JPS59183748U - 平面研削用定盤 - Google Patents

平面研削用定盤

Info

Publication number
JPS59183748U
JPS59183748U JP1983078037U JP7803783U JPS59183748U JP S59183748 U JPS59183748 U JP S59183748U JP 1983078037 U JP1983078037 U JP 1983078037U JP 7803783 U JP7803783 U JP 7803783U JP S59183748 U JPS59183748 U JP S59183748U
Authority
JP
Japan
Prior art keywords
grinding
base
pad mounting
plate
mounting board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983078037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH035413Y2 (enExample
Inventor
新井　初雪
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP1983078037U priority Critical patent/JPS59183748U/ja
Publication of JPS59183748U publication Critical patent/JPS59183748U/ja
Application granted granted Critical
Publication of JPH035413Y2 publication Critical patent/JPH035413Y2/ja
Granted legal-status Critical Current

Links

JP1983078037U 1983-05-24 1983-05-24 平面研削用定盤 Granted JPS59183748U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Publications (2)

Publication Number Publication Date
JPS59183748U true JPS59183748U (ja) 1984-12-07
JPH035413Y2 JPH035413Y2 (enExample) 1991-02-12

Family

ID=30208047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983078037U Granted JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Country Status (1)

Country Link
JP (1) JPS59183748U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131866A (ja) * 1988-11-11 1990-05-21 Hitachi Ltd 硬脆材料のラッピング方法
JP2011161623A (ja) * 2010-12-08 2011-08-25 Toho Engineering Kk 研磨パッドの再生方法
JP2011161522A (ja) * 2010-02-04 2011-08-25 Toho Engineering Kk 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0756917A4 (en) * 1994-04-22 1997-12-17 Toshiba Kk SEPARATE GRINDING SURFACE SUPPORT PLATE AND ASSOCIATED APPARATUS

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161395U (enExample) * 1977-05-26 1978-12-18
JPS57156166A (en) * 1981-03-20 1982-09-27 Hitachi Ltd Lapping equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161395U (enExample) * 1977-05-26 1978-12-18
JPS57156166A (en) * 1981-03-20 1982-09-27 Hitachi Ltd Lapping equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131866A (ja) * 1988-11-11 1990-05-21 Hitachi Ltd 硬脆材料のラッピング方法
JP2011161522A (ja) * 2010-02-04 2011-08-25 Toho Engineering Kk 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法
JP2011161623A (ja) * 2010-12-08 2011-08-25 Toho Engineering Kk 研磨パッドの再生方法

Also Published As

Publication number Publication date
JPH035413Y2 (enExample) 1991-02-12

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