JPS59186135A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS59186135A JPS59186135A JP58060251A JP6025183A JPS59186135A JP S59186135 A JPS59186135 A JP S59186135A JP 58060251 A JP58060251 A JP 58060251A JP 6025183 A JP6025183 A JP 6025183A JP S59186135 A JPS59186135 A JP S59186135A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- thin film
- metallic oxide
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 32
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 16
- 239000010408 film Substances 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 8
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 230000006378 damage Effects 0.000 abstract description 5
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 238000010884 ion-beam technique Methods 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229920000728 polyester Polymers 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- 239000005041 Mylar™ Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は磁気記録媒体に関し、特に機械的耐久性の優れ
た磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, and particularly to a magnetic recording medium with excellent mechanical durability.
従来、磁性薄膜を有する磁気記録媒体はアルミニウムま
だはマイラシートの基板に適宜下地処理を行い金檎磁性
体や金属酸化物磁性体全スパッタあるいはメッキなどの
手法により付着させている。Conventionally, a magnetic recording medium having a magnetic thin film is deposited on a substrate made of aluminum or a mylar sheet by applying a suitable surface treatment and then depositing a metal oxide magnetic material or a metal oxide magnetic material by full sputtering or plating.
例えば、垂直記録用の磁気記録媒体では磁性薄膜はＣｏ
−Ｃｒであり、その厚みは０．５〜１．０μｍである。For example, in a magnetic recording medium for perpendicular recording, the magnetic thin film is made of Co
-Cr, and its thickness is 0.5 to 1.0 μm.
このような磁性薄膜を有する磁気記録媒体に記録されて
いる情報を読出す場合、あるいは情報を書込む場合、摺
動型あるいは浮上型磁気ヘッドが用いられる。摺動型磁
気ヘッドは磁性薄膜に摺動して情報を読出し、または書
込みを行う。浮上型磁気ヘッドは情報の読出し中あるい
は誉込み中は磁性薄膜に摺動しないが、スタート時とス
トップ時に磁性薄膜と接触し、摺動する。磁気ヘッドの
磁気記録媒体に対向する面はフェライト、チタン酸バリ
ウム等の金属酸化物を主成分とする材料で作られている
ので極めて硬く、機械的耐久性が強い。When reading or writing information recorded on a magnetic recording medium having such a magnetic thin film, a sliding type or floating type magnetic head is used. A sliding magnetic head reads or writes information by sliding on a magnetic thin film. The floating magnetic head does not slide against the magnetic thin film while reading or reading information, but it contacts and slides against the magnetic thin film when starting and stopping. The surface of the magnetic head that faces the magnetic recording medium is made of a material whose main component is a metal oxide such as ferrite or barium titanate, so it is extremely hard and has strong mechanical durability.
このような磁気ヘッドが磁気記録媒体の磁性薄膜表面を
摺動すると、磁気ヘッドよりも柔かい磁性薄膜には引掻
傷やえぐれ傷などが生じ、折角記録した情報を損傷する
という問題を生ずる。そこで磁性薄膜表面に潤滑剤を塗
布する試みが々されているが磁性体との付着性が悪く、
必ずしも成功しているとは言い難く、その製造方法も極
めて頻雑かつ高価なものとなり、実用に適していないと
いう欠点がある。When such a magnetic head slides on the surface of a magnetic thin film of a magnetic recording medium, scratches and gouges occur on the magnetic thin film, which is softer than the magnetic head, resulting in the problem of damaging recorded information. Therefore, many attempts have been made to apply lubricant to the surface of the magnetic thin film, but it has poor adhesion to the magnetic material.
It cannot be said that this method has always been successful, and its manufacturing method is extremely complicated and expensive, making it unsuitable for practical use.
本発明は上記欠点を除去し、記録されている情報の胱出
し、あるいは情報の書込みにおいて磁気ヘッドと摺動し
ても磁性薄膜に損傷を生ぜず、耐久力の優れた磁気記録
媒体全提供するものである。The present invention eliminates the above-mentioned drawbacks and provides a magnetic recording medium that does not cause damage to the magnetic thin film even when it slides against a magnetic head when extracting recorded information or writing information, and has excellent durability. It is something.
