JPH0534737B2 - - Google Patents
Info
- Publication number
- JPH0534737B2 JPH0534737B2 JP58159457A JP15945783A JPH0534737B2 JP H0534737 B2 JPH0534737 B2 JP H0534737B2 JP 58159457 A JP58159457 A JP 58159457A JP 15945783 A JP15945783 A JP 15945783A JP H0534737 B2 JPH0534737 B2 JP H0534737B2
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- pregroove
- optical recording
- optical
- master
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 65
- 229920002120 photoresistant polymer Polymers 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 36
- 239000002184 metal Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 15
- 239000011521 glass Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- NUHSROFQTUXZQQ-UHFFFAOYSA-N isopentenyl diphosphate Chemical compound CC(=C)CCO[P@](O)(=O)OP(O)(O)=O NUHSROFQTUXZQQ-UHFFFAOYSA-N 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/2407—Tracks or pits; Shape, structure or physical properties thereof
- G11B7/24085—Pits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Head (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明はプリグルーブ及びアドレスピツトを有
する光学的に記録及び再生の可能な光学式記録媒
体及びその原盤の製造装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an optical recording medium that has pregrooves and address pits and can be optically recorded and reproduced, and an apparatus for manufacturing the master disc thereof.
背景技術とその問題点
先ず第１図及び第２図を参照して、従来の記録
及び再生の可能な光学式記録媒体について説明す
る。第１図及び第２図において１は光学式記録媒
体（デイスク）を全体として示し、第１図におい
てPGはプリグルーブ（図示の場合は同心円プリ
グルーブであるが、円に近い渦巻き状プリブルー
ブでも良い）、SCはその各プリグルーブPGのセ
クタ、APはそのプリグルーブPGの番号及びセク
タSCの番号を表わすべくプリグルーブPG内に於
いて各セクタSCの端部に形成されたアドレスピ
ツトである。尚、プリグルーブPGのピツチが
2.0μｍ、その幅が0.8μｍである。BACKGROUND ART AND PROBLEMS First, a conventional recordable and reproducible optical recording medium will be described with reference to FIGS. 1 and 2. In Figures 1 and 2, 1 indicates the optical recording medium (disk) as a whole, and in Figure 1, PG indicates a pregroove (in the case shown, it is a concentric pregroove, but it may also be a spiral pregroove close to a circle). ), SC is the sector of each pregroove PG, and AP is an address pit formed at the end of each sector SC in the pregroove PG to represent the number of the pregroove PG and the number of the sector SC. In addition, the pitch of the pregroove PG is
2.0 μm, and its width is 0.8 μm.
この光学式記録媒体１は第２図に示すごとく、
アクリル等の透明なプラスチツク基板２上に情報
を光学的に記録すべきプリグルーブPGの形成さ
れた一層又は多層の低融点金属層（反射金属層）
３が形成されている。尚、LDは金属層３のラン
ド部である。４は金属層３上に被着形成されたプ
ラスチツクから成る保護層である。かかる光学式
記録媒体１に於いては、レーザ光源よりのレーザ
ビームを金属層３のプリグルーブPGにトラツキ
ングをとりながら走査させ、そのプリグルーブ
PG内に情報を光学的に記録していくものである。
その記録の仕方は、プリグルーブPGにレーザビ
ームを照射することによつて、その金属層３の構
造を変化させてその反射率を高めることにより、
音声、ビデオ、データ信号等を周波数変調、位相
変調、PCM等による光学的ドツトの列として記
録トラツクを形成する如く記録する。尚、金属層
３をレーザビームによつて融解してその反射率を
低下させることによつて、又はその下層の他の金
属層を露呈させてそれにより反射率を高めること
によつて光学的ドツトを形成することもできる。 This optical recording medium 1, as shown in FIG.
A single or multilayer low melting point metal layer (reflective metal layer) on which a pregroove PG for optically recording information is formed on a transparent plastic substrate 2 such as acrylic.
3 is formed. Note that LD is a land portion of the metal layer 3. 4 is a protective layer made of plastic deposited on the metal layer 3. In such an optical recording medium 1, a laser beam from a laser light source is scanned while tracking the pregroove PG of the metal layer 3, and the pregroove PG is scanned while tracking.
Information is optically recorded within the PG.
The recording method is to change the structure of the metal layer 3 and increase its reflectance by irradiating the pregroove PG with a laser beam.
Audio, video, data signals, etc. are recorded as a string of optical dots by frequency modulation, phase modulation, PCM, etc. to form a recording track. Note that optical dots can be formed by melting the metal layer 3 with a laser beam to lower its reflectance, or by exposing other metal layers underneath and thereby increasing the reflectance. can also be formed.
次に第３図を参照して、上述した光学式記録媒
体を製造するための原盤１′について説明する。
第３図のＡはその原盤１′の部分的上面図、Ｂは
その部分的断面図である。５は例えばガラス基板
であつて、上述の光学式記録媒体１に対する記録
及び再生用ビームの波長をλ、記録及び再生用ビ
ームの透過する光透過層、即ち透明基板２の屈折
率をｎとするとき、厚さがλ／8nとなるごとくフオ
トレジスト層６を均一に被着形成し、これをガラ
ス基板５上に至るまでのカツテイングを行ない、
即ちレーザビームを照射し、これを現像すること
により夫々共にλ／8nの位相深さのプリグルーブ
PG′及びアドレスピツトAP′を形成する。 Next, referring to FIG. 3, a master disk 1' for manufacturing the above-mentioned optical recording medium will be explained.
