JPS59178311A - Dimension measuring apparatus - Google Patents

Dimension measuring apparatus

Info

Publication number
JPS59178311A
JPS59178311A JP5139183A JP5139183A JPS59178311A JP S59178311 A JPS59178311 A JP S59178311A JP 5139183 A JP5139183 A JP 5139183A JP 5139183 A JP5139183 A JP 5139183A JP S59178311 A JPS59178311 A JP S59178311A
Authority
JP
Japan
Prior art keywords
pressure
dimension
measuring
measured
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5139183A
Other languages
Japanese (ja)
Inventor
Toshimitsu Yamada
山田 利光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5139183A priority Critical patent/JPS59178311A/en
Publication of JPS59178311A publication Critical patent/JPS59178311A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002Details
    • G01B3/008Arrangements for controlling the measuring force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To measure a dimension with good accuracy even in an object to be measured comprising a low hardness material, by a method wherein an apparatus for detecting pressure applied to a measuring surface is provided to simultaneously detect the pressure and the dimension while the dimension under predetermined pressure is displayed as a measured value. CONSTITUTION:After a dial gauge 21 is secured at a predetermined height, a spindle 22 is downwardly moved and a dimension display apparatus 7 is set to zero. In the next step, an object to be measured is grasped by a surface plate and a measuring surface 23 while the spindle 22 is downwardly moved to apply measuring pressure and the dimension value at the point of time when said pressure reaches predetermined pressure is set as the dimension of the object to be measured. Because a bellows 15 is extended and contracted by the movement of the measuring surface 23, the pressure transmitting medium 10 sealed therein transmits pressure to a pressure converting apparatus 9 to display the measuring pressure by a pressure display apparatus 12. In addition, simultaneously with display of the pressure, a comparison signal 24 is outputted to a dimension value A/D converting apparatus 6. This dimension value A/D converting apparatus 6 is provided with a circuit for temporarily holding the display of the dimension value and, by inputting the comparison signal 24 thereto, the dimension value under predetermined measuring pressure can be displayed.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、物体の寸法、移動量、変位量等(以下寸法と
総称する)を測定する装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for measuring dimensions, movement amounts, displacement amounts, etc. (hereinafter collectively referred to as dimensions) of an object.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

一般に物体の寸法を測定するには、ノギス・ノ・イトゲ
ージ・マイクロメータ・ダイヤルゲージ等の測定器上の
測定面の移動量を測定器に付けられた目盛りで表す。ま
た、移動量を光等により電気的に検出し表示する。
Generally, to measure the dimensions of an object, the amount of movement of a measuring surface on a measuring device such as a caliper, a gauge, a micrometer, or a dial gauge is expressed by a scale attached to the measuring device. Additionally, the amount of movement is electrically detected and displayed using light or the like.

ノギスによる測定はスライダーを移動させ、被測定物を
測定面ではさみスライダーの移動量を読む。マイクロメ
ータによる測定も同様に被測定物を、スピン+゛ルを移
動させて測定面ではさみ、その移動量を読む。またノ・
イトゲージやダイヤルゲージによる測定は、それぞれ基
準点例えば定盤をゼロ点として、被測定物上の測定点ま
でのスライダーやスピンドルの移動量を読む。これらの
測定器はいずれも、被測定物に測定器の測定面を接触さ
せて使用するが、特にノギスやノルイトゲージでは、接
触時の測定圧力(以下測定圧力と称す)についての調節
機構を持たないため、測定者の経験的圧力において測定
が行われていた。金属材料あるいはそれと同等な硬度を
有する材料においては、寸法測定に際し、測定圧力の大
小は問題にならないが、プラスチック材料、織物、フェ
ルト等の比較的硬度の小さい材料が被測定物の場合は、
測定圧力によりその寸法が大きく変わるため、測定者に
よる測定値のバラツキや、−測定者によっても測定時に
よるバラツキを生じていた。
To measure with a caliper, move the slider, hold the object to be measured between the measurement surfaces, and read the amount of slider movement. In the same way, when measuring with a micrometer, the object to be measured is moved by a spin + angle, held between measurement surfaces, and the amount of movement is read. Also no・
When measuring with a light gauge or dial gauge, the distance of movement of the slider or spindle to the measuring point on the object to be measured is read using a reference point such as a surface plate as the zero point. All of these measuring instruments are used by bringing the measuring surface of the measuring instrument into contact with the object to be measured, but calipers and Noruit gauges in particular do not have an adjustment mechanism for the measuring pressure at the time of contact (hereinafter referred to as measuring pressure). Therefore, measurements were performed based on the empirical pressure of the measurer. When measuring dimensions of metal materials or materials with equivalent hardness, the magnitude of the measurement pressure does not matter, but when the object to be measured is a material with relatively low hardness such as plastic materials, textiles, felt,
Since the dimensions vary greatly depending on the measurement pressure, the measurement values vary depending on the measurer and also vary depending on the measurer at the time of measurement.

