JPS59187072A - Improvement of grinding particle of bn of cubic system - Google Patents

Improvement of grinding particle of bn of cubic system

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Publication number
JPS59187072A
JPS59187072A JP5999483A JP5999483A JPS59187072A JP S59187072 A JPS59187072 A JP S59187072A JP 5999483 A JP5999483 A JP 5999483A JP 5999483 A JP5999483 A JP 5999483A JP S59187072 A JPS59187072 A JP S59187072A
Authority
JP
Japan
Prior art keywords
grinding
abrasive grains
grain
molten salt
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5999483A
Other languages
Japanese (ja)
Other versions
JPS6058273B2 (en
Inventor
Kunihiro Miyazaki
宮崎 国弘
Teruo Kijima
木島 照生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP5999483A priority Critical patent/JPS6058273B2/en
Publication of JPS59187072A publication Critical patent/JPS59187072A/en
Publication of JPS6058273B2 publication Critical patent/JPS6058273B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE:To improve grinding ability of grinding particles, by heat-treating grinding particles of BN of cubic system in a molten salt at a specific temperature so that impurities are dissolved in the bath without damaging the grinding particles. CONSTITUTION:Grinding particles of BN of cubic system are heat-treated in a molten salt (preferably water-soluble chloride of NaCl-KCl system) at 500- 1,300 deg.C, preferably 700-1,000 deg.C. The heat-treatment is preferably carried out <=5 deg.C/min low rate of heating.

Description

【発明の詳細な説明】 本発明は立方晶BN砥粒の改質法に関し、さらに詳しく
は立方晶BN(以下OBNと略す)砥粒を500〜13
00℃の温度範囲の溶融塩中で加熱処理することによっ
て、CBN砥粒の研削性能をより向上させるだめの改質
法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for modifying cubic BN abrasive grains, and more specifically, the present invention relates to a method for modifying cubic BN abrasive grains, and more specifically, the present invention relates to a method for modifying cubic BN abrasive grains.
The present invention relates to a method for improving the grinding performance of CBN abrasive grains by heat treatment in a molten salt in the temperature range of 00°C.

本発明者は先にCBN砥粒の改質法について特許出願し
た(特願昭57−72585)。その内容は、CBN砥
粒の研削性能を向上させるだめの改質法及びその改質砥
粒を用いた砥石の製造法に関するもので、OBN砥粒を
500〜1300°Cの温度範囲の気体雰囲気中又は真
空中で加熱処理をすることに特徴がある。この方法によ
れば、(1)合成時に生じた内部応力歪の解放、(2)
含有不純物の除去、という二つの効果に基づいて、研削
性能は処理前に比べて30〜50%向上する。しかし、
この加熱処理条件は幾分ハードな部類に属し、特に気体
雰囲気や真空中の加熱では所定の昇温速度に砥粒を加熱
制御することがむずかしく、砥粒にかなりのダメージを
与えるために砥粒強度を低下させており、このために本
来期待されるべき性能向上が阻害されている。
The present inventor previously filed a patent application for a method for modifying CBN abrasive grains (Japanese Patent Application No. 57-72585). The content relates to a modification method for improving the grinding performance of CBN abrasive grains and a method for producing grinding wheels using the modified abrasive grains. It is characterized by heat treatment performed inside or in a vacuum. According to this method, (1) release of internal stress strain generated during synthesis, (2)
Based on the two effects of removing contained impurities, the grinding performance is improved by 30 to 50% compared to before treatment. but,
This heat treatment condition belongs to a somewhat harsh category, and it is difficult to control the heating of the abrasive grains to a predetermined temperature increase rate, especially when heating in a gas atmosphere or in a vacuum. This reduces the strength, and this hinders the originally expected performance improvement.

また上記の条件下での加熱では拡散、蒸発によって除去
できない不純物が残る。
In addition, impurities that cannot be removed by diffusion and evaporation remain when heated under the above conditions.

