JPS59181682A - Light emitting element - Google Patents

Light emitting element

Info

Publication number
JPS59181682A
JPS59181682A JP58056170A JP5617083A JPS59181682A JP S59181682 A JPS59181682 A JP S59181682A JP 58056170 A JP58056170 A JP 58056170A JP 5617083 A JP5617083 A JP 5617083A JP S59181682 A JPS59181682 A JP S59181682A
Authority
JP
Japan
Prior art keywords
light emitting
light
emitting layer
thin film
amorphous semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58056170A
Other languages
Japanese (ja)
Other versions
JPH0160916B2 (en
Inventor
Hiroshi Kukimoto
柊元 宏
Tatsuro Beppu
達郎 別府
Keijiro Hirahara
平原 奎治郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58056170A priority Critical patent/JPS59181682A/en
Publication of JPS59181682A publication Critical patent/JPS59181682A/en
Publication of JPH0160916B2 publication Critical patent/JPH0160916B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/28Materials of the light emitting region containing only elements of group II and group VI of the periodic system
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier

Abstract

PURPOSE:To provide a light emitting element which can obtain high luminance by low-voltage driving, by using a light emitting layer, wherein II-VI group amorphous semiconductor thin films having different bandgaps are alternately laminated and a quantum well is formed. CONSTITUTION:A transparent electrode 22 comprising ITO and the like is formed on a glass substrate 21 as a first electrode. A light emitting layer 23 is formed thereon through an insulating film 23 made of Y2C3 and the like. The light emitting layer 24 is formed by alternately laminating first II-VI group amorphous semiconductor thin films of ZnSxSe1-x, i.e., thin films 24b1 and 24b2 and second amorphous semiconductor thin films of ZnSYSe1-y, i.e., thin films 24a1, 24a2, and 24a3, so that the films 24b1 and 24b2 are held by the films 24a1, 24a2, and 24a3. A metal elecrode 26, which is the second electrode, is provided on the surface of the light emitting layer 24 through an insulating film 25. The light emitting layer 24 is formed by thermal decomposition reaction of, e.g., Zn(CH3)2, H2S and H2Se. The mixed crystal ratio of (x) and (y) for H2 S and H2Se is selected so as to be 0<=x<=0.8, 0.2<=y<=1, and x<y. The relation between a forbidden band width E1 of the ZnSxSe1-x thin film and a forbidden band width E2 of the ZnXy Se1-y thin film is set at E2-E1<=100[meV].

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、n−vi族化合物からなるアモルファス半導
体薄膜を用いた電場発光型の発光菓子に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an electroluminescent confectionery using an amorphous semiconductor thin film made of an n-vi group compound.

〔発明の技術的背原とその問題点〕[Technical background of the invention and its problems]

n−■族化合物半導体であるZnS 、 Zn5e 、
 CdS 。
ZnS, Zn5e, which are n-■ group compound semiconductors,
CdS.

CdSe 、 ZnTe 、 CtlTeは直接遷移型
のバンド構造をもち、発光中心となるドーパントを絵加
することにより優れた螢光体特性を不すことが知られて
いる。従来、これらの半導体拐料を用いた電場発光型発
光素子としては、これらの材料粒子を絶縁体材相中に懸
濁浮遊せしめ、これに電界を印加する構造がよく知られ
ている。しかしこの構造では、粒界不均一に基づく発光
特性の制御性の難しさから実用に耐え得るものが得られ
ていない。
CdSe, ZnTe, and CtlTe have a direct transition type band structure, and it is known that excellent phosphor properties can be lost by adding a dopant that becomes a luminescent center. Conventionally, as an electroluminescent light emitting device using these semiconductor particles, a structure in which particles of these materials are suspended in an insulating material phase and an electric field is applied thereto is well known. However, with this structure, it has not been possible to obtain a structure that can withstand practical use due to the difficulty in controlling the light emission characteristics due to grain boundary non-uniformity.

一方、同様の半導体材料の薄膜を絶縁体で挾持して電場
発光型発光素子を構成する方法も知られている。その−
例を第1図に示す。これは例えはカラヌ基板11に透明
電極12を形成し、この上に透EjA絶縁股13を介し
てMnを添加したZnS薄膜14を被着し、更にこの上
に絶縁膜15を介して電極Z6を形成したものである。
On the other hand, a method is also known in which a thin film of a similar semiconductor material is sandwiched between insulators to construct an electroluminescent light emitting element. That-
An example is shown in FIG. For example, a transparent electrode 12 is formed on a Calanu substrate 11, a Mn-doped ZnS thin film 14 is deposited on this through a transparent EJA insulating layer 13, and an electrode Z6 is further applied on this through an insulating film 15. was formed.