マイクロメータでは測定圧力を定める機構として、ラチ
ェットストップあるいはフリクションストップが設けら
れている。しかしながらその機械的な機構による測定圧
力は、l5O3611では5〔N〕〜15〔N〕、と測
定されているだけで、バラツキの範囲を広く考えた値と
なっている。このため個々のマイクロメータで測定圧力
が異なっていた。
A micrometer is equipped with a ratchet stop or a friction stop as a mechanism for determining the measured pressure. However, the pressure measured by the mechanical mechanism is only 5 [N] to 15 [N] for 15O3611, which is a value that takes into account a wide range of variation. For this reason, the pressure measured by each micrometer was different.

またダイヤルゲージも、測定圧力を定める機構として、
スピンドルを引戻す引戻バネが設けられ、そのバネの力
で測定圧力が加えられる。測定圧カバ例工はJIS B
 7503 f、[測定圧力は140(gf)を超えて
はならない、測定力の最大値と最小値の差が60[gL
lを超えてはならない」と広範囲((測定されているだ
けである。このため、1固々のダイヤルゲージで測定圧
力に違いが生じ、−個のダイヤルゲージにおいてもスピ
ンドルの位置によって測定圧力に違いが生じていた。
Dial gauges also serve as a mechanism for determining measurement pressure.
A retraction spring is provided which pulls back the spindle, the force of which applies the measuring pressure. Measurement pressure cover example construction is JIS B
7503 f, [Measuring pressure must not exceed 140 (gf), the difference between the maximum and minimum measuring force is 60 [gL]
Therefore, there is a difference in the measured pressure with one dial gauge, and even with - dial gauges, the measured pressure varies depending on the position of the spindle. There was a difference.

このようにマイクロメータやダイヤルゲージは、測定圧
力を付加する機能は有するものの、測定圧力が一定では
ないので、比較的硬度の小さい材料を取り扱う生産工程
における品質管理等に適さなかった。また材料の種類あ
るいは品質管理の目的別シてよって、6111定圧力を
変えて寸法を測定することも出来なかった。
As described above, although micrometers and dial gauges have the function of applying measurement pressure, the measurement pressure is not constant, so they are not suitable for quality control in production processes that handle materials with relatively low hardness. Furthermore, depending on the type of material or the purpose of quality control, it was not possible to measure the dimensions by changing the 6111 constant pressure.

〔発明の目的〕[Purpose of the invention]

本発明は上記の如き従来の寸法測定装置の欠点を改善し
、硬度の小さな材質の被測定物においても寸法測定が精
度良くできる寸法i’1lll定装置を提供することを
目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a dimension i'1lll determination device that can improve the drawbacks of the conventional dimension measuring devices as described above and can accurately measure the dimensions of objects to be measured made of materials with low hardness.

〔発明の概要〕[Summary of the invention]

上記目的を達成するには本発明の寸法o11J定装置に
おいては、測定面に加わる圧力を検出する装置を設け、
寸法と圧力を同時に検出し、所定圧力の時の寸法を測定
値として表示するようにする。
In order to achieve the above object, the dimension o11J determination device of the present invention is provided with a device for detecting the pressure applied to the measurement surface,
Dimensions and pressure are detected at the same time, and the dimensions at a predetermined pressure are displayed as measured values.