ところが、本発明では溶融塩中で加熱処理を行なうこと
によって砥粒の不純物は浴中に溶け、速やかに拡散除去
される。また溶融塩は気体に比べて熱容量が太きいため
に昇降温を所定の条件に制御して非常にゆっくり行なう
ことができ、そのために不純物の移動もゆるやかになる
。このようにマイルドな条件で処理することができるの
で砥粒に与えるダメージも少なくなり、クラック発生な
どに基づく粒強度の低下が減少するものと考えられる。
However, in the present invention, by performing heat treatment in a molten salt, impurities in the abrasive grains are dissolved in the bath and quickly diffused and removed. Furthermore, since molten salt has a larger heat capacity than gas, the temperature can be raised and lowered very slowly by controlling it to predetermined conditions, and therefore the movement of impurities is also slow. Since the treatment can be carried out under such mild conditions, damage to the abrasive grains is reduced, and it is thought that a decrease in grain strength due to cracking and the like is reduced.

この改質された砥粒は前記特願昭57−72585号の
場合と同じく、砥石製作時や研削加工時の熱的、機械的
衝撃に強く、シかも前記特願昭57−72585号のも
のより粒強度が太きいために、より研削性能にすぐれ、
ビトリファイド砥石、レジメイド砥石、電着砥石などに
広く使用可能である。
This modified abrasive grain is resistant to thermal and mechanical shocks during whetstone production and grinding, as in the case of the above-mentioned Japanese Patent Application No. 57-72585, Because the grain strength is thicker, it has better grinding performance,
It can be widely used for vitrified whetstones, remade whetstones, electroplated whetstones, etc.

溶融塩は500〜1300°Cの間に融点を持つ塩化物
、フッ化物などのハロゲン化物系、B2O3の様な酸化
物系、及び炭酸塩系などの一成分系あるいは二成分以上
の多成分系のものが使用されるが、加熱処理後のOBN
砥粒回収を考えれば水溶性の塩化物系などが好ましい。
Molten salts are single-component systems or multi-component systems with two or more components, such as halides such as chlorides and fluorides, oxides such as B2O3, and carbonates, which have a melting point between 500 and 1300°C. OBN after heat treatment is used.
Considering the recovery of abrasive grains, water-soluble chloride-based materials are preferred.

又、使用する溶融塩は処理するCBN砥粒の量に対して
一定量以上(好ましくは、CBN砥粒1カラット当り3
g以上)か必要で、量が少なくなると効果が減少するー
加熱処理は好ましくは5°C/分以下の遅い昇降温速度
で500〜1300°Cの温度範囲で行なう。500°
C未満では殆んど効果がなく、1300°C以上では粒
に与えるダメージが太きい。使用する温度は処理するO
BN砥粒の粒度、含有不純物量、作製する砥石の種類な
どで異なり、一般的には上記の範囲で用いられるが、そ
の中でも70σ〜1000°Cが好ましい。処理時間は
60分以内で充分である。
In addition, the amount of molten salt used is at least a certain amount relative to the amount of CBN abrasive grains to be treated (preferably, 3
(g or more) is required; the smaller the amount, the less effective the heat treatment is preferably carried out at a temperature range of 500-1300°C at a slow heating/cooling rate of less than 5°C/min. 500°
Below C, there is almost no effect, and above 1300°C, the damage to the grains is severe. The temperature used is O
The temperature varies depending on the particle size of the BN abrasive grains, the amount of impurities contained, the type of grindstone to be produced, etc., and is generally used within the above range, but 70σ to 1000°C is preferable. A treatment time of 60 minutes or less is sufficient.

ここに塩化物系を例にとって更に詳細に説明す。Here, a more detailed explanation will be given using a chloride system as an example.

る。Ru.

塩化物系ではNaCl、 KCl、 LiCl、 M3
;C3A!2. Ba(J2゜Ca O12などの一成
分系、あるいはそれらの内の二成分以上を組み合せた多
成分系が使用されるが、ここでは最も代表的なNa0l
−KCJ (1: 1モル)を例にとって説明する。こ
の系は融点が約660°Cなのでそれ以下の温度での処
理を目的とする場合には、この系は使用できず、NaC
l−LiCd、 1((J −Li Ol、 NaO#
−Mgcg2. Li O(J  BaC4などの系を
使用するとよい。
For chloride systems, NaCl, KCl, LiCl, M3
;C3A! 2. Single-component systems such as Ba(J2゜CaO12) or multi-component systems combining two or more of these components are used, but here the most typical one is Na0l.
-KCJ (1:1 mol) will be explained as an example. This system has a melting point of about 660°C, so if the purpose is to process at a temperature lower than that, this system cannot be used, and NaC
l-LiCd, 1((J-LiOl, NaO#
-Mgcg2. It is preferable to use a system such as Li 2 O (J BaC4).