A in FIG. 3 is a partial top view of the master 1', and B is a partial sectional view thereof. 5 is a glass substrate, for example, where the wavelength of the recording and reproducing beam for the optical recording medium 1 is λ, and the refractive index of the transparent substrate 2, which is the light transmitting layer through which the recording and reproducing beam passes, is n. At this time, a photoresist layer 6 is uniformly deposited to have a thickness of λ/8n, and this is cut until it reaches the top of the glass substrate 5.
That is, by irradiating a laser beam and developing the laser beam, a pregroove PG' and an address pit AP' each having a phase depth of λ/8n are formed.
そして、その後は従来周知のごとく、この原盤
１′のガラス基板５上に残存したフオトレジスト
層６の上にメツキを行ない、これを素にしてメタ
ルマスタを作り、このメタルマスタからマザーを
作る。そして、このマザーからスタンパを作り、
このスタンパを用いてアクリル等の光透過性樹脂
をスタンプして透明基板２を形成し、その上に光
反射金属層３を被着形成し、その上に保護層４を
被着形成するものである（第２図参照）。 Thereafter, as is well known in the art, plating is performed on the photoresist layer 6 remaining on the glass substrate 5 of this master 1', a metal master is made from this, and a mother is made from this metal master. Then, make a stamper from this mother,
Using this stamper, a light-transmitting resin such as acrylic is stamped to form a transparent substrate 2, a light-reflecting metal layer 3 is deposited thereon, and a protective layer 4 is deposited thereon. Yes (see Figure 2).
ところで、この第３図に図示の光学式記録媒体
１の原盤１′においては、ガラス基板５上に塗布
するフオトレジスト層６の厚さが600〜800Å程度
と極く薄く、厚さが不均一となり、ピンホールも
生じるという欠点がある他、プリグルーブPG′の
位相深さも、アドレスピツトAP′の位相深さも共
にλ／8nであるために、次のような問題が生じる。 By the way, in the master disk 1' of the optical recording medium 1 shown in FIG. 3, the thickness of the photoresist layer 6 coated on the glass substrate 5 is extremely thin, about 600 to 800 Å, and the thickness is uneven. In addition to the disadvantage that pinholes are generated, the following problems occur because both the phase depth of the pregroove PG' and the phase depth of the address pit AP' are λ/8n.
即ち、先ず最終的に形成される第１図及び第２図
に示した光学式記録媒体（デイスク）１の金属層
３による反射光量を第４図を用いて説明する。光
反射金属層３が理想的な鏡面である場合の反射光
量をIoとすると、金属層３のランド部LD上の反
射光量ITOPは略Ioに匹敵する。SAPはアドレスピツ
トAPによる反射光量の変調部分を示し、そのピ
ークレベルをIPPとする。SRPは、プリグルーブPG
内に情報信号の記録を行ない、それを再生した場
合の反射光量の変調を示し、IRPはそのピーク値
を示す。プリグルーブPGの位相深さがλ／8nである
ので、トラツキングエラー信号（プツシユブル信
号）のレベルは大となるが、その反面、アドレス
ピツトAPの位相深さがプリグルーブPGのそれと
同様にλ／8nであるために、この第４図から分かる
ように、アドレスピツトAPからの再生光量のピ
ーク値はIoの20〜30％と頗る少ないことが分か
る。That is, first, the amount of light reflected by the metal layer 3 of the finally formed optical recording medium (disk) 1 shown in FIGS. 1 and 2 will be explained using FIG. 4. If the amount of reflected light when the light-reflecting metal layer 3 has an ideal mirror surface is Io, then the amount of reflected light I TOP on the land portion LD of the metal layer 3 is approximately equal to Io. SAP indicates the modulation portion of the amount of reflected light by the address pit AP, and its peak level is IPP . S RP is pregroove PG
Indicates the modulation of the amount of reflected light when an information signal is recorded within and reproduced, and IRP indicates its peak value. Since the phase depth of the pregroove PG is λ/8n, the level of the tracking error signal (pushable signal) is high, but on the other hand, the phase depth of the address pit AP is λ/8n, similar to that of the pregroove PG. 8n, it can be seen from FIG. 4 that the peak value of the amount of reproduced light from the address pit AP is extremely small at 20 to 30% of Io.
逆に、アドレスピツトAPからの再生光量のピ
ーク値IPPを大にするために、アドレスピツトAP
及びプリグルーブPGの位相深さを共にλ／4nにする
と、トラツキングエラー信号のレベルが小さくな
ると共に、プリグルーブPGの変調度が大きくな
つて再生情報信号のＳ／Ｎが低下してしまう。 Conversely, in order to increase the peak value IPP of the amount of reproduced light from the address pit AP,
If both the phase depths of the pregroove PG and the pregroove PG are set to λ/4n, the level of the tracking error signal becomes small, and the degree of modulation of the pregroove PG becomes large, resulting in a decrease in the S/N of the reproduced information signal.
