JPS59182216A - 多結晶シリコンウエハの製造用皿 - Google Patents

多結晶シリコンウエハの製造用皿

Info

Publication number
JPS59182216A
JPS59182216A JP58054454A JP5445483A JPS59182216A JP S59182216 A JPS59182216 A JP S59182216A JP 58054454 A JP58054454 A JP 58054454A JP 5445483 A JP5445483 A JP 5445483A JP S59182216 A JPS59182216 A JP S59182216A
Authority
JP
Japan
Prior art keywords
wafer
melt
turntable
forming
dish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58054454A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314766B2 (enExample
Inventor
Yasuhiro Maeda
泰宏 前田
Takashi Yokoyama
敬志 横山
Ichiro Hide
一郎 秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoxan Corp
Hokusan Co Ltd
Original Assignee
Hoxan Corp
Hokusan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoxan Corp, Hokusan Co Ltd filed Critical Hoxan Corp
Priority to JP58054454A priority Critical patent/JPS59182216A/ja
Publication of JPS59182216A publication Critical patent/JPS59182216A/ja
Publication of JPH0314766B2 publication Critical patent/JPH0314766B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/048—Transmission, i.e. analysed material between transmitter and receiver

Landscapes

  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP58054454A 1983-03-30 1983-03-30 多結晶シリコンウエハの製造用皿 Granted JPS59182216A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58054454A JPS59182216A (ja) 1983-03-30 1983-03-30 多結晶シリコンウエハの製造用皿

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58054454A JPS59182216A (ja) 1983-03-30 1983-03-30 多結晶シリコンウエハの製造用皿

Publications (2)

Publication Number Publication Date
JPS59182216A true JPS59182216A (ja) 1984-10-17
JPH0314766B2 JPH0314766B2 (enExample) 1991-02-27

Family

ID=12971124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58054454A Granted JPS59182216A (ja) 1983-03-30 1983-03-30 多結晶シリコンウエハの製造用皿

Country Status (1)

Country Link
JP (1) JPS59182216A (enExample)

Also Published As

Publication number Publication date
JPH0314766B2 (enExample) 1991-02-27

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