JPS59195894A - Laser device - Google Patents

Laser device

Info

Publication number
JPS59195894A
JPS59195894A JP58069532A JP6953283A JPS59195894A JP S59195894 A JPS59195894 A JP S59195894A JP 58069532 A JP58069532 A JP 58069532A JP 6953283 A JP6953283 A JP 6953283A JP S59195894 A JPS59195894 A JP S59195894A
Authority
JP
Japan
Prior art keywords
aperture member
laser
reflection mirror
aperture
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58069532A
Other languages
Japanese (ja)
Inventor
Shigenori Yagi
重典 八木
Kimiharu Yasui
公治 安井
Shuji Ogawa
小川　周治
Masaki Kuzumoto
昌樹 葛本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58069532A priority Critical patent/JPS59195894A/en
Priority to DE19843415009 priority patent/DE3415009A1/en
Priority to US06/602,584 priority patent/US4914671A/en
Priority to FR848406306A priority patent/FR2544922B1/en
Publication of JPS59195894A publication Critical patent/JPS59195894A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length

Abstract

PURPOSE:To obtain an output of a laser beam mode of an excellent symmetry by mounting an aperture member, to the outer circumference of an opening section thereof a plurality of temperature detecting elements are fitted, and measuring the temperature distribution of the periphery of the aperture member. CONSTITUTION:Groove sections 72 are formed to the outer circumference of an opening section 71 in an aperture member 70, and thermocouples 73 are mounted. When a partial reflecting mirror 5 and a totally reflecting mirror 6 are aligned deflectively, laser beams 9 and the center of the aperture member 70 are displaced, and temperature distribution is generated in each section of the aperture member 70. Accordingly, the mutual opposite positions of the partial reflecting mirror 5 and the totally reflecting mirror 6 are adjusted so that outputs from the thermocouples 73 are equalized by an adjusting means, and the laser beams 9 of a mode of an excellent symmetry can be generated.

Description

【発明の詳細な説明】 この発明は、赤外線レーザ装置などのレーザ共振器内に
設けられるアパーチャ部材を備えたレーザ装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser device including an aperture member provided in a laser resonator, such as an infrared laser device.

従来こンの種のレーザ装置としては、第１図に示すもの
があった。第１図は従来のレーザ装置を示す概略構成図
である。図において、１は交流高電圧の電源、２，３は
相対向して配置されるそれぞれの電極、４は各電極２，
３間に発生される無声放電、５は部分反射ミラー、６は
全反射ミラー、７は部分反射ミラー５の近傍に配設され
るアパーチャ部材、８はレーザ媒質ガスのガス流であシ
、第１図に示すように紙面と直角の方向に流れている。A conventional laser device of this type is one shown in FIG. FIG. 1 is a schematic configuration diagram showing a conventional laser device. In the figure, 1 is an AC high voltage power supply, 2 and 3 are electrodes arranged opposite each other, 4 is each electrode 2,
3 is a silent discharge generated between 3, 5 is a partial reflection mirror, 6 is a total reflection mirror, 7 is an aperture member disposed near the partial reflection mirror 5, 8 is a gas flow of the laser medium gas, As shown in Figure 1, the flow is perpendicular to the plane of the paper.

９は発生されるレーザビームである。9 is a generated laser beam.

次に上記第１図の動作について説明する。まず、各電極
２，３間に電源１から交流高電圧を印加し、各電極２，
３間に無声放電４を発生させる。一方、各電極２，３間
にレーザ媒質ガスのガス流８を流し、レーザ媒質ガスを
上記の無声放電４によって励起することによりレーザ光
を生成させる。無声放電４をはさんで部分反射ミラー５
と全反射ミラー６とを相対向して配置し、また部分反射
ミラー５の近傍に円形の開口部７ａを有するアパーチャ
部材７を配設すれば、円形のレーザビーム９を外部に”
取り出すことができる。この場合、部分反射ミラー５と
全反射ミラー６との相互の対向位置の調整、すなわちア
ライメントが不良であれば、レーザビーム９のモードの
対称性が崩れ、このため、レーザ加工によシ被加工物の
切断などをする時の加工特性が劣化する。Next, the operation shown in FIG. 1 will be explained. First, an AC high voltage is applied between each electrode 2 and 3 from the power supply 1, and each electrode 2,
A silent discharge 4 is generated between 3 and 3. On the other hand, a gas flow 8 of a laser medium gas is caused to flow between each electrode 2 and 3, and the laser medium gas is excited by the silent discharge 4 described above to generate laser light. Partial reflection mirror 5 across silent discharge 4
By disposing a total reflection mirror 6 and a total reflection mirror 6 facing each other, and by arranging an aperture member 7 having a circular opening 7a near the partial reflection mirror 5, a circular laser beam 9 can be directed to the outside.
It can be taken out. In this case, if the adjustment of the mutually facing positions of the partial reflection mirror 5 and the total reflection mirror 6, that is, the alignment is poor, the symmetry of the mode of the laser beam 9 will be lost, and therefore the workpiece will not be processed by laser processing. Processing characteristics deteriorate when cutting objects.

