JPS59177539A - Thin film for optical recording and its production - Google Patents

Thin film for optical recording and its production

Info

Publication number
JPS59177539A
JPS59177539A JP58051598A JP5159883A JPS59177539A JP S59177539 A JPS59177539 A JP S59177539A JP 58051598 A JP58051598 A JP 58051598A JP 5159883 A JP5159883 A JP 5159883A JP S59177539 A JPS59177539 A JP S59177539A
Authority
JP
Japan
Prior art keywords
film
optical recording
silver
light
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58051598A
Other languages
Japanese (ja)
Inventor
Tomoaki Yamada
山田 智秋
Masaharu Fukuma
福馬 政晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP58051598A priority Critical patent/JPS59177539A/en
Publication of JPS59177539A publication Critical patent/JPS59177539A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24306Metals or metalloids transition metal elements of groups 3-10
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24308Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318Non-metallic elements
    • G11B2007/2432Oxygen
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass

Abstract

PURPOSE:To enable readout of an optical charge in a thin film for optical recording when irradiated with visible light and to enable simple erasure of the recording by heating by laminating of depositing by evaporation tungsten trioxide and silver on a substrate or laminating silver on an oxide film contg. tungsten trioxide. CONSTITUTION:Tungsten trioxide is vacuum-deposited by using a heating boat formed of tungsten on a quartz glass substrate and in sucession, silver is deposited by evaporation thereon to obtain a thin film for optical recording. After the resultant thin film for optical recording is heated, white light is irradiated thereto and the spectral transmission characteristic of the film after the heating and the spectral transmission characteristic of the film after the irradiation of the light are inverstigated, the spectral curve A of the film after the heating and the spectral curve B after the irradiation of light are obtd. The transmissivity of the film decreases by about 5% at about 450-650nm and by about 5% at 850-1,300nm when irradiated with light as is evident from the curve. When the film after the irradiation of light is reheated, the transmissivity is reset almost to the spectral curve before the irradiation of light and the optical recording is made possible again.

Description

【発明の詳細な説明】 本発明は記録、消去が可能な光学記録用薄膜とその製造
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical recording thin film that can be recorded and erased, and a method for manufacturing the same.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来、銀を含む記録、消去が可能な光学記録材料として
は、フォトクロミックガラスが知られている。フォトク
ロミックガラスではガラス中に分散させたハロゲン化銀
が光照射によシハロケ゛ンと銀に解離することにより感
光し、光照射を中止すると逆反応によってもとにもどる
Photochromic glass is conventionally known as an optical recording material containing silver that can be recorded and erased. In photochromic glass, silver halide dispersed in the glass is sensitized by dissociating into cyhaloquine and silver upon irradiation with light, and returns to its original state through a reverse reaction when irradiation with light is stopped.

フォトクロミックガラスの感光域は紫外から可視である
。こうしたフォトクロミックガラスの機能を薄膜で実現
しようとする試みとして、ノ・ロケ゛ン化銀とSn02
 + SnBr2等を混合蒸着した例がちシ可逆的な感
光が確認されている。しかしながら、これらのフォトク
ロミックガラスおよびその薄膜は室温においても光照射
を中止すると記録が失なわれ、また薄膜では解離したハ
ロケ゛ンが脱離しやすく特性が劣化するという欠点があ
・った。
The photosensitive range of photochromic glass is from ultraviolet to visible. In an attempt to realize the functions of photochromic glass with a thin film, we have attempted to realize the functions of photochromic glass using
+Reversible photosensitivity has been confirmed in many cases where SnBr2 and the like are mixed and deposited. However, these photochromic glasses and thin films thereof have the disadvantage that recording is lost even at room temperature when light irradiation is stopped, and that the thin films are susceptible to dissociated halogens, resulting in deterioration of their properties.

酸化物と銀から々る光学記録用薄膜としては同一発明者
による希土類酸化物と銀からなるもの(特願昭57−1
67784号)がある。光照射時の膜の変化は本発明と
ほぼ同様であるが感度、透過率変化量は本発明よシ劣る
A thin film for optical recording made of an oxide and silver is a thin film made of a rare earth oxide and silver by the same inventor (Patent Application No. 57-1).
No. 67784). The change in the film upon irradiation with light is almost the same as that of the present invention, but the sensitivity and amount of change in transmittance are inferior to the present invention.