3 しかしこの構造でも、パワー変換効率が10台と低(,
200V以上の高電圧を印加しなければならないことか
ら、−末だ実用に供されていない。
3 However, even with this structure, the power conversion efficiency is low at 10 units (,
Since it is necessary to apply a high voltage of 200 V or more, it is hardly put to practical use.

〔発明の目的〕[Purpose of the invention]

本発明は上記の点に鑑みなされたもので、■−Vl族ア
モルファス手導体薄膜を用いて低電圧駆動で高輝度が得
られる構造とした発光素子を提供することを目的とする
The present invention has been made in view of the above points, and an object of the present invention is to provide a light emitting element having a structure that uses a -Vl group amorphous conductive thin film and can achieve high brightness with low voltage driving.

〔発明の概要〕[Summary of the invention]

本発明において目1、バンドギャップの異なるn −■
族アモルファス半導体薄膜を父互に積層して童子ウェル
を形成した発光層を用いる。即ち、県制帯II@ El
なる第1の1t−Vl族アモルファス半導体薄膜を察t
lflJ帯幅L(ただし” 1< E2 )なる第2の
■−■族アモルファス半導体薄膜で挾んだ構造を単位発
光RFJとし、これを第1の電極が形成された基板上に
一層または二層以上積層し、このJH層された発光層表
面に第2の電極を設けて発光素子を構成する。
In the present invention, item 1: n −■ with different band gaps
A light-emitting layer is used in which a doji well is formed by stacking group amorphous semiconductor thin films on each other. That is, prefectural belt II @ El
We observed the first 1t-Vl group amorphous semiconductor thin film.
A unit light-emitting RFJ has a structure sandwiched by a second ■-■ group amorphous semiconductor thin film having a band width L (where 1<E2), and this is formed in one or two layers on the substrate on which the first electrode is formed. The above layers are stacked, and a second electrode is provided on the surface of the JH-layered light-emitting layer to constitute a light-emitting element.

この場合、発光層には発光中心となるドーパントとして
例えは、Ag 、Cu 、Tb 、Tm、Eu 、fv
ln 、At、ハロゲン等の中から選ばれた一以上の元
素を添加ゴーる0またあ1、第2のアモルファス半導体
薄膜のV flf’J帯1h; E、 、 H2の差は
E2−E、≧100(100(に選ぶことが好ましく、
膜厚は量子ウェルを構成するhlのアモルファス半導体
薄膜を30〜50A1.(リア層となる第2のアモルフ
ァス半導体?、t、 I+泉を50〜100^に選ぶこ
とが好ましまた、AC駆動型とするためには第r、fa
2の電極と発光層・の間に絶R膜を介在させ、I) C
駆動型と1′るためには第11第2の電極を直接発光J
曽に接触させれはよい。
In this case, the light-emitting layer contains dopants that serve as luminescent centers, such as Ag, Cu, Tb, Tm, Eu, fv.
Adding one or more elements selected from ln, At, halogen, etc. 0 or 1, V flf'J band 1h of the second amorphous semiconductor thin film; E, , the difference between H2 is E2-E, ≧100 (preferably selected as 100),
The film thickness of the hl amorphous semiconductor thin film constituting the quantum well is 30 to 50 A1. (It is preferable to select the second amorphous semiconductor ?, t, I+ spring which becomes the rear layer to be 50 to 100^, and in order to make it an AC drive type,
I) C
In order to use the drive type, the 11th and 2nd electrodes are directly emitted.
It is good to have contact with Zeng.

〔発明の効果〕〔Effect of the invention〕

本発明によれは、発光層内に量子ウェルを構成すること
によって内部電界による電子増倍効果が強−され、従来
より低い印加電圧で実用上十分な輝度を翁する発光素子
が得られる。
According to the present invention, by forming quantum wells in the light emitting layer, the electron multiplication effect due to the internal electric field is strengthened, and a light emitting device can be obtained which provides practically sufficient brightness with an applied voltage lower than that of the conventional device.