前記Na(M−KOlの粉末30.9と粒度#80/1
00のCBN砥粒10カラットをよく混合した後、アル
ミナルツボに充填し、大気中で電気炉に設置する。次い
で、1°C/分の速度で昇温し、所定温度にて1時間保
持をした後、1℃/分の速度で降温する。
Said Na(M-KOl powder 30.9 and particle size #80/1
After thoroughly mixing 10 carats of No. 00 CBN abrasive grains, the alumina crucible was filled and placed in an electric furnace in the atmosphere. Next, the temperature is increased at a rate of 1°C/min, maintained at a predetermined temperature for 1 hour, and then lowered at a rate of 1°C/min.

200°C以下になったらルツボを取り出し、水中に投
入して沸騰させなからNaC!6−K(JJの塩を溶解
する。塩が溶解し終ったら塩酸中で1時間煮沸し、OB
N砥粒表面に付着している不純物を完全に除去する。水
洗後乾燥し、含有不純物の分析と粒強度の測定を行なう
。分析は通常の化学分析により、粒強度の測定は次の様
にして行なう。
When the temperature drops below 200°C, take out the crucible, put it in water and let it boil, then NaC! 6-K (Dissolve the JJ salt. Once the salt has dissolved, boil it in hydrochloric acid for 1 hour, and dissolve the OB
Completely removes impurities adhering to the surface of N abrasive grains. After washing with water and drying, analyze the contained impurities and measure the grain strength. The analysis is carried out by ordinary chemical analysis, and the grain strength is measured as follows.

まず、指定された篩網で篩別したサンプルの一定量と6
gmmの鋼球1個を容積約2rnlのカプセルに入れて
、小型振動ミルで一定時間粉砕をする。
First, a certain amount of the sample sieved with the specified sieve mesh and 6
One gmm steel ball is placed in a capsule with a volume of approximately 2rnl, and pulverized for a certain period of time in a small vibrating mill.

粉砕されたサンプルを指定された篩網で篩別し、篩網上
のサンプル残存重量係をもってタフネス値とする。従っ
て、このタフネス値が大きい程、粉砕のされ方が少なく
、粒強度は太きいと言うことができる。
The crushed sample is sieved through a designated sieve, and the remaining weight of the sample on the sieve is determined as a toughness value. Therefore, it can be said that the larger the toughness value, the less pulverization and the greater the grain strength.

この様にして得られたOBN砥粒サンプルの含有不純物
量と粒強度の測定結果を前記特願昭57−72585号
のN2気流中での結果と対比して、第1表に示す。
The measurement results of the impurity content and grain strength of the OBN abrasive grain sample obtained in this way are shown in Table 1 in comparison with the results in the N2 gas flow of Japanese Patent Application No. 72585/1985.

81表から明らかな如く、本発明による溶融塩中での処
理の方が不純物除去にもすぐれ、粒強度低下が著しく少
ない。特に、700′Cの如き低温でも不純物は充分に
除去され、且つ殆んど粒強度低下をもたらさないという
ことは注目に値する。
As is clear from Table 81, the treatment in molten salt according to the present invention is superior in removing impurities and causes significantly less decrease in grain strength. In particular, it is noteworthy that impurities are sufficiently removed even at low temperatures such as 700'C, and there is almost no reduction in grain strength.

以下実施例により説明する。This will be explained below using examples.

実施例1 各種粒度(#L60/80. #8Q/100. # 
120/140. #140/170. #170/2
00. #270/325 )のOBN砥粒をNaC1
−K(J (1: 1モル)の溶融塩中で700°C1
1時゛間加熱処理をした。昇温及び降温速度はいずれも
1°C/分で行なった。加熱処理後、前記の如く溶融塩
を溶解し、酸水洗後乾燥して試料とした。
Example 1 Various particle sizes (#L60/80. #8Q/100. #
120/140. #140/170. #170/2
00. #270/325) OBN abrasive grains with NaC1
-K(J (1: 1 mol) in a molten salt at 700 °C1
Heat treatment was performed for 1 hour. Both heating and cooling rates were 1°C/min. After heat treatment, the molten salt was dissolved as described above, washed with acid water, and dried to obtain a sample.