〔発明の目的〕[Purpose of the invention]

本発明は、可視光の照射により光学的な変化を起こし、
その変化を光学的に読み出すことができ、かつ加熱によ
って記録を簡単に消去しうる光学記録用薄膜とその製造
方法を提供しようとするものである。
The present invention causes an optical change by irradiation with visible light,
The object of the present invention is to provide an optical recording thin film whose changes can be read out optically and whose records can be easily erased by heating, and a method for manufacturing the same.

〔発明の実施例〕[Embodiments of the invention]

第1図(a)は本発明の第1の実施例であり、1は石英
ガラス基板、2はその上に蒸着した約1000Xの三酸
化タングステン膜であり、3はその上に積層して蒸着し
た約150Xの銀の蒸着膜である。第1図(b)はこれ
を空気巾約200℃で10分間熱処理したもので、4の
層では三酸化タングステンと銀は一部化合物を形成し、
この化合物と銀が三酸化タンゲステン膜中に分散した状
態となシ、光学記録用薄膜を形成している。
FIG. 1(a) shows a first embodiment of the present invention, in which 1 is a quartz glass substrate, 2 is a tungsten trioxide film of about 1000X deposited on it, and 3 is a tungsten trioxide film deposited on top of it. It is a evaporated silver film of about 150X. Figure 1(b) shows this after being heat-treated at an air width of approximately 200°C for 10 minutes. In layer 4, tungsten trioxide and silver partially form a compound.
When this compound and silver are dispersed in the tungsten trioxide film, a thin film for optical recording is formed.

第2図(a)は本発明の第2の実施例であシ、1は石英
ガラス基板、5はガラス基板上に三酸化タングステンと
銀を同時に蒸着して形成した膜であり、三酸化タングス
テン中に銀が分散している。第2図(b)は、これを空
気中200℃約10分間熱処理したもので、三酸化タン
グステンと銀は一部化合物を形成し第1図(b)と等価
な光学記録用薄膜4が得られる。
FIG. 2(a) shows a second embodiment of the present invention, in which 1 is a quartz glass substrate, and 5 is a film formed by simultaneously depositing tungsten trioxide and silver on a glass substrate. Silver is dispersed inside. FIG. 2(b) shows a result of heat-treating this in air at 200°C for about 10 minutes. Tungsten trioxide and silver partially form a compound, resulting in an optical recording thin film 4 equivalent to that shown in FIG. 1(b). It will be done.

第3図(a)は本発明の第3の実施例であシ、1は石英
ガラス基板、6は三酸化タングステン以外の単純酸化物
(TiO2,Nb2O5,Ga2O3等)と三酸化タン
グステンを同時に蒸着した膜であシ、3はその上に積層
した銀の蒸着膜である。第3図(b)は、これを空気中
300℃で約10分間熱処理したもので、7の膜は三酸
化タングステン以外の単純酸化物中に三酸化タングステ
ンと銀の化合物、三酸化タングステンおよび銀の王者が
分散しており、光学記録用薄膜を形成している。
FIG. 3(a) shows a third embodiment of the present invention, in which 1 is a quartz glass substrate, 6 is a simple oxide other than tungsten trioxide (TiO2, Nb2O5, Ga2O3, etc.) and tungsten trioxide are simultaneously evaporated. 3 is a deposited silver film laminated thereon. Figure 3(b) shows the result of heat treatment in air at 300°C for about 10 minutes. are dispersed to form thin films for optical recording.

第1図(b)および第2図(b)の4の膜又は第3図(
b)の7の膜に可視光を照射すると分散している化合物
は容易に分解し、銀と三酸化タングステンとなって、膜
の透過特性が著しく変化し、光照射をしない部分と明ら
かなコントラストを生じて記録を形成する。
4 in Figures 1(b) and 2(b) or Figure 3(
When the film in step 7 of b) is irradiated with visible light, the dispersed compounds easily decompose and become silver and tungsten trioxide, resulting in a significant change in the transmission characteristics of the film and a clear contrast with the area that is not irradiated with light. occur and form a record.