またアモルファス半導体薄膜は有機金属化合物の熱分解
を、fu用したMOCVD法により均一性よく形成する
ことができ、特に41 % IK 2のアモルファス半
導体薄膜を交互に多層に積層した発光層を用いれは、発
光面内の輝度の均一性に優れた発光素子を実現すること
ができる。
Furthermore, an amorphous semiconductor thin film can be formed with good uniformity by thermal decomposition of an organometallic compound using the MOCVD method using fu, and especially when a light emitting layer is used in which amorphous semiconductor thin films of 41% IK 2 are laminated in multiple layers alternately. A light emitting element with excellent uniformity of brightness within a light emitting surface can be realized.

〔発明の実施例〕[Embodiments of the invention]

本発明の一実施例の発光素子構造を裁2図に示す。この
例は基孜側を発光面とするもので、ガラス基板21に第
1の電極としてI’l’O等からなる透明電極22を形
成し、この上KY208等の絶縁膜23を介して発光層
24を形成しも・る。
FIG. 2 shows the structure of a light emitting device according to an embodiment of the present invention. In this example, the base side is the light emitting surface, and a transparent electrode 22 made of I'l'O or the like is formed as a first electrode on a glass substrate 21, and light is emitted through an insulating film 23 of KY208 or the like. A layer 24 may also be formed.

発光層24は、第1の■−■族アモルファス半薄膜であ
るZn5ySe、、薄膜24a□、24a□、24a3
で挾む形で交互に積層した構造と1よっている。
The light emitting layer 24 is made of Zn5ySe, which is a first ■-■ group amorphous semi-thin film, thin films 24a□, 24a□, 24a3
It has a structure in which layers are alternately sandwiched in between.

発光層240表面には絶縁膜25を介して第20′屯極
である金属′電極26を設けている。
A metal' electrode 26, which is the 20'th electrode, is provided on the surface of the light emitting layer 240 with an insulating film 25 interposed therebetween.

発光層24は、Zn (CHs )zとl−12Sおよ
び)t2Seの熱分解反応を用いたMOCVD法により
形成する0そしてH,Sと)(2Se  の流量比を制
御することにより、混晶比x s Yを、0(x(0,
8、0,2<Y< 1であってかつx<yを満たすよう
に選び、Zn5xSe  薄膜の禁制帯幅E1とZn5
ySe、 、薄膜 −X の禁制帯幅E2の関係をE2E1≧too(meVJと
なるように設定する。また板子ウェル部となるZn5x
Se、 、 薄膜24 bl、 24 b、  の膜厚
を30〜50^、バリア部となるZn5ySe、 、薄
膜24a1.24 a2 、24 a3の膜厚を50〜
100Aにそれぞれ設定する。
The light-emitting layer 24 is formed by MOCVD using a thermal decomposition reaction of Zn(CHs)z, l-12S, and x s Y, 0(x(0,
8, 0,2<Y<1 and x<y, and the forbidden band width E1 and Zn5 of the Zn5xSe thin film.
ySe, , the relationship between the forbidden band width E2 of the thin film -X is set so that E2E1≧too(meVJ).
The film thickness of Se, , 24 bl, 24 b, is 30 to 50^, and the film thickness of Zn5ySe, , 24 a1, 24 a2, 24 a3, which becomes the barrier part, is 50 to 50
Set each to 100A.

このように構成された発光素子は、第1図に示した従来
構造のものに比べて量子的効果によりパワー変換効率が
約2倍に改善され、従来より低い印加電圧で実用上十分
な高輝度特性が得られた。また発光面の輝度分布の均一
性も霞れブヒものであった。
The light-emitting element configured in this way has a power conversion efficiency that is approximately doubled due to quantum effects compared to the conventional structure shown in Figure 1, and can achieve a sufficiently high luminance for practical use with a lower applied voltage than before. characteristics were obtained. Furthermore, the uniformity of the luminance distribution on the light emitting surface was also poor.

また、発光ノ※24に発光中心となるドーバン) トL
 iAg、Cu、Tb、Tm、Eu、Mn、Aj’ 、
ハロゲン元素等を添加することによって、各ドーパント
に約応した波長域での発光強度の増大が確認された。
In addition, the light emission center is Doban) L in light emission *24
iAg, Cu, Tb, Tm, Eu, Mn, Aj',
It was confirmed that by adding a halogen element, etc., the emission intensity increased in a wavelength range corresponding to each dopant.

