JPS59180839A - Groove forming method of master disk - Google Patents
Groove forming method of master diskInfo
- Publication number
- JPS59180839A JPS59180839A JP5579083A JP5579083A JPS59180839A JP S59180839 A JPS59180839 A JP S59180839A JP 5579083 A JP5579083 A JP 5579083A JP 5579083 A JP5579083 A JP 5579083A JP S59180839 A JPS59180839 A JP S59180839A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resist
- disk
- groove
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000011521 glass Substances 0.000 claims abstract description 12
- 230000035945 sensitivity Effects 0.000 claims abstract description 9
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 12
- 239000010410 layer Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0057—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture
- G11B23/0064—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture mediums or carriers characterised by the selection of the material
- G11B23/0085—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture mediums or carriers characterised by the selection of the material intermediate mediums using a photosensitive material, e.g. photo-resist
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 （→ 発明の技術分野 本発明は光デイスク用原盤の製造方法に係シ。[Detailed description of the invention] (→ Technical field of invention The present invention relates to a method for manufacturing an optical disc master.
特に深さの異々る２穏類の溝を同一トラック上に作成す
るために、ガラス等の円板上に感度の異なるレジストを
２層コーティングして形成し、該レジスト上を同一波長
のレーザ光のパワーを変えて照射し浅い溝、深い穴を形
成する方法に関する。In particular, in order to create two types of grooves with different depths on the same track, two layers of resist with different sensitivities are coated on a disk such as glass, and a laser beam of the same wavelength is applied to the resist. It relates to a method of forming shallow grooves and deep holes by irradiating light with varying power.
（ｂ）従来技術と問題点
従来光デイスク媒体１は第１図（イ）（ロ）に示すよう
にプラスチック等の円板２上に予めトラックフォローす
るだめの案内溝３が円周方向にトラック状に設けられて
いる。このトラック状の案内溝３には、複数の固定情報
領域Ｂ（溝のある々しによシコード化した情報２例えば
アドレス情報等）とデータ記録領域Ａ（溝幅０．７ｐｍ
、深さ７００Ａ。(b) Prior Art and Problems In the conventional optical disk medium 1, as shown in FIG. It is set up in a shape. This track-shaped guide groove 3 has a plurality of fixed information areas B (information 2 coded according to the groove, such as address information) and a data recording area A (groove width 0.7 pm).
, depth 700A.
トラックピッチ２〜２．５μｍの案内溝３にデータを記
録する）が設けられ、その円板２上に記録層を蒸着して
光デイスク媒体１が形成されている。The optical disk medium 1 is formed by depositing a recording layer on the disk 2. The optical disc medium 1 is provided with a guide groove 3 having a track pitch of 2 to 2.5 .mu.m for recording data.
なお、４は円板２を回転させるスピンドル穴を示す。Note that 4 indicates a spindle hole through which the disc 2 is rotated.
上記光デイスク媒体１は原盤を用いて作られた薄いニッ
ケル金属膜のスタンパによシブラスチック等を成形して
作られる。その原盤８は第２図に示すようにガラス円板
５にレジスト６をコーティングし、該レジスト６上にレ
ーザ光７を照射し。The optical disc medium 1 is made by molding a plastic or the like onto a thin nickel metal film stamper made using a master disc. As shown in FIG. 2, the master disk 8 is a glass disk 5 coated with a resist 6, and a laser beam 7 is irradiated onto the resist 6.
（第１図（ロ）参照）固定情報領域Ｂの溝とデータ記録
領域Ａの溝を書込み、現像、定着を行い、前述した案内
溝３を形成している。この案内溝３には複数の固定情報
領１２ Ｂとデータ記録領域Ａがあシ。(See FIG. 1(B)) The grooves in the fixed information area B and the grooves in the data recording area A are written, developed, and fixed to form the guide grooves 3 described above. This guide groove 3 has a plurality of fixed information areas 12B and data recording areas A.
例えば固定情報領域Ｂの溝は深く、データ記録領域の案
内溝３け浅く構成し、光の反ｌ：Ｉ率を変えて情報再生
時の信号レベルが検出できるようにしている。For example, the groove in the fixed information area B is deep, and the guide groove in the data recording area is three times shallower, so that the signal level during information reproduction can be detected by changing the ratio of light.
従来、原盤８は単層からなるレジスト６をガラス円板５
上にコーティングして、露光パワーを調節して２種類の
溝深さを得ようとしていた。しかし、この方法で１は深
い溝の場合は第２図（イ）に示すような台形溝９が得ら
れるが、浅い溝を得ようとすると、第２図（ロ）に示す
ように台形に々らず■形溝９′となる。この原盤８で成
形された光デイスク媒体１のＶ形溝９′がヘッドのトラ
ッキングの案内溝として使用されるために、−・ラドの
トラックフォローイングが不安定に々るという問題があ
った。Conventionally, the master 8 has a resist 6 made of a single layer on a glass disk 5.
