JPS59183748U - 平面研削用定盤 - Google Patents

平面研削用定盤

Info

Publication number
JPS59183748U
JPS59183748U JP1983078037U JP7803783U JPS59183748U JP S59183748 U JPS59183748 U JP S59183748U JP 1983078037 U JP1983078037 U JP 1983078037U JP 7803783 U JP7803783 U JP 7803783U JP S59183748 U JPS59183748 U JP S59183748U
Authority
JP
Japan
Prior art keywords
grinding
base
pad mounting
plate
mounting board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983078037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH035413Y2 (enrdf_load_stackoverflow
Inventor
新井　初雪
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP1983078037U priority Critical patent/JPS59183748U/ja
Publication of JPS59183748U publication Critical patent/JPS59183748U/ja
Application granted granted Critical
Publication of JPH035413Y2 publication Critical patent/JPH035413Y2/ja
Granted legal-status Critical Current

Links

JP1983078037U 1983-05-24 1983-05-24 平面研削用定盤 Granted JPS59183748U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Publications (2)

Publication Number Publication Date
JPS59183748U true JPS59183748U (ja) 1984-12-07
JPH035413Y2 JPH035413Y2 (enrdf_load_stackoverflow) 1991-02-12

Family

ID=30208047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983078037U Granted JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Country Status (1)

Country Link
JP (1) JPS59183748U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131866A (ja) * 1988-11-11 1990-05-21 Hitachi Ltd 硬脆材料のラッピング方法
JP2011161623A (ja) * 2010-12-08 2011-08-25 Toho Engineering Kk 研磨パッドの再生方法
JP2011161522A (ja) * 2010-02-04 2011-08-25 Toho Engineering Kk 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100213855B1 (ko) * 1994-04-22 1999-08-02 니시무로 타이조 분리형 연마정반 및 그를 이용한 연마장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161395U (enrdf_load_stackoverflow) * 1977-05-26 1978-12-18
JPS57156166A (en) * 1981-03-20 1982-09-27 Hitachi Ltd Lapping equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161395U (enrdf_load_stackoverflow) * 1977-05-26 1978-12-18
JPS57156166A (en) * 1981-03-20 1982-09-27 Hitachi Ltd Lapping equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131866A (ja) * 1988-11-11 1990-05-21 Hitachi Ltd 硬脆材料のラッピング方法
JP2011161522A (ja) * 2010-02-04 2011-08-25 Toho Engineering Kk 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法
JP2011161623A (ja) * 2010-12-08 2011-08-25 Toho Engineering Kk 研磨パッドの再生方法

Also Published As

Publication number Publication date
JPH035413Y2 (enrdf_load_stackoverflow) 1991-02-12

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