そこで両要求を満足させるためには、原盤１′
の製造時において、ガラス基板５上にλ／4n厚のフ
オトレジスト層６を被着形成しておき、同一ビー
ムの光量をプリグルーブPG′とアドレスピツト
AP′の形成のための露光において異ならしめて、
夫々プリグルーブPG′においてはその位相深さが
λ／8n、アドレスピツトAP′に於いてはその位相深
さがλ／4nになるようにすることも考えられる。し
かし、この場合には、フオトレジスト層がプリグ
ルーブPG′の部分に於いてハーフトーンで露光さ
れるため、そのプロセスコントロールが困難であ
り、しかもハーフトーンで露光されたフオトレジ
スト層は現像の不均一性から、アドレスピツト
AP′の位相深さが不均一となり、これを基にして
作つたデイスク１に記録を行ない、これからアド
レスピツトAPを再生した場合、その再生信号の
Ｓ／Ｎが悪くなるという欠点がある。 Therefore, in order to satisfy both requirements, it is necessary to
During manufacturing, a photoresist layer 6 with a thickness of λ/4n is deposited on the glass substrate 5, and the light intensity of the same beam is distributed between the pregroove PG' and the address pit.
By varying the exposure for the formation of AP′,
It is also conceivable that the phase depth of each pregroove PG' is λ/8n, and that of the address pit AP' is λ/4n. However, in this case, the photoresist layer is exposed in a halftone manner in the pregroove PG′, making it difficult to control the process. Due to uniformity, address pit
The phase depth of AP' becomes non-uniform, and when recording is performed on the disk 1 made based on this and the address pit AP is reproduced from this, there is a drawback that the S/N of the reproduced signal becomes poor.
又、従来は光学式記録媒体１のプリグルーブ
PG内に情報を記録していたため、再生情報信号
のＳ／Ｎが小さく、しかもドロツプアウトの可能
性が高かつた。 Also, conventionally, the pregroove of the optical recording medium 1
Since information was recorded in the PG, the S/N ratio of the reproduced information signal was low and there was a high possibility of dropout.
発明の目的
斯る点に鑑み第１の本発明は、プリグルーブ及
びアドレスピツトを有し、光学的に記録及び再生
の可能な光学式記録媒体において、トラツキング
エラー信号のレベルが大で、アドレスピツトの再
生信号のＳ／Ｎが良好で、且つドロツプアウトが
少なく、Ｓ／Ｎの良好な情報信号を再生すること
のできるものを提案しようとするものである。Purpose of the Invention In view of the above, the first aspect of the present invention is to provide an optical recording medium that has a pregroove and an address pit and is optically recordable and reproducible. The purpose of this invention is to propose a device that has a good S/N ratio of a reproduced signal, has few dropouts, and can reproduce an information signal with a good S/N ratio.
第２の本発明は、第１の本発明による光学式記
録媒体の原盤を容易に製造することのできる光学
式記録媒体の原盤の製造装置を得んとするもので
ある。 A second aspect of the invention is to provide an apparatus for manufacturing an optical recording medium master according to the first aspect of the invention, which can easily manufacture an optical recording medium master.
発明の概要
本発明による光学式記録媒体は、記録及び再生
用ビームの波長をλ、その記録及び再生用ビーム
の透過する光透過層の屈折率をｎと夫々したと
き、光学的に記録及び再生の可能な記録層のビー
ム入射面側に同心円状もしくは渦巻き状のλ／8nの
位相深さを有するプリグルーブを形成すると共
に、そのプリグルーブによつて挟まれた領域に
λ／4nの位相深さを有するアドレスピツトを形成し
て成るものである。Summary of the Invention The optical recording medium according to the present invention is capable of optically recording and reproducing data when the wavelength of the recording and reproducing beam is λ, and the refractive index of the light transmission layer through which the recording and reproducing beam passes is n. A concentric or spiral pregroove with a phase depth of λ/8n is formed on the beam incidence side of the recording layer, and a phase depth of λ/4n is formed in the region sandwiched by the pregroove. The address pit is formed by forming an address pit with a large diameter.
斯る本発明によれば、プリグルーブ及びアドレ
スピツトを有し、光学的に記録及び再生の可能な
光学式記録媒体において、トラツキングエラー信
号のレベルが大で、アドレスピツトの再生信号の
Ｓ／Ｎが良好で、且つドロツプアウトが少なく、
Ｓ／Ｎの良好な情報信号を再生することのできる
ものを得ることができる。 According to the present invention, in an optical recording medium having a pregroove and an address pit and capable of optical recording and reproduction, the level of the tracking error signal is high and the S/N of the reproduction signal of the address pit is high. Good quality and less dropout.
It is possible to obtain an information signal with a good S/N ratio.