第1表 まず、これらの試料について含有不純物と粒強度の測定
を行なった。その結果、全粒度とも含有不純物量は当初
(無処理時)の約半量に減少12、粒強度は殆んど低下
しなかった。次いで、これらの試料の中から#80/1
00を選び、次の様にしてビトリファイド砥石を製作し
た。
Table 1 First, the impurities contained and grain strength of these samples were measured. As a result, the amount of impurities contained in all grain sizes was reduced to about half of the initial amount (untreated)12, and the grain strength hardly decreased. Next, #80/1 from these samples
00 was selected, and a vitrified grindstone was manufactured in the following manner.

配合 上記配合物を円弧状(厚さ3mm、巾7間、円弧の長さ
32mm、外径の曲率半径75 mm 、内径の曲率半
径72龍)にプレス成型し、120″Cで1時間乾燥後
、900°Cで1時間焼成してセグメントを得た。この
セグメント中にはCBN砥粒が約3容量係含まれている
。このセグメントを外径14496mm、内径50.8
 y5 mra、厚み7朋の金属製円盤の外周に接着剤
で貼りつけて平型砥石にした。
Formulation The above compound was press-molded into an arc shape (thickness: 3 mm, width: 7 mm, arc length: 32 mm, outer radius of curvature of 75 mm, inner radius of curvature of 72 mm), and dried at 120"C for 1 hour. A segment was obtained by firing at 900°C for 1 hour.This segment contained about 3 volumes of CBN abrasive grains.
A flat whetstone was made by pasting it with adhesive on the outer periphery of a metal disk of y5 mra and thickness of 7 mm.

実施例2 実施例1と同様の各種粒度のOBN砥粒をN、+cl(
60% /L=%) −I−i0#)溶融塩中テア00
″011時間加熱処理をした。昇温及び降温速度はいず
れも1’Cl分で行なった。加熱処理後、実施例1と同
様にして試料を得た。全粒度とも含有不純物は当初(無
処理時)のほぼ半量に減少し、粒強度は当初のほぼ92
%即ち8%程の低下にとどまった。
Example 2 OBN abrasive grains of various particle sizes similar to Example 1 were mixed with N, +cl(
60% /L=%) -I-i0#) Tear 00 in molten salt
The heat treatment was carried out for 11 hours.The temperature rise and fall rates were both 1'Cl min.After the heat treatment, samples were obtained in the same manner as in Example 1. ), and the grain strength was approximately 92% of its original value.
%, or about 8%.

これらの試料の中から#80/100を選び、実施例1
と同一条件で同一寸法のビトリファイド砥石を製作した
#80/100 was selected from these samples and used in Example 1.
A vitrified grinding wheel with the same dimensions was manufactured under the same conditions.

実施例3 実施例1で得られた#140/17oの砥粒を用いて次
の様にしてレジノイド砥石を製作した。
Example 3 Using the #140/17o abrasive grains obtained in Example 1, a resinoid grindstone was manufactured in the following manner.

まず、レジンボンドとの砥粒保持力を良くするために通
常よく使用される無電解Niメッキ液にムデンスーパー
)を用い、約60重量%のNi被覆を行なった。
First, in order to improve the abrasive grain retention with the resin bond, approximately 60% by weight Ni coating was performed using Muden Super as an electroless Ni plating solution that is commonly used.

