JPS5918493Y2 - ガス流量制御装置 - Google Patents

ガス流量制御装置

Info

Publication number
JPS5918493Y2
JPS5918493Y2 JP1978029995U JP2999578U JPS5918493Y2 JP S5918493 Y2 JPS5918493 Y2 JP S5918493Y2 JP 1978029995 U JP1978029995 U JP 1978029995U JP 2999578 U JP2999578 U JP 2999578U JP S5918493 Y2 JPS5918493 Y2 JP S5918493Y2
Authority
JP
Japan
Prior art keywords
spring
pressure
flow rate
diaphragm
back pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978029995U
Other languages
English (en)
Japanese (ja)
Other versions
JPS54133425U (enExample
Inventor
正雄 原
達雄 浅上
逸夫 五十嵐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1978029995U priority Critical patent/JPS5918493Y2/ja
Publication of JPS54133425U publication Critical patent/JPS54133425U/ja
Application granted granted Critical
Publication of JPS5918493Y2 publication Critical patent/JPS5918493Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding And Controlling Fuel (AREA)
  • Control Of Fluid Pressure (AREA)
JP1978029995U 1978-03-08 1978-03-08 ガス流量制御装置 Expired JPS5918493Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978029995U JPS5918493Y2 (ja) 1978-03-08 1978-03-08 ガス流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978029995U JPS5918493Y2 (ja) 1978-03-08 1978-03-08 ガス流量制御装置

Publications (2)

Publication Number Publication Date
JPS54133425U JPS54133425U (enExample) 1979-09-17
JPS5918493Y2 true JPS5918493Y2 (ja) 1984-05-29

Family

ID=28878815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978029995U Expired JPS5918493Y2 (ja) 1978-03-08 1978-03-08 ガス流量制御装置

Country Status (1)

Country Link
JP (1) JPS5918493Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4816662U (enExample) * 1971-06-18 1973-02-24

Also Published As

Publication number Publication date
JPS54133425U (enExample) 1979-09-17

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