記録の読み出しには、近赤外の光源を用いることが有利
である。光照射によって生ずる膜の透過率変化は、近赤
外にまで及んでおり、かつこの膜は近赤外光に対して感
度をもたないので、読み出し光の照射によシ膜の記録部
分及び未記録部分に変化を生じさせることはない。
It is advantageous to use a near-infrared light source for reading out records. The change in transmittance of the film caused by light irradiation extends to near-infrared light, and this film has no sensitivity to near-infrared light. No changes are made to unrecorded areas.

記録を消去するには、膜を空気中200〜300℃で数
分間加熱すればよい。加熱によシ膜中の三酸化タングス
テンと銀は、再び化合物を形成し、膜の透過率は光照射
前の状態に復帰する。
To erase the record, the film may be heated in air at 200-300° C. for several minutes. By heating, tungsten trioxide and silver in the film form a compound again, and the transmittance of the film returns to the state before the light irradiation.

200℃よシ低い熱処理゛温度では化合物の生成速度は
極めて遅くなfi、300℃より高い温度では膜が劣化
し感光性を失う。
At heat treatment temperatures lower than 200°C, the rate of compound formation is extremely slow, and at temperatures higher than 300°C, the film deteriorates and loses photosensitivity.

次に、光学記録用薄膜とその製造方法と、得られる光学
記録用薄膜の感光特性を実施例をもって具体的に説明す
る。
Next, the optical recording thin film, its manufacturing method, and the photosensitivity characteristics of the resulting optical recording thin film will be specifically explained using examples.

(実施例1) 石英ガラス基板上にタングステン製の加
熱用ボートを用いて三酸化タングステンを約1000X
真空蒸着し、引続き銀を約150又蒸着して光学記録用
薄膜を得た。得られた光学記録用薄膜を200℃で10
分間加熱した後、約250 mw/crn” の白色光
を10分間照射し、加熱後の膜の透過分光特性と光照射
後の膜の透過分光特性を調べた。その結果を第4図に示
す。
(Example 1) Tungsten trioxide was heated at approximately 1000X on a quartz glass substrate using a tungsten heating boat.
A thin film for optical recording was obtained by vacuum evaporation and subsequent evaporation of about 150 layers of silver. The obtained thin film for optical recording was heated at 200°C for 10
After heating for 1 minute, white light of approximately 250 mw/crn'' was irradiated for 10 minutes, and the transmission spectral characteristics of the film after heating and the transmission spectral characteristics of the film after light irradiation were examined. The results are shown in Figure 4. .

なお、第4図中のAは加熱後の膜の分光曲線を、Bは光
照射後の膜の分光曲線を示す。この第4図から明らか々
ように光照射により膜の透過率は450〜650nm付
近で約5%、850〜1300nmで約5%減少する。
In addition, A in FIG. 4 shows the spectral curve of the film after heating, and B shows the spectral curve of the film after light irradiation. As is clear from FIG. 4, the transmittance of the film decreases by about 5% in the vicinity of 450 to 650 nm and by about 5% in the vicinity of 850 to 1300 nm by light irradiation.

また光照射後の膜を再度200℃で10分間加熱したと
ころ、透過率は光照射以前の分光曲線にほぼ復帰し再度
の光記録が可能であった。
Furthermore, when the film after light irradiation was heated again at 200° C. for 10 minutes, the transmittance almost returned to the spectral curve before light irradiation, making optical recording possible again.