配合 10 B N砥粒 #1.40/170(Ni被覆粒)
 64 ’TfE ta %内径150〆朋の金型の内
部に、外径144$mm、内径50896 mm %厚
さ7imの金属製円盤を同心にして入れ、金型の内壁と
円盤の外周に上記配合物を充填し、定容法でホットプレ
ス(約180″011時間保持)成型後、190°Cで
12時間焼成して平型砥石にした。との砥粒層にはOB
N砥粒が約25容量係含まれている。
Blend 10 B N abrasive grain #1.40/170 (Ni coated grain)
64' TfE ta % A metal disk with an outer diameter of 144 $ mm, an inner diameter of 50896 mm, and a thickness of 7 mm was placed concentrically inside a mold with an inner diameter of 150 mm, and the above composition was applied to the inner wall of the mold and the outer periphery of the disk. The abrasive grain layer was filled with abrasives, hot-pressed (approximately 180 mm and held for 11 hours), and fired at 190°C for 12 hours to make a flat grindstone.
Contains about 25 volumes of N abrasive grains.

実施例4 実施例1で得られた4ノー8V1ooの砥粒を用いて、
外径15093zm、内径508ダin、厚さ7mmの
金属製円盤の外周上に単層に電気メッキで砥粒を固定し
、電着砥石を得た。電着メッキ層厚さは砥粒径の%で約
110μmである。
Example 4 Using the 4NO 8V1oo abrasive grains obtained in Example 1,
Abrasive grains were fixed in a single layer by electroplating on the outer periphery of a metal disk having an outer diameter of 15093 mm, an inner diameter of 508 inches, and a thickness of 7 mm to obtain an electrodeposited grindstone. The thickness of the electrodeposited layer is approximately 110 μm in % of the abrasive grain diameter.

比較例1 比較対照のため、無処理の粒度#80/1ooのOBN
砥粒を用いて、実施例1と同一条件で同一寸法のビトリ
ファイド砥石を製作した。
Comparative Example 1 For comparison, untreated OBN with particle size #80/1oo
A vitrified grindstone with the same dimensions as in Example 1 was manufactured using abrasive grains under the same conditions as in Example 1.

研削試験結果は第2表に示す通シである。The results of the grinding test are shown in Table 2.

比較例2 比較対照のため、無処理の粒度##8o/100のCB
N砥粒をN2気流中、700℃で1時間加熱処理をした
。昇降温速度は1°C/分である。この砥粒を用いて、
実施例1と同一条件で同一寸法のビトリファイド砥石を
製作した。
Comparative Example 2 For comparison, untreated CB with particle size ##8o/100
The N abrasive grains were heat-treated at 700°C for 1 hour in a N2 stream. The temperature increase/decrease rate was 1°C/min. Using this abrasive grain,
A vitrified grindstone with the same dimensions as in Example 1 was manufactured under the same conditions.

研削試験結果は第2表に示す通りである。The results of the grinding test are shown in Table 2.

第2表の研削試験条件は、砥石周速度1500m/分、
テーブル送り速度15m/分、サドル送り2mmた。被
削材はJ i S  SKH,−57(ロックウェル硬
度Oスケール63、長さ200mm、幅100mm)で
総研削深さ3.0朋であった。
The grinding test conditions in Table 2 are: grinding wheel peripheral speed 1500 m/min;
The table feed speed was 15 m/min, and the saddle feed was 2 mm. The work material was JIS SKH, -57 (Rockwell hardness O scale 63, length 200 mm, width 100 mm), and the total grinding depth was 3.0 mm.

第2表 ※研削比−研削量(ffl)÷砥石摩耗量(d)実施例
1及び2のビトリファイド砥石は比較例]及び2のいず
れと比べても研削比は向上し、溶融塩処理による砥粒改
質効果の著しいことを示している。
Table 2 * Grinding ratio - amount of grinding (ffl) ÷ amount of grinding wheel wear (d) The vitrified grinding wheels of Examples 1 and 2 are comparative examples] The grinding ratio is improved compared to both of Examples 1 and 2, and the grinding ratio is improved compared to both of Examples 1 and 2. This shows that the grain modification effect is significant.

比較例3 比較対照のため、無処理粒の粒度41−140/] 7
0のOBN砥粒を用いて実施例3と同一条件で同一寸法
のレジノイド砥石を製作した。
Comparative Example 3 For comparison, the particle size of untreated grains was 41-140/] 7
A resinoid grindstone having the same dimensions as in Example 3 was manufactured using OBN abrasive grains having the same dimensions as in Example 3.

