 11+ form layer 3, )J' Il Toil part removed Ita tiik
Layer 12 KaiiiQ &1U'F(.

(いる。:した、電4重層7は端子13)に1x続さ(
′;でおり、史に、P形基板1と透明電極層ε〕との間
(4−は直流電源′14によって電圧Vが印加、さ1′
)rいイ・2つまり、透明電極I?2i8.ネマirツ
タ)(シ品5)、透明ガレス層10及びn十形層3に、
1′−)(光透過・ネ′可変索了が構成され受光面1に
積1.?iさ:H(J:iす、この光透過率可変素」−
は透明型’t% 図8と11+形バ・;3間の電J「゛
つまり)(々晶9の電界強度によって撮像素子の各画素
を(j11成づる11+形層3毎にで・の光透過率を可
変りる0のである。この光透過率可変素子の印加電圧つ
まり電界強度と光透過率との関係は、第2図に小り如く
印加電圧が\/、・以下では光透過率が一定(′あり、
印加電圧がV2からVlまでの間C,L電1コ−に対応
し−(光透過率が低下し、印加電圧がVJを越えると光
透過率は再び一定となる。
(Yes, the electric quadruple layer 7 is connected to the terminal 13) by 1x (
′; In the history, a voltage V is applied between the P-type substrate 1 and the transparent electrode layer ε (4- is applied by the DC power supply 14, and 1′
) r i・2 In other words, transparent electrode I? 2i8. Nemair ivy) (product 5), on the transparent gales layer 10 and the n-shaped layer 3,
1'-) (Light transmission/ne' variable element is configured and multiplied on the light receiving surface 1.
is a transparent type 't%. 0 to vary the light transmittance.The relationship between the applied voltage, that is, the electric field strength, and the light transmittance of this variable light transmittance element is shown in Figure 2. The rate is constant (with ′,
When the applied voltage is from V2 to Vl, the light transmittance decreases corresponding to the C and L voltages, and when the applied voltage exceeds VJ, the light transmittance becomes constant again.

ここで、第1図示の端子13には第3図に示づ如さ波形
の電り二が印加される。垂直ブランキング期間に印加さ
l’Lる電圧\/1のパルスaによってグー1〜Gの小
ノンシ(ノルが高くなりフAトダイオードを4jl: 
Jノ¥cノる11+形層3に蓄積された光電荷はC01
つを構成づる1)−形Fi71に転送される1、この転
iZ直俊に、1j(プる1)十形層3のボjンシA・ル
φ1゜スレッシ“1−ルトゲー1−6のボjンシ\ノル
φIG。
Here, a voltage having a waveform as shown in FIG. 3 is applied to the terminal 13 shown in the first diagram. Due to the pulse a of the voltage \/1 applied during the vertical blanking period, the small nonce of Go 1 to G becomes high and the foot diode becomes 4jl:
The photocharge accumulated in JNO\cNORU11+ type layer 3 is C01
1) Transferred to form Fi71, this transfer iZ Naotoshi, jnshi\norφIG.