(実施例2) ガラス基板上に二つの加熱用ボートから
三酸化タングステン゛と銀を、両者の比が10:1〜5
:1になるような速度で同時に蒸着し、約10001の
厚さの光学記録用薄膜を得た。得られた光学記録用薄膜
を200℃で10分間加熱した後、約250mW/cr
n2の白色光を10分間照射し、加熱後の膜の透過分光
特性と光照射後の膜の透過分光特性を調べたところ第4
図とほぼ同様の結果が得られた。また光照射した膜を再
度200℃、10分間加熱したところ透過率は光照射以
前の分光曲勝にほぼ復帰し再度の光記録が可能であった
(Example 2) Tungsten trioxide and silver were placed on a glass substrate from two heating boats at a ratio of 10:1 to 5.
The thin film for optical recording with a thickness of about 10,001 mm was obtained by simultaneously depositing at a rate of 1:1. After heating the obtained optical recording thin film at 200°C for 10 minutes, the power of about 250 mW/cr
When irradiated with n2 white light for 10 minutes and examined the transmission spectral characteristics of the film after heating and the transmission spectral characteristics of the film after light irradiation, the fourth
Almost the same results as shown in the figure were obtained. When the irradiated film was heated again at 200° C. for 10 minutes, the transmittance almost returned to the spectral curve before the irradiation, making optical recording possible again.

(実施例3) 加熱用のタングステンボートに酸化ニオ
ブを充てんし、これを真空中で加熱蒸発させて、ガラス
基板上に約1000X厚の酸化ニオブの蒸着膜を得た。
(Example 3) A tungsten boat for heating was filled with niobium oxide, and the niobium oxide was heated and evaporated in a vacuum to obtain a deposited film of niobium oxide about 1000× thick on a glass substrate.

加熱中にボート上で融解した酸化ニオブはタングステン
テートを一部融解させ、蒸着膜中にはタングステンが三
酸化タングステンの形で多量に含有される。この膜上に
銀を約150X重ねて蒸着して光学記録用薄膜を作製し
た。得られた光学記録用薄膜を300℃で10分間加熱
した後、中心波長45’Onmの干渉フィルタを通した
約5 mw/crn2のタングステンラング光を10分
間照射し、加熱後の膜の透過分光特性と、光照射後の膜
の透過分光特性を調べた。その結果を第5図に示す。な
お第5図中のAは加熱後の膜の分光曲線を、Bは光照射
後の膜の分光曲線を示す。また、光照射後の膜を再度3
00℃、5分間加熱したところ一透過率は光照射以前の
分光曲線にほぼ復帰し再度の光記録が可能であった。
The niobium oxide melted on the boat during heating partially melts tungsten tate, and the deposited film contains a large amount of tungsten in the form of tungsten trioxide. Silver was deposited on this film in a layer of about 150× to produce a thin film for optical recording. The obtained thin film for optical recording was heated at 300°C for 10 minutes, and then irradiated with tungsten Lang light of approximately 5 mw/crn2 through an interference filter with a center wavelength of 45'Onm for 10 minutes, and the transmission spectroscopy of the film after heating was performed. The characteristics and transmission spectroscopic characteristics of the film after light irradiation were investigated. The results are shown in FIG. Note that A in FIG. 5 shows the spectral curve of the film after heating, and B shows the spectral curve of the film after light irradiation. In addition, the film after light irradiation was reapplied 3 times.
When heated at 00°C for 5 minutes, the transmittance almost returned to the spectral curve before the light irradiation, making optical recording possible again.

(実施例4) 酸化チタンと三酸化タングステンを重量
比5:1で混合し、プレス成型してペレットを作製した
。このペレットを蒸発源として電子ビーム蒸着法により
三酸化タングステンを含む、酸化チタン膜をガラス基板
上に蒸着し、その上に銀を蒸着して光学記録用薄膜を作
製した。得られた光学記録用薄膜を300℃で10′分
間加熱した後、中心波長450nmの干渉フィルタを通
した約5 mw/crn2のタングステンランプ光を、
20分間照射し、加熱後の膜の透過分光特性と光照射後
の膜の透過分光特性を調べた。その結果を第6図に示す
。なお、第6図中のAは加熱後の膜の分光曲線を、Bは
光照射後の膜の分光曲線を示す。
(Example 4) Titanium oxide and tungsten trioxide were mixed at a weight ratio of 5:1 and press-molded to produce pellets. Using this pellet as an evaporation source, a titanium oxide film containing tungsten trioxide was deposited on a glass substrate by electron beam evaporation, and silver was deposited thereon to produce a thin film for optical recording. After heating the obtained optical recording thin film at 300°C for 10 minutes, tungsten lamp light of about 5 mw/crn2 was passed through an interference filter with a center wavelength of 450 nm.
After irradiation for 20 minutes, the transmission spectral characteristics of the film after heating and the transmission spectral characteristics of the film after light irradiation were examined. The results are shown in FIG. In addition, A in FIG. 6 shows the spectral curve of the film after heating, and B shows the spectral curve of the film after light irradiation.