本発明による光学式記録媒体の原盤の製造方法
は、光源と、その光源からの出射ビームを第１及
び第２のビームに２分する光分割手段と、第１の
ビームの強度を制御する第１の光変調器と、第２
のビームを記録すべきアドレス情報に応じてパル
ス的に光変調する第２の光変調器と、第１のビー
ム及び第２の変調器によつて光変調された第２の
ビームの供給される対物レンズとを有し、フオト
レジスト層の被着形成された基板上のそのフオト
レジスト層を対物レンズによつて集束された第１
及び第２のビームによつて走査して、光学式記録
媒体に対する記録及び再生用ビームの波長をλ、
その記録及び再生用ビームの透過する光透過層の
屈折率をｎと夫々したとき、上記第１のビームに
よつてλ／8nの位相深さを有するプリグルーブを、
第２のビームによつてλ／4nの位相深さを有するア
ドレスピツトを互いに隣合うように各々フオトレ
ジスト層に形成して光学式記録媒体の原盤を製造
するようにしたものである。 The method for manufacturing a master of an optical recording medium according to the present invention includes a light source, a light splitting means for dividing an emitted beam from the light source into a first beam and a second beam, and a light splitting means for controlling the intensity of the first beam. a first optical modulator; a second optical modulator;
a second optical modulator that optically modulates the beam in a pulse manner according to address information to be recorded; and a second beam that is optically modulated by the first beam and the second modulator is supplied. an objective lens; the photoresist layer on the substrate on which the photoresist layer is deposited is focused by the objective lens;
and a second beam to set the wavelength of the recording and reproducing beam to the optical recording medium to λ,
The first beam forms a pregroove having a phase depth of λ/8n, and the second beam forms a pregroove having a phase depth of λ/8n. Address pits having a phase depth of λ/4n are formed adjacent to each other in a photoresist layer to manufacture a master of an optical recording medium.
斯る本発明によれば第１の本発明による光学式
記録媒体の原盤を容易に製造することのできる光
学式記録媒体の原盤の製造装置を得ることができ
る。 According to the present invention, it is possible to obtain an optical recording medium master manufacturing apparatus that can easily manufacture an optical recording medium master according to the first aspect of the present invention.
実施例
以下に第５図を参照して、本発明による光学式
記録媒体の原盤の構成について説明する。上述の
第１図及び第２図と同様に、ガラス基板５上にフ
オトレジスト層６を被着形成するが、その場合の
厚さをλ／4nとする。そして、後述するところから
明らかになるが、２本のビームを用いて、アドレ
スピツトAP′としてはそのフオトレジスト層６を
ガラス基板５の表面に達するまで露光及び現像に
よりカツテイングし、プリグルーブPG′はアドレ
スピツトAP′を形成するビームに比らべて光量の
少ないビームを用いてλ／8nの位相深さに形成す
る。Embodiment The structure of the master disc of the optical recording medium according to the present invention will be described below with reference to FIG. As in FIGS. 1 and 2 described above, a photoresist layer 6 is deposited on a glass substrate 5, and the thickness thereof is λ/4n. As will be explained later, two beams are used to cut the photoresist layer 6 as the address pit AP' by exposure and development until it reaches the surface of the glass substrate 5, and the pregroove PG' is A beam having a smaller amount of light than the beam forming the address pit AP' is used to form a phase depth of λ/8n.
そして、このようにして形成した原盤１′を用
い冒頭に述べたような手順をふんで第６図に示す
ごとき光学式記録媒体１を得る。即ち、アクリル
等の透明基板２上に位相深さがλ／8nのプリグルー
ブPGと、位相深さがλ／4nのアドレスピツトAPと
が形成された低融点金属層３が被着形成される。
４は保護層である。この場合、プリグルーブPG
は金属層３のランド部LD上に形成され、そのピ
ツチは2μｍ、プリグルーブPG及びアドレスピツ
トAP間の間隔は1μｍ、夫々の幅は0.5μｍである。
情報信号は金属層３のランド部LDの中央に記録
される。 Using the master disk 1' thus formed, the optical recording medium 1 as shown in FIG. 6 is obtained by performing the procedure described at the beginning. That is, a low melting point metal layer 3 in which pregrooves PG having a phase depth of λ/8n and address pits AP having a phase depth of λ/4n are formed is deposited on a transparent substrate 2 made of acrylic or the like.
4 is a protective layer. In this case, the pregroove PG
are formed on the land portion LD of the metal layer 3, the pitch thereof is 2 μm, the interval between the pregroove PG and the address pit AP is 1 μm, and the width of each is 0.5 μm.
The information signal is recorded at the center of the land portion LD of the metal layer 3.
尚、記録及び再生時共光学系よりのビームは透
明基板２側から媒体１の金属層３に入射するのは
勿論である。このようにして得られた光学式記録
媒体１の反射光量を第７図を参照して説明する
も、第７図において第４図と対応する部分には同
一符号を付して重複説明を省略する。この場合に
はアドレスピツトの反射光量の変調によるピーク
レベルIPPはIoの50〜60％と第４図の場合に比し
大幅に大となつていることが分かる。 It goes without saying that the beam from the optical system during both recording and reproduction is incident on the metal layer 3 of the medium 1 from the transparent substrate 2 side. The amount of reflected light of the optical recording medium 1 obtained in this manner will be explained with reference to FIG. 7, but in FIG. 7, parts corresponding to those in FIG. do. It can be seen that in this case, the peak level IPP due to the modulation of the amount of reflected light from the address pit is 50 to 60% of Io, which is significantly larger than in the case of FIG.
尚、このようにして形成された光学式記録媒体
は１本のビームを用い、ランド部上のアドレスピ
ツトAPの再生及びトラツキングエラー信号の検
出と共に、ドツトによるランド部LDへの情報信
号の記録を行なう。また、３本のビームを用いて
トラツキングエラーの検出と、アドレスピツトの
再生、情報信号の記録を行なうようにしてもよ
い。再生時においても、同じ装置を用いてランド
部LDに記録されたドツトの位相変調、或いは周
波数変調、PCMされた情報信号を再生すること
ができる。 The optical recording medium thus formed uses a single beam to reproduce the address pit AP on the land, detect a tracking error signal, and record information signals on the land LD using dots. Let's do it. Alternatively, three beams may be used to detect tracking errors, reproduce address pits, and record information signals. During reproduction, the same device can be used to reproduce the phase modulated, frequency modulated, or PCM information signal of the dots recorded on the land portion LD.
上述せる光学式記録媒体によれば、トラツキン
グエラー信号のレベルが大で、プリグルーブの変
調度に多少バラツキがあつても、再生情報信号へ
の影響は少なく、アドレスピツトをＳ／Ｎ良く再
生でき、歩留りが良く、Ｓ／Ｎが良好でドロツプ
アウトの可能性の少ない情報信号を再生できる。
又、アドレスピツトに対するトラツキングエラー
信号は零なので、アドレスピツトによつてトラツ
キングエラー信号に外乱が混入しない。プリグル
ーブには情報信号を記録しないので、その幅を狭
くすることができ、記録密度の向上につながる。 According to the optical recording medium described above, even if the level of the tracking error signal is high and there is some variation in the degree of modulation of the pregroove, the effect on the reproduced information signal is small and the address pit can be reproduced with a good S/N. , it is possible to reproduce information signals with good yield, good S/N ratio, and less possibility of dropout.
Furthermore, since the tracking error signal for the address pit is zero, no disturbance is mixed into the tracking error signal by the address pit. Since no information signal is recorded in the pregroove, its width can be narrowed, leading to an improvement in recording density.
次に第８図を参照して上述の光学式記録媒体の
原盤の製造装置について説明する。７はレーザ光
源（例えばAr又はHe−Cdレーザ光源）であつて
これより例えばＳ偏光のレーザビームLBoを発射
させ、これをビームスプリツタ８に入射して第１
及び第２のビームLB1，LB2に分離する。第１の
ビームLB1はビームスプリツタ８によつてその光
路が90°偏向せしめられ、第２のビームLB2は直
進した後、ミラー９によつてその光路が90°偏向
せしめられる。 Next, referring to FIG. 8, the above-mentioned optical recording medium master manufacturing apparatus will be explained. Reference numeral 7 denotes a laser light source (for example, an Ar or He-Cd laser light source) which emits, for example, an S-polarized laser beam LBo, which is incident on the beam splitter 8 to be sent to the first beam splitter.
and separates into second beams LB 1 and LB 2 . The optical path of the first beam LB 1 is deflected by 90° by the beam splitter 8, and the optical path of the second beam LB 2 is deflected by 90° by the mirror 9 after traveling straight.
これら第１及び第２のビームLB1，LB2は夫々
レンズ１０，１１を介して第１及び第２の光変調
器（電気−光学素子）１２，１３に供給される。
第１の光変調器１２には直流電源１４よりの直流
電圧が与えられる。第２の光変調器１３には信号
源１５よりのパルス信号、即ちトラツク番号及び
セクタ番号を示すアドレス信号が供給されて、第
２のビームLB2が光変調される。第９図及び第１
０図は夫々第１及び第２の光変調器１２，１３か
ら得られたビームの波形を示す。尚、第１及び第
２の光変調器１２，１３に加える電圧によつて、
フオトレジスト層６を露光するビームの強さを、
前者が弱く、後者が強くなるように調整できる。 These first and second beams LB 1 and LB 2 are supplied to first and second optical modulators (electro-optical elements) 12 and 13 via lenses 10 and 11, respectively.
A DC voltage from a DC power supply 14 is applied to the first optical modulator 12 . A pulse signal from a signal source 15, ie, an address signal indicating a track number and a sector number, is supplied to the second optical modulator 13, and the second beam LB2 is optically modulated. Figure 9 and 1
0 shows the waveforms of the beams obtained from the first and second optical modulators 12 and 13, respectively. Note that depending on the voltage applied to the first and second optical modulators 12 and 13,
The intensity of the beam that exposes the photoresist layer 6 is
It can be adjusted so that the former is weak and the latter is strong.
これら第１及び第２の光変調器１２，１３から
得られた夫々Ｓ，Ｐ偏光のビームLB1，LB2は
夫々凸レンズ１６，１７を介して夫々ミラー１
８，１９に入射して、その光路が90°偏向せしめ
られる。第１のビームLB1は更にミラー２０によ
つてその光路は90°偏向せしめられて偏光ビーム
スプリツタ２１に入射せしめられる。又、ミラー
１９によつて90°偏向せしめられた第２のビーム
LB2も偏向ビームスプリツタ２１に入射せしめら
れる。 The S and P polarized beams LB 1 and LB 2 obtained from the first and second optical modulators 12 and 13 are sent to the mirror 1 through convex lenses 16 and 17, respectively.
8 and 19, the optical path thereof is deflected by 90°. The optical path of the first beam LB 1 is further deflected by 90° by a mirror 20 and is made incident on a polarizing beam splitter 21 . Also, a second beam deflected by 90° by mirror 19
LB 2 is also made incident on the deflection beam splitter 21.
そして、偏光ビームスプリツタ２１を出射した
第１及び第２のビームLB1，LB2が凸レンズ２２
を介してミラー２３に入射してその光路が90°偏
向せしめられた後、対物レンズ２４に入射して集
束ビームとなされ、これらビームLB1，LB2が1μ
ｍの間隔を以つて上述のガラス基板５上に形成さ
れたフオトレジスト層６上に照射せしめられ、そ
のフオトレジスト層６が露光せしめられる。この
露光されたフオトレジスト層６は現像されること
により、光に感光した部分が除去されて、第５図
に示した如きプリグルーブPG′及びアドレスピツ
トAP′が形成される。 The first and second beams LB 1 and LB 2 emitted from the polarizing beam splitter 21 are transmitted to the convex lens 22.
After passing through the mirror 23 and deflecting the optical path by 90 degrees, the beam enters the objective lens 24 and becomes a focused beam, and these beams LB 1 and LB 2 are
The photoresist layer 6 formed on the above-mentioned glass substrate 5 is irradiated with the photoresist layer 6 at intervals of m, and the photoresist layer 6 is exposed. The exposed photoresist layer 6 is developed to remove the exposed portions and form pregrooves PG' and address pits AP' as shown in FIG.
上述せる光学式記録媒体の原盤の製造装置によ
れば、上述の光学式記録媒体の原盤を容易に製造
することができる。 According to the above-described apparatus for manufacturing a master of an optical recording medium, the master of the above-described optical recording medium can be easily manufactured.
尚、トラツキングサーボ回路の極性を入れ替え
ることにより、従来の光学式記録再生装置を用い
て本発明による光学式記録デイスクのトラツキン
グは容易である。 Note that by changing the polarity of the tracking servo circuit, it is easy to track the optical recording disk according to the present invention using a conventional optical recording/reproducing device.
発明の効果
上述せる第１の本発明によれば、プリグルーブ
及びアドレスピツトを有し、光学的に記録及び再
生の可能な光学式記録媒体において、トラツキン
グエラー信号のレベルが大で、アドレスピツトの
再生信号のＳ／Ｎが良好で、且つドロツプが少な
く、Ｓ／Ｎの良好な情報信号を再生することので
きるものを得ることができる。Effects of the Invention According to the first invention described above, in an optical recording medium that has a pregroove and an address pit and can be optically recorded and reproduced, the level of the tracking error signal is large and the address pit cannot be reproduced. It is possible to obtain an information signal with a good S/N ratio and less drop, and which can reproduce an information signal with a good S/N ratio.
第２の本発明によれば第１の本発明による光学
式記録媒体の原盤を容易に製造することのできる
光学式記録媒体の原盤の製造装置を得ることがで
きる。 According to the second aspect of the present invention, it is possible to obtain an apparatus for manufacturing an optical recording medium master that can easily manufacture a master disk of an optical recording medium according to the first aspect of the present invention.
第１図及び第２図は従来の記録再生可能な光学
式記録媒体の平面図及び断面図、第３図Ａ，Ｂは
第１図及び第２図の光学式記録媒体の原盤を示す
平面図及び断面図、第４図は従来の光学式記録媒
体の反射光の特性を示す曲線図、第５図Ａ，Ｂは
本発明による光学式記録媒体の原盤を示す平面図
及び断面図、第６図はその原盤を用いて得られた
本発明による光学式記録媒体を示す断面図、第７
図はその光学式記録媒体の反射光の特性を示す曲
線図、第８図は本発明による光学式記録媒体の原
盤の製造装置を示す配置図、第９図及び第１０図
は第８図の装置の第１及び第２の光変調器の出力
ビームの波形を示す波形図である。
１は光学式記録媒体、２は光透過層としての透
明基板、３はその上に形成された反射金属層、４
はその上に形成された保護層、PGはプリグルー
ブ、APはアドレスピツト、７は光源、８は分割
手段、１２，１３は第１及び第２の光変調器、２
４は対物レンズ、１′は原盤である。
1 and 2 are a plan view and a sectional view of a conventional recordable and reproducible optical recording medium, and FIGS. 3A and 3B are plan views showing master discs of the optical recording medium shown in FIGS. 1 and 2. FIG. 4 is a curve diagram showing the characteristics of reflected light of a conventional optical recording medium, FIGS. The figure is a cross-sectional view showing an optical recording medium according to the present invention obtained using the master disk.
The figure is a curve diagram showing the characteristics of reflected light of the optical recording medium, FIG. FIG. 3 is a waveform diagram showing waveforms of output beams of first and second optical modulators of the device. 1 is an optical recording medium, 2 is a transparent substrate as a light-transmitting layer, 3 is a reflective metal layer formed thereon, 4
is a protective layer formed thereon, PG is a pregroove, AP is an address pit, 7 is a light source, 8 is a dividing means, 12 and 13 are first and second optical modulators, 2
4 is an objective lens, and 1' is a master disc.
Claims (1)
び再生用ビームの透過する光透過層の屈折率をｎ
と夫々したとき、光学的に記録及び再生の可能な
記録層のビーム入射面側に同心円状もしくは渦巻
状のλ／8nの位相深さを有するプリグルーブを形成 すると共に、該プリグルーブによつて挟まれた領
域にλ／4nの位相深さを有するアドレスピツトを形 成して成ることを特徴とする光学式記録媒体。 ２ 光源と、該光源からの出射ビームを第１及び
第２のビームに２分する光分割手段と、上記第１
のビームの強度を制御する第１の光変調器と、上
記第２のビームを記録すべきアドレス情報に応じ
てパルス的に光変調する第２の光変調器と、上記
第１のビーム及び上記第２の変調器によつて光変
調された上記第２のビームの供給される対物レン
ズとを有し、フオトレジスト層の被着形成された
基板上の該フオトレジスト層を上記対物レンズに
よつて集束された上記第１及び第２のビームによ
つて走査して、光学式記録媒体に対する記録及び
再生用ビームの波長をλ、該記録及び再生用ビー
ムの透過する光透過層の屈折率をｎと夫々したと
き、上記第１のビームによつてλ／8nの位相深さを 有するプリグルーブを、上記第２のビームによつ
てλ／4nの位相深さを有するアドレスピツトを互い に隣合うように各々上記フオトレジスト層に形成
して光学式記録媒体の原盤を製造するようにした
ことを特徴とする光学式記録媒体の原盤の製造装
置。[Claims] 1. The wavelength of the recording and reproducing beam is λ, and the refractive index of the light transmission layer through which the recording and reproducing beam passes is n.
In each case, a concentric or spiral pregroove having a phase depth of λ/8n is formed on the beam incidence surface side of the optically recordable and readable recording layer, and the pregroove An optical recording medium characterized in that address pits having a phase depth of λ/4n are formed in sandwiched regions. 2 a light source, a light splitting means for dividing an emitted beam from the light source into a first beam and a second beam;
a first optical modulator that controls the intensity of the beam; a second optical modulator that pulse-modulates the second beam in accordance with address information to be recorded; an objective lens to which the second beam optically modulated by a second modulator is supplied; The wavelength of the recording and reproducing beams on the optical recording medium is set to λ, and the refractive index of the light transmitting layer through which the recording and reproducing beams are transmitted is set to λ. n, the first beam forms a pregroove with a phase depth of λ/8n, and the second beam forms an address pit with a phase depth of λ/4n so that they are adjacent to each other. 1. An apparatus for manufacturing a master of an optical recording medium, characterized in that a master of an optical recording medium is manufactured by forming each of the above photoresist layers on the photoresist layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58159457A JPS6050733A (en) | 1983-08-31 | 1983-08-31 | Optical recording medium and producer of master disk of said medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58159457A JPS6050733A (en) | 1983-08-31 | 1983-08-31 | Optical recording medium and producer of master disk of said medium |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6334465A Division JP2611681B2 (en) | 1994-12-19 | 1994-12-19 | Optical recording medium |
| JP9049034A Division JP2998681B2 (en) | 1997-03-04 | 1997-03-04 | Optical recording medium and method for producing master disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6050733A JPS6050733A (en) | 1985-03-20 |
| JPH0534737B2 true JPH0534737B2 (en) | 1993-05-24 |
Family
ID=15694179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58159457A Granted JPS6050733A (en) | 1983-08-31 | 1983-08-31 | Optical recording medium and producer of master disk of said medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6050733A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2613199B2 (en) * | 1986-12-10 | 1997-05-21 | 株式会社日立製作所 | Information reproducing method and optical disk |
| JP2613200B2 (en) * | 1987-01-09 | 1997-05-21 | 株式会社日立製作所 | Optical disk master production equipment |
| JPH01107336A (en) * | 1987-10-21 | 1989-04-25 | Hitachi Ltd | Optical disk |
| JPH04286736A (en) * | 1991-03-15 | 1992-10-12 | Sharp Corp | Production of substrate for master disk of optical memory element |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103715A (en) * | 1977-02-23 | 1978-09-09 | Victor Co Of Japan Ltd | Grooveless disc for information recording medium |
| JPS56145535A (en) * | 1980-04-15 | 1981-11-12 | Matsushita Electric Ind Co Ltd | Disc for optical recording |
| JPS5733441A (en) * | 1980-08-07 | 1982-02-23 | Matsushita Electric Ind Co Ltd | Optical information recorder and reproducer |
| JPS57138065A (en) * | 1981-01-12 | 1982-08-26 | Philips Nv | Recording carrier |
| JPS5841446A (en) * | 1981-09-04 | 1983-03-10 | Hitachi Ltd | Optical information tracking system |
| JPS5850638A (en) * | 1981-09-18 | 1983-03-25 | Fujitsu Ltd | Production of pregrooved original plate for optical disc |
| JPS5873026A (en) * | 1981-10-26 | 1983-05-02 | Nippon Telegr & Teleph Corp <Ntt> | Optical disc provided with groove |
| JPS5877048A (en) * | 1981-10-30 | 1983-05-10 | Pioneer Electronic Corp | Reader for photomagnetic recording and reproducing system |
| JPS58100249A (en) * | 1981-12-09 | 1983-06-14 | Matsushita Electric Ind Co Ltd | Carrier for optical information recording |
| JPS58102347A (en) * | 1981-12-11 | 1983-06-17 | Mitsubishi Electric Corp | Optical disk record carrier |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58165794U (en) * | 1982-04-27 | 1983-11-04 | 株式会社東芝 | optical information storage medium |
-
1983
- 1983-08-31 JP JP58159457A patent/JPS6050733A/en active Granted
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103715A (en) * | 1977-02-23 | 1978-09-09 | Victor Co Of Japan Ltd | Grooveless disc for information recording medium |
| JPS56145535A (en) * | 1980-04-15 | 1981-11-12 | Matsushita Electric Ind Co Ltd | Disc for optical recording |
| JPS5733441A (en) * | 1980-08-07 | 1982-02-23 | Matsushita Electric Ind Co Ltd | Optical information recorder and reproducer |
| JPS57138065A (en) * | 1981-01-12 | 1982-08-26 | Philips Nv | Recording carrier |
| JPS5841446A (en) * | 1981-09-04 | 1983-03-10 | Hitachi Ltd | Optical information tracking system |
| JPS5850638A (en) * | 1981-09-18 | 1983-03-25 | Fujitsu Ltd | Production of pregrooved original plate for optical disc |
| JPS5873026A (en) * | 1981-10-26 | 1983-05-02 | Nippon Telegr & Teleph Corp <Ntt> | Optical disc provided with groove |
| JPS5877048A (en) * | 1981-10-30 | 1983-05-10 | Pioneer Electronic Corp | Reader for photomagnetic recording and reproducing system |
| JPS58100249A (en) * | 1981-12-09 | 1983-06-14 | Matsushita Electric Ind Co Ltd | Carrier for optical information recording |
| JPS58102347A (en) * | 1981-12-11 | 1983-06-17 | Mitsubishi Electric Corp | Optical disk record carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6050733A (en) | 1985-03-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH07107744B2 (en) | Optical disc playback method | |
| JP2000231745A (en) | Optical recording medium, original disk for manufacturing optical recording medium, and its manufacture | |
| JP2000149331A (en) | Optical recording medium, master disk for manufacturing the medium, and optical recording and reproducing device | |
| US7242662B2 (en) | Optical recording/reproducing medium, mother stamper for producing optical recording/reproducing medium and optical recording/reproducing device | |
| JPH0534737B2 (en) | ||
| KR100913509B1 (en) | Optical recording medium, master disc for manufacturing optical recording medium, and device and method for manufacturing master disc for manufacturing optical recording medium | |
| US7251211B2 (en) | Optical medium having grooves along recording tracks, and an associated master disc and apparatus | |
| WO1984003988A1 (en) | Disc-shaped recording medium | |
| US7280461B2 (en) | Optical recording/reproducing medium, stamper for manufacturing optical recording/reproducing medium, and optical recording/reproducing apparatus | |
| US6934244B2 (en) | Optical recording medium and stamper for manufacturing the same | |
| US6597655B2 (en) | Optical recording medium having wobbling groove extending along the tracks | |
| JP2998681B2 (en) | Optical recording medium and method for producing master disk | |
| JP2611681B2 (en) | Optical recording medium | |
| JP2636563B2 (en) | optical disk | |
| JP4320916B2 (en) | Optical recording medium, master for manufacturing optical recording medium, and optical recording / reproducing apparatus | |
| JP2005032317A (en) | Optical recording and reproducing medium, stamper for manufacturing optical recording and reproducing medium, and optical recording method | |
| JPH02103752A (en) | Optical disk and its production | |
| JPH0668474A (en) | Optical recording medium and its reproducing device | |
| JP4320915B2 (en) | Optical recording medium, master for manufacturing optical recording medium, and optical recording / reproducing apparatus | |
| JPH11339329A (en) | Device and method for exposure | |
| JPH10302322A (en) | Optical disk and manufacture therefor | |
| JP2000132869A (en) | Optical recording medium, original board for its manufacture and optical recording and reproducing device | |
| JP2003045040A (en) | Optical recording medium, master disk for the optical recording medium, molding stamper, manufacturing methods thereof, and optical recording/reproducing method | |
| JP2001195746A (en) | Optical information recording medium having additional information and method for manufacturing the same | |
| JPS62223837A (en) | Manufacture of optical recording master disk |