11−形1ンj4のボノンシ)lルφCCD夫々は第4
図の実線Iに示1j如ざ状態とされている。11+形層
3のボjンシャルがφ1であるとぎ基板1と透明電極8
間【8冒ま常に電圧Vが印加されているので「1+形層
3ど透明電極層8の間の電1)′lイー(I\l γあ
り、第2図にりこのときの光透過宰可変本了の光’>n
過率はα: (゛ある。コノ後、n −1)2 ’;q
 /l(B y、1電荷は第3図示の垂直転送パルス1
)が!tf;: ’j′i 、’3に印加される1tJ
に第1図の粗面]−十方向に連なるn−形層を順次転j
スされるが、この耳!直転送明間にn十形層3とP形基
板1とで)1η成されるノJL・ダイオードに光が入射
すると、この入用光が光電変換されて1)十形層3に光
電荷が蓄積し、[1+形層13のポーシーンシAノルは
例えばφ7・ま(イIJ、 l:りろ、。
11-Type 1 n j4 Bononshi) l φCCD each is the 4th
The state shown by the solid line I in the figure is 1j. A sharp substrate 1 and a transparent electrode 8 in which the 11+ type layer 3 has a φ1 bond.
Since the voltage V is always applied between the 1+ type layer 3 and the transparent electrode layer 8, the light transmission at this time is shown in Figure 2. The Light of Changeable Honryo'>n
The error rate is α: (゛ exists. After this, n - 1)2'; q
/l(B y, 1 charge is vertical transfer pulse 1 shown in Figure 3)
)but! tf;: 1tJ applied to 'j'i, '3
[The rough surface shown in Figure 1] - The n-type layers extending in ten directions are sequentially rolled
But this ear! When light enters the diode formed by the n-shaped layer 3 and the p-type substrate 1 between the direct transfer brightness, this light is photoelectrically converted and 1) a photo charge is generated in the 10-shaped layer 3. accumulates, and the port scene A of the 1+ type layer 13 is, for example, φ7・Ma(IJ, l:Riro,).

このときのn十形1&i 3と透明型1’(lI!・7
8の間の電1f17 X/ 、は第2図に示り′如<ソ
(、透過−f′が低l・1ノ始める部分に相当1ノて(
13す、この後人1’J、I光早の増加ど共に光透過率
は連続して低下5する、。
At this time, the n-ten type 1 & i 3 and the transparent type 1' (lI!・7
The electric current between 8 and 1f17
13. After this, the light transmittance decreases continuously as the light velocity increases.

更に人躬光舟が増加すると11+形層3のボノンシXフ
ルはφ3どイj一つ゛(これと透明電極11・18の間
の電位差V3に対応し−(光透過率はα。に(代1・・
する、。
When the number of human beams further increases, the 11+-type layer 3's bonanza 1...
do,.

これより更に入用光示が増加]jるど1]+形層J)と
透明電極層8との電位差は\14で7(、透過<v l
;1、α:となり、これ以−)入CJ光最が増加【i 
”c ’b光透過(′は低下しなり<紅る。この後n十
形層3のポjンシ′Xフルが低下しCφ101メ下とな
るとブルーミングを起こりことにイgるが−1−記電位
差がV4を越える以前に次の読み出(5のため端子13
にパルスaが入来し、1)十形層3のポデンシT’ルは
φ1にりしツ1へされる。
The potential difference between the transparent electrode layer 8 and the transparent electrode layer 8 is \14 and 7(, transmission <v l
;1, α: From this point on, the input CJ light maximum increases [i
``c'b light transmission (' decreases and turns red. After this, when the ``X full'' of the n-shaped layer 3 decreases and becomes below Cφ101, blooming occurs, but -1- Before the recorded potential difference exceeds V4, the next readout (because of 5, terminal 13
A pulse a enters, and 1) the podensile T' of the ten-shaped layer 3 is set to φ1.

このように人身・1甲に対応して光透過率i1変累:r
の光透過率がα1からα13Lで低下するため、入射光
量に比例し゛(゛増大りるスミVが抑制iキれる。
In this way, the light transmittance i1 changes depending on the human body and the body: r
Since the light transmittance of the lens decreases from α1 to α13L, the increase in smear V is suppressed in proportion to the amount of incident light.