また、光照射後の膜を再度300℃、5分間加熱したと
ころ透過率は光照射以前の分光曲線にほぼ復帰し、再度
の光記録が可能であった。
Furthermore, when the film after the light irradiation was heated again at 300° C. for 5 minutes, the transmittance almost returned to the spectral curve before the light irradiation, and optical recording was possible again.

(実施例5) 照射光波長として450 nm 、 5
50℃m、650℃m′f:Mび、(実施例4)で示し
た光学記録用薄膜にそれぞれ同一光X (5J/crn
2 ;Hg p;した時の透過率変化量を波長1100
0nで測定した。結果を第7図に示す。横軸は照射光波
長であり、縦軸は透過率の変化量である。第7図から明
らかなように、この光学記録用薄膜は波長650nmよ
り長波長の光に対して感度をもた々い。
(Example 5) Irradiation light wavelength was 450 nm, 5
50°C m, 650°C m'f: M, and the same light
The amount of change in transmittance when 2;Hg p;
Measured at 0n. The results are shown in FIG. The horizontal axis is the irradiation light wavelength, and the vertical axis is the amount of change in transmittance. As is clear from FIG. 7, this optical recording thin film has a high sensitivity to light with a wavelength longer than 650 nm.

以上、実施例で示したように、三酸化タングステンを含
む膜を作製し、銀と積層することにより感光性をもつ膜
が得られる。酸化物の膜上に積層した銀は、空気中での
加熱により容易に酸化物膜中に拡散し、この酸化物膜が
三酸化タングステンからなるか三酸化タングステンを含
有する場合に固有の化合物を形成する。この化合物は、
光照射により容易に分解し銀を析出するために、この化
合物を含む膜に光照射すると照射部分に銀が析出されて
、透過率が著しく変化し記録を形成する。これがこの光
学記録用薄膜の感光原理である。感光性は三酸化タング
ステン膜又は二酸化タングステンを含む酸化物膜の作製
法によらない。
As shown in the examples above, a photosensitive film can be obtained by producing a film containing tungsten trioxide and laminating it with silver. Silver deposited on an oxide film easily diffuses into the oxide film by heating in the air, and when this oxide film is made of or contains tungsten trioxide, it creates a unique compound. Form. This compound is
Because it easily decomposes and precipitates silver when irradiated with light, when a film containing this compound is irradiated with light, silver is precipitated in the irradiated area, causing a significant change in transmittance and forming a record. This is the photosensitive principle of this thin film for optical recording. Photosensitivity does not depend on the method for producing the tungsten trioxide film or the oxide film containing tungsten dioxide.

真空蒸着法によシ三酸化タングステン膜又は三酸化タン
グステンを含む酸化物膜を作製する場合にセードに充て
んする原料は、二酸化タングステンに限定する必要はな
く、二酸化タングステンを用いても得られる膜は三酸化
タングステン膜となる。また実施例3に示したように他
の酸化物の加熱用ホードとして、タングステンテートを
用いた場合にも得られる酸化物膜には三酸化タングステ
ンのみが含有される。光照射時の透過率変化量は酸化物
の種類によシ異なる。
When producing a tungsten trioxide film or an oxide film containing tungsten trioxide by a vacuum evaporation method, the raw material to be filled in the shade does not need to be limited to tungsten dioxide; It becomes a tungsten trioxide film. Furthermore, as shown in Example 3, even when tungsten tate is used as a heating source for another oxide, the resulting oxide film contains only tungsten trioxide. The amount of change in transmittance upon irradiation with light varies depending on the type of oxide.