従来のレーザ装置は以上の様に構成されているので、部
分反射ミラー５と全反射ミラー６との相互の対向位置の
調整であるアライメントがずれた場合に、発生されるレ
ーザビーム９のモードの対称性が崩れるが、このレーザ
ビーム９のモードの対称性を検知する手段が無く、この
結果、対称性の優れたモードのレーザビーム９を発生す
ることは、非常に困難であるという欠点があった。Since the conventional laser device is configured as described above, the mode of the generated laser beam 9 is changed when the alignment, which is the adjustment of the mutually facing positions of the partial reflection mirror 5 and the total reflection mirror 6, is misaligned. However, there is a disadvantage that there is no means to detect the symmetry of the mode of the laser beam 9, and as a result, it is extremely difficult to generate a laser beam 9 with a mode with excellent symmetry. Ta.

この発明は上記の様な従来のものの欠点を除去するため
になされたもので、発生されたレーザの光路内に設置さ
れ、レーザ光軸上に開口部と、この開口部の外周に複数
個の温度検出素子をそれぞれ設けたアパーチャ部材を備
えて成る構成を有し、アパーチャ部材の周辺の温度分布
を測定することによシ、対称性の良いレーザビームモー
ドの出力を得ることができるレーザ装置を提供すること
を目的としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described above, and is provided with an aperture on the laser optical axis and a plurality of apertures on the outer periphery of this aperture, which are installed in the optical path of the generated laser. The present invention provides a laser device having a configuration including aperture members each provided with a temperature detection element, and capable of obtaining an output in a laser beam mode with good symmetry by measuring the temperature distribution around the aperture member. is intended to provide.

以下、この発明の一実施例を図について説明する。第２
図（ａ）及びΦ）は、この発明の一実施例であるレーザ
装置に適用されるアパーチャ部材を示す正面図及びその
縦断面図である。図において、７０はアパーチャ部材で
１、その中心であるレーザ光軸上に円形の開口部７１が
設けられる。また、アパーチャ部材７０には、開口部７
１の外周に直径方向に延出する溝部７２が形成され、こ
の溝部７２内には温度検出素子である熱電対７３が設け
られている。７４はアパーチャ部材７０を冷却するため
に、このアパーチャ部材７０内の通路７５を流通する冷
却水で、第１図に矢印で示されている。An embodiment of the present invention will be described below with reference to the drawings. Second
Figures (a) and Φ) are a front view and a longitudinal cross-sectional view of an aperture member applied to a laser device according to an embodiment of the present invention. In the figure, 70 is an aperture member 1, and a circular opening 71 is provided on the laser optical axis at the center thereof. Further, the aperture member 70 has an opening 7
A groove 72 extending in the diametrical direction is formed on the outer periphery of the sensor 1, and a thermocouple 73 serving as a temperature detection element is provided within the groove 72. Reference numeral 74 denotes cooling water that flows through a passage 75 within the aperture member 70 in order to cool the aperture member 70, and is indicated by an arrow in FIG.

上記した構成を有するこの発明によるアパーチャ部材７
０を、第１図に示すレーザ装置におけるアパーチャ部材
７の代シに取シ付ける。この時、部分反射ミラー５と全
反射ミラー６とのアライメントが不良であれば、レーザ
ビーム９とアパーチャ部材７０の中心とがずれることに
なる。このため、アパーチャ部材７０における各部分に
温度分布が生じる。そこで、アパーチャ部材７０に設け
られている熱電対７３からの出力が均一になる様に、各
部分反射ミラー５と全反射ミラー６との相互の対向位置
を調整する手段、例えば上記各ミラー５，６の角度を調
整する手段により、適宜に調整することによシ、対称性
の良好なモードのレーザビーム９を発生させることが可
能となる。ここで、冷却水７４１ｄ、アパーチャ部材７
０の温度レベル上昇を抑制するために流されるものであ
る。Aperture member 7 according to the present invention having the above-described configuration
0 is attached to the aperture member 7 in the laser device shown in FIG. At this time, if the alignment between the partial reflection mirror 5 and the total reflection mirror 6 is poor, the center of the laser beam 9 and the aperture member 70 will be misaligned. Therefore, temperature distribution occurs in each part of the aperture member 70. Therefore, in order to make the output from the thermocouple 73 provided in the aperture member 70 uniform, there is a means for adjusting the opposing positions of each partial reflection mirror 5 and total reflection mirror 6, for example, each of the above-mentioned mirrors 5, By appropriately adjusting the angle of 6, it is possible to generate a laser beam 9 in a mode with good symmetry. Here, cooling water 741d, aperture member 7
This is carried out to suppress the rise in the temperature level of 0.