第51稍IJ1本冗明【こなる固体搬像素子の第2°史
施例の回ff5 ’l:l:成図を承り。同図中、第1
図と同一部分に(よ同 符勇る。符し、その説明を省略
覆る。第5図中、各11−形層の構成づる複数の垂直転
送用CCC人々を転)′Aされた画素信号は出力シア1
−レジスタ(図示け(〕゛)に供給され、このシフトレ
ジスフを転jスされ(、’ It−5系列な映像信号と
して出力され、ブリアン−120に供給される。このプ
リフンプで増幅され−(出力される映像信号は二分岐さ
れ、ぞの一方tよ出力幅;了21を介して後段のプロレ
ス増幅回路(図示I!ず)に供給されてここで所定の処
理が?うなわれ史に回期(L弓がf」加され(79ご1
1’:’像信月とされる。また、仙7′J(、L帰還回
路’t (’7’l I戊−する積分回路22に供給さ
れる。積分回路2’2C;I、この映像1ム舅を積分し
てその積分i11’lに比1シリした111′lの化1
丁を出力Jる。1この電圧はバッファアンプ2 y’1
を介しC透明電極層8に印加されイン。ま/1、IN形
の基板1(,1例えば接地されて所定電位と、\れCい
る。
51st chapter IJ1 This explanation [This is the second history of solid-state image carriers. In the same figure, the first
The same parts as in the figure are marked and their explanations are omitted. is output shear 1
- It is supplied to the register (shown in the figure (゛)), is passed through this shift register, and is output as an It-5 series video signal, and is supplied to Brian 120. It is amplified by this pre-fump and - (output The video signal to be output is branched into two, and one of the two is supplied to the subsequent professional wrestling amplifier circuit (not shown in the figure) via the output width 21, where it undergoes predetermined processing and is turned into an unauware history. (L bow has been added with “f” (79 go 1)
1':'It is said to be the statue of Shingetsu. In addition, the signal is supplied to the integrating circuit 22 which outputs the feedback circuit 't ('7'l I). 111'l, which is 1 series compared to 'l'
Outputs digits. 1 This voltage is buffer amplifier 2 y'1
C is applied to the transparent electrode layer 8 through the in. /1, IN type substrate 1 (,1, for example, is grounded and has a predetermined potential.

ここで、第1図示の如く、早椴1とj六電電4〜層ε3
との間に71)に電圧Vが印加されている場合に1.1
1、パルスaの入来直後11+形層3とjΔ明電電14
7層ε3間の電1立差はV+ とされ、この1殺電1)
′l差ノ)い/2となるJ:でに時間を要し、入射光量
が多いと3きには透過率が低下づる前にスミャが先住(
)ることらある。しかし、第5図の如ぎ回路(11−成
にJ、り人Q・1尤吊に応じて基板1と透電電1旧3と
の間の゛;ト江/・111変づることtこより入射光量
が多い場合には)ら電電極層8への印加電圧が高くなり
、パルスaの人、((向後のn十形層3と透明電極層8
0間の電位イは■2程度となり光透過率が低下し始める
一L(の時間が短縮され、スミA7が充分に抑制される
Here, as shown in the first diagram, Hayasu 1 and Rokudenden 4 to layer ε3
1.1 when voltage V is applied to 71) between
1. Immediately after pulse a enters 11+ type layer 3 and jΔ Meidenden 14
The electric voltage difference between the 7 layers ε3 is V+, and this 1 electric discharge 1)
J: It takes time, and if there is a large amount of incident light, smear will occur before the transmittance decreases.
) There are things. However, if a circuit like the one shown in Figure 5 (11-J, person Q, 1 and 1 is used), the connection between the substrate 1 and the conductive conductor 1 and 3 will change. When the amount of incident light is large, the voltage applied to the electrode layer 8 increases, and the voltage applied to the electrode layer 8 increases, and
The potential A between 0 becomes about 2, and the time at which the light transmittance begins to decrease is shortened, and the smear A7 is sufficiently suppressed.