〔発明の実施例〕[Embodiments of the invention]

本発明−1の一実施例の構成を第1図および第2図を参
照して説明する。寸法測定装置は、寸法処理装置1と圧
力検出装置2と記憶装置3ならびに外部出力装置4から
成る。寸法処理装置1は、寸法人力装置5と寸法値A/
D変換装置6と寸法表示装置7から成る。圧力検出装置
2は、圧力入力装置8と圧力変換装置9とから成り、圧
力変換装置9は圧力値A、/D変換装置10と比較装置
11と圧力表示装置12とから成る。
The configuration of an embodiment of the present invention-1 will be described with reference to FIGS. 1 and 2. The dimension measuring device includes a dimension processing device 1, a pressure detection device 2, a storage device 3, and an external output device 4. The dimension processing device 1 has a dimension processing device 5 and a dimension value A/
It consists of a D conversion device 6 and a dimension display device 7. The pressure detection device 2 includes a pressure input device 8 and a pressure conversion device 9, and the pressure conversion device 9 includes a pressure value A/D conversion device 10, a comparison device 11, and a pressure display device 12.

圧力入力装置8は、そのベローズホルダー13内に測定
面を取り付けるための下部取り付はネジ14を設けたベ
ローズ15を納める。圧力値Aρ変換装置10は圧力変
換素子を有し、圧力のアナログ値をディジタル変換する
。圧力変換素子は感圧用半導体変換素子あるいは感圧用
水晶伝動素子により圧力を受ける。
The pressure input device 8 houses a bellows 15 provided with a screw 14 at the bottom for mounting the measuring surface in its bellows holder 13 . The pressure value Aρ conversion device 10 has a pressure conversion element and converts an analog value of pressure into a digital value. The pressure conversion element receives pressure from a pressure-sensitive semiconductor conversion element or a pressure-sensitive crystal transmission element.

圧力入力装置8の圧力伝達口16と圧力値A/D変換装
置10の圧力変換素子とを圧カチューブ17テ結ヒ、ベ
ローズ15、圧カチューフ゛17および圧力値A/’D
変換装置10の圧力変換素子内部に圧力伝達媒体18と
して油あるいは空気を封入する。
The pressure transmission port 16 of the pressure input device 8 and the pressure conversion element of the pressure value A/D conversion device 10 are connected to the pressure tube 17, the bellows 15, the pressure tube 17 and the pressure value A/D.
Oil or air is sealed as a pressure transmission medium 18 inside the pressure conversion element of the conversion device 10.

ベローズホルダ13には内圧調整口19や寸法損11定
器具に取り付けるための上部取り付ネジ20を設ける。
The bellows holder 13 is provided with an upper mounting screw 20 for mounting to an internal pressure adjustment port 19 or a dimensional loss 11 regulating device.

このように構成した寸法l1lII]定装置は、寸法値
とその測定圧力値を同時にA/T) 変換して挾示する
とともに、測定圧力を比較装置11により事前に設定し
た圧力と比較し、測定圧力が設定圧力より大きくなった
ら双方の〜Φ変換処理を中止し、設定圧力と等しい測定
圧力での寸法値を表示し、また記憶する。
The dimension determination device configured in this way simultaneously converts and displays the dimension value and its measured pressure value (A/T), and also compares the measured pressure with the pressure set in advance by the comparator 11, and performs the measurement. When the pressure becomes larger than the set pressure, both ~Φ conversion processes are stopped, and the dimensional values at the measured pressure equal to the set pressure are displayed and stored.

本発明を応用したダイヤル形寸法測定装置について第3
図を参照して説明する。
Part 3 regarding the dial type dimension measuring device to which the present invention is applied
This will be explained with reference to the figures.