They tried to coat it on top and adjust the exposure power to obtain two different groove depths. However, with this method, if 1 is a deep groove, a trapezoidal groove 9 as shown in Fig. 2 (a) can be obtained, but if you try to obtain a shallow groove, it will become trapezoidal as shown in Fig. 2 (b). It becomes a ■-shaped groove 9'. Since the V-shaped groove 9' of the optical disk medium 1 formed by the master disk 8 is used as a guide groove for tracking of the head, there is a problem that the track following of the -.rad is unstable.
（Ｃ）発明の目的
本発明の目的は光デイスク媒体に設ける２種類の溝深さ
く深さλ／４．λ／８）のうち、特に浅い溝（深さλ／
８）を安定に形良く得るだめの方法を提供することにあ
る。(C) Object of the Invention The object of the present invention is to provide two types of groove depths, λ/4. λ/8), especially shallow grooves (depth λ/8)
The objective is to provide a method for obtaining 8) stably and in a good shape.
（ｄ） 発明の構成
そしてこの目的は２本発明によればガラス等の円板上の
形成されたレジスト層に信号処理に・必要な異なる深さ
の溝および穴を形成する原盤の溝形成方法であって、前
記レジスト層を感度の異なる上、下２層で構成し、該レ
ジスト層に露光パワーの異なる光を照射して前記異なる
深さの溝および太番形成することを特徴とする原盤の溝
形成方法を提供することによって達成される。(d) Structure of the Invention and Objects of the Invention According to the present invention, there is provided a method for forming grooves on a master disk for forming grooves and holes of different depths necessary for signal processing in a resist layer formed on a disk such as glass. The master disc is characterized in that the resist layer is composed of an upper layer and a lower layer having different sensitivities, and the grooves of different depths and thick grooves are formed by irradiating the resist layer with light having different exposure powers. This is accomplished by providing a groove forming method.
（ｅ） 発明の実施例 以下本発明の実施例を図面によって詳述する。(e) Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.
（第１図参照）光ディスク１ではトラックサーボ用の溝
（円周方向にトラック状に設けられた案内溝３）として
、その深さがλ／８（λ：書込み。(See FIG. 1) In the optical disc 1, the track servo groove (guide groove 3 provided in a track shape in the circumferential direction) has a depth of λ/8 (λ: writing.
読出しレーザ光の波長）とアドレス情報用の穴（固定情
報領域Ｂの穴）として、その深さがλ／４の２種類の深
さを持つ溝もしくは穴から構成されている。The hole for address information (the wavelength of the readout laser beam) and the hole for address information (the hole in the fixed information area B) are composed of grooves or holes having two different depths of λ/4.
上記光デイスク媒体１を得るための原盤の溝形成方法の
実施例を第３図に示す。第３図（イ）〜に）は本発明の
原盤の溝形成方法の１実施例を示す断面図である。FIG. 3 shows an embodiment of a method for forming grooves on a master disk for obtaining the above-mentioned optical disk medium 1. As shown in FIG. FIGS. 3(a) to 3(a) are sectional views showing one embodiment of the method for forming grooves on a master disc according to the present invention.
図において、第３図（イ）に示すように、ガラス円板５
上に厚さλ／８に々るように第一層レジスト１０をスピ
ンコーティングする。このレジスト１゜を温度１４０℃
」ソ上でプリベーク（予備硬化反応）させた後、さらに
第３図（鴫に示すように厚さλ／８の第二層レジスト１
１をスピンコーティングし。In the figure, as shown in FIG. 3 (a), a glass disk 5
A first layer resist 10 is spin-coated on top to a thickness of λ/8. This resist 1° is heated to 140°C.
After pre-baking (pre-curing reaction) on a 100-degree plate, a second layer of resist 1 with a thickness of λ/8 is further applied as shown in FIG.
Spin coat 1.
（金側厚さλ／４にする）再度温度８０〜９０’Ｃでプ
リベークする。以上の操作によりレジスト第一層１０は
第二層レジスト１１のプリベータにょシ２度プリベーグ
されるためレジスト第二層１１に比べ、感度が低下する
。(Gold side thickness is set to λ/4) Prebaking again at a temperature of 80 to 90'C. As a result of the above operations, the first resist layer 10 is prebaked twice by the pre-baking of the second resist layer 11, so that its sensitivity is lower than that of the second resist layer 11.
上記のように第二層レジスト１１の感度を良くし、第一
層レジスト１０の感度を悪くすることによシ、第３図（
ハ）に示すように露光パワーを大きくすれば第一層レジ
ス）１０のガラス面５まで露光（１２）され、露光パワ
ーを小さくすれば第二層レジスト１１のみが露光（１３
）される。次に現像。As described above, by improving the sensitivity of the second layer resist 11 and decreasing the sensitivity of the first layer resist 10,
As shown in c), if the exposure power is increased, even the glass surface 5 of the first layer resist 10 will be exposed (12), and if the exposure power is decreased, only the second layer resist 11 will be exposed (13).
) to be done. Next, develop.