なJ−3、第1図、第55図に示り一搬像素子に史に/
1−バーフ[j−ドレインを設けたり、P形基板1の下
面に11形1t4iを設置3′Cnpnの縦形構造とす
ることによりブ11ノーミングの抑制効果を更にjRl
めることか可能であり、上記実施例に限定されない3゜
イ“「a3、上記の実施例はCCD形の素子を例にして
説明をしたが、ψれはへ40S形の素子であっCも良く
、上記実施例に限定されない。
J-3, shown in Fig. 1 and Fig.
By providing a 1-barf [j-drain or by installing an 11-type 1t4i on the bottom surface of the P-type substrate 1 and creating a vertical structure of 3'Cnpn, the effect of suppressing barf 11 norming can be further increased by providing a jRl
A3. The above embodiment was explained using a CCD type element as an example, but this is a 40S type element. However, the present invention is not limited to the above embodiments.

上述の如く、本発明になる固体服像素了I;11、基板
上に構成し/、−ン5719.の画累人々にて光電変換
を行ない映像1、−8を取り出で固体ffG像素子にお
いて、基板の複数の画素を設(jられた受光面上に光透
過率が電界強度に応じで変化す゛る光透過室可変素子を
積層してなり、基板と光透過室可変素子との間に所定電
圧を印加し複数の画素夫々の光電変換によるボデンシ!
ルU)変1ヒtこ応して光透過率−riJ変素子の複数
の画素に対応りる位置の光透過率を可変り゛るよう構成
し1.−ため、入射光量の増加に応じて光透過率が低十
づるのである画素に強い光が入射しこの画素、J、り溢
れ出た光電を)か重+i’、i ’l’/、 ’+スジ
イン(こ流れ込むブルーミング及G・人身・j光;)“
・しこ比1シロ、(草根底部η・発生゛りる光電伺が小
部転送ンイン(S拡散゛りるスミレを光分に抑制り−る
ことがて゛さる等の1コ1長を右ケるものである。
As mentioned above, the solid-state image structure according to the present invention is constructed on a substrate. A solid-state FFG image element is used to perform photoelectric conversion on images 1 and -8, and the light transmittance changes depending on the electric field strength on the light-receiving surface of the substrate. It is made by stacking various light transmission chamber variable elements, and a predetermined voltage is applied between the substrate and the light transmission chamber variable element to increase the density by photoelectric conversion of each of the plurality of pixels!
1. The light transmittance of the light transmittance-riJ variable element at positions corresponding to a plurality of pixels is changed accordingly. - Therefore, as the amount of incident light increases, the light transmittance decreases.When strong light enters a certain pixel, the photoelectric currents overflow from this pixel, J) or + Sujiin (Flowing blooming, G, human, J light;) “
・The width is 1 cm, (the bottom of the grass root η, the photoelectric wave that is generated is transmitted in the small part (S diffusion), and the violet that is generated is suppressed to the light beam.) It's worth it.

また、基板上に414成した複数の両本人〕、:(こ(
光電変1灸を行ないll!J、H像イJ−号を取り出・
〕固体1ii?像素」′において、L4板の複数の画素
を設りられた受光11)l圭に光透過率が電界強度に応
じで変化りる光透過室可変素子を積層し、映像信号を仔
」力し7.1j7た入QJ光吊に応じた電J1を基板ど
光透過べ゛用乃・拳rどの間に印加する帰)W回路を設
り゛(/、rす、複数の画累犬々のソC電変換にJ、る
ボーノンン\ノルの変化に応しく光透過率可変素fの複
数の画素に2・j応づるイ、ニア11コの光透過率を可
変−りるよう構成したため、名画阜の光電的を転送した
あど光透過;:;″が低下し始める。Lでの111間が
11桜1象索子全体に人則りる尤jf:か憎加すイ)【
こ従って7.+7縮されブルーミンク及Oスミ“lノか
より充分に抑制される等のり′I艮をイ〕’Jるしの。
In addition, there are multiple individuals who have created 414 on the board], :(this(
Photodenhen 1 moxibustion ll! J, H statue A. Take out No. J-.
]Solid 1ii? In the image element, a light transmitting chamber variable element whose light transmittance changes depending on the electric field strength is laminated on the light receiving element equipped with multiple pixels of the L4 plate, and a video signal is output. 7.1j7 Set up a W circuit that applies an electric current J1 corresponding to the input QJ light between the substrate and the light transmitting base. This is because the light transmittance of the near 11 pixels can be varied in response to the change in the light transmittance variable element f in response to the change in the electric power conversion of the light transmittance element f. As soon as the photoelectric transmission of the famous painting is transferred, the light transmission begins to decrease.
Accordingly, 7. +7 reduced bloom mink and O sumi "l no", etc. glue'I 艮I]'Jrushino.