本発明のダイヤルゲージ形寸法測定装置を用いて寸法測
定をおこなうにはダイヤルゲージ21を所定の高さに固
定した後、スピンドル22を下向に移動し、測定面23
をゼロ点たとえば定盤に押し付けて、所定の測定圧力に
到達式せ、寸法表示装置7を「ゼロ」にセットする。次
に被測定物を定盤と測定面23で(佳さみ、スピンドJ
L/22を下向に移動し測定圧力を加え所定の圧力に到
達した時点の寸法値を、その被測定物の寸法とする。測
定圧力は、測定面23の移動によりベローズ15が伸縮
するため、封入されている圧力伝達媒体18が、圧力変
換装置9に圧力を伝え圧力表示装置12で表示する。ま
た圧力は表示と同時に比較信号24が、寸法値A/D変
換装置6に出力される。寸法値Aρ変換装#6は寸法値
の表示を一時保持する回路を設け、前記比較信号24を
入力させることにより、所定の測定圧力時の寸法値を表
示することができる。
To measure dimensions using the dial gauge type dimension measuring device of the present invention, after fixing the dial gauge 21 at a predetermined height, the spindle 22 is moved downward, and the measurement surface 23 is moved downward.
is pressed against the zero point, for example, a surface plate, to reach a predetermined measurement pressure, and the dimension display device 7 is set to "zero". Next, the object to be measured is placed on the surface plate and the measuring surface 23 (Kasami, Spind J
L/22 is moved downward, measurement pressure is applied, and the dimension value at the time when a predetermined pressure is reached is defined as the dimension of the object to be measured. Since the bellows 15 expands and contracts due to the movement of the measurement surface 23, the pressure transmission medium 18 enclosed therein transmits the pressure to the pressure converter 9 and displays it on the pressure display device 12. Further, at the same time as the pressure is displayed, a comparison signal 24 is output to the dimension value A/D converter 6. Dimensional value Aρ conversion device #6 is provided with a circuit that temporarily holds the display of the dimensional value, and by inputting the comparison signal 24, it is possible to display the dimensional value at a predetermined measurement pressure.

圧力検出装置2の圧力入力装置8はベローズ機構のため
、小形化できダイヤルゲージ21の測定un23とスピ
ンドル220間に設置可能となる。
Since the pressure input device 8 of the pressure detection device 2 has a bellows mechanism, it can be made smaller and can be installed between the measurement unit 23 of the dial gauge 21 and the spindle 220.

圧力変換装置9の感圧用半導体変換素子や感圧用水晶成
動素子は、容易に圧力を電気量に変換出来号として利用
できる。圧力入力装置8と圧力変換装置9とを結ぶ圧力
チューブ17中には、圧力伝達媒体として列えは空気を
封入する。空気では圧力伝達損失が大きいが、保守が容
易である。また保守が難しいが圧力伝達損失の小さい油
を使用することも可能である。高温下での測定において
は熱膨張の小さな圧力伝達材が必要である。
The pressure-sensitive semiconductor conversion element and the pressure-sensitive quartz crystal element of the pressure conversion device 9 can be used as a signal for easily converting pressure into an amount of electricity. A pressure tube 17 connecting the pressure input device 8 and the pressure conversion device 9 is filled with air as a pressure transmission medium. Air has a large pressure transmission loss, but maintenance is easy. It is also possible to use oil with low pressure transmission loss, although maintenance is difficult. For measurements at high temperatures, a pressure transmitting material with low thermal expansion is required.

本発明のダイヤルゲージ形寸法測定装置は、比較的硬度
の小さい材料で特にテープ状またはシート状の薄物につ
いて、測定圧力を一定にしての寸法測定やいろいろな圧
力での寸法測定ができる。
The dial gauge shape size measuring device of the present invention is capable of measuring the dimensions of materials with relatively low hardness, especially tape-shaped or sheet-shaped thin objects, with a constant measurement pressure or with various pressures.

本発明の池の実施列としてマイクロメータ形寸法測定装
置について、J4図を参照して説明する。
A micrometer type dimension measuring device as an embodiment of the pond according to the present invention will be explained with reference to Fig. J4.

圧力入力装置8を寸法値を電気的に処理し表示するマイ
クロメータ25のアンビル26と測定面230間に設け
、圧力伝達媒体を封入した圧カテユープ17で圧力変換
装置9へ結び、圧力検出および圧力表示を行う。寸法値
は寸法値信号線27により寸法rIiA/1)変換装置
6に人力される。被測定物は測定面23とスピンドル2
20間にはさみ、測定圧力と寸法値が同時に表示される
ので、比較的硬度の小さい材料の特にブロック状の物に
ついて、測定圧力を一定にしての寸法測定や各圧力下の
寸法測定ができる。
A pressure input device 8 is provided between the anvil 26 of the micrometer 25 that electrically processes and displays dimensional values and the measurement surface 230, and is connected to the pressure transducer 9 with a pressure catheup 17 containing a pressure transmission medium, for pressure detection and pressure. Perform display. The dimension value is manually input to the dimension rIiA/1) conversion device 6 via the dimension value signal line 27. The object to be measured is the measurement surface 23 and the spindle 2.
Since the measurement pressure and dimensional values are displayed simultaneously, it is possible to measure dimensions with a constant measurement pressure or under various pressures, especially for block-shaped objects made of relatively low hardness materials.