研削試験結果は第3表に示す通りである。研削試験条件
は比較例2で述べた通りである。
The results of the grinding test are shown in Table 3. The grinding test conditions were as described in Comparative Example 2.

実施例3のレジノイド砥石は比較例3に比べて研削比は
向上し、溶融塩処理により砥粒改質が行なわれたことを
示している。
The grinding ratio of the resinoid grindstone of Example 3 was improved compared to that of Comparative Example 3, indicating that the abrasive grains were modified by the molten salt treatment.

比較例4 比較対照のため、無処理の粒度#80/100を用いて
実施例4と同一条件で同一寸法の電着砥石を製作した。
Comparative Example 4 For comparison, an electrodeposited grindstone with the same dimensions as in Example 4 was manufactured using untreated grain size #80/100 under the same conditions as in Example 4.

研削試験結果は第4表に示す通りである1、研削試験条
件は比較例2に述べた通りである。但し、た研削量でも
って比較した。
The grinding test results are shown in Table 41. The grinding test conditions were as described in Comparative Example 2. However, the comparison was made based on the amount of grinding.

実施例4の電着砥石は比較例4に比べて研削量が増加し
ており、溶融塩処理により砥粒改質が行なわれたことを
示している。
The amount of grinding of the electrodeposited grindstone of Example 4 was increased compared to that of Comparative Example 4, indicating that the abrasive grains were modified by the molten salt treatment.

出願人 昭和電工株式会社 代理人 弁理士 菊地精−Applicant: Showa Denko Co., Ltd. Agent: Patent Attorney Sei Kikuchi

Claims (1)

【特許請求の範囲】[Claims] 立方晶BN砥粒を500〜1300°Cの温度範囲の溶
融塩中で加熱処理することを特徴とする立方晶BN砥粒
の改質法。
A method for modifying cubic BN abrasive grains, which comprises heat-treating cubic BN abrasive grains in a molten salt at a temperature range of 500 to 1300°C.
JP5999483A 1983-04-07 1983-04-07 Modification method of cubic BN abrasive grains Expired JPS6058273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5999483A JPS6058273B2 (en) 1983-04-07 1983-04-07 Modification method of cubic BN abrasive grains

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5999483A JPS6058273B2 (en) 1983-04-07 1983-04-07 Modification method of cubic BN abrasive grains

Publications (2)

Publication Number Publication Date
JPS59187072A true JPS59187072A (en) 1984-10-24
JPS6058273B2 JPS6058273B2 (en) 1985-12-19

Family

ID=13129227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5999483A Expired JPS6058273B2 (en) 1983-04-07 1983-04-07 Modification method of cubic BN abrasive grains

Country Status (1)

Country Link
JP (1) JPS6058273B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1702969A1 (en) * 2003-01-06 2006-09-20 Showa Denko K.K. Metal-coated cubic boron nitride abrasive grains and method for producing thereof, and resin-bonded grindstone
JP2009161401A (en) * 2008-01-08 2009-07-23 Mitsubishi Chemicals Corp Method for controlling content of impurity element in single crystal, single crystal and semiconductor device
CN114132904A (en) * 2021-12-06 2022-03-04 湖南大学 High oil absorption whitening hexagonal boron nitride porous microspheres for cosmetics

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7097678B2 (en) 2003-01-06 2006-08-29 Showa Denko K.K. Metal-coated cubic boron nitride abrasive grain, production method thereof, and resin bonded grinding wheel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1702969A1 (en) * 2003-01-06 2006-09-20 Showa Denko K.K. Metal-coated cubic boron nitride abrasive grains and method for producing thereof, and resin-bonded grindstone
EP1702969A4 (en) * 2003-01-06 2008-09-03 Showa Denko Kk Metal-coated cubic boron nitride abrasive grains and method for producing thereof, and resin-bonded grindstone
JP2009161401A (en) * 2008-01-08 2009-07-23 Mitsubishi Chemicals Corp Method for controlling content of impurity element in single crystal, single crystal and semiconductor device
CN114132904A (en) * 2021-12-06 2022-03-04 湖南大学 High oil absorption whitening hexagonal boron nitride porous microspheres for cosmetics

Also Published As

Publication number Publication date
JPS6058273B2 (en) 1985-12-19

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