ある。be.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第5図は本発明になる固体!!!: f’s 
i% J′の各実施例の断面図1回路構成図、第2ヌI
は>’L’+ ;森過率iiJ変素子の特性図、第3図
はり′〕1図、第り図(、承り電極の電圧波形図、第4
図はイ)′1図図j<の木j′各部のボデンシ\フルを
示づ図(゛ある、。 1・・・基板、3・・・n十形層、7・・・電ゼ、:、
8・・・j4明′市JMj層、9・・・液晶、14・・
・n流電源、20・・・ブリiノン1.22・・・積分
回路。 第1図 門111i □ 第5図 丁続ン市jl−:: 1.事flの表示 昭和()ε3イf  !I、11 +1’l願 第79
722 g2、発明の名称 固1ホ1最]lv外、」′ 3、補正をする者 4!iム′1出9イ1人 11所 〒221  神奈川す1!横?!(山神金用I
″A守屋町3−1−+]12番地名称 (432)  
l水ヒククー株式会社代表者 取締役ネ!艮 宍 ;0
− 部4代11Jj人 イ1−所 〒102  中東部!「代ロI区麹町55丁
目7番地明細t;の5を明の訂細な説明の(11”、j
、。 7補IIの内容 明aIr’i中、第3L”! ”I! 8 ?”l )
l’ ll:’l LL 、! 41”RJ IL I
ど1山11りる。
Figures 1 and 5 show the solid state of the present invention! ! ! : f's
Cross-sectional diagram of each embodiment of i% J' 1 circuit configuration diagram, 2nd column I
is>'L'+ ;Characteristic diagram of Mori pass rate iiJ variable element, Fig. 3 Beam'] Fig. 1, Fig. 4
The figure is a) '1 figure. :,
8...j4 Ming' City JMj layer, 9...LCD, 14...
・N-current power supply, 20... Buri Non 1.22... Integral circuit. Figure 1 Gate 111i □ Figure 5 Dingzhuin City jl-:: 1. Display of thing fl Showa () ε3 if! I, 11 +1'l petition No. 79
722 g2, title of the invention 1] lv outside, '3, person making the amendment 4! im '1 out 9 i 1 person 11 places 〒221 Kanagawa Su1! beside? ! (Yamagami Kinyo I
``A Moriyacho 3-1-+] No. 12 name (432)
Mizuhikuku Co., Ltd. Representative Director Ne! Shishi ;0
- Part 4, 11JJ people, 1-place 〒102 Middle East! 55-7, Kojimachi, I-ku, Dairo I, details t;
,. Contents of Supplement 7 II aIr'i, 3rd L"! "I! 8? ”l)
l'll:'l LL,! 41”RJ IL I
Do 1 mountain 11 ruru.

Claims (2)