本発明の他の実施例としてノギス形寸法測定装置につい
て、第5図を参照して説明する。圧力入力装置8を寸法
値を電気的え処理し表示するノギス28のジヨウ29に
設け、ベローズ15の下部取付はネジ14に測定面23
を設ける。圧力伝達媒体18を封入した圧力チューブ1
7で寸法表示装置7と一体にした圧力変換装置9と圧力
入力装置5とを結び、圧力検出および圧力表示を行う。
A caliper type dimension measuring device as another embodiment of the present invention will be described with reference to FIG. A pressure input device 8 is provided on the mount 29 of a caliper 28 that electrically processes and displays dimensional values, and the lower part of the bellows 15 is attached to the measuring surface 23 on the screw 14.
will be established. Pressure tube 1 enclosing pressure transmission medium 18
7 connects the pressure converting device 9 integrated with the dimension display device 7 and the pressure input device 5 to perform pressure detection and pressure display.

寸法値はジヨウ29の移動量により光等による電気量で
直接寸法表示器7に表示される。被測定物は測定面23
ではさみ、測定圧力と寸法値が同時に表示されるので、
比較的硬度の小さい材料で大物についても片手で容易に
、測定圧力を一定にしての寸法測定や谷圧力下の寸法測
定ができる。
The dimension value is directly displayed on the dimension display 7 by the amount of electricity using light or the like depending on the amount of movement of the jaw 29. The object to be measured is the measurement surface 23
With scissors, the measured pressure and dimension value are displayed at the same time, so
You can easily measure the dimensions of large objects made of materials with relatively low hardness with one hand while keeping the measurement pressure constant or under valley pressure.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明においてはダイヤルゲージ形
・マイクロゲージ形およびノギス形等の寸法測定器の測
定圧力を、ベローズによる圧力入力器と圧力伝達媒体封
入の圧力チューブと圧力を電気量に変換する変換器とか
ら成る圧力検出装置で測定出来るようにしたので、被測
定物の寸法値とその測定圧力を同時に測定出来、プラス
チック材料等の比較的硬度の小さい材料の寸法測定にあ
たって所定の測定圧力における寸法測定が出来る。
As explained above, in the present invention, the pressure measured by a dimension measuring device such as a dial gauge type, micro gauge type, or caliper type is converted into an electrical quantity using a pressure input device using a bellows and a pressure tube containing a pressure transmission medium. Since it is possible to measure with a pressure detection device consisting of a transducer, it is possible to measure the dimension value of the object to be measured and its measurement pressure at the same time. Dimensions can be measured.