〔発明の効果〕〔Effect of the invention〕

以上詳述したごとく、本発明によれば基板に三酸化タン
グステンと銀を積層するかもしくは同時に蒸着するか、
もしくは三酸化タングステンを含む酸化物膜上に銀を積
層することにより、可視光に感光し近赤外におよぶ広い
波長域で透過率の顕著な変化を生じて記録でき、かつそ
れに対応する波長の光源を読み出し光として利用でき、
更に膜全体もしくは一部を加熱することにより消去を行
なうことができると共に、記録、消去を繰り返し行なう
ことが可能な光学記録用薄膜を提供できる。また、かか
る光学記録用薄膜は、原料として酸化物と銀を用いノ・
ロケ゛ン化銀を含まないので、蒸着時の制御が容易で再
現性が良好なこと、記録、再生の繰シ返しによりハロゲ
ンが失なわれて記録特性が劣化する必要がないこと、長
期間安定なこと、等の種々の効果を有する。
As detailed above, according to the present invention, tungsten trioxide and silver may be laminated or simultaneously deposited on a substrate.
Alternatively, by layering silver on an oxide film containing tungsten trioxide, it is possible to record a remarkable change in transmittance in a wide wavelength range that is sensitive to visible light and extends to near infrared, and to record the corresponding wavelength. The light source can be used as readout light,
Furthermore, it is possible to provide a thin film for optical recording that can be erased by heating the whole or a part of the film, and can be repeatedly recorded and erased. In addition, such optical recording thin films use oxides and silver as raw materials.
Since it does not contain silver chloride, it is easy to control the deposition process and has good reproducibility, there is no need for halogen to be lost due to repeated recording and playback and the recording characteristics deteriorate, and it is stable over a long period of time. It has various effects such as.