【特許請求の範囲】[Claims] (1)  基数t−+こ)IJ1成した複数の画素夫々
にて光電変換を行ない映像信号を取り出ず固体搬像A1
了において、HJ >N仮の複数の画素を設(プられた
受光面上に光透過率が電界強度に応じて変化する光透過
率可変素了を7111層し−(なり、該基板と該光透過
率71J変A(了との間に所定電1丁を印加し該複数の
画素人々のソこ電変換に1:るポi−ンシA/ルの変化
に応じて該光)ぺ過:仝”1−リ′タ屯rの該複数の画
素に対応りろ位置の光透過率をiiJ変りるよう構成し
たことを特徴とする固体慝像索J′。
(1) Photoelectric conversion is performed in each of the plurality of pixels formed by base number t-+ko)IJ1, and the solid-state carrier image A1 is
In the final stage, a plurality of temporary pixels with HJ>N are set up (7111 layers of variable light transmittance elements whose light transmittance changes according to the electric field strength) are formed on the light-receiving surface. Light transmittance 71J change A (applying one predetermined electric current between the light and the electric current conversion of the plurality of pixels according to the change in the electric power) A solid-state imager J' characterized in that the light transmittance at positions corresponding to the plurality of pixels of the 1-returner is configured to vary by iiJ.
(2)  基板しにB4成した複数の画素人々にて光電
変換を行ない映像(51翼を取り出す固体撮像索子(ご
J5いて、識見(反の複数の画素を設けられた受光面上
に光透過停二が電界強度に応じて変化づる光jシ過率司
変県了を積層1]、該映像信号を積分して得た入射光単
に応じた電圧を該基板と該光透過率7変素子どの間に印
加りる帰還回路を1(々けてCI(:) 、、 ::4
;複数の画素人々の光゛電変換にJ、るボIンシ\フル
の変化に応じて該光透過率可変素了の1咳複数の画〃に
対応する位置の光透過率を再度(するJ、)(’6:成
1゜たことを特徴と覆る固体歴@崇丁
(2) Photoelectric conversion is performed using multiple pixels formed on the B4 substrate, and the image (51) is taken out from the solid-state imaging probe (J5), and light is transmitted onto the light-receiving surface, which is provided with a plurality of pixels on the opposite side. The incident light obtained by integrating the video signal is simply applied to the substrate and the light transmittance is changed by the voltage applied to the substrate. The feedback circuit applied between the elements is 1 (CI(:),, ::4
;The light transmittance at the position corresponding to one or more pixels of the light transmittance variable element is changed again according to the change in the point of view of the photoelectric conversion of multiple pixels. J, ) ('6: A solid history that is characterized by being born 1゜ @ Takacho
JP58079722A 1983-05-07 1983-05-07 Solid-state image pickup element Pending JPS59204269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58079722A JPS59204269A (en) 1983-05-07 1983-05-07 Solid-state image pickup element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58079722A JPS59204269A (en) 1983-05-07 1983-05-07 Solid-state image pickup element

Publications (1)

Publication Number Publication Date
JPS59204269A true JPS59204269A (en) 1984-11-19

Family

ID=13698086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58079722A Pending JPS59204269A (en) 1983-05-07 1983-05-07 Solid-state image pickup element

Country Status (1)

Country Link
JP (1) JPS59204269A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248382A (en) * 1986-04-22 1987-10-29 Hamamatsu Photonics Kk Night vision device
JPS6335081A (en) * 1986-07-30 1988-02-15 Rhythm Watch Co Ltd Light quantity correcting device for video camera
JPS6335082A (en) * 1986-07-30 1988-02-15 Rhythm Watch Co Ltd Light quantity correcting device for video camera

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108782A (en) * 1979-02-13 1980-08-21 Matsushita Electric Ind Co Ltd Solid pickup device
JPS586681A (en) * 1981-07-02 1983-01-14 Mitsubishi Electric Corp Semiconductor image pickup device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108782A (en) * 1979-02-13 1980-08-21 Matsushita Electric Ind Co Ltd Solid pickup device
JPS586681A (en) * 1981-07-02 1983-01-14 Mitsubishi Electric Corp Semiconductor image pickup device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248382A (en) * 1986-04-22 1987-10-29 Hamamatsu Photonics Kk Night vision device
JPS6335081A (en) * 1986-07-30 1988-02-15 Rhythm Watch Co Ltd Light quantity correcting device for video camera
JPS6335082A (en) * 1986-07-30 1988-02-15 Rhythm Watch Co Ltd Light quantity correcting device for video camera

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