JPS5919592U - 浮上液排出装置 - Google Patents

浮上液排出装置

Info

Publication number
JPS5919592U
JPS5919592U JP11287482U JP11287482U JPS5919592U JP S5919592 U JPS5919592 U JP S5919592U JP 11287482 U JP11287482 U JP 11287482U JP 11287482 U JP11287482 U JP 11287482U JP S5919592 U JPS5919592 U JP S5919592U
Authority
JP
Japan
Prior art keywords
float
discharge device
liquid
buoyancy
liquid discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11287482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233750Y2 (enEXAMPLES
Inventor
今沢　真
新倉　敏之
Original Assignee
ト−ヨ−カネツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ト−ヨ−カネツ株式会社 filed Critical ト−ヨ−カネツ株式会社
Priority to JP11287482U priority Critical patent/JPS5919592U/ja
Publication of JPS5919592U publication Critical patent/JPS5919592U/ja
Application granted granted Critical
Publication of JPS6233750Y2 publication Critical patent/JPS6233750Y2/ja
Granted legal-status Critical Current

Links

JP11287482U 1982-07-27 1982-07-27 浮上液排出装置 Granted JPS5919592U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11287482U JPS5919592U (ja) 1982-07-27 1982-07-27 浮上液排出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11287482U JPS5919592U (ja) 1982-07-27 1982-07-27 浮上液排出装置

Publications (2)

Publication Number Publication Date
JPS5919592U true JPS5919592U (ja) 1984-02-06
JPS6233750Y2 JPS6233750Y2 (enEXAMPLES) 1987-08-28

Family

ID=30261502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11287482U Granted JPS5919592U (ja) 1982-07-27 1982-07-27 浮上液排出装置

Country Status (1)

Country Link
JP (1) JPS5919592U (enEXAMPLES)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008523900A (ja) * 2004-12-17 2008-07-10 カーディナル ヘルス ３０３、インコーポレイテッド エレクトレットにより機能強化された自動ｉｖドリップチャンバ遮断
KR20230127998A (ko) 2021-01-08 2023-09-01 가부시키가이샤 에바라 세이사꾸쇼 기판 처리 장치 및 기판 처리 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008523900A (ja) * 2004-12-17 2008-07-10 カーディナル ヘルス ３０３、インコーポレイテッド エレクトレットにより機能強化された自動ｉｖドリップチャンバ遮断
KR20230127998A (ko) 2021-01-08 2023-09-01 가부시키가이샤 에바라 세이사꾸쇼 기판 처리 장치 및 기판 처리 방법

Also Published As

Publication number Publication date
JPS6233750Y2 (enEXAMPLES) 1987-08-28

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