本発明の磁気記録媒体は、基板上に形成された磁性薄膜
と、該磁性薄膜に均一に分散して設けられた微小面積の
穴と、該穴に充填され前記磁性薄膜表面と同じ高さかあ
るいは該表面より少し高くなるように設けられた金属酸
化物とを含んで構成される。The magnetic recording medium of the present invention includes a magnetic thin film formed on a substrate, holes of a minute area uniformly distributed in the magnetic thin film, and holes filled with holes at the same height as the surface of the magnetic thin film or at the same height as the surface of the magnetic thin film. and a metal oxide provided slightly higher than the surface.
次に、本発明の実施例について図面を用いて説明する。Next, embodiments of the present invention will be described using the drawings.
第１図は本発明の一実施例の一部断面斜視図である。FIG. 1 is a partially sectional perspective view of an embodiment of the present invention.
基板１としてアルミニウムを用いるとする。基板１の表
面に金属磁性体あるいは金属酸化物磁性体で磁性薄膜２
を形成する。この磁性薄膜２に微小面積の穴３を均一に
分散させて設ける。穴３の直径は約１μｍで、１０μｍ
Ｘ］、Ｑｌ１ｍの面積当り５個程度の密度に均一に分散
させる。ここで均一とは、ある面積の所では集中して穴
が存在し、ある面積の所では穴が存在しないというよう
な偏りのないことを意味し、等間隔でなければならない
ということまでは要求しない。穴の分布に偏りがあると
、情報の抗出しにノイズが発生するからである。この穴
３に金属酸化物４を充填する。金属ぼ化物としてアルミ
ナ、シリカ等が適当である。金属酸化物の充填は磁性薄
膜の表面と同じ高さかそれよりも僅かに（１００Ａ程度
）高くする。実用上は僅かに高い方が磁性薄膜２の耐久
性の点が好ましい。Assume that aluminum is used as the substrate 1. A magnetic thin film 2 made of metal magnetic material or metal oxide magnetic material is formed on the surface of the substrate 1.
form. This magnetic thin film 2 is provided with holes 3 of minute area in a uniformly distributed manner. The diameter of hole 3 is approximately 1 μm and 10 μm
X], Ql uniformly dispersed at a density of about 5 pieces per 1 m area. Uniform here means that there is no bias, such as holes concentrated in a certain area and absent in a certain area, and there is no requirement that they be evenly spaced. do not. This is because if the distribution of holes is uneven, noise will occur in the projection of information. This hole 3 is filled with metal oxide 4. Alumina, silica, etc. are suitable as the metal boride. The metal oxide is filled at the same height as the surface of the magnetic thin film or slightly higher (about 100 A). Practically speaking, a slightly higher value is preferable in terms of durability of the magnetic thin film 2.
このような構造にすると、読出しあるいは書込みにおい
て磁気ヘッドは金属酸化物４に接触し、磁性薄膜２には
直接に接触しないので磁性薄膜２に損傷を与えることは
ない。従って、磁気記録媒体に記録された情報の破壊や
読出し誤りがなく、耐久性に優れた磁気記録媒体が得ら
れる。With this structure, the magnetic head contacts the metal oxide 4 during reading or writing, but does not directly contact the magnetic thin film 2, so that the magnetic thin film 2 is not damaged. Therefore, a magnetic recording medium with excellent durability can be obtained without destruction or reading errors of information recorded on the magnetic recording medium.
次に、本発明の磁気記録媒体の製造方法について説明す
る。Next, a method for manufacturing a magnetic recording medium according to the present invention will be explained.
第２図（ａ）〜（ｄ）は本発明の磁気記録媒体の製造方
法を説明するだめの工程順に示した断面図である。FIGS. 2(a) to 2(d) are cross-sectional views showing the process order for explaining the method for manufacturing a magnetic recording medium of the present invention.
まず、第２図（ａ）に示すように、アルミニウム。First, as shown in FIG. 2(a), aluminum.
マイラーシート等の基板１の上に磁性薄膜２をスパッタ
あるいはメッキなどの手法により付着させる。この上に
ホトレジスト膜５を受信し、通常の路光現像法により開
口６を設ける。開口６の直径は約１μｍである。A magnetic thin film 2 is deposited on a substrate 1 such as a Mylar sheet by sputtering or plating. A photoresist film 5 is applied thereon, and openings 6 are formed using a normal path-light development method. The diameter of the opening 6 is approximately 1 μm.
次に、第２図（ｂ）に示すように、イオンビームエツチ
ング等の方法でエツチングを行い、磁性薄膜２の露出部
分を除去して磁性薄膜２に穴３を設ける。Next, as shown in FIG. 2(b), etching is performed using a method such as ion beam etching to remove the exposed portion of the magnetic thin film 2 and form a hole 3 in the magnetic thin film 2.