定着することにより、第３図に）のような２種類の溝深
さ百、１０台形溝１３’、１２’が得られる。特に溝深
さλ／８の浅い溝が従来の単層レジストのような不安定
な形のＶ形溝ｄでなく２台形溝１３′の安定した形であ
るので、この原盤１４を基にして形成される光デイスク
媒体はへ、ラドのトラックフォローイングの安定したも
のが得られる。By fixing, two types of trapezoidal grooves 13' and 12' with groove depths of 100 and 10 as shown in FIG. 3 are obtained. In particular, the shallow grooves with the groove depth λ/8 are not V-shaped grooves d, which are unstable as in conventional single-layer resists, but have the stable shape of two trapezoidal grooves 13'. The formed optical disk medium has stable track following.
（０発明の効果
以上詳細に説明したように１本発明の原盤の溝形成方法
はガラス円板上に上下２層で感度の異なるレジスト層を
設け、同一波長のレーザ光のパワーを変えて照射し、浅
い溝、深い穴を作るようにすることによシ、従来の却層
レジストに露光パワーを調節して２種類の溝深さを作る
とき２％に浅い溝が不安定々形のＶ形溝でなく、安定し
た形の台形溝を得ることができる。従ってこの原盤を基
にして作られる光ディスクのヘッドのトラックフォロー
イングは安定する効果は大きい。(0 Effects of the Invention As explained in detail above, 1. The method of forming grooves on a master disc of the present invention is to provide upper and lower resist layers with different sensitivities on a glass disk, and to irradiate laser beams of the same wavelength with different powers. However, by creating shallow grooves and deep holes, when two types of groove depths are created by adjusting the exposure power in a conventional thin layer resist, 2% of the shallow grooves are unstable shaped V. It is possible to obtain a stable trapezoidal groove instead of a trapezoidal groove.Therefore, the track following of the head of an optical disk made based on this master disc is greatly stabilized.
第１図は光デイスク媒体を説明するための図で。
（（イ）はディスク平面図、（→はトラックの説明図、
第２図（イ）（ロ）は従来の原盤の溝形成方法を説明す
る断面し１．第３図（イ）〜に）は本発明の原作の溝形
成方法の１実施例を訝す；」する断面図である。
■１にす？いて、５はガラス円板、１０（Ｚｌｉ纂一層
レシスト、１１は第二層レジス）、１２．１３は露光、
１ノ、１３′は溝、１４は原盤を示す。
ネ ＩＩ￥］
（イ） １
柄２図
第 ３図
とイノFIG. 1 is a diagram for explaining an optical disk medium. ((A) is a plan view of the disk, (→ is an explanatory diagram of the track,
Figures 2(a) and 2(b) are cross-sectional diagrams illustrating the conventional method of forming grooves on a master disk.1. FIGS. 3(a) to 3(a) are sectional views showing one embodiment of the original groove forming method of the present invention. ■Would you like it to be 1? , 5 is a glass disk, 10 (Zli fabric single layer resist, 11 is second layer resist), 12.13 is exposure,
1 and 13' are grooves, and 14 is a master disc. Ne II￥] (A) 1 Pattern 2 Figure 3 Figure and Ino
Claims (1)
必要方異なる深さの溝および穴を形成する原盤の溝形成
方法であって、前記レジスト層を感度の異なる上、下２
層で構成し、該レジスタ層に露光パワーの異なる光を照
射して前記具なる深さの溝および穴を形成することを特
徴とする原盤の溝形成方法。A method for forming grooves on a master disc, in which grooves and holes of different depths are formed as necessary for signal processing in a resist layer formed on a disk such as glass, the resist layer being formed into upper and lower layers with different sensitivities.
1. A method for forming grooves on a master, comprising forming grooves and holes in the register layer and forming grooves and holes having the specified depths by irradiating the register layer with light having different exposure powers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5579083A JPS59180839A (en) | 1983-03-31 | 1983-03-31 | Groove forming method of master disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5579083A JPS59180839A (en) | 1983-03-31 | 1983-03-31 | Groove forming method of master disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59180839A true JPS59180839A (en) | 1984-10-15 |
Family
ID=13008703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5579083A Pending JPS59180839A (en) | 1983-03-31 | 1983-03-31 | Groove forming method of master disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180839A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61153850A (en) * | 1984-12-26 | 1986-07-12 | Matsushita Electric Ind Co Ltd | Original disk for optical disk and its manufacture |
| JP2006338828A (en) * | 2005-06-03 | 2006-12-14 | Sony Corp | Optical recording medium, optical disk original plate and its manufacturing method |
-
1983
- 1983-03-31 JP JP5579083A patent/JPS59180839A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61153850A (en) * | 1984-12-26 | 1986-07-12 | Matsushita Electric Ind Co Ltd | Original disk for optical disk and its manufacture |
| JP2006338828A (en) * | 2005-06-03 | 2006-12-14 | Sony Corp | Optical recording medium, optical disk original plate and its manufacturing method |
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