なお、上記熱電対７３の出力をモニタとし、その出力が
バランスする様に自動的に部分反射ミラー５又は全反射
ミラー６を調整することは容易にでき、この様にして、
各部分反射ミラー５と全反射ミラー６とのアライメント
を自動化し、常に良好なモードのレーザビーム９を得る
様にすることも可能である。Note that it is easy to monitor the output of the thermocouple 73 and automatically adjust the partial reflection mirror 5 or the total reflection mirror 6 so that the output is balanced; in this way,
It is also possible to automate the alignment of each partial reflection mirror 5 and total reflection mirror 6 so as to always obtain a laser beam 9 in a good mode.

以上のように、この発明のレーザ装置によれば、レーザ
光軸上に開口部と、この開口部の外周に複数個の温度検
出素子をそれぞれ設けたアパーチャ部材を用いた構成と
したので、簡単な構成によシ、極めてビームモードの対
称性の良好なレーザビーム出力が容易に得られるという
優れた効果を奏するものである。As described above, the laser device of the present invention has a structure using an aperture member in which an aperture is provided on the laser optical axis and a plurality of temperature detection elements are provided on the outer periphery of this aperture. This configuration provides an excellent effect in that a laser beam output with extremely good beam mode symmetry can be easily obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のレーザ装置を示す概略構成図、第２図（
ａ）及びΦ）は、この発明の一実施例であるレーザ装置
に適用されるアパーチャ部材を示す正面図及びその縦断
面図である。 図において、１・・・電源、２，３・・・電極、４・・
・無声放電、５・・・部分反射ミラー、６・・・全反射
ミラー、７．７０・・・アパーチャ部材、８・・・ガス
流、９・・・レーザビーム、７ａ、７１・・・開口部、
７２・・・溝部、７３・・・熱電対、７４・・・冷却水
、７５・・・通路である。 代理人　大岩増雄Figure 1 is a schematic configuration diagram showing a conventional laser device, and Figure 2 (
a) and Φ) are a front view and a longitudinal cross-sectional view of an aperture member applied to a laser device according to an embodiment of the present invention. In the figure, 1...power supply, 2, 3...electrode, 4...
・Silent discharge, 5...Partial reflection mirror, 6...Total reflection mirror, 7.70...Aperture member, 8...Gas flow, 9...Laser beam, 7a, 71...Aperture Department,
72... Groove portion, 73... Thermocouple, 74... Cooling water, 75... Passage. Agent Masuo Oiwa

Claims (2)

【特許請求の範囲】[Claims] （１）　　発生されたレーザの光路内に設置され、レー
ザ光軸上に開口部と、該開口部の外周に複数個の温度検
出素子をそれぞれ設けたアパーチャ部材を備えて成るこ
とを特徴とするレーザ装置。(1) It is characterized by comprising an aperture member installed in the optical path of the generated laser and having an aperture on the laser optical axis and a plurality of temperature detection elements provided on the outer periphery of the aperture. laser equipment. （２）　前記温度検出素子には、該温度検出素子相互の
出力差が最小になるべくするため、ミラーの角度を調整
する手段が設けられていることを特徴とする特許請求の
範囲第１項記載のレーザ装置。(2) The temperature detection element is provided with means for adjusting the angle of the mirror in order to minimize the difference in output between the temperature detection elements. laser equipment.
JP58069532A 1983-04-20 1983-04-20 Laser device Pending JPS59195894A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58069532A JPS59195894A (en) 1983-04-20 1983-04-20 Laser device
DE19843415009 DE3415009A1 (en) 1983-04-20 1984-04-19 Laser device
US06/602,584 US4914671A (en) 1983-04-20 1984-04-20 Laser device
FR848406306A FR2544922B1 (en) 1983-04-20 1984-04-20 LASER DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58069532A JPS59195894A (en) 1983-04-20 1983-04-20 Laser device

Publications (1)

Publication Number Publication Date
JPS59195894A true JPS59195894A (en) 1984-11-07

Family

ID=13405424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58069532A Pending JPS59195894A (en) 1983-04-20 1983-04-20 Laser device

Country Status (1)

Country Link
JP (1) JPS59195894A (en)

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