JPS59197102A - Method of producing moisture sensor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a humidity sensor using an improved metal hydride as an electrode material.

Humidity sensors generally detect changes in relative humidity as changes in electrical resistance.In order to achieve a quick response speed, humidity sensors minimize the degree of blockage of the pores of the humidity sensing element itself by the electrodes. It is required to maximize the effective area of the electrode surface formed on the sensor itself, and the selection of the electrode material is a critical requirement based on the characteristics of the accuracy sensor.

Conventionally, the electrode material that should meet these demands is A.
Negative metal particles such as U, Pt, and Ag are used, but these yellow metal materials are expensive and result in an increase in the cost of the humidity sensor. There were many practical drawbacks, such as the problem of short-circuiting under large currents due to the migration phenomenon in which Ag particles entered the wet bulking element. In recent years, ruthenium ferrite has been attracting attention as an electrode material. However, when saponified ruthenium is used as a TM material, it is necessary to add a glass frit component of Rurutsuki in order to form a close layer with the moisture sensitive element itself, and at the same time, the pores of the moisture sensitive element itself are not blocked by the electrodes. In order to ensure the above-mentioned condition, the glass frit components and blending ratio in the ruthenium oxide paste, as well as the amount of glass 7 liters added to the ruthenium oxide, must be set under extremely strict conditions. To obtain an inexpensive humidity sensor with high reliability by specifying the glass frit component in the ruthenium diluted paste, the blending ratio of the frit component, and the addition ratio to the ruthenium diluted glass component. It is an object of the present invention to provide a method for manufacturing a humidity sensor that can perform the following steps.

The present invention will be explained below. That is, Figures 1 and 2
As shown in the figure, for example, Zn, Or Cr204rL i
20 * Gold such as V 205) Take a s4 hanka-kiri and mix it well with a ball mill.600~9
Roast with 00'C171++Ji, add a few grains of Holivinyl Artzol water bath liquid as a binder to δ, and form into a plate shape.
Then, it is heated at a temperature of 1000 to 1400°C for 1 to 5 hours, and then polished to form a sintered body (1). Then, ruthenium oxide ('Ru0z) was coated with 5102. PbOjMgO,A1
20a.

The blending ratio of Zr0pr is 5iOs+2 by weight
．． 6: PbO3,4: MgO0,2: Al2O!
l 1.0: Add 1 to 1 omk% of the glass 7-litre component to give ZrO22.8, mix bath additives and resin suds, screen print ruthenium diluted paste, and print at 120'0. Dry search 700-900°
C for 3 minutes to form electrodes (2a) and (2b).
Nine terminals (3aH3b) are attached to the electrodes (2a) and (2b), respectively.
It is made by &[.

By the manufacturing method of the humidity sensor configured as described above, the effective area of the electrode surface can be minimized to minimize the Dk concentration due to the blockage of the pores of the hygroscopic body, which is an important shelter as an electrode material. Since the floor space can be maximized, there is no custom-made deterioration, and the XF3 has the effect of improving reliability.

Next, the present invention will be explained in detail using a practical example. First, Zn0 50 mol%, Cr, +04 41 mol%
, L12o 4.5 mol%, V2Q5 4.5
Weigh out the mole % and mix it thoroughly with a ball mill. These mixtures were then roasted at a temperature of 800°C, and then mixed with a polyvinyl alcohol water bath solution until the thickness was 0.
．． A disk molded body with a diameter of 24 m and 9 mm was obtained.

The disk molded body was heated at a temperature of 1300°C for 3 hours.
, + leaving the outer periphery on both the front and back sides of the moisture-sensitive nest obtained by combining RuO2 with 5iOs+ 2.6: Pb0
3.4 :AigOO,2: Al2O31,0:
A glass with a blending ratio of ZrO22 and 8 was added to each of the 7 components (in weight ratio) and sensitized ruthenium was screen-printed at λ+ilj L/120'
Dry with O, then ff1 with soo'c for 3 minutes.
As a result of measuring the change digit, hysteresis, and humidity change rate characteristics of each glass frit of the humidity sensor with the electrode shaped, the results are shown in Figures 3 to 8. Became. In addition, the glass free used as a sample7) %% addition fit is 0.5%, 1%, 3%, 5
%, 10%.

15%, 20% '74! ii.

Figure 3 shows R1 for glass frit fins! o/R9
0, and in addition, Figures 5 to 8 are glass 7 pieces) excluding 7J
Relative i when left for 5000 hours at 50°C and 90%RH against II fence: N degree 30%RH, 50%RH, 7
0%RHj90%RR respectively indicate the humidity change rate expressed as a change rate of the general resistance value change.

As is clear from Fig. 3 to Fig. 8, when the glass frit is separately installed, the hysteresis is small and the initial characteristics are excellent, and at the same time, when the glass frit is placed separately, the hysteresis is small and the initial characteristics are excellent. Even in the storage test, the humidity change rate did not change, demonstrating the excellent effect of maintaining stable characteristics over a long period of time.

As described above, according to the present invention, the compounding ratio of ruthenium is 5i022.6:pbo 3.4 in terms of mi ratio.
: MgO0,2: Al2O31,0:Zr
0z 2.8 and add 1 to 10 i% of Karasu 7 lit ingredients to the lowest temperature to form an electrode on both sides of the moisture-sensitive confectionery product. Accordingly, it is possible to provide a method for manufacturing a humidity sensor that can obtain an inexpensive humidity sensor with excellent initial characteristics and reliability.

[Brief explanation of the drawing]

1 and 2 show an example of a humidity sensor obtained according to the present invention. FIG. 1 is a plan view, FIG. 2 is a side view, and FIG. 3 is a glass frit-added yarn-change invitation curve diagram. Fourth
The figure is a graph of glass 7 addition it-hysteresis characteristic curve.
Humidity & change of 30%RH special feature
, Figure 6 is a custom-made curve diagram of the humidity change rate of glass frit cooling 1-50% RH, Figure 7 is a diagram of glass frit cooling 1-50% RH, Figure 7 is glass frit addition 11ji
Humility plagal quasi-characteristic curve diagram of t-'i' O%RR, No. 8
The figure is a wet charcoal change skewering property curve diagram of glass frit or separate -90% RI. Electrode patent applicant Marcon Ryuko Co., Ltd. Fig. 1 Fig. 3 Fig. 0 "U 7 so.../Tokyo Dl] 1 total (Total amount % Fig. 2 Fig. 4) u0
% (phrase 1f4) Figure S 0.5 / 35 l015 z. IJ゛'Las 1 Lit Shikalo Heavy (Contest) Fig. 7 0.5 1 35 40 15 20 Force゛Las-
Furi, Toshi City, ml匈11≠)ty゛-1suf+)=
trQ77o Lid ([!!/,) Fig. 8

Claims (1)

[Claims] Ruthenium mide with Azuma ratio: 5i022゜6:PbO3
,4: MgOO,2: Al2O31,0ZrO2
Spread 1 portion of glass frit with a blending ratio of 2.8 on the entire affected board and apply 1 to 10% fuzzy ruthenium paste on the surface of the moisture-sensitive element-19, fissure III+. A method for manufacturing a humidity sensor, characterized in that 'am is formed.