なお上記実施例では第11第20n−Vl族アモルファ
ス半導体薄膜とCでそれぞれZnSxSe1−x。
In the above embodiment, the 11th and 20th n-Vl group amorphous semiconductor thin films and C are ZnSxSe1-x, respectively.

Zn8ySe、 、を用いたが、他の材料の組合せ、例
えはCdδxse1−xとCd5ySet−y 、 Z
nxCc+、−xTeとZn、Cd、 、Te  の組
合せを用いることもできる。
Zn8ySe, , was used, but other material combinations, such as Cdδxse1-x and Cd5ySet-y, Z
A combination of nxCc+, -xTe and Zn, Cd, , Te can also be used.

これらの材料を用いた場合にも、上記実施例と同様に禁
制帯幅の差や各薄膜の膜厚を設定することで同様の高輝
度特性を得ることができる。
Even when these materials are used, similar high luminance characteristics can be obtained by setting the difference in forbidden band width and the thickness of each thin film in the same way as in the above embodiments.

また上記実施例はAC駆動型としたが、DC駆動型とす
るには第1、第2の電極で直接発光層を挾持する構造と
すればよい。更に、基板として不透明材料を用いた場合
には、発光層上面側の第2の%極や絶縁膜を透明材料と
すれはよ
Further, although the above embodiment is of an AC drive type, a DC drive type may be achieved by using a structure in which the light emitting layer is directly sandwiched between the first and second electrodes. Furthermore, if an opaque material is used as the substrate, the second % electrode on the upper surface of the light emitting layer and the insulating film should not be made of transparent material.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の電場発光型発光集子の一例を示す図、第
2図&コ1本発明の一実施例の発光素子をン〕くず図で
ある。 21・・・ガラス基板、22・・・透明電板(第1の゛
電極)、2.?、25・・・絶縁膜、24・・・発光層
、24a、 、 24a2.24a、−−−Zn5yS
e、−y薄膜(第2の1i −Vi族アモルファス半導
体薄j摸)、24b□。 24 bl・・−Zn5xSe、、薄! (211のn
 −Vl 族アモルファス半2斗体薄y)、26・・・
金属電極(第2の電極)。 出願人代理人 弁理士  銘 江 武 彦第1図 第2図
FIG. 1 is a diagram showing an example of a conventional electroluminescent type light-emitting collector, and FIG. 2 is a scrap diagram showing a light-emitting device according to an embodiment of the present invention. 21... Glass substrate, 22... Transparent electrode plate (first electrode), 2. ? , 25... Insulating film, 24... Light emitting layer, 24a, , 24a2.24a, ---Zn5yS
e, -y thin film (second 1i -Vi group amorphous semiconductor thin film), 24b□. 24 bl...-Zn5xSe, Thin! (n of 211
-Vl group amorphous hemi-di dorotic thin y), 26...
Metal electrode (second electrode). Applicant's agent Patent attorney Name: Takehiko E Figure 1 Figure 2

Claims (8)