次に、第２図（Ｃ）に示すように、金属酸化物４として
アルミナをスパッタリングにより付着させる。Next, as shown in FIG. 2(C), alumina is deposited as the metal oxide 4 by sputtering.
金属酸化物４の厚さは、前述したように、磁性薄膜２の
厚さと同じかあるいはそれよりも僅かに（１００Ａ程度
）厚くする。スパッタ法を用いるとき、バイアス電圧を
加えてスパッタを行うと形成される膜質が均一で応力の
少ないものとなるので好ましい。As described above, the thickness of the metal oxide 4 is made to be the same as the thickness of the magnetic thin film 2 or slightly thicker (about 100 A). When using the sputtering method, it is preferable to perform the sputtering while applying a bias voltage because the quality of the formed film is uniform and there is less stress.
５−
次に、第２図（ｄ）に示すように、ホトレジス）ＩＩ５
をその上の金属酸化物４と共に除去すると、金属歌化物
４は穴３にのみ残り、本発明の磁気記録媒体が得られる
。5- Next, as shown in FIG. 2(d), photoresist II5
When the metal oxide 4 is removed together with the metal oxide 4 thereon, the metal oxide 4 remains only in the hole 3, and the magnetic recording medium of the present invention is obtained.
上記説明ではホトレジスト膜を用いたが、磁性薄膜の種
類、金属酸化物の種類によってはエツチング速度、膜厚
を考慮して金属を用いることもできる。In the above description, a photoresist film is used, but depending on the type of magnetic thin film and the type of metal oxide, metal may also be used in consideration of the etching rate and film thickness.
以上詳細に説明したように１本発明によれば、情報の読
出しあるいは書込みにおいて磁気ヘッドと接触しても損
傷を生ぜず、耐久力の優れた磁気記録媒体が得られるの
でその効果は大きい。As described in detail above, according to the present invention, it is possible to obtain a magnetic recording medium that does not cause damage even when it comes into contact with a magnetic head during reading or writing of information and has excellent durability, which is highly effective.
第１図は本発明の一実施例の一部断面斜視図、第２図（
ａ）〜（ｄ）は本発明の磁気記録媒体の製造方法を説明
するだめの工程順に示した断面図である。FIG. 1 is a partially sectional perspective view of an embodiment of the present invention, and FIG. 2 (
1A to 1D are cross-sectional views shown in the order of steps for explaining the method for manufacturing a magnetic recording medium of the present invention.
１・・・・・・基板、２・・・・・・磁性薄膜、３・・
・・・・穴、４・・・・・・金属酸化物、５・・・・・
・ホトレジスト膜、６・・・・・・開口。1...Substrate, 2...Magnetic thin film, 3...
...hole, 4...metal oxide, 5...
- Photoresist film, 6...opening.
Claims (1)
散して設けられた微小面積の穴と、該穴そ〒Ｍに充填さ
れ前記磁性薄膜表面と同じ高さかあるいは該表面よシ少
し高くガるように設けられた金属酸化物とを含むことを
特徴とする磁気記録媒体。A magnetic thin film formed on a substrate, holes of a minute area uniformly distributed in the magnetic thin film, and holes M filled with holes M that are at the same height as the surface of the magnetic thin film or slightly above the surface. 1. A magnetic recording medium, comprising: a metal oxide disposed in a high pitched manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58060251A JPS59186135A (en) | 1983-04-06 | 1983-04-06 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58060251A JPS59186135A (en) | 1983-04-06 | 1983-04-06 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59186135A true JPS59186135A (en) | 1984-10-22 |
| JPH022218B2 JPH022218B2 (en) | 1990-01-17 |
Family
ID=13136766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58060251A Granted JPS59186135A (en) | 1983-04-06 | 1983-04-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59186135A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014001096A (en) | 2012-06-18 | 2014-01-09 | Shin Etsu Chem Co Ltd | Polycrystalline silicon crystal orientation degree evaluation method, polycrystalline silicon rod selection method, polycrystalline silicon rod, polycrystalline silicon ingot, and polycrystalline silicon fabrication method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5079309A (en) * | 1973-11-12 | 1975-06-27 |
-
1983
- 1983-04-06 JP JP58060251A patent/JPS59186135A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5079309A (en) * | 1973-11-12 | 1975-06-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022218B2 (en) | 1990-01-17 |
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