なお、上記実施例では光学記録用薄膜を作製する三酸化
タングステン以外の単純酸化物として酸化チタンもしく
は酸化ニオブを用いる場合について説明したが、これに
限らず例えば酸化ガリウム(Ga205) 等の酸化物
を用いても同様に実施することができる。
In addition, in the above example, the case where titanium oxide or niobium oxide is used as a simple oxide other than tungsten trioxide to produce a thin film for optical recording is explained, but the invention is not limited to this, and oxides such as gallium oxide (Ga205) can also be used. It can be carried out in the same way even if it is used.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図、第3図は本発明の光学記録用薄膜の構
成図でありそれぞれの(a)は蒸着後の状態、(b)は
空気中の熱処理後の状態を示す。第4図は本発明の(実
施例1)、(実施例2)における三酸化タングステンと
銀からなる光学記録用薄膜の透過分光特性を示す線図、
第5図は本発明の(実施例3)における三酸化タングス
テンを含有する酸化ニオブと銀からなる光学記録用薄膜
の透過分光特性を示す線図、第6図は本発明の(実施例
4)における三酸化タングステンを含む酸化チタンと銀
からなる光学記録用薄膜の透過分光特性を示す線図であ
る。第7図は、(実施例5)における三酸化タングステ
ンを含む酸化チタンと銀からなる光学記録用薄膜の分光
感度曲線であシ、横軸は光学記録用薄膜に照射した光の
波長、縦軸は5J/Crn2照射した時の波長1000
 nmにおける透過率変化量である。 1・・・ガラス基板、2・・・三酸化タングステン膜、
3・・・銀膜、4・・・三酸化タングステン中に銀およ
び銀と三酸化タングステンの化合物が分散した膜、5・
・・三酸化タングステン中に銀が分散した膜、6・・r
三酸化タングステン以外の酸化物中に三酸化タングステ
ンが分散した膜、7・・・三酸化タングステン以外の酸
化物中に銀と三酸化タングステンおよび銀と三酸化タン
グステンの化合物が分散した膜、A・・・加熱後の膜の
分光曲線、B・・・光照射後の膜の分光曲線。 出願人代理人  弁理士 鈴 江 武 彦30 第1図 第2図 第3図
FIGS. 1, 2, and 3 are block diagrams of the optical recording thin film of the present invention, in which (a) shows the state after vapor deposition, and (b) shows the state after heat treatment in air. FIG. 4 is a diagram showing the transmission spectral characteristics of the optical recording thin film made of tungsten trioxide and silver in (Example 1) and (Example 2) of the present invention,
FIG. 5 is a diagram showing the transmission spectral characteristics of an optical recording thin film made of niobium oxide and silver containing tungsten trioxide in (Example 3) of the present invention, and FIG. FIG. 2 is a diagram showing the transmission spectral characteristics of an optical recording thin film made of silver and titanium oxide containing tungsten trioxide. Figure 7 is a spectral sensitivity curve of the optical recording thin film made of titanium oxide and silver containing tungsten trioxide in (Example 5), where the horizontal axis is the wavelength of the light irradiated to the optical recording thin film, and the vertical axis is the wavelength of the light irradiated to the optical recording thin film. is the wavelength of 1000 when irradiated with 5J/Crn2
This is the amount of change in transmittance in nm. 1...Glass substrate, 2...Tungsten trioxide film,
3... Silver film, 4... Film in which silver and a compound of silver and tungsten trioxide are dispersed in tungsten trioxide, 5...
・・Film in which silver is dispersed in tungsten trioxide, 6・・r
A film in which tungsten trioxide is dispersed in an oxide other than tungsten trioxide, 7... A film in which silver and tungsten trioxide and a compound of silver and tungsten trioxide are dispersed in an oxide other than tungsten trioxide, A. ... Spectral curve of the film after heating, B... Spectral curve of the film after light irradiation. Applicant's agent Patent attorney Takehiko Suzue 30 Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】 1、三酸化タングステンと銀からなる光学記録用薄膜。 2、三酸化タングステンと銀と三酸化タングステン以外
の単純酸化物からなる光学記録用薄膜0 3、三酸化タングステン以外の単純酸化物として酸化チ
タンもしくは酸化ニオブからなる特許請求の範囲第2項
記載の光学記録用薄膜。 4、基板上に三酸化タングステンと銀を順次積層して蒸
着するか、もしくは同時に蒸着した後、空気中で熱処理
することを特徴とする光学記録用薄膜の製造方法。 5、基板上に三酸化タングステンを含む三酸化タングス
テン以外の単純酸化物と銀を順次積層して蒸着するか、
もしくは同時に蒸着した後、空気中で熱処理することを
特徴とする光学記録用薄膜の製造方法。
[Claims] 1. A thin film for optical recording made of tungsten trioxide and silver. 2. A thin film for optical recording consisting of tungsten trioxide, silver, and a simple oxide other than tungsten trioxide 3. A thin film for optical recording consisting of titanium oxide or niobium oxide as a simple oxide other than tungsten trioxide Thin film for optical recording. 4. A method for producing a thin film for optical recording, which comprises sequentially depositing tungsten trioxide and silver on a substrate, or depositing them simultaneously, and then heat-treating them in air. 5. Sequentially stack and deposit silver and simple oxides other than tungsten trioxide, including tungsten trioxide, on the substrate, or
Alternatively, a method for producing a thin film for optical recording, characterized in that the film is simultaneously vapor-deposited and then heat-treated in air.
JP58051598A 1983-03-29 1983-03-29 Thin film for optical recording and its production Pending JPS59177539A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58051598A JPS59177539A (en) 1983-03-29 1983-03-29 Thin film for optical recording and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58051598A JPS59177539A (en) 1983-03-29 1983-03-29 Thin film for optical recording and its production

Publications (1)

Publication Number Publication Date
JPS59177539A true JPS59177539A (en) 1984-10-08

Family

ID=12891339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58051598A Pending JPS59177539A (en) 1983-03-29 1983-03-29 Thin film for optical recording and its production

Country Status (1)

Country Link
JP (1) JPS59177539A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6045889A (en) * 1997-09-25 2000-04-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Recording medium
WO2003070479A1 (en) * 2002-02-22 2003-08-28 Sony Corporation Optical recording medium and optical recording method
JP2013086336A (en) * 2011-10-17 2013-05-13 Sony Corp Recording layer for medium of recording optical information, and optical information recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6045889A (en) * 1997-09-25 2000-04-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Recording medium
WO2003070479A1 (en) * 2002-02-22 2003-08-28 Sony Corporation Optical recording medium and optical recording method
JP2013086336A (en) * 2011-10-17 2013-05-13 Sony Corp Recording layer for medium of recording optical information, and optical information recording medium

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