【特許請求の範囲】[Claims] (1)  第1の電極が形成された基板上に、禁制帯幅
E□なる第1のn−vi族アモルファス半導体薄膜を鎖
側帯幅E2  (ただしE 1< E 2 )なる第2
のn−vi族アモルファス半纏体薄膜で挾んだ構造を単
位発光層としてこれを一層または二層以上積層して発光
層を構成し、この発光層表面に第2の電極を設けてなる
ことを特徴とする発光素子。
(1) On the substrate on which the first electrode is formed, a first n-vi group amorphous semiconductor thin film with a forbidden band width E
A structure sandwiched between n-vi group amorphous semi-consolidated thin films is used as a unit light-emitting layer, and one or more layers are laminated to form a light-emitting layer, and a second electrode is provided on the surface of this light-emitting layer. Characteristic light-emitting elements.
(2)発光層は、発光中心となるドーパントとしてAg
 、Cu 、Tb 、’l”m、Eu 、Mn 、Al
、ハDゲン元紫の中から選ばれた一以上の元素を含む喘
的請氷の範囲第1項記載の発光素子。
(2) The light-emitting layer contains Ag as a dopant serving as a luminescent center.
, Cu, Tb, 'l''m, Eu, Mn, Al
2. The light emitting device according to claim 1, which contains one or more elements selected from the group consisting of 1, 2 and 3.
(3)第1のIi −Vi族アモルファス半導体薄膜は
Zn5xSe 、−X(0< X≦0.8)、i2の]
−〜llll上ルファス半導体薄膜はZn Sy Se
 、−y(0,2<J≦1)であって、禁制帯幅E、 
、 E2の差をE2−El≧100 〔meVJ  と
した特許請求の範囲第1i記載の発光素子。
(3) The first Ii-Vi group amorphous semiconductor thin film is Zn5xSe, -X (0<X≦0.8), i2]
-~lllllThe upper rufus semiconductor thin film is Zn Sy Se
, -y (0,2<J≦1), and the forbidden band width E,
, E2 is set to E2-El≧100 [meVJ]. The light emitting device according to claim 1i.
(4)第1のn−Vi族アモルファス半破、体側膜はC
dSxSe   、第2の11− Vi Nアモルファ
ス −X 半導体満腹ばCd Sy Se   であって、X側帯
 −y 幅E、 、 E2の差をE2−E1≧100 (meV
Jとした特許請求の範囲第1項記載の発光集子。
(4) First n-Vi group amorphous half-broken, body membrane is C
dSxSe, the second 11-ViN amorphous-X semiconductor satisfies CdSySe, and the difference between the widths E, , E2 of the
A light emitting concentrator according to claim 1, defined as J.
(5)第1のn−Vi族アモルファス牛導体瀞膜はZn
xCa、、−xTe s第2の’n−Vl族アモルファ
ス半導体俤膜はZn 、Ca 、−yTeであって、先
制帯+IE、、E2の差をE 2−E、″> 100 
(me’V Jとした特許請求の範囲第1項記載の発光
素子。
(5) The first n-Vi group amorphous conductor film is Zn.
xCa,, -xTesThe second 'n-Vl group amorphous semiconductor film is Zn, Ca, -yTe, and the difference in preemptive band +IE,,E2 is E2-E,''> 100
(The light emitting device according to claim 1, defined as me'V J.
(6)第1のIf −Vl族アモルファス牛導体膏膜の
厚みを30〜50A%第2のit −Vl族アモルファ
ス半導体薄膜の厚みを50〜100A とした特許請求
の範囲第1項記載の発光素子。
(6) The light emission according to claim 1, wherein the thickness of the first If-Vl group amorphous semiconductor thin film is 30 to 50A% and the thickness of the second It-Vl group amorphous semiconductor thin film is 50 to 100A. element.
(7)第1.第2の電極と発光層の間に絶縁膜を介在さ
せてAC駆動を行うようにした特許請求の範囲第1項記
載の発光素子。
(7) First. The light emitting device according to claim 1, wherein an insulating film is interposed between the second electrode and the light emitting layer to perform AC driving.
(8)第1、第2の電極を直接発光層に接触させてL)
C駆動を行うようにした特許請求の範囲′e441項記
載の発光素子。
(8) By bringing the first and second electrodes into direct contact with the light emitting layer L)
A light-emitting device according to claim 'e441, which performs C drive.
JP58056170A 1983-03-31 1983-03-31 Light emitting element Granted JPS59181682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58056170A JPS59181682A (en) 1983-03-31 1983-03-31 Light emitting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58056170A JPS59181682A (en) 1983-03-31 1983-03-31 Light emitting element

Publications (2)

Publication Number Publication Date
JPS59181682A true JPS59181682A (en) 1984-10-16
JPH0160916B2 JPH0160916B2 (en) 1989-12-26

Family

ID=13019620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58056170A Granted JPS59181682A (en) 1983-03-31 1983-03-31 Light emitting element

Country Status (1)

Country Link
JP (1) JPS59181682A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165993A (en) * 1985-01-17 1986-07-26 株式会社小糸製作所 Super thin film semiconductor optical apparatus
JPH01225095A (en) * 1988-03-04 1989-09-07 Komatsu Ltd Thin film el element
JPH01239796A (en) * 1988-03-22 1989-09-25 Komatsu Ltd Thin film el element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61165993A (en) * 1985-01-17 1986-07-26 株式会社小糸製作所 Super thin film semiconductor optical apparatus
JPH0570277B2 (en) * 1985-01-17 1993-10-04 Koito Mfg Co Ltd
JPH01225095A (en) * 1988-03-04 1989-09-07 Komatsu Ltd Thin film el element
JPH01239796A (en) * 1988-03-22 1989-09-25 Komatsu Ltd Thin film el element

Also Published As

Publication number Publication date
JPH0160916B2 (en) 1989-12-26

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