したがって、測定時の圧力が一定でないことに基因する
寸法測定誤差を排除することもできる。
Therefore, it is also possible to eliminate dimensional measurement errors caused by uneven pressure during measurement.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の寸法測定装置の構成を示すブロック図
、第2図は本発明の寸法測定装置において使用する圧力
入力装置の一実施例を示す断面図、第3図は不発明の一
実施例のダイヤルゲージ形寸法測定装置を示す構成図、
第4図は本発明の1mの実施例のマイクロメータ形寸法
測定装置を示す構成図、第5図は不発明のさらに他の実
施列としてのノギス形寸法測定装置を示す構成図である
。 1 寸法処理装置  2 圧力検出装置3・・記憶装置
    4 、外部出力装置5−・寸法人力装置  6
・寸法値A/D変換装置7 ・寸法表示装置  8 圧
力入力装置d9・・圧力変換装置  10・圧力値A/
D変換装置11−比較装置    12−圧力表示装置
130.ベローズホルダー 14・下部数ル付はネジJ
5  ベローズ    16・圧力伝達口17 圧力チ
ューブ  18 圧力伝達媒体19−・内圧調整口  
 20 上部取り付はネジ21− ダイヤルゲージ  
22  スピンドル23・測定面     24  比
較信号25  マイクロメータ  26・アノビル27
・・寸法値信号線  28−ノギス29  ジヨウ 第1図 第2図 第3因 第4図 L1
FIG. 1 is a block diagram showing the configuration of the dimension measuring device of the present invention, FIG. 2 is a sectional view showing an embodiment of the pressure input device used in the dimension measuring device of the present invention, and FIG. 3 is a block diagram showing the configuration of the dimension measuring device of the present invention. A configuration diagram showing a dial gauge type dimension measuring device according to an embodiment,
FIG. 4 is a block diagram showing a micrometer type dimension measuring device according to a 1 m embodiment of the present invention, and FIG. 5 is a block diagram showing a caliper type dimension measuring device as yet another embodiment of the invention. 1 Dimension processing device 2 Pressure detection device 3...Storage device 4, External output device 5--Dimension manual device 6
・Dimension value A/D conversion device 7 ・Dimension display device 8 Pressure input device d9...Pressure conversion device 10.Pressure value A/
D conversion device 11-comparison device 12-pressure display device 130. Bellows holder 14・Bottom number is screw J
5 Bellows 16・Pressure transmission port 17 Pressure tube 18 Pressure transmission medium 19−・Internal pressure adjustment port
20 Upper mounting screw 21- Dial gauge
22 Spindle 23/Measurement surface 24 Comparison signal 25 Micrometer 26/Anobil 27
...Dimension value signal line 28-Caliper 29 Figure 1 Figure 2 Figure 3 Cause Figure 4 L1

Claims (1)

【特許請求の範囲】 1、被測定物に接触する測定面と、この測定面の位置を
検出し表示する寸法処理装置と、前記測定面に加わる圧
力を検出し表示する圧力検出装置とを備えたことを特徴
とする寸法測定装置。 2、圧力検出装置は、測定面に近接して設けられた圧力
入力装置と、この圧力入力装置に管によって接続された
圧力変換装置と、この圧力変換装置および寸法処理装置
に電気的に接続され設定圧力値と検出圧力値とを比較す
る比較装置と、この比較装置に接続された圧力表示装置
とを備えたことを特徴とする特許請求の範囲第1項記載
の寸法測定装置。 3、 圧力入力装置は圧力伝達流体を封入したベローズ
を備えたことを特徴とする特許請求の範囲第2項記載の
寸法測定装置。
[Claims] 1. A measuring surface that contacts the object to be measured, a dimension processing device that detects and displays the position of this measuring surface, and a pressure detecting device that detects and displays the pressure applied to the measuring surface. A dimension measuring device characterized by: 2. The pressure detection device includes a pressure input device provided close to the measurement surface, a pressure conversion device connected to the pressure input device by a pipe, and an electrical connection to the pressure conversion device and the dimension processing device. 2. The dimension measuring device according to claim 1, further comprising a comparison device for comparing a set pressure value and a detected pressure value, and a pressure display device connected to the comparison device. 3. The dimension measuring device according to claim 2, wherein the pressure input device includes a bellows containing a pressure transmission fluid.
JP5139183A 1983-03-29 1983-03-29 Dimension measuring apparatus Pending JPS59178311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5139183A JPS59178311A (en) 1983-03-29 1983-03-29 Dimension measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5139183A JPS59178311A (en) 1983-03-29 1983-03-29 Dimension measuring apparatus

Publications (1)

Publication Number Publication Date
JPS59178311A true JPS59178311A (en) 1984-10-09

Family

ID=12885636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5139183A Pending JPS59178311A (en) 1983-03-29 1983-03-29 Dimension measuring apparatus

Country Status (1)

Country Link
JP (1) JPS59178311A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117706432A (en) * 2024-02-02 2024-03-15 合肥中航天成电子科技有限公司 Pin detection equipment for SOP packaging element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117706432A (en) * 2024-02-02 2024-03-15 合肥中航天成电子科技有限公司 Pin detection equipment for SOP packaging element
CN117706432B (en) * 2024-02-02 2024-04-30 合肥中航天成电子科技有限公司 Pin detection equipment